AU2003212680A1 - Mass flow controller - Google Patents

Mass flow controller

Info

Publication number
AU2003212680A1
AU2003212680A1 AU2003212680A AU2003212680A AU2003212680A1 AU 2003212680 A1 AU2003212680 A1 AU 2003212680A1 AU 2003212680 A AU2003212680 A AU 2003212680A AU 2003212680 A AU2003212680 A AU 2003212680A AU 2003212680 A1 AU2003212680 A1 AU 2003212680A1
Authority
AU
Australia
Prior art keywords
mass flow
flow controller
controller
mass
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003212680A
Inventor
Wook-Hyun Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2003212680A1 publication Critical patent/AU2003212680A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Flow Control (AREA)
AU2003212680A 2003-01-14 2003-03-05 Mass flow controller Abandoned AU2003212680A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2003-0002581 2003-01-14
KR1020030002581A KR100395657B1 (en) 2003-01-14 2003-01-14 Mass flow controller
PCT/KR2003/000425 WO2004063679A1 (en) 2003-01-14 2003-03-05 Mass flow controller

Publications (1)

Publication Number Publication Date
AU2003212680A1 true AU2003212680A1 (en) 2004-08-10

Family

ID=32709883

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003212680A Abandoned AU2003212680A1 (en) 2003-01-14 2003-03-05 Mass flow controller

Country Status (3)

Country Link
KR (1) KR100395657B1 (en)
AU (1) AU2003212680A1 (en)
WO (1) WO2004063679A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2249128A1 (en) * 2009-05-08 2010-11-10 Linde Aktiengesellschaft Measuring assembly and method for monitoring the sump liquid flow in an air decomposition system
GB2553681B (en) 2015-01-07 2019-06-26 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
JP6613609B2 (en) * 2015-05-13 2019-12-04 東京電力ホールディングス株式会社 Measuring system and method
US10409295B2 (en) * 2016-12-31 2019-09-10 Applied Materials, Inc. Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
CN107844133A (en) * 2017-12-20 2018-03-27 北京创昱科技有限公司 A kind of mass flow controller
KR102171750B1 (en) 2019-06-07 2020-10-29 안무아 Flow control structure of Mass Flow mater Controller system with simultaneous temperature control and flow control
KR102068930B1 (en) 2019-06-07 2020-01-21 안무아 Mass Flow mater Controller system with simultaneous temperature control and flow control
US11772958B2 (en) 2020-09-17 2023-10-03 Applied Materials, Inc. Mass flow control based on micro-electromechanical devices
US20220081282A1 (en) * 2020-09-17 2022-03-17 Applied Materials, Inc. Micro-electromechanical device for use in a flow control apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
US4794947A (en) * 1986-11-29 1989-01-03 Kabushiki Kaisha Nippon IC (also trading as Nippon IC, Inc.) Mass flow controller
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US6244293B1 (en) * 1997-07-15 2001-06-12 Faramarz Azima Fluid mass flow controller device and method
US6332348B1 (en) * 2000-01-05 2001-12-25 Advanced Micro Devices, Inc. Gas flow calibration of mass flow controllers
US6360772B1 (en) * 2000-06-30 2002-03-26 Promos Technologies, Inc. Mass flow controller
KR100395656B1 (en) * 2001-12-19 2003-08-21 김욱현 Mass Flow Measurement Sensor for Mass Flow Controller

Also Published As

Publication number Publication date
WO2004063679A1 (en) 2004-07-29
KR100395657B1 (en) 2003-08-21

Similar Documents

Publication Publication Date Title
GB2419422B8 (en) Mass flow controller
GB0227109D0 (en) Volume flow controller
AU2003253958A1 (en) Flow device
AU2003254957A1 (en) Controller
EP1731808A4 (en) Fluid controller
AU2003254956A1 (en) Fluid controller
AU2003298453A1 (en) Fluid control device
AU2003281317A1 (en) Fluid controller
AU2003304122A1 (en) Flow control device
AU2003212680A1 (en) Mass flow controller
AU2003297372A1 (en) Flow field
AU2003280669A1 (en) Controller
AU2003268787A1 (en) Emulsifier
AU2003264779A1 (en) Flow control device
EP1620627B8 (en) Movements controlling means
AU2002219621A1 (en) Flow rate controller
GB0217044D0 (en) Mass flow controller
AU2003271208A1 (en) Ventilator
AU2003252171A1 (en) Flow through pipet
AU2003242336A1 (en) Flowmeter
AU2003223030A1 (en) Conditioning device
AU2004904638A0 (en) Flow controller
AU2004902472A0 (en) Flow controller
AU2003901365A0 (en) Boomgate controller
AU2003292398A1 (en) Valve

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase