GB2404028A - Apparatus and method for pressure fluctuation insensitive massflow control - Google Patents

Apparatus and method for pressure fluctuation insensitive massflow control Download PDF

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Publication number
GB2404028A
GB2404028A GB0423320A GB0423320A GB2404028A GB 2404028 A GB2404028 A GB 2404028A GB 0423320 A GB0423320 A GB 0423320A GB 0423320 A GB0423320 A GB 0423320A GB 2404028 A GB2404028 A GB 2404028A
Authority
GB
United Kingdom
Prior art keywords
pressure
mass flow
massflow
flow rate
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0423320A
Other versions
GB2404028B8 (en
GB0423320D0 (en
GB2404028A8 (en
GB2404028B (en
Inventor
Ali Shajii
Nicholas Kottenstette
Jesse Ambrosina
John A Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/178,752 external-priority patent/US20030234047A1/en
Priority claimed from US10/178,261 external-priority patent/US6868862B2/en
Priority claimed from US10/178,721 external-priority patent/US6712084B2/en
Priority claimed from US10/178,288 external-priority patent/US20030234045A1/en
Priority claimed from US10/178,568 external-priority patent/US6661693B2/en
Priority claimed from US10/178,378 external-priority patent/US6948508B2/en
Priority claimed from US10/178,119 external-priority patent/US7136767B2/en
Priority claimed from US10/178,810 external-priority patent/US7004191B2/en
Priority claimed from US10/178,884 external-priority patent/US6810308B2/en
Priority to GB0526343A priority Critical patent/GB2419957B8/en
Priority to GB0526348A priority patent/GB2419421B8/en
Priority to GB0526359A priority patent/GB2419422B8/en
Priority to GB0526341A priority patent/GB2419420B8/en
Priority to GB0526337A priority patent/GB2419677A/en
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Priority to GB0526346A priority patent/GB2419958B8/en
Priority to GB0526243A priority patent/GB2419676B8/en
Publication of GB0423320D0 publication Critical patent/GB0423320D0/en
Publication of GB2404028A publication Critical patent/GB2404028A/en
Publication of GB2404028B publication Critical patent/GB2404028B/en
Application granted granted Critical
Publication of GB2404028A8 publication Critical patent/GB2404028A8/en
Publication of GB2404028B8 publication Critical patent/GB2404028B8/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)

Abstract

A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may he used to operate a mass flow controller control valve.

Description

GB 2404028 A continuation (72) Inventor(s): All Shalii Nicholas
Kottenstette Jesse Ambrosina John A Smith (74) Agent and/or Address for Service: Potts Kerr & Co Hamilton Square, BIRKENHEAD, Merseyside, CH41 6BR, United Kingdom
GB0423320A 2002-06-24 2003-06-24 Apparatus and method for pressure fluctuation insensitive massflow control Expired - Lifetime GB2404028B8 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB0526359A GB2419422B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526341A GB2419420B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526348A GB2419421B8 (en) 2002-06-24 2003-06-24 Gas flow standard
GB0526337A GB2419677A (en) 2002-06-24 2003-06-24 Pressure fluctuation insensitive mass flow controller
GB0526343A GB2419957B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526243A GB2419676B8 (en) 2002-06-24 2003-06-24 Mass flow calibrator
GB0526346A GB2419958B8 (en) 2002-06-24 2003-06-24 Mass flow controller

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US10/178,752 US20030234047A1 (en) 2002-06-24 2002-06-24 Apparatus and method for dual processor mass flow controller
US10/178,884 US6810308B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with network access to diagnostics
US10/178,810 US7004191B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with embedded web server
US10/178,119 US7136767B2 (en) 2002-06-24 2002-06-24 Apparatus and method for calibration of mass flow controller
US10/178,378 US6948508B2 (en) 2002-06-24 2002-06-24 Apparatus and method for self-calibration of mass flow controller
US10/178,568 US6661693B2 (en) 1995-08-31 2002-06-24 Circuit for programming antifuse bits
US10/178,288 US20030234045A1 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with on-line diagnostics
US10/178,721 US6712084B2 (en) 2002-06-24 2002-06-24 Apparatus and method for pressure fluctuation insensitive mass flow control
US10/178,261 US6868862B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with a plurality of closed loop control code sets
PCT/US2003/019969 WO2004001516A1 (en) 2002-06-24 2003-06-24 Apparatus and method for pressure fluctuation insensitive mass flow control

Publications (5)

Publication Number Publication Date
GB0423320D0 GB0423320D0 (en) 2004-11-24
GB2404028A true GB2404028A (en) 2005-01-19
GB2404028B GB2404028B (en) 2007-01-31
GB2404028B8 GB2404028B8 (en) 2008-09-03
GB2404028A8 GB2404028A8 (en) 2008-09-03

Family

ID=30004142

Family Applications (8)

Application Number Title Priority Date Filing Date
GB0526341A Expired - Lifetime GB2419420B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526346A Expired - Lifetime GB2419958B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526359A Expired - Lifetime GB2419422B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526337A Withdrawn GB2419677A (en) 2002-06-24 2003-06-24 Pressure fluctuation insensitive mass flow controller
GB0526243A Expired - Lifetime GB2419676B8 (en) 2002-06-24 2003-06-24 Mass flow calibrator
GB0526348A Expired - Lifetime GB2419421B8 (en) 2002-06-24 2003-06-24 Gas flow standard
GB0526343A Expired - Lifetime GB2419957B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0423320A Expired - Lifetime GB2404028B8 (en) 2002-06-24 2003-06-24 Apparatus and method for pressure fluctuation insensitive massflow control

