NO20084722L - Oket polysilisium utfelling i en CVD reaktor - Google Patents
Oket polysilisium utfelling i en CVD reaktorInfo
- Publication number
- NO20084722L NO20084722L NO20084722A NO20084722A NO20084722L NO 20084722 L NO20084722 L NO 20084722L NO 20084722 A NO20084722 A NO 20084722A NO 20084722 A NO20084722 A NO 20084722A NO 20084722 L NO20084722 L NO 20084722L
- Authority
- NO
- Norway
- Prior art keywords
- filaments
- silicon
- film
- edge
- new
- Prior art date
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4418—Methods for making free-standing articles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/102—Apparatus for forming a platelet shape or a small diameter, elongate, generally cylindrical shape [e.g., whisker, fiber, needle, filament]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
- Y10T117/104—Means for forming a hollow structure [e.g., tube, polygon]
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Det er beskrevet en fremgangsmåte og prosess forfremstilling av bulk polysilisium ved kjemisk dampavsetning (CVD), hvor konvensjonelle silisium "slanke stenger" som vanligvis blir brukt i en Siemens-type reaksjon blir erstattet med formede silisiumfilamenter (31, 32, 33) med tilsvarende elektriske egenskaper, men med større overflateareale, så som silisiumrør, bånd og andre tverrsnittsformer. Silisiumholdige gasser, så som klorsilan eller silan, blir dekomponert og danner en silisiumavsetning på de varme overflatene til filamentene. De innledningsvis store overflatearealene til disse filamentene sikrer en høyere produksjonsrate uten å endre reaktorstørrelsen og uten å øke antallet eller lengden til filamentene. Eksisterende reaktorer trenger kun en tilpasning eller utbytting av filamentstøtter (19) for å kunne bruke de nye filamentene. Filamentene vokser fra silisiumsmelten ved kant-definert, filmmatevekst (EFG -Edge-defined, Film-fed Growth) metoden. Dette muliggjør også doping av filamentene og en forenkling av strømtilførselen for nye reaktorer.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/413,425 US9683286B2 (en) | 2006-04-28 | 2006-04-28 | Increased polysilicon deposition in a CVD reactor |
PCT/US2007/066923 WO2007127657A2 (en) | 2006-04-28 | 2007-04-19 | Increased polysilicon deposition in a cvd reactor |
Publications (1)
Publication Number | Publication Date |
---|---|
NO20084722L true NO20084722L (no) | 2008-11-10 |
Family
ID=38647131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO20084722A NO20084722L (no) | 2006-04-28 | 2008-11-10 | Oket polysilisium utfelling i en CVD reaktor |
Country Status (9)
Country | Link |
---|---|
US (3) | US9683286B2 (no) |
EP (2) | EP2013376B8 (no) |
JP (2) | JP2009535505A (no) |
KR (2) | KR20140099952A (no) |
CN (1) | CN101432460B (no) |
CA (1) | CA2650722A1 (no) |
NO (1) | NO20084722L (no) |
RU (1) | RU2442844C2 (no) |
WO (1) | WO2007127657A2 (no) |
Families Citing this family (39)
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US20090191336A1 (en) * | 2008-01-30 | 2009-07-30 | Mohan Chandra | Method and apparatus for simpified startup of chemical vapor deposition of polysilicon |
RU2010143546A (ru) * | 2008-03-26 | 2012-05-10 | ДжиТи СОЛАР, ИНКОРПОРЕЙТЕД (US) | Реакторная система с золотым покрытием для осаждения поликристаллического кремния и способ |
CN102027156A (zh) * | 2008-03-26 | 2011-04-20 | Gt太阳能公司 | 在化学气相沉积反应器中用于配气的系统和方法 |
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AU2009236678B2 (en) * | 2008-04-14 | 2014-02-27 | Hemlock Semiconductor Corporation | Manufacturing apparatus for depositing a material on an electrode for use therein |
EP2265883A1 (en) * | 2008-04-14 | 2010-12-29 | Hemlock Semiconductor Corporation | Manufacturing apparatus for depositing a material and an electrode for use therein |
TWI458854B (zh) * | 2008-06-23 | 2014-11-01 | Gtat Corp | 在化學氣相沉積反應器中用於管絲的夾頭及電橋之連接點 |
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CN101724895B (zh) * | 2009-12-17 | 2011-12-21 | 江苏中能硅业科技发展有限公司 | 一种多晶硅的生产工艺 |
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CN103160917A (zh) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | 一种空心硅芯的拉制模板 |
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CN109319787B (zh) * | 2018-11-02 | 2021-12-21 | 中国南玻集团股份有限公司 | 一种高效生产多晶硅的还原装置及工艺 |
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US20080206970A1 (en) | 2005-04-10 | 2008-08-28 | Franz Hugo | Production Of Polycrystalline Silicon |
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2006
- 2006-04-28 US US11/413,425 patent/US9683286B2/en active Active
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2007
- 2007-04-19 EP EP07760879.2A patent/EP2013376B8/en not_active Not-in-force
- 2007-04-19 CA CA002650722A patent/CA2650722A1/en not_active Abandoned
- 2007-04-19 WO PCT/US2007/066923 patent/WO2007127657A2/en active Application Filing
- 2007-04-19 KR KR1020147020045A patent/KR20140099952A/ko active Search and Examination
- 2007-04-19 JP JP2009507896A patent/JP2009535505A/ja active Pending
- 2007-04-19 KR KR1020087027535A patent/KR101453575B1/ko active IP Right Grant
- 2007-04-19 EP EP12182264.7A patent/EP2530184A3/en not_active Withdrawn
- 2007-04-19 RU RU2008142471/02A patent/RU2442844C2/ru not_active IP Right Cessation
- 2007-04-19 CN CN2007800154065A patent/CN101432460B/zh not_active Expired - Fee Related
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- 2011-07-20 US US13/186,579 patent/US8647432B2/en active Active
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Also Published As
Publication number | Publication date |
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RU2442844C2 (ru) | 2012-02-20 |
EP2013376A4 (en) | 2010-03-24 |
CN101432460A (zh) | 2009-05-13 |
JP2014141748A (ja) | 2014-08-07 |
US8647432B2 (en) | 2014-02-11 |
WO2007127657A3 (en) | 2008-11-20 |
EP2013376B8 (en) | 2018-10-31 |
EP2530184A3 (en) | 2013-08-07 |
EP2530184A2 (en) | 2012-12-05 |
CN101432460B (zh) | 2013-07-31 |
US20170253960A1 (en) | 2017-09-07 |
WO2007127657A2 (en) | 2007-11-08 |
KR101453575B1 (ko) | 2014-10-21 |
US9683286B2 (en) | 2017-06-20 |
JP5974030B2 (ja) | 2016-08-23 |
US20070251455A1 (en) | 2007-11-01 |
KR20090005375A (ko) | 2009-01-13 |
KR20140099952A (ko) | 2014-08-13 |
CA2650722A1 (en) | 2007-11-08 |
RU2008142471A (ru) | 2010-06-10 |
JP2009535505A (ja) | 2009-10-01 |
EP2013376B1 (en) | 2018-05-30 |
US20110271718A1 (en) | 2011-11-10 |
EP2013376A2 (en) | 2009-01-14 |
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