GB2419958A8 - Mass flow controller with network interface for access to active diagnostics - Google Patents
Mass flow controller with network interface for access to active diagnosticsInfo
- Publication number
- GB2419958A8 GB2419958A8 GB0526346A GB0526346A GB2419958A8 GB 2419958 A8 GB2419958 A8 GB 2419958A8 GB 0526346 A GB0526346 A GB 0526346A GB 0526346 A GB0526346 A GB 0526346A GB 2419958 A8 GB2419958 A8 GB 2419958A8
- Authority
- GB
- United Kingdom
- Prior art keywords
- access
- network interface
- mass flow
- flow controller
- active diagnostics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
- G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
- G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
- G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/178,721 US6712084B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for pressure fluctuation insensitive mass flow control |
US10/178,752 US20030234047A1 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for dual processor mass flow controller |
US10/178,884 US6810308B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with network access to diagnostics |
US10/178,568 US6661693B2 (en) | 1995-08-31 | 2002-06-24 | Circuit for programming antifuse bits |
US10/178,261 US6868862B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with a plurality of closed loop control code sets |
US10/178,288 US20030234045A1 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with on-line diagnostics |
US10/178,378 US6948508B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for self-calibration of mass flow controller |
US10/178,810 US7004191B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for mass flow controller with embedded web server |
US10/178,119 US7136767B2 (en) | 2002-06-24 | 2002-06-24 | Apparatus and method for calibration of mass flow controller |
GB0423320A GB2404028B8 (en) | 2002-06-24 | 2003-06-24 | Apparatus and method for pressure fluctuation insensitive massflow control |
Publications (5)
Publication Number | Publication Date |
---|---|
GB0526346D0 GB0526346D0 (en) | 2006-02-01 |
GB2419958A GB2419958A (en) | 2006-05-10 |
GB2419958B GB2419958B (en) | 2006-11-15 |
GB2419958B8 GB2419958B8 (en) | 2008-09-03 |
GB2419958A8 true GB2419958A8 (en) | 2008-09-03 |
Family
ID=30004142
Family Applications (8)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0526337A Withdrawn GB2419677A (en) | 2002-06-24 | 2003-06-24 | Pressure fluctuation insensitive mass flow controller |
GB0526346A Expired - Lifetime GB2419958B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526341A Expired - Lifetime GB2419420B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526343A Expired - Lifetime GB2419957B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526243A Expired - Lifetime GB2419676B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow calibrator |
GB0423320A Expired - Lifetime GB2404028B8 (en) | 2002-06-24 | 2003-06-24 | Apparatus and method for pressure fluctuation insensitive massflow control |
GB0526348A Expired - Lifetime GB2419421B8 (en) | 2002-06-24 | 2003-06-24 | Gas flow standard |
GB0526359A Expired - Lifetime GB2419422B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0526337A Withdrawn GB2419677A (en) | 2002-06-24 | 2003-06-24 | Pressure fluctuation insensitive mass flow controller |
Family Applications After (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0526341A Expired - Lifetime GB2419420B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526343A Expired - Lifetime GB2419957B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
GB0526243A Expired - Lifetime GB2419676B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow calibrator |
GB0423320A Expired - Lifetime GB2404028B8 (en) | 2002-06-24 | 2003-06-24 | Apparatus and method for pressure fluctuation insensitive massflow control |
