CN111665877B - Pressure control method and device, photovoltaic device - Google Patents
Pressure control method and device, photovoltaic device Download PDFInfo
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Abstract
本发明实施例提供一种压力控制方法和装置、光伏设备，该方法包括以下步骤：S1、实时检测源瓶的压力和气体流量，以获得压力值和气体流量值；S2、基于压力值和气体流量值在单位时间内的波动情况，确认数据模式；S3、根据单位时间内获得的压力值和气体流量值，采用确认出的数据模式和智能计算模型进行计算，以获得调整因子；S4、基于调整因子，对用于计算压力输出值的预设控制算法所使用的控制系数进行修正，以获得新控制系数；S5、采用预设控制算法并使用新控制系数计算获得压力输出值，并输出至被控对象。本发明实施例提供的压力控制方法和装置、光伏设备，能够快速、精确地控制源瓶的压力，减少压力波动对工艺的影响，提高压力控制的响应速度。
Embodiments of the present invention provide a pressure control method and device, and photovoltaic equipment. The method includes the following steps: S1, real-time detection of the pressure and gas flow of the source bottle to obtain the pressure value and gas flow value; S2, based on the pressure value and gas flow The fluctuation of the flow value within a unit time, confirm the data mode; S3, according to the pressure value and gas flow value obtained per unit time, use the confirmed data mode and intelligent calculation model to calculate to obtain the adjustment factor; S4, based on The adjustment factor is used to modify the control coefficient used by the preset control algorithm used to calculate the pressure output value to obtain a new control coefficient; S5, adopt the preset control algorithm and use the new control coefficient to calculate and obtain the pressure output value, and output to Accused. The pressure control method and device and photovoltaic equipment provided by the embodiments of the present invention can quickly and accurately control the pressure of the source bottle, reduce the impact of pressure fluctuations on the process, and improve the response speed of pressure control.
Description
技术领域technical field
本发明涉及光伏技术领域，具体地，涉及一种压力控制方法和装置、光伏设备。The present invention relates to the field of photovoltaic technology, in particular to a pressure control method and device, and photovoltaic equipment.
背景技术Background technique
近年来，全球光伏设备行业实现稳健增长，太阳能电池扩散作为光伏领域的核心工艺，主要有开管扩散和闭管软着陆扩散两种形式。其中，闭管软着陆扩散方式工艺过程完全不受外界环境干扰，工艺质量完全受保护。In recent years, the global photovoltaic equipment industry has achieved steady growth. As the core process in the photovoltaic field, solar cell diffusion mainly has two forms: open-tube diffusion and closed-tube soft-landing diffusion. Among them, the process of the closed-tube soft landing diffusion method is completely free from external environment interference, and the process quality is completely protected.
如图1所示，光伏扩散炉包括扩散炉管1、源瓶2、第一进气管路3、第二进气管路4、流量调节阀5、压力调节阀6和真空泵7，其中，源瓶2中用于盛放工艺气体源(例如磷源、硼源等)第一进气管路3的两端分别与源瓶2的出气端与扩散炉管1连接；第二进气管路4与源瓶2的进气端连接，用以向源瓶2中输送携带气体(例如氮气)；流量调节阀5设置在第一进气管路3上，用于调节输送至源瓶2中的携带气体的流量；压力调节阀6设置在第二进气管路4上，用于控制压力调节阀6调节源瓶2的压力。As shown in Figure 1, the photovoltaic diffusion furnace includes a
目前，如何精确快速的控制源瓶2的压力，以使其与压力设定值趋于一致，成为了一个亟待解决的核心技术问题。At present, how to accurately and quickly control the pressure of the
发明内容Contents of the invention
本发明旨在至少解决现有技术中存在的技术问题之一，提出了一种压力控制方法和装置、光伏设备，其能够快速、精确地控制源瓶的压力，以使其与压力设定值趋于一致，从而不仅可以最大限度地减少压力波动对工艺的影响，而且可以提高压力控制的响应速度。The present invention aims to solve at least one of the technical problems in the prior art, and proposes a pressure control method and device, photovoltaic equipment, which can quickly and accurately control the pressure of the source bottle, so that it is consistent with the pressure set value Tend to be consistent, so that not only can minimize the impact of pressure fluctuations on the process, but also improve the response speed of pressure control.
为实现上述目的，本发明提供了一种压力控制方法，用于控制光伏设备的源瓶的压力，包括以下步骤：In order to achieve the above object, the present invention provides a pressure control method for controlling the pressure of a source bottle of a photovoltaic device, comprising the following steps:
S1、实时检测所述源瓶的压力和气体流量，以获得压力值和气体流量值；S1. Detect the pressure and gas flow of the source bottle in real time to obtain the pressure value and gas flow value;
S2、基于所述压力值和气体流量值在单位时间内的波动情况，确认数据模式，所述数据模式包括压力波动而流量固定的模式，和流量波动而压力固定的模式；S2. Based on the fluctuation of the pressure value and the gas flow value per unit time, confirm the data mode, the data mode includes the mode of pressure fluctuation and fixed flow rate, and the mode of flow rate fluctuation and fixed pressure;
S3、根据所述单位时间内获得的所述压力值和气体流量值，采用确认出的所述数据模式和预设的智能计算模型进行计算，以获得调整因子；S3. According to the pressure value and the gas flow value obtained in the unit time, calculate using the confirmed data mode and the preset intelligent calculation model to obtain an adjustment factor;
S4、基于所述调整因子，对用于计算压力输出值的预设控制算法所使用的控制系数进行修正，以获得新控制系数；S4. Based on the adjustment factor, correct the control coefficient used in the preset control algorithm for calculating the pressure output value, so as to obtain a new control coefficient;
S5、采用所述预设控制算法并使用所述新控制系数计算获得压力输出值，并输出至被控对象。S5. Using the preset control algorithm and using the new control coefficient to calculate and obtain a pressure output value, and output it to the controlled object.
可选的，所述智能计算模型包括神经网络计算模型。Optionally, the intelligent computing model includes a neural network computing model.
可选的，所述步骤S3包括：Optionally, the step S3 includes:
S31、根据所述单位时间内获得的所述压力值和气体流量值，以及预先设定的所述调整因子的表达式中压力权重因子和流量权重因子的初始值，采用确认出的所述数据模式和所述智能计算模型进行计算，以获得所述压力权重因子和流量权重因子的修正值；S31. According to the pressure value and gas flow value obtained in the unit time, and the preset initial values of the pressure weight factor and flow weight factor in the expression of the adjustment factor, adopt the confirmed data mode and the intelligent calculation model to obtain the correction value of the pressure weight factor and the flow weight factor;
S32、将所述调整因子的表达式中的所述压力权重因子和流量权重因子的数值替换为所述修正值，以获得修正后的所述调整因子。S32. Replace the values of the pressure weighting factor and the flow weighting factor in the expression of the adjustment factor with the correction value, so as to obtain the corrected adjustment factor.
可选的，所述步骤S31，包括：Optionally, the step S31 includes:
S311、计算所述压力输出值与所述压力设定值的误差；S311. Calculate the error between the pressure output value and the pressure set value;
S312、基于所述误差、所述单位时间内获得的所述压力值和气体流量值，以及预先设定的所述调整因子的表达式中压力权重因子和流量权重因子的初始值，采用确认出的所述数据模式和所述智能计算模型进行计算，以获得所述压力权重因子和流量权重因子的修正值；所述修正值满足：使所述误差趋近于最小误差值。S312. Based on the error, the pressure value and the gas flow value obtained in the unit time, and the preset initial values of the pressure weight factor and the flow weight factor in the expression of the adjustment factor, use the confirmed The data mode and the intelligent calculation model are used for calculation to obtain the correction value of the pressure weight factor and the flow weight factor; the correction value satisfies: making the error approach a minimum error value.
可选的，在所述步骤S311中，所述误差满足下述函数：Optionally, in the step S311, the error satisfies the following function:
其中，x为由所述单位时间内获得的所述压力值和气体流量值构成的输入向量；y(x)为所述压力输出值；ps为所述压力设定值；n为所述单位时间内的所述压力输出值的数量。Wherein, x is the input vector formed by the pressure value and the gas flow value obtained in the unit time; y(x) is the output value of the pressure; p s is the set value of the pressure; n is the The number of pressure output values per unit time.
可选的，所述步骤S4包括：Optionally, the step S4 includes:
S41、计算所述调整因子与所述控制系数的乘积；S41. Calculate the product of the adjustment factor and the control coefficient;
S42、将所述乘积作为所述新控制系数。S42. Use the product as the new control coefficient.
可选的，在所述步骤S1中，实时检测所述源瓶的靠近其输入端或输出端处的管路中的压力，以及所述源瓶的靠近其输入端处的管路中的气体流量。Optionally, in the step S1, the pressure in the pipeline near the input end or the output end of the source bottle, and the gas in the pipeline near the input end of the source bottle are detected in real time flow.
作为另一个技术方案，本发明实施例还提供一种压力控制装置，用于控制光伏设备中的源瓶的压力,包括：As another technical solution, an embodiment of the present invention also provides a pressure control device for controlling the pressure of a source bottle in a photovoltaic device, including:
数据检测单元，用于实时检测所述源瓶的压力和气体流量，以获得压力值和气体流量值；A data detection unit for detecting the pressure and gas flow of the source bottle in real time, so as to obtain the pressure value and the gas flow value;
模式确认单元，用于基于所述压力值和气体流量值在单位时间内的波动情况，确认数据模式，所述数据模式包括压力波动而流量固定的模式，和流量波动而压力固定的模式；A mode confirmation unit, configured to confirm the data mode based on the fluctuation of the pressure value and the gas flow value per unit time, and the data mode includes a mode in which the pressure fluctuates and the flow rate is fixed, and a mode in which the flow rate fluctuates but the pressure is fixed;
计算单元，用于根据所述单位时间内获得的所述压力值和气体流量值，采用确认出的所述数据模式和所述智能计算模型进行计算，以获得调整因子；A calculation unit, configured to perform calculations using the confirmed data pattern and the intelligent calculation model according to the pressure value and the gas flow value obtained per unit time, so as to obtain an adjustment factor;
修正单元，用于基于所述调整因子，对用于计算压力输出值的预设控制算法所使用的控制系数进行修正，以获得新控制系数；A correction unit, configured to correct the control coefficient used by the preset control algorithm for calculating the pressure output value based on the adjustment factor, so as to obtain a new control coefficient;
控制单元，用于采用所述预设控制算法并使用所述新控制系数计算获得压力输出值，并输出至被控对象。The control unit is used to adopt the preset control algorithm and use the new control coefficient to calculate and obtain the pressure output value, and output it to the controlled object.
可选的，所述计算单元还用于计算所述压力输出值与所述压力设定值的误差；基于所述误差、所述单位时间内获得的所述压力值和气体流量值，以及预先设定的所述调整因子的表达式中压力权重因子和流量权重因子的初始值，采用确认出的所述数据模式和所述智能计算模型进行计算，以获得所述压力权重因子和流量权重因子的修正值；所述修正值满足：使所述误差趋近于最小误差值。Optionally, the calculation unit is also used to calculate the error between the pressure output value and the pressure set value; based on the error, the pressure value and the gas flow value obtained in the unit time, and the pre-set The initial values of the pressure weighting factor and the flow weighting factor in the expression of the set adjustment factor are calculated using the confirmed data mode and the intelligent calculation model to obtain the pressure weighting factor and the flow weighting factor The correction value; the correction value satisfies: make the error approach the minimum error value.
作为另一个技术方案，本发明实施例还提供一种光伏设备，包括反应腔室、源瓶、第一进气管路、第二进气管路、流量调节阀和压力调节阀，其中，所述第一进气管路的两端分别与所述源瓶的出气端与所述反应腔室连接；所述第二进气管路与所述源瓶的进气端连接，用以向所述源瓶中输送携带气体；所述流量调节阀设置在所述第一进气管路上；所述压力调节阀设置在所述第二进气管路上，还包括本发明实施例提供的上述压力控制装置，用于控制所述压力调节阀调节所述源瓶的压力，以使其与所述压力设定值趋于一致。As another technical solution, an embodiment of the present invention also provides a photovoltaic device, including a reaction chamber, a source bottle, a first air intake line, a second air intake line, a flow regulating valve, and a pressure regulating valve, wherein the first The two ends of an air inlet pipeline are respectively connected with the gas outlet end of the source bottle and the reaction chamber; the second air inlet pipeline is connected with the inlet end of the source bottle for feeding Carrying gas is delivered; the flow regulating valve is set on the first air intake pipeline; the pressure regulating valve is set on the second air intake line, and also includes the above-mentioned pressure control device provided by the embodiment of the present invention for controlling The pressure regulating valve regulates the pressure of the source bottle so that it tends to be consistent with the pressure setting value.
本发明的有益效果：Beneficial effects of the present invention:
本发明实施例提供的压力控制方法和装置的技术方案中，源瓶压力波动主要由压力波动和气体流量波动这两个因素引起的，基于此，实时检测源瓶的压力和气体流量，并基于其在单位时间内的波动情况确认数据模式，该数据模式包括压力波动而流量固定的模式，和流量波动而压力固定的模式；然后，采用确认出的数据模式和智能计算模型进行计算，以获得调整因子，并基于该调整因子对预设控制算法所使用的控制系数进行修正。通过进行上述模式确认，并利用确认出的数据模式和智能计算模型修正控制系数，可以快速、精确地控制源瓶的压力，以使其与压力设定值趋于一致，从而不仅可以最大限度地减少压力波动对工艺的影响，而且可以提高压力控制的响应速度。In the technical solution of the pressure control method and device provided by the embodiments of the present invention, the pressure fluctuation of the source bottle is mainly caused by two factors: pressure fluctuation and gas flow fluctuation. Based on this, the pressure and gas flow of the source bottle are detected in real time, and based on Its fluctuations in unit time confirm the data mode, which includes the mode of pressure fluctuation and fixed flow rate, and the mode of flow rate fluctuation and fixed pressure; then, the confirmed data mode and intelligent calculation model are used for calculation to obtain Adjustment factor, and modify the control coefficient used by the preset control algorithm based on the adjustment factor. By confirming the above mode, and using the confirmed data mode and intelligent calculation model to correct the control coefficient, the pressure of the source bottle can be quickly and accurately controlled so that it tends to be consistent with the pressure set value, so that not only can the maximum Reduce the impact of pressure fluctuations on the process, and can improve the response speed of pressure control.
本发明提供的光伏设备，其通过采用本发明提供的上述压力控制装置，可以快速、精确地控制源瓶的压力，以使其与压力设定值趋于一致，从而不仅可以最大限度地减少压力波动对工艺的影响，而且可以提高压力控制的响应速度。The photovoltaic equipment provided by the present invention can quickly and accurately control the pressure of the source bottle by using the above-mentioned pressure control device provided by the present invention so that it tends to be consistent with the pressure set value, thereby not only reducing the pressure to the maximum The impact of fluctuations on the process, and can improve the response speed of pressure control.
附图说明Description of drawings
图1为光伏扩散炉的结构示意图；Fig. 1 is the structural representation of photovoltaic diffusion furnace;
图2为本发明实施例提供的压力控制方法的流程框图；Fig. 2 is a flowchart of a pressure control method provided by an embodiment of the present invention;
图3为本发明实施例提供的压力控制装置的原理框图。Fig. 3 is a functional block diagram of a pressure control device provided by an embodiment of the present invention.
具体实施方式Detailed ways
为使本领域的技术人员更好地理解本发明的技术方案，下面结合附图对本发明提供的压力控制方法和装置、光伏设备进行详细描述。In order to enable those skilled in the art to better understand the technical solution of the present invention, the pressure control method and device, and photovoltaic equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
本发明实施例提供的压力控制方法，用于控制光伏设备的源瓶的压力，以使其能够与压力设定值趋于一致，以最大限度地减少压力波动对工艺的影响。下面以控制图1示出的光伏扩散炉中的源瓶2的压力为例，对本实施例提供的压力控制方法进行详细描述。The pressure control method provided by the embodiment of the present invention is used to control the pressure of the source bottle of the photovoltaic device so that it can tend to be consistent with the pressure setting value, so as to minimize the impact of pressure fluctuations on the process. The pressure control method provided by this embodiment will be described in detail below by taking control of the pressure of the
具体的，如图2所示，压力控制方法包括以下步骤：Specifically, as shown in Figure 2, the pressure control method includes the following steps:
S1、实时检测源瓶2的压力和气体流量，以获得压力值和气体流量值；S1. Detect the pressure and gas flow of the
在步骤S1中，可以实时检测第二进气管路4的靠近源瓶2的输出端处的压力，或者也可以实时检测第一进气管路3的靠近源瓶2的输入端处的压力，具体来说，将压力检测装置设置在第二进气管路4或者第一进气管路3上。另外，可以实时检测第一进气管路3的靠近源瓶2的输入端处的气体流量，即，将流量检测装置设置在第一进气管路3上。In step S1, the pressure at the output end of the second
S2、基于上述压力值和气体流量值在单位时间内的波动情况，确认数据模式，该数据模式包括压力波动而流量固定的模式，和流量波动而压力固定的模式。S2. Based on the above-mentioned fluctuations of the pressure value and the gas flow value per unit time, confirm the data pattern, the data pattern includes a pattern of pressure fluctuation and constant flow, and a pattern of flow fluctuation and pressure constant.
例如，若气体流量值维持在某一数值不变，而压力值因压力设定值变化(例如，自1000mbar变化为800mbar)等原因而发生变化，则可以确认为压力波动而流量固定的模式；若压力值维持在某一数值不变，而气体流量值因流量设定值变化(例如，自1000sccm变化为500sccm)，则可以确认为流量波动而压力固定的模式。在确认数据模式之后，将采用确认出的数据模式参与后续计算。For example, if the gas flow value remains constant at a certain value, but the pressure value changes due to changes in the pressure setting value (for example, from 1000mbar to 800mbar), it can be confirmed as a mode of pressure fluctuation and flow rate; If the pressure value remains constant at a certain value, but the gas flow value changes due to the flow setting value (for example, from 1000 sccm to 500 sccm), then it can be confirmed as a mode of flow fluctuation and pressure constant. After the data pattern is confirmed, the confirmed data pattern will be used to participate in subsequent calculations.
源瓶2的压力波动主要由压力波动和气体流量波动这两个因素引起的，基于此，通过进行上述模式确认，可以通过将确认出的数据模式参与到后续的计算步骤中，来提高所使用的智能计算模型的自我修正效率，即，能够更快速地、更精准地使压力输出值与压力设定值的误差趋近于最小误差值，从而可以提高计算的准确度，提高控制精度。The pressure fluctuation of the
另外，上述单元时间是周期性地获取一组压力流量数据时的周期时间。数据的获取方法例如为：提供一压力流量数据模板，在实时检测源瓶的压力和气体流量的过程中，周期性地获取一组压力流量数据，并按检测时间的先后顺序保存在该压力流量数据模板中。在进行模式确认时，基于保存在压力流量数据模板中的压力流量数据分析压力和流量的波动情况。另外，当该压力流量数据模板中保存的数据数量达到上限值时，首先删除最早保存的压力值和气体流量值，然后将最新获取的压力值和气体流量值存入压力流量数据模板中，从而实现压力流量数据模板的实时更新。In addition, the above-mentioned unit time is a cycle time when a set of pressure and flow data is periodically acquired. The data acquisition method is, for example, to provide a pressure and flow data template. During the process of real-time detection of the pressure and gas flow of the source bottle, periodically obtain a set of pressure and flow data, and store them in the pressure and flow data in the order of detection time. in the data template. During mode confirmation, the pressure and flow fluctuations are analyzed based on the pressure and flow data stored in the pressure and flow data template. In addition, when the number of data stored in the pressure flow data template reaches the upper limit, first delete the earliest saved pressure value and gas flow value, and then store the latest acquired pressure value and gas flow value into the pressure flow data template, In this way, the real-time update of the pressure flow data template is realized.
