GB2419420B8 - Mass flow controller - Google Patents
Mass flow controllerInfo
- Publication number
- GB2419420B8 GB2419420B8 GB0526341A GB0526341A GB2419420B8 GB 2419420 B8 GB2419420 B8 GB 2419420B8 GB 0526341 A GB0526341 A GB 0526341A GB 0526341 A GB0526341 A GB 0526341A GB 2419420 B8 GB2419420 B8 GB 2419420B8
- Authority
- GB
- United Kingdom
- Prior art keywords
- mass flow
- flow controller
- controller
- mass
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
- G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
- G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
- G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/178,568 US6661693B2 (en) | 1995-08-31 | 2002-06-24 | Circuit for programming antifuse bits |
US10/178,119 US7136767B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for calibration of mass flow controller |
US10/178,884 US6810308B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with network access to diagnostics |
US10/178,378 US6948508B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for self-calibration of mass flow controller |
US10/178,261 US6868862B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with a plurality of closed loop control code sets |
US10/178,752 US20030234047A1 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for dual processor mass flow controller |
US10/178,288 US20030234045A1 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with on-line diagnostics |
US10/178,721 US6712084B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for pressure fluctuation insensitive mass flow control |
US10/178,810 US7004191B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with embedded web server |
GB0423320A GB2404028B8 (en) | 2002-06-24 | 2003-06-24 | Apparatus and method for pressure fluctuation insensitive massflow control |
Publications (5)
Publication Number | Publication Date |
---|---|
GB0526341D0 GB0526341D0 (en) | 2006-02-01 |
GB2419420A GB2419420A (en) | 2006-04-26 |
GB2419420B GB2419420B (en) | 2006-11-15 |
GB2419420B8 true GB2419420B8 (en) | 2008-09-03 |
GB2419420A8 GB2419420A8 (en) | 2008-09-03 |
Family
ID=30004142
Family Applications (8)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0526341A Expired - Lifetime GB2419420B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526337A Withdrawn GB2419677A (en) | 2002-06-24 | 2003-06-24 | Pressure fluctuation insensitive mass flow controller |
GB0526346A Expired - Lifetime GB2419958B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526243A Expired - Lifetime GB2419676B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow calibrator |
GB0526343A Expired - Lifetime GB2419957B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0423320A Expired - Lifetime GB2404028B8 (en) | 2002-06-24 | 2003-06-24 | Apparatus and method for pressure fluctuation insensitive massflow control |
GB0526348A Expired - Lifetime GB2419421B8 (en) | 2002-06-24 | 2003-06-24 | Gas flow standard |
GB0526359A Expired - Lifetime GB2419422B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
Family Applications After (7)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0526337A Withdrawn GB2419677A (en) | 2002-06-24 | 2003-06-24 | Pressure fluctuation insensitive mass flow controller |
GB0526346A Expired - Lifetime GB2419958B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526243A Expired - Lifetime GB2419676B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow calibrator |
GB0526343A Expired - Lifetime GB2419957B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0423320A Expired - Lifetime GB2404028B8 (en) | 2002-06-24 | 2003-06-24 | Apparatus and method for pressure fluctuation insensitive massflow control |
GB0526348A Expired - Lifetime GB2419421B8 (en) | 2002-06-24 | 2003-06-24 | Gas flow standard |
GB0526359A Expired - Lifetime GB2419422B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4544992B2 (en) |
GB (8) | GB2419420B8 (en) |
WO (1) | WO2004001516A1 (en) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6712084B2 (en) | 2002-06-24 | 2004-03-30 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
US7809473B2 (en) | 2002-06-24 | 2010-10-05 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
US7222029B2 (en) | 2004-07-08 | 2007-05-22 | Celerity, Inc. | Attitude insensitive flow device system and method |
US7461549B1 (en) * | 2007-06-27 | 2008-12-09 | Mks Instruments, Inc. | Mass flow verifiers capable of providing different volumes, and related methods |
US7467027B2 (en) * | 2006-01-26 | 2008-12-16 | Mks Instruments, Inc. | Compensation for thermal siphoning in mass flow controllers |
US7603186B2 (en) | 2006-04-28 | 2009-10-13 | Advanced Energy Industries, Inc. | Adaptive response time closed loop control algorithm |
US7640078B2 (en) | 2006-07-05 | 2009-12-29 | Advanced Energy Industries, Inc. | Multi-mode control algorithm |
JP4936439B2 (en) * | 2006-10-11 | 2012-05-23 | 国立大学法人東京工業大学 | Pressure regulator and vibration isolator |
US7651263B2 (en) * | 2007-03-01 | 2010-01-26 | Advanced Energy Industries, Inc. | Method and apparatus for measuring the temperature of a gas in a mass flow controller |
DE102007021099A1 (en) | 2007-05-03 | 2008-11-13 | Endress + Hauser (Deutschland) Ag + Co. Kg | Method for commissioning and / or reconfiguring a programmable field meter |
US7826986B2 (en) * | 2008-09-26 | 2010-11-02 | Advanced Energy Industries, Inc. | Method and system for operating a mass flow controller |
US8793082B2 (en) * | 2009-07-24 | 2014-07-29 | Mks Instruments, Inc. | Upstream volume mass flow verification systems and methods |
JP5864849B2 (en) | 2010-10-20 | 2016-02-17 | 株式会社堀場エステック | Fluid measurement system |
US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
