NO20110755A1 - Fremgangsmater til a fremstille en smelte av silisiumpulver for silisiumkrystallvekst - Google Patents
Fremgangsmater til a fremstille en smelte av silisiumpulver for silisiumkrystallvekst Download PDFInfo
- Publication number
- NO20110755A1 NO20110755A1 NO20110755A NO20110755A NO20110755A1 NO 20110755 A1 NO20110755 A1 NO 20110755A1 NO 20110755 A NO20110755 A NO 20110755A NO 20110755 A NO20110755 A NO 20110755A NO 20110755 A1 NO20110755 A1 NO 20110755A1
- Authority
- NO
- Norway
- Prior art keywords
- silicon
- approx
- charge
- crucible
- silicon powder
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 450
- 229910052710 silicon Inorganic materials 0.000 title claims description 246
- 239000010703 silicon Substances 0.000 title claims description 246
- 239000011863 silicon-based powder Substances 0.000 title claims description 204
- 238000000034 method Methods 0.000 title claims description 157
- 239000013078 crystal Substances 0.000 title claims description 70
- 239000000155 melt Substances 0.000 title claims description 52
- 238000010438 heat treatment Methods 0.000 claims description 83
- 230000008018 melting Effects 0.000 claims description 70
- 238000002844 melting Methods 0.000 claims description 70
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 57
- 125000006850 spacer group Chemical group 0.000 claims description 56
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 30
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 29
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 28
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 28
- 239000002245 particle Substances 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 229910052786 argon Inorganic materials 0.000 claims description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 239000000843 powder Substances 0.000 description 60
- 238000013461 design Methods 0.000 description 47
- 229920005591 polysilicon Polymers 0.000 description 29
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000005755 formation reaction Methods 0.000 description 11
- 238000005056 compaction Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 239000011261 inert gas Substances 0.000 description 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 229910000077 silane Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000001590 oxidative effect Effects 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 239000004033 plastic Substances 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 5
- 239000011449 brick Substances 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 239000011856 silicon-based particle Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007847 structural defect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004033 diameter control Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 229920001821 foam rubber Polymers 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/024—Arrangements for cooling, heating, ventilating or temperature compensation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11153608P | 2008-11-05 | 2008-11-05 | |
| PCT/US2009/063114 WO2010053915A2 (en) | 2008-11-05 | 2009-11-03 | Methods for preparing a melt of silicon powder for silicon crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO20110755A1 true NO20110755A1 (no) | 2011-05-23 |
Family
ID=41591647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20110755A NO20110755A1 (no) | 2008-11-05 | 2011-05-23 | Fremgangsmater til a fremstille en smelte av silisiumpulver for silisiumkrystallvekst |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20100107966A1 (de) |