S3、根据单位时间内获得的压力值和气体流量值，采用确认出的数据模式和预设的智能计算模型进行计算，以获得调整因子。S3. According to the pressure value and the gas flow value obtained per unit time, the confirmed data mode and the preset intelligent calculation model are used for calculation to obtain the adjustment factor.
步骤S3中单位时间内获得的压力值和气体流量值，即为当前压力流量数据模板中保存的压力流量数据。The pressure value and gas flow value obtained per unit time in step S3 are the pressure and flow data stored in the current pressure and flow data template.
上述智能计算模型例如为神经网络计算模型，当然，在实际应用中，还可以采用其他任意能够实现上述功能的智能计算模型。The aforementioned intelligent computing model is, for example, a neural network computing model. Of course, in practical applications, any other intelligent computing model that can realize the above-mentioned functions may also be used.
在本实施例中，可以采用常用的闭环控制方法控制被控对象(例如压力调节阀的开度)，以使压力输出值等于预设的压力设定值。上述闭环控制方法根据压力值和上述压力设定值，采用预设控制算法计算获得压力输出值，该预设控制算法例如为比例积分微分(Proportional IntegralDerivative，以下简称PID)控制算法。上述智能计算模型计算获得的调整因子用于对上述预设控制算法所使用的控制系数进行修正，以获得新控制系数，这种修正控制系数的方式可以达到提高控制精度的目的。In this embodiment, a common closed-loop control method can be used to control the controlled object (such as the opening of the pressure regulating valve), so that the pressure output value is equal to the preset pressure setting value. The above-mentioned closed-loop control method calculates and obtains the pressure output value by using a preset control algorithm based on the pressure value and the above-mentioned pressure set value. The preset control algorithm is, for example, a Proportional Integral Derivative (PID) control algorithm. The adjustment factor calculated by the above-mentioned intelligent calculation model is used to modify the control coefficient used by the above-mentioned preset control algorithm to obtain a new control coefficient. This way of modifying the control coefficient can achieve the purpose of improving the control accuracy.
可选的，上述智能计算模型具有监督自学习的功能，即，基于压力输出值与压力设定值的误差，不断自我修正，以使该误差随着该模型的计算次数的累积而逐渐减小，直至趋近于最小误差值。Optionally, the above-mentioned intelligent calculation model has the function of supervised self-learning, that is, based on the error between the pressure output value and the pressure set value, it is constantly self-correcting, so that the error will gradually decrease with the accumulation of the calculation times of the model , until it approaches the minimum error value.
在步骤S3中，通过将确认出的数据模式结合智能计算模型进行计算，可以提高所使用的智能计算模型的自我修正效率，即，能够更快速地、更精准地使压力输出值与压力设定值的误差趋近于最小误差值，从而可以提高计算的准确度，提高控制精度。In step S3, by combining the confirmed data pattern with the intelligent calculation model for calculation, the self-correction efficiency of the intelligent calculation model used can be improved, that is, the pressure output value and the pressure setting can be adjusted more quickly and accurately. The error of the value tends to the minimum error value, which can improve the accuracy of calculation and control precision.