GB0526348A Expired - Lifetime GB2419421B8 (en) | 2002-06-24 | 2003-06-24 | Gas flow standard |
GB0526359A Expired - Lifetime GB2419422B8 (en) | 2002-06-24 | 2003-06-24 | Mass flow controller |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4544992B2 (en) |
GB (8) | GB2419677A (en) |
WO (1) | WO2004001516A1 (en) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6712084B2 (en) | 2002-06-24 | 2004-03-30 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
US7809473B2 (en) | 2002-06-24 | 2010-10-05 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
US7222029B2 (en) * | 2004-07-08 | 2007-05-22 | Celerity, Inc. | Attitude insensitive flow device system and method |
US7461549B1 (en) * | 2007-06-27 | 2008-12-09 | Mks Instruments, Inc. | Mass flow verifiers capable of providing different volumes, and related methods |
US7467027B2 (en) * | 2006-01-26 | 2008-12-16 | Mks Instruments, Inc. | Compensation for thermal siphoning in mass flow controllers |
US7603186B2 (en) | 2006-04-28 | 2009-10-13 | Advanced Energy Industries, Inc. | Adaptive response time closed loop control algorithm |
US7640078B2 (en) | 2006-07-05 | 2009-12-29 | Advanced Energy Industries, Inc. | Multi-mode control algorithm |
JP4936439B2 (en) * | 2006-10-11 | 2012-05-23 | 国立大学法人東京工業大学 | Pressure regulator and vibration isolator |
US7651263B2 (en) * | 2007-03-01 | 2010-01-26 | Advanced Energy Industries, Inc. | Method and apparatus for measuring the temperature of a gas in a mass flow controller |
DE102007021099A1 (en) | 2007-05-03 | 2008-11-13 | Endress + Hauser (Deutschland) Ag + Co. Kg | Method for commissioning and / or reconfiguring a programmable field meter |
US7826986B2 (en) * | 2008-09-26 | 2010-11-02 | Advanced Energy Industries, Inc. | Method and system for operating a mass flow controller |
US8793082B2 (en) * | 2009-07-24 | 2014-07-29 | Mks Instruments, Inc. | Upstream volume mass flow verification systems and methods |
JP5864849B2 (en) | 2010-10-20 | 2016-02-17 | 株式会社堀場エステック | Fluid measurement system |
US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
JP5124038B2 (en) * | 2011-09-01 | 2013-01-23 | 国立大学法人東京工業大学 | Pressure regulator and vibration isolator |
JP6526374B2 (en) | 2013-04-25 | 2019-06-05 | 株式会社堀場エステック | Fluid control device |
CN104216424B (en) * | 2014-08-29 | 2019-04-09 | 湖南三德科技股份有限公司 | Delicate flow controller for portable equipment |
US9664659B2 (en) * | 2014-11-05 | 2017-05-30 | Dresser, Inc. | Apparatus and method for testing gas meters |
CN104949723A (en) * | 2015-06-30 | 2015-09-30 | 开平市中青环保技术服务有限公司 | Liquid flow monitor |
US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
JP7384551B2 (en) | 2017-03-14 | 2023-11-21 | 株式会社堀場エステック | Diagnostic system, diagnostic method, diagnostic program and flow control device. |
JP7164938B2 (en) * | 2017-07-31 | 2022-11-02 | 株式会社堀場エステック | Flow control device, flow control method, and program for flow control device |
US20200132536A1 (en) * | 2018-10-26 | 2020-04-30 | Illinois Tool Works Inc. | Mass flow controller with advanced back streaming diagnostics |
JP7251786B2 (en) * | 2019-07-31 | 2023-04-04 | 株式会社フジキン | Flow measurement system and flow measurement method |
JP2021152786A (en) | 2020-03-24 | 2021-09-30 | 株式会社フジキン | Flow rate control system, control method for flow rate control system, control program for flow rate control system |
CN111665877B (en) * | 2020-06-18 | 2023-04-14 | 北京七星华创流量计有限公司 | Pressure control method and device and photovoltaic equipment |
US11899477B2 (en) | 2021-03-03 | 2024-02-13 | Ichor Systems, Inc. | Fluid flow control system comprising a manifold assembly |
KR20230160826A (en) * | 2021-03-24 | 2023-11-24 | 가부시키가이샤 프로테리아루 | Method and system for determining initial values of parameters and method and system for adjusting mass flow control devices |
