MXPA04004957A - Sistema de suministro de fluido de alta pureza. - Google Patents

Sistema de suministro de fluido de alta pureza.

Info

Publication number
MXPA04004957A
MXPA04004957A MXPA04004957A MXPA04004957A MXPA04004957A MX PA04004957 A MXPA04004957 A MX PA04004957A MX PA04004957 A MXPA04004957 A MX PA04004957A MX PA04004957 A MXPA04004957 A MX PA04004957A MX PA04004957 A MXPA04004957 A MX PA04004957A
Authority
MX
Mexico
Prior art keywords
delivery system
control device
flow control
high purity
fluid delivery
Prior art date
Application number
MXPA04004957A
Other languages
English (en)
Inventor
Michael J Barger
Original Assignee
Emerson Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emerson Electric Co filed Critical Emerson Electric Co
Publication of MXPA04004957A publication Critical patent/MXPA04004957A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8413—Coriolis or gyroscopic mass flowmeters constructional details means for influencing the flowmeter's motional or vibrational behaviour, e.g., conduit support or fixing means, or conduit attachments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8422—Coriolis or gyroscopic mass flowmeters constructional details exciters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/849—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits
    • G01F1/8495—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits with multiple measuring conduits
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Un sistema de suministro de fluido incluye un dispositivo de control de flujo y un medidor de flujo de masa de Coriolis, 112, en comunicacion de fluido con el dispositivo de control de flujo, 110; el medidor de flujo de Coriolis tiene un tubo de flujo hecho de un material de plastico de alta pureza tal como PFA, haciendo el sistema de suministro adecuado para aplicaciones de alta pureza; un controlador, 114, provee una senal de salida de control al dispositivo de control de flujo, 110, que puede comprender una valvula de constriccion, 120, a fin de variar la salida del dispositivo de control de flujo en respuesta a una senal de punto de ajuste y senales de medicion recibidas del medidor del flujo, 112.
MXPA04004957A 2001-11-26 2002-11-25 Sistema de suministro de fluido de alta pureza. MXPA04004957A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/995,067 US20030098069A1 (en) 2001-11-26 2001-11-26 High purity fluid delivery system
PCT/US2002/037778 WO2003046489A1 (en) 2001-11-26 2002-11-25 High purity fluid delivery system

Publications (1)

Publication Number Publication Date
MXPA04004957A true MXPA04004957A (es) 2004-08-11

Family

ID=25541348

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA04004957A MXPA04004957A (es) 2001-11-26 2002-11-25 Sistema de suministro de fluido de alta pureza.

Country Status (17)

Country Link
US (3) US20030098069A1 (es)
EP (3) EP2026041B1 (es)
JP (2) JP4294485B2 (es)
KR (6) KR20100061724A (es)
CN (1) CN1310016C (es)
AR (1) AR037441A1 (es)
AT (1) ATE549604T1 (es)
AU (1) AU2002350257B2 (es)
BR (1) BRPI0214113B1 (es)
CA (2) CA2464051C (es)
DK (2) DK2026041T3 (es)
HK (1) HK1127725A1 (es)
MX (1) MXPA04004957A (es)
MY (1) MY131073A (es)
PL (1) PL206930B1 (es)
RU (1) RU2302653C2 (es)
WO (1) WO2003046489A1 (es)

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