具体的，上述步骤S3包括：Specifically, the above step S3 includes:
S31、根据单位时间内获得的压力值和气体流量值，以及预先设定的调整因子的表达式中压力权重因子和流量权重因子的初始值，采用确认出的数据模式和智能计算模型进行计算，以获得压力权重因子和流量权重因子的修正值；S31. According to the pressure value and gas flow value obtained per unit time, and the initial value of the pressure weight factor and the flow weight factor in the expression of the preset adjustment factor, the confirmed data mode and the intelligent calculation model are used for calculation, to obtain the corrected values of the pressure weight factor and the flow weight factor;
S32、将调整因子的表达式中的压力权重因子和流量权重因子的数值替换为修正值，以获得修正后的调整因子。S32. Replace the values of the pressure weighting factor and the flow weighting factor in the expression of the adjustment factor with correction values, so as to obtain a revised adjustment factor.
例如，上述调整因子的表达式为An(f,p)，其中，f和p分别为该表达式中的压力权重因子和流量权重因子。在计算过程中，压力流量数据模板中的压力流量数据用作压力权重因子和流量权重因子的输入参数，即，上述智能计算模型对该压力流量数据进行特征提取，并进行上述步骤S31和步骤S32，以计算获得调整因子An(f,p)。For example, the expression of the above adjustment factor is An(f,p), where f and p are respectively the pressure weight factor and the flow weight factor in the expression. In the calculation process, the pressure and flow data in the pressure and flow data template are used as the input parameters of the pressure weight factor and the flow weight factor, that is, the above-mentioned intelligent calculation model performs feature extraction on the pressure and flow data, and performs the above steps S31 and S32 , to calculate the adjustment factor An(f,p).
需要说明的是，对于不同的数据模式，上述压力权重因子和流量权重因子所起到的作用大小不同，例如，对于上述压力波动而流量固定的模式，压力权重因子所起到的作用大于流量权重因子所起到的作用；对于流量波动而压力固定的模式，流量权重因子所起到的作用大于压力权重因子所起到的作用。正是因为这两种权重因子所起到的作用不同，使得所使用的智能计算模型的自我修正效率得以提高，从而能够更快速地、更精准地使压力输出值与压力设定值的误差趋近于最小误差值。It should be noted that, for different data modes, the above-mentioned pressure weight factor and flow weight factor play different roles. For example, for the above-mentioned mode of pressure fluctuation and flow fixed, the role of the pressure weight factor is greater than the flow weight The role played by the factor; for the flow fluctuation and pressure fixed mode, the role of the flow weight factor is greater than that of the pressure weight factor. It is precisely because these two weighting factors play different roles that the self-correction efficiency of the intelligent calculation model used can be improved, so that the error trend between the pressure output value and the pressure set value can be made faster and more accurately. close to the minimum error value.
获得压力权重因子和流量权重因子的修正值的具体方法例如为：上述步骤S31，包括：The specific method for obtaining the correction value of the pressure weight factor and the flow weight factor is, for example: the above step S31, including:
S311、计算压力输出值与压力设定值的误差；S311. Calculate the error between the pressure output value and the pressure setting value;
可选的，在上述步骤S311中，误差满足下述函数：Optionally, in the above step S311, the error satisfies the following function:
其中，x为由单位时间内获得的压力值和气体流量值构成的输入向量；y(x)为压力输出值；ps为压力设定值；n为单位时间内的压力输出值的数量。Among them, x is the input vector composed of the pressure value and gas flow value obtained per unit time; y(x) is the pressure output value; p s is the pressure setting value; n is the number of pressure output values per unit time.
上述误差C(f,p)即为均方误差，即，单位时间内获得的压力输出值与设定压力值的差值的均方差，当然，在实际应用中，还可以采用其他任意方法计算获得上述误差。The above error C(f,p) is the mean square error, that is, the mean square error of the difference between the pressure output value obtained per unit time and the set pressure value. Of course, in practical applications, any other method can be used to calculate Obtain the above error.
