CN100415945C - 一种提高直拉硅单晶炉热场部件寿命的方法及单晶炉 - Google Patents
一种提高直拉硅单晶炉热场部件寿命的方法及单晶炉 Download PDFInfo
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- CN100415945C CN100415945C CNB200510132575XA CN200510132575A CN100415945C CN 100415945 C CN100415945 C CN 100415945C CN B200510132575X A CNB200510132575X A CN B200510132575XA CN 200510132575 A CN200510132575 A CN 200510132575A CN 100415945 C CN100415945 C CN 100415945C
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CNB200510132575XA CN100415945C (zh) | 2005-12-26 | 2005-12-26 | 一种提高直拉硅单晶炉热场部件寿命的方法及单晶炉 |
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CNB200510132575XA CN100415945C (zh) | 2005-12-26 | 2005-12-26 | 一种提高直拉硅单晶炉热场部件寿命的方法及单晶炉 |
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CN1990918A CN1990918A (zh) | 2007-07-04 |
CN100415945C true CN100415945C (zh) | 2008-09-03 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI681087B (zh) * | 2018-04-27 | 2020-01-01 | 日商Sumco股份有限公司 | 矽單結晶的製造方法及矽單結晶的提拉裝置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102206855A (zh) * | 2010-03-29 | 2011-10-05 | 上海杰姆斯电子材料有限公司 | 直拉单晶炉石墨坩埚 |
CN102234836B (zh) * | 2010-05-07 | 2014-04-09 | 上海晶美电子技术有限公司 | 直拉硅单晶炉装置及硅单晶拉制方法 |
CN102011181B (zh) * | 2010-12-24 | 2012-10-03 | 温州神硅电子有限公司 | 一种直拉法生长太阳能用8吋硅单晶的热场装置 |
CN103290486A (zh) * | 2012-02-29 | 2013-09-11 | 宁夏日晶新能源装备股份有限公司 | 单晶炉液面测温装置 |
CN107779946A (zh) * | 2016-08-25 | 2018-03-09 | 上海新昇半导体科技有限公司 | 热屏组件及单晶提拉炉热场结构 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1055965A (zh) * | 1990-03-20 | 1991-11-06 | 日本钢管株式会社 | 制造单晶硅的装置 |
CN1084398C (zh) * | 1999-12-16 | 2002-05-08 | 上海中科嘉浦光电子材料有限公司 | 生长高温氧化物晶体的装置 |
CN1205362C (zh) * | 2001-10-18 | 2005-06-08 | 北京有色金属研究总院 | 直拉硅单晶炉热场的气流控制方法及装置 |
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- 2005-12-26 CN CNB200510132575XA patent/CN100415945C/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1055965A (zh) * | 1990-03-20 | 1991-11-06 | 日本钢管株式会社 | 制造单晶硅的装置 |
CN1084398C (zh) * | 1999-12-16 | 2002-05-08 | 上海中科嘉浦光电子材料有限公司 | 生长高温氧化物晶体的装置 |
CN1205362C (zh) * | 2001-10-18 | 2005-06-08 | 北京有色金属研究总院 | 直拉硅单晶炉热场的气流控制方法及装置 |
Non-Patent Citations (4)
Title |
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应用改进的热场生长低位错SI-GaAs单晶. 谢自力等.固体电子学研究与进展,第12卷第3期. 1992 |
应用改进的热场生长低位错SI-GaAs单晶. 谢自力等.固体电子学研究与进展,第12卷第3期. 1992 * |
直拉大直径硅单晶热场的设计与测量. 宋大有等.上海金属,第5卷第4期. 1984 |
直拉大直径硅单晶热场的设计与测量. 宋大有等.上海金属,第5卷第4期. 1984 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI681087B (zh) * | 2018-04-27 | 2020-01-01 | 日商Sumco股份有限公司 | 矽單結晶的製造方法及矽單結晶的提拉裝置 |
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CN1990918A (zh) | 2007-07-04 |
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