| EP (2) | EP2650405A3 (de) |
| JP (1) | JP2012508151A (de) |
| KR (1) | KR20110095290A (de) |
| CN (1) | CN102272360A (de) |
| NO (1) | NO20110755A1 (de) |
| TW (1) | TWI428482B (de) |
| WO (1) | WO2010053915A2 (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8721786B2 (en) | 2010-09-08 | 2014-05-13 | Siemens Medical Solutions Usa, Inc. | Czochralski crystal growth process furnace that maintains constant melt line orientation and method of operation |
| CN102953117B (zh) * | 2011-08-31 | 2015-06-10 | 上海普罗新能源有限公司 | 硅锭的铸造方法 |
| CN103266346B (zh) * | 2013-05-22 | 2016-12-28 | 嘉兴和讯光电科技有限公司 | 一种引上法生长yvo4晶体的生长设备及基于该生长设备的生长方法 |
| KR101540570B1 (ko) * | 2013-12-11 | 2015-07-31 | 주식회사 엘지실트론 | 단결정 성장용 도가니, 및 이를 포함하는 단결정 성장 장치 |
| WO2017062949A1 (en) * | 2015-10-10 | 2017-04-13 | Sunedison, Inc. | System and method for degassing granular polysilicon |
| US11313049B2 (en) * | 2015-10-19 | 2022-04-26 | Globalwafers Co., Ltd. | Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects |
| CN105783510A (zh) * | 2016-04-25 | 2016-07-20 | 苏州普京真空技术有限公司 | 一种双用可拆卸坩埚 |
| CN106119956B (zh) * | 2016-08-19 | 2019-04-12 | 西安华晶电子技术股份有限公司 | 一种多晶硅半熔铸锭方法 |
| CN106087045B (zh) * | 2016-08-19 | 2019-05-07 | 西安华晶电子技术股份有限公司 | 一种多晶硅半熔铸锭用熔料及长晶工艺 |
| JP7049119B2 (ja) * | 2018-01-19 | 2022-04-06 | グローバルウェーハズ・ジャパン株式会社 | シリコン単結晶の製造方法 |
| JP6844560B2 (ja) * | 2018-02-28 | 2021-03-17 | 株式会社Sumco | シリコン融液の対流パターン制御方法、シリコン単結晶の製造方法、および、シリコン単結晶の引き上げ装置 |
| CN113802181A (zh) * | 2020-06-11 | 2021-12-17 | 苏州阿特斯阳光电力科技有限公司 | 硅料装料方法 |
| US20220145492A1 (en) * | 2020-11-12 | 2022-05-12 | GlobalWaters Co., Ltd. | Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot with such apparatus |
| US11987899B2 (en) * | 2020-11-12 | 2024-05-21 | Globalwafers Co., Ltd. | Methods for preparing an ingot in an ingot puller apparatus and methods for selecting a side heater length for such apparatus |
| CN112581835B (zh) * | 2020-12-07 | 2022-02-22 | 东北大学 | 一种液桥生成器 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1147698A (en) * | 1980-10-15 | 1983-06-07 | Maher I. Boulos | Purification of metallurgical grade silicon |
| US4354987A (en) * | 1981-03-31 | 1982-10-19 | Union Carbide Corporation | Consolidation of high purity silicon powder |
| US4659421A (en) * | 1981-10-02 | 1987-04-21 | Energy Materials Corporation | System for growth of single crystal materials with extreme uniformity in their structural and electrical properties |
| JPS61222982A (ja) * | 1985-03-29 | 1986-10-03 | Toshiba Ceramics Co Ltd | シリコン単結晶引上装置 |
| US4676968A (en) * | 1985-07-24 | 1987-06-30 | Enichem, S.P.A. | Melt consolidation of silicon powder |
| DE3629231A1 (de) * | 1986-08-28 | 1988-03-03 | Heliotronic Gmbh | Verfahren zum aufschmelzen von in einen schmelztiegel chargiertem siliciumpulver und schmelztiegel zur durchfuehrung des verfahrens |
| JPH0798715B2 (ja) * | 1989-01-23 | 1995-10-25 | 住友金属工業株式会社 | シリコン単結晶の製造方法 |
| US5006317A (en) * | 1990-05-18 | 1991-04-09 | Commtech Development Partners Ii | Process for producing crystalline silicon ingot in a fluidized bed reactor |
| US5108720A (en) * | 1991-05-20 | 1992-04-28 | Hemlock Semiconductor Corporation | Float zone processing of particulate silicon |
| JPH0710682A (ja) * | 1993-06-29 | 1995-01-13 | Toshiba Corp | 単結晶の引上方法及びその製造装置 |
| JP3085567B2 (ja) * | 1993-10-22 | 2000-09-11 | コマツ電子金属株式会社 | 多結晶のリチャージ装置およびリチャージ方法 |
