JPS51103875A - Handotaiketsushonoseizohoho oyobi seizosochi - Google Patents

Handotaiketsushonoseizohoho oyobi seizosochi

Info

Publication number
JPS51103875A
JPS51103875A JP2899175A JP2899175A JPS51103875A JP S51103875 A JPS51103875 A JP S51103875A JP 2899175 A JP2899175 A JP 2899175A JP 2899175 A JP2899175 A JP 2899175A JP S51103875 A JPS51103875 A JP S51103875A
Authority
JP
Japan
Prior art keywords
seizosochi
handotaiketsushonoseizohoho
oyobi
oyobi seizosochi
handotaiketsushonoseizohoho oyobi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2899175A
Other languages
English (en)
Inventor
Suikei Kuroda
Masatoshi Matsuda
Michoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2899175A priority Critical patent/JPS51103875A/ja
Publication of JPS51103875A publication Critical patent/JPS51103875A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2899175A 1975-03-12 1975-03-12 Handotaiketsushonoseizohoho oyobi seizosochi Pending JPS51103875A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2899175A JPS51103875A (ja) 1975-03-12 1975-03-12 Handotaiketsushonoseizohoho oyobi seizosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2899175A JPS51103875A (ja) 1975-03-12 1975-03-12 Handotaiketsushonoseizohoho oyobi seizosochi

Publications (1)

Publication Number Publication Date
JPS51103875A true JPS51103875A (ja) 1976-09-14

Family

ID=12263867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2899175A Pending JPS51103875A (ja) 1975-03-12 1975-03-12 Handotaiketsushonoseizohoho oyobi seizosochi

Country Status (1)

Country Link
JP (1) JPS51103875A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2530184A3 (en) * 2006-04-28 2013-08-07 GTAT Corporation Polysilicon deposition

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2530184A3 (en) * 2006-04-28 2013-08-07 GTAT Corporation Polysilicon deposition
US8647432B2 (en) 2006-04-28 2014-02-11 Gtat Corporation Method of making large surface area filaments for the production of polysilicon in a CVD reactor
US9683286B2 (en) 2006-04-28 2017-06-20 Gtat Corporation Increased polysilicon deposition in a CVD reactor

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