Family Applications Before (7)

Application Number Title Priority Date Filing Date
GB0526341A Expired - Lifetime GB2419420B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526346A Expired - Lifetime GB2419958B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526359A Expired - Lifetime GB2419422B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526337A Withdrawn GB2419677A (en) 2002-06-24 2003-06-24 Pressure fluctuation insensitive mass flow controller
GB0526243A Expired - Lifetime GB2419676B8 (en) 2002-06-24 2003-06-24 Mass flow calibrator
GB0526348A Expired - Lifetime GB2419421B8 (en) 2002-06-24 2003-06-24 Gas flow standard
GB0526343A Expired - Lifetime GB2419957B8 (en) 2002-06-24 2003-06-24 Mass flow controller

Country Status (3)

Country Link
JP (1) JP4544992B2 (en)
GB (8) GB2419420B8 (en)
WO (1) WO2004001516A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7424346B2 (en) 2002-06-24 2008-09-09 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US8738187B2 (en) 2002-06-24 2014-05-27 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
CN111665877A (en) * 2020-06-18 2020-09-15 北京七星华创流量计有限公司 Pressure control method and device and photovoltaic equipment

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US7222029B2 (en) * 2004-07-08 2007-05-22 Celerity, Inc. Attitude insensitive flow device system and method
US7461549B1 (en) * 2007-06-27 2008-12-09 Mks Instruments, Inc. Mass flow verifiers capable of providing different volumes, and related methods
US7467027B2 (en) * 2006-01-26 2008-12-16 Mks Instruments, Inc. Compensation for thermal siphoning in mass flow controllers
US7603186B2 (en) 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US7640078B2 (en) 2006-07-05 2009-12-29 Advanced Energy Industries, Inc. Multi-mode control algorithm
JP4936439B2 (en) * 2006-10-11 2012-05-23 国立大学法人東京工業大学 Pressure regulator and vibration isolator
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
DE102007021099A1 (en) * 2007-05-03 2008-11-13 Endress + Hauser (Deutschland) Ag + Co. Kg Method for commissioning and / or reconfiguring a programmable field meter
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US8793082B2 (en) * 2009-07-24 2014-07-29 Mks Instruments, Inc. Upstream volume mass flow verification systems and methods
JP5864849B2 (en) 2010-10-20 2016-02-17 株式会社堀場エステック Fluid measurement system
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
JP5124038B2 (en) * 2011-09-01 2013-01-23 国立大学法人東京工業大学 Pressure regulator and vibration isolator
JP6526374B2 (en) 2013-04-25 2019-06-05 株式会社堀場エステック Fluid control device
CN104216424B (en) * 2014-08-29 2019-04-09 湖南三德科技股份有限公司 Delicate flow controller for portable equipment
US9664659B2 (en) * 2014-11-05 2017-05-30 Dresser, Inc. Apparatus and method for testing gas meters
CN104949723A (en) * 2015-06-30 2015-09-30 开平市中青环保技术服务有限公司 Liquid flow monitor
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
JP7384551B2 (en) 2017-03-14 2023-11-21 株式会社堀場エステック Diagnostic system, diagnostic method, diagnostic program and flow control device.
JP7164938B2 (en) * 2017-07-31 2022-11-02 株式会社堀場エステック Flow control device, flow control method, and program for flow control device
US20200132536A1 (en) * 2018-10-26 2020-04-30 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
JP7251786B2 (en) * 2019-07-31 2023-04-04 株式会社フジキン Flow measurement system and flow measurement method
JP7531881B2 (en) 2020-03-24 2024-08-13 株式会社フジキン Flow rate control system, control method for flow rate control system, and control program for flow rate control system
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
WO2022201963A1 (en) * 2021-03-24 2022-09-29 日立金属株式会社 Parameter initial value determination method and system, and mass flow rate control device adjustment method and system
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US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5263369A (en) * 1992-07-24 1993-11-23 Bear Medical Systems, Inc. Flow sensor system and method
US6119047A (en) * 1996-03-28 2000-09-12 Rosemount Inc. Transmitter with software for determining when to initiate diagnostics
US5805442A (en) * 1996-05-30 1998-09-08 Control Technology Corporation Distributed interface architecture for programmable industrial control systems
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US6192281B1 (en) * 1996-10-04 2001-02-20 Fisher Controls International, Inc. Network accessible interface for a process control network
US6370448B1 (en) * 1997-10-13 2002-04-09 Rosemount Inc. Communication technique for field devices in industrial processes
US6216726B1 (en) * 1999-05-26 2001-04-17 Cyber Instrument Technologies Llc Wide range gas flow system with real time flow measurement and correction
US6343617B1 (en) * 1999-07-09 2002-02-05 Millipore Corporation System and method of operation of a digital mass flow controller
US6450190B2 (en) * 1999-08-10 2002-09-17 Tadahiro Ohmi Method of detecting abnormalities in flow rate in pressure-type flow controller
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US6619258B2 (en) * 2002-01-15 2003-09-16 Delphi Technologies, Inc. System for controllably disabling cylinders in an internal combustion engine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7424346B2 (en) 2002-06-24 2008-09-09 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US8738187B2 (en) 2002-06-24 2014-05-27 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
CN111665877A (en) * 2020-06-18 2020-09-15 北京七星华创流量计有限公司 Pressure control method and device and photovoltaic equipment
CN111665877B (en) * 2020-06-18 2023-04-14 北京七星华创流量计有限公司 Pressure control method and device and photovoltaic equipment

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GB2419958B (en) 2006-11-15

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Expiry date: 20230623