WO2023012742A1 (en) * | 2021-08-06 | 2023-02-09 | Cavagna Group Spa | Method for calibrating a gas meter and gas meter calibrated according to the method |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6218709U (en) * | 1985-07-19 | 1987-02-04 | ||
US5062446A (en) * | 1991-01-07 | 1991-11-05 | Sematech, Inc. | Intelligent mass flow controller |
JP2720634B2 (en) * | 1991-05-28 | 1998-03-04 | 日本電気株式会社 | Self-diagnosis device of mass flow controller |
JPH05134764A (en) * | 1991-11-12 | 1993-06-01 | Nec Kyushu Ltd | Mass flow controller |
US5263369A (en) * | 1992-07-24 | 1993-11-23 | Bear Medical Systems, Inc. | Flow sensor system and method |
JPH0863235A (en) * | 1994-08-24 | 1996-03-08 | Burutsukusu Instr Kk | Differential pressure type mass flow rate control unit |
US5524084A (en) * | 1994-12-30 | 1996-06-04 | Hewlett-Packard Company | Method and apparatus for improved flow and pressure measurement and control |
US6017143A (en) * | 1996-03-28 | 2000-01-25 | Rosemount Inc. | Device in a process system for detecting events |
US5805442A (en) * | 1996-05-30 | 1998-09-08 | Control Technology Corporation | Distributed interface architecture for programmable industrial control systems |
WO1998014852A1 (en) * | 1996-10-04 | 1998-04-09 | Fisher Controls International, Inc. | A network accessible interface for a process control network |
US5911238A (en) * | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
CA2306767C (en) * | 1997-10-13 | 2007-05-01 | Rosemount Inc. | Communication technique for field devices in industrial processes |
JPH11259140A (en) * | 1998-03-13 | 1999-09-24 | Kokusai Electric Co Ltd | Flow rate controller |
JP3546153B2 (en) * | 1998-08-24 | 2004-07-21 | 忠弘 大見 | Orifice clogging detection method and detection apparatus for pressure type flow control device |
US6119710A (en) * | 1999-05-26 | 2000-09-19 | Cyber Instrument Technologies Llc | Method for wide range gas flow system with real time flow measurement and correction |
US6343617B1 (en) * | 1999-07-09 | 2002-02-05 | Millipore Corporation | System and method of operation of a digital mass flow controller |
JP3554509B2 (en) * | 1999-08-10 | 2004-08-18 | 忠弘 大見 | Flow rate abnormality detection method in pressure flow control device |
US6539968B1 (en) * | 2000-09-20 | 2003-04-01 | Fugasity Corporation | Fluid flow controller and method of operation |
US7568000B2 (en) * | 2001-08-21 | 2009-07-28 | Rosemount Analytical | Shared-use data processing for process control systems |
US6619258B2 (en) * | 2002-01-15 | 2003-09-16 | Delphi Technologies, Inc. | System for controllably disabling cylinders in an internal combustion engine |
-
2003
- 2003-06-24 GB GB0526337A patent/GB2419677A/en not_active Withdrawn
- 2003-06-24 GB GB0526346A patent/GB2419958B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526341A patent/GB2419420B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526343A patent/GB2419957B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526243A patent/GB2419676B8/en not_active Expired - Lifetime
- 2003-06-24 GB GB0423320A patent/GB2404028B8/en not_active Expired - Lifetime
- 2003-06-24 JP JP2004516220A patent/JP4544992B2/en not_active Expired - Lifetime
- 2003-06-24 GB GB0526348A patent/GB2419421B8/en not_active Expired - Lifetime
- 2003-06-24 WO PCT/US2003/019969 patent/WO2004001516A1/en active Application Filing
- 2003-06-24 GB GB0526359A patent/GB2419422B8/en not_active Expired - Lifetime
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S117 | Correction of errors in patents and applications (sect. 117/patents act 1977) | ||
S117 | Correction of errors in patents and applications (sect. 117/patents act 1977) | ||
PE20 | Patent expired after termination of 20 years |
Expiry date: 20230623 |