JP5124038B2 (en) * | 2011-09-01 | 2013-01-23 | 国立大学法人東京工業大学 | Pressure regulator and vibration isolator |
JP6526374B2 (en) | 2013-04-25 | 2019-06-05 | 株式会社堀場エステック | Fluid control device |
CN104216424B (en) * | 2014-08-29 | 2019-04-09 | 湖南三德科技股份有限公司 | Delicate flow controller for portable equipment |
US9664659B2 (en) * | 2014-11-05 | 2017-05-30 | Dresser, Inc. | Apparatus and method for testing gas meters |
CN104949723A (en) * | 2015-06-30 | 2015-09-30 | 开平市中青环保技术服务有限公司 | Liquid flow monitor |
US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
JP7384551B2 (en) | 2017-03-14 | 2023-11-21 | 株式会社堀場エステック | Diagnostic system, diagnostic method, diagnostic program and flow control device. |
JP7164938B2 (en) * | 2017-07-31 | 2022-11-02 | 株式会社堀場エステック | Flow control device, flow control method, and program for flow control device |
US20200132536A1 (en) * | 2018-10-26 | 2020-04-30 | Illinois Tool Works Inc. | Mass flow controller with advanced back streaming diagnostics |
JP7251786B2 (en) * | 2019-07-31 | 2023-04-04 | 株式会社フジキン | Flow measurement system and flow measurement method |
JP2021152786A (en) | 2020-03-24 | 2021-09-30 | 株式会社フジキン | Flow rate control system, control method for flow rate control system, control program for flow rate control system |
CN111665877B (en) * | 2020-06-18 | 2023-04-14 | 北京七星华创流量计有限公司 | Pressure control method and device and photovoltaic equipment |
WO2022186971A1 (en) | 2021-03-03 | 2022-09-09 | Ichor Systems, Inc. | Fluid flow control system comprising a manifold assembly |
JPWO2022201963A1 (en) * | 2021-03-24 | 2022-09-29 | ||
WO2023012742A1 (en) * | 2021-08-06 | 2023-02-09 | Cavagna Group Spa | Method for calibrating a gas meter and gas meter calibrated according to the method |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6218709U (en) * | 1985-07-19 | 1987-02-04 | ||
US5062446A (en) * | 1991-01-07 | 1991-11-05 | Sematech, Inc. | Intelligent mass flow controller |
JP2720634B2 (en) * | 1991-05-28 | 1998-03-04 | 日本電気株式会社 | Self-diagnosis device of mass flow controller |
JPH05134764A (en) * | 1991-11-12 | 1993-06-01 | Nec Kyushu Ltd | Mass flow controller |
US5263369A (en) * | 1992-07-24 | 1993-11-23 | Bear Medical Systems, Inc. | Flow sensor system and method |
JPH0863235A (en) * | 1994-08-24 | 1996-03-08 | Burutsukusu Instr Kk | Differential pressure type mass flow rate control unit |
US5524084A (en) * | 1994-12-30 | 1996-06-04 | Hewlett-Packard Company | Method and apparatus for improved flow and pressure measurement and control |
US6017143A (en) * | 1996-03-28 | 2000-01-25 | Rosemount Inc. | Device in a process system for detecting events |
US5805442A (en) * | 1996-05-30 | 1998-09-08 | Control Technology Corporation | Distributed interface architecture for programmable industrial control systems |
BR9712194A (en) * | 1996-10-04 | 1999-08-31 | Fisher Controls Int | Interface between a communications network and a process control system, software program that implements an interface between a communications network and a process control system to run on a processor, manufacturing article implementing a software program interface between a communications network and a process control system to run on a processor; and, an interface adapted to be coupled between a remote communications network and a process control system. |
US5911238A (en) * | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
EP1023650B1 (en) * | 1997-10-13 | 2003-09-24 | Rosemount Inc. | Communication technique for field devices in industrial processes |
JPH11259140A (en) * | 1998-03-13 | 1999-09-24 | Kokusai Electric Co Ltd | Flow rate controller |
JP3546153B2 (en) * | 1998-08-24 | 2004-07-21 | 忠弘 大見 | Orifice clogging detection method and detection apparatus for pressure type flow control device |
US6119710A (en) * | 1999-05-26 | 2000-09-19 | Cyber Instrument Technologies Llc | Method for wide range gas flow system with real time flow measurement and correction |
US6343617B1 (en) * | 1999-07-09 | 2002-02-05 | Millipore Corporation | System and method of operation of a digital mass flow controller |
JP3554509B2 (en) * | 1999-08-10 | 2004-08-18 | 忠弘 大見 | Flow rate abnormality detection method in pressure flow control device |
US6539968B1 (en) * | 2000-09-20 | 2003-04-01 | Fugasity Corporation | Fluid flow controller and method of operation |
US7568000B2 (en) * | 2001-08-21 | 2009-07-28 | Rosemount Analytical | Shared-use data processing for process control systems |
US6619258B2 (en) * | 2002-01-15 | 2003-09-16 | Delphi Technologies, Inc. | System for controllably disabling cylinders in an internal combustion engine |
-
2003
- 2003-06-24 GB GB0526341A patent/GB2419420B8/en not_active Expired - Lifetime
- 2003-06-24 WO PCT/US2003/019969 patent/WO2004001516A1/en active Application Filing
- 2003-06-24 GB GB0526337A patent/GB2419677A/en not_active Withdrawn
- 2003-06-24 JP JP2004516220A patent/JP4544992B2/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526346A patent/GB2419958B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526243A patent/GB2419676B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526343A patent/GB2419957B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0423320A patent/GB2404028B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526348A patent/GB2419421B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526359A patent/GB2419422B8/en not_active Expired - Lifetime
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S117 | Correction of errors in patents and applications (sect. 117/patents act 1977) | ||
S117 | Correction of errors in patents and applications (sect. 117/patents act 1977) | ||
PE20 | Patent expired after termination of 20 years |
Expiry date: 20230623 |