| US5976247A (en) * | 1995-06-14 | 1999-11-02 | Memc Electronic Materials, Inc. | Surface-treated crucibles for improved zero dislocation performance |
| US5588993A (en) * | 1995-07-25 | 1996-12-31 | Memc Electronic Materials, Inc. | Method for preparing molten silicon melt from polycrystalline silicon charge |
| US5814148A (en) * | 1996-02-01 | 1998-09-29 | Memc Electronic Materials, Inc. | Method for preparing molten silicon melt from polycrystalline silicon charge |
| US5919303A (en) * | 1997-10-16 | 1999-07-06 | Memc Electronic Materials, Inc. | Process for preparing a silicon melt from a polysilicon charge |
| US5935328A (en) * | 1997-11-25 | 1999-08-10 | Memc Electronic Materials, Inc. | Apparatus for use in crystal pulling |
| JPH11310496A (ja) * | 1998-02-25 | 1999-11-09 | Mitsubishi Materials Corp | 一方向凝固組織を有するシリコンインゴットの製造方法およびその製造装置 |
| US6093913A (en) | 1998-06-05 | 2000-07-25 | Memc Electronic Materials, Inc | Electrical heater for crystal growth apparatus with upper sections producing increased heating power compared to lower sections |
| JP3702679B2 (ja) * | 1998-12-08 | 2005-10-05 | 株式会社Ｓｕｍｃｏ | 石英るつぼの内面保護具及びこれを用いて多結晶シリコンを入れる方法 |
| US6663709B2 (en) * | 2001-06-26 | 2003-12-16 | Memc Electronic Materials, Inc. | Crystal puller and method for growing monocrystalline silicon ingots |
| US6984263B2 (en) * | 2001-11-01 | 2006-01-10 | Midwest Research Institute | Shallow melt apparatus for semicontinuous czochralski crystal growth |
| US6797062B2 (en) | 2002-09-20 | 2004-09-28 | Memc Electronic Materials, Inc. | Heat shield assembly for a crystal puller |
| WO2004061166A1 (ja) * | 2002-12-27 | 2004-07-22 | Shin-Etsu Handotai Co., Ltd. | 単結晶製造用黒鉛ヒーター及び単結晶製造装置ならびに単結晶製造方法 |
| US20050066881A1 (en) * | 2003-09-25 | 2005-03-31 | Canon Kabushiki Kaisha | Continuous production method for crystalline silicon and production apparatus for the same |
| KR100831044B1 (ko) * | 2005-09-21 | 2008-05-21 | 주식회사 실트론 | 고품질 실리콘 단결정 잉곳의 성장장치, 그 장치를 이용한성장방법 |
| TW200914371A (en) * | 2007-06-01 | 2009-04-01 | Gt Solar Inc | Processing of fine silicon powder to produce bulk silicon |
| WO2009140406A2 (en) * | 2008-05-13 | 2009-11-19 | Applied Materials, Inc. | Crystal growth apparatus for solar cell manufacturing |
-
2009
- 2009-11-03 EP EP13174922.8A patent/EP2650405A3/de not_active Withdrawn
- 2009-11-03 CN CN2009801536954A patent/CN102272360A/zh active Pending
- 2009-11-03 KR KR1020117012737A patent/KR20110095290A/ko not_active Application Discontinuation
- 2009-11-03 US US12/611,567 patent/US20100107966A1/en not_active Abandoned
- 2009-11-03 JP JP2011534882A patent/JP2012508151A/ja active Pending
- 2009-11-03 WO PCT/US2009/063114 patent/WO2010053915A2/en active Application Filing
- 2009-11-03 EP EP09745266.8A patent/EP2356268B1/de not_active Not-in-force
- 2009-11-05 TW TW098137653A patent/TWI428482B/zh active
-
2011
- 2011-05-23 NO NO20110755A patent/NO20110755A1/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| EP2356268A2 (de) | 2011-08-17 |
| KR20110095290A (ko) | 2011-08-24 |
| TWI428482B (zh) | 2014-03-01 |
| CN102272360A (zh) | 2011-12-07 |
| EP2356268B1 (de) | 2013-07-31 |
| EP2650405A2 (de) | 2013-10-16 |
| EP2650405A3 (de) | 2014-02-26 |
| TW201026915A (en) | 2010-07-16 |
| WO2010053915A3 (en) | 2010-09-10 |
| US20100107966A1 (en) | 2010-05-06 |
| JP2012508151A (ja) | 2012-04-05 |
| WO2010053915A2 (en) | 2010-05-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FC2A | Withdrawal, rejection or dismissal of laid open patent application |