CN100415944C - 一种清除直拉硅单晶炉内SiO的方法及装置 - Google Patents
一种清除直拉硅单晶炉内SiO的方法及装置 Download PDFInfo
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- CN100415944C CN100415944C CNB2005101325745A CN200510132574A CN100415944C CN 100415944 C CN100415944 C CN 100415944C CN B2005101325745 A CNB2005101325745 A CN B2005101325745A CN 200510132574 A CN200510132574 A CN 200510132574A CN 100415944 C CN100415944 C CN 100415944C
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CNB2005101325745A CN100415944C (zh) | 2005-12-26 | 2005-12-26 | 一种清除直拉硅单晶炉内SiO的方法及装置 |
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CNB2005101325745A CN100415944C (zh) | 2005-12-26 | 2005-12-26 | 一种清除直拉硅单晶炉内SiO的方法及装置 |
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CN1990917A CN1990917A (zh) | 2007-07-04 |
CN100415944C true CN100415944C (zh) | 2008-09-03 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101717991B (zh) * | 2009-12-14 | 2012-02-29 | 晶龙实业集团有限公司 | 改进的直拉硅单晶炉 |
CN102251274A (zh) * | 2011-07-15 | 2011-11-23 | 浙江荣马电子科技有限公司 | 一种单晶炉抽气孔堵塞的处理方法 |
JP6471631B2 (ja) * | 2015-07-02 | 2019-02-20 | 株式会社Sumco | シリコン単結晶引上げ装置内の部材の再生方法 |
CN105879656B (zh) * | 2015-11-24 | 2020-01-07 | 上海超硅半导体有限公司 | 单晶硅生长尾气固相处理技术 |
CN106838540B (zh) * | 2017-03-29 | 2019-09-24 | 天通吉成机器技术有限公司 | 一种单晶炉真空管道清理装置 |
CN106914460A (zh) * | 2017-03-29 | 2017-07-04 | 天通吉成机器技术有限公司 | 一种单晶炉真空管道清理方法 |
US11421346B2 (en) * | 2019-03-15 | 2022-08-23 | Linton Crystal Technologies Corporation | Active cleaning vacuum system and method |
CN110714222B (zh) * | 2019-11-06 | 2022-04-08 | 西安奕斯伟材料科技有限公司 | 流量可控的侧排气装置及具有该装置的拉晶炉 |
CN111172598B (zh) * | 2020-01-10 | 2022-08-19 | 郑州合晶硅材料有限公司 | 掺磷单晶硅生产中防尘爆的抽真空方法及应用其的掺磷单晶硅生产方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1186974A (zh) * | 1996-09-09 | 1998-07-08 | Memc电子材料有限公司 | 直拉生长单晶硅期间实时监测和控制氧的一氧化硅探针 |
CN1208504C (zh) * | 1998-10-07 | 2005-06-29 | Memc电子材料有限公司 | 用于拉晶设备的连续氧化方法 |
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CN1186974A (zh) * | 1996-09-09 | 1998-07-08 | Memc电子材料有限公司 | 直拉生长单晶硅期间实时监测和控制氧的一氧化硅探针 |
CN1208504C (zh) * | 1998-10-07 | 2005-06-29 | Memc电子材料有限公司 | 用于拉晶设备的连续氧化方法 |
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