S312、基于上述误差、单位时间内获得的压力值和气体流量值，以及预先设定的调整因子的表达式中压力权重因子和流量权重因子的初始值，采用确认出的数据模式和上述智能计算模型进行计算，以获得压力权重因子和流量权重因子的修正值，该修正值满足：使上述误差趋近于最小误差值。S312, based on the above error, the pressure value and gas flow value obtained per unit time, and the initial value of the pressure weight factor and the flow weight factor in the expression of the preset adjustment factor, using the confirmed data mode and the above intelligent calculation The model is calculated to obtain the correction value of the pressure weight factor and the flow weight factor, and the correction value satisfies: make the above error approach the minimum error value.
由上可知，基于上述误差，上述智能计算模型可以通过输入的压力流量数据自主修正压力权重因子和流量权重因子，以使得误差随着该模型的计算次数的累积而逐渐减小，直至达到最小误差值。It can be seen from the above that based on the above error, the above intelligent calculation model can independently correct the pressure weight factor and flow weight factor through the input pressure and flow data, so that the error will gradually decrease with the accumulation of calculation times of the model until the minimum error is reached value.
需要说明的是，本实施例通过将上述智能计算模型计算获得的调整因子应用到预设控制算法(例如PID控制算法)中，即，对该算法所使用的控制系数进行修正，从而达到提高控制精度的目的。本发明实施例对上述智能计算模型的具体计算过程没有特别的限定，相关技术中能够实现上述功能的智能计算模型均属于本发明的保护范围。It should be noted that, in this embodiment, the adjustment factor calculated by the above-mentioned intelligent calculation model is applied to the preset control algorithm (such as the PID control algorithm), that is, the control coefficient used by the algorithm is corrected, so as to improve the control purpose of precision. The embodiment of the present invention has no special limitation on the specific calculation process of the above-mentioned intelligent computing model, and the intelligent computing models in the related art that can realize the above-mentioned functions all belong to the protection scope of the present invention.
S4、基于上述调整因子，对用于计算压力输出值的预设控制算法所使用的控制系数进行修正，以获得新控制系数。S4. Based on the above adjustment factor, correct the control coefficient used in the preset control algorithm for calculating the pressure output value, so as to obtain a new control coefficient.
例如，上述步骤S4包括：For example, the above step S4 includes:
S41、计算调整因子与控制系数的乘积；S41. Calculate the product of the adjustment factor and the control coefficient;
S42、将乘积作为新控制系数。S42. Use the product as a new control coefficient.
S5、采用预设控制算法并使用所述新控制系数计算获得压力输出值，并输出至被控对象。S5. Using a preset control algorithm and using the new control coefficient to calculate and obtain a pressure output value, and output it to the controlled object.
上述被控对象例如为图1中示出压力调节阀6的开度。The above-mentioned controlled object is, for example, the opening degree of the
可选的，在上述步骤S1之前，还包括：Optionally, before the above step S1, it also includes:
判断当前的压力值是否等于预设的压力设定值；若是，则流程结束；若否，则进行上述步骤S1。It is judged whether the current pressure value is equal to the preset pressure setting value; if yes, the process ends; if not, the above step S1 is performed.
综上所述，通过进行上述模式确认，并利用确认出的数据模式和智能计算模型修正控制系数，可以快速、精确地控制源瓶的压力，以使其与压力设定值趋于一致，从而不仅可以最大限度地减少压力波动对工艺的影响，而且可以提高压力控制的响应速度。To sum up, by confirming the above mode and using the confirmed data mode and intelligent calculation model to correct the control coefficient, the pressure of the source bottle can be quickly and accurately controlled so that it tends to be consistent with the pressure set value, thereby Not only can the influence of pressure fluctuation on the process be minimized, but also the response speed of pressure control can be improved.
作为另一个技术方案，请参阅图3，本发明实施例还提供一种压力控制装置，其包括数据检测单元101、模式确认单元102、计算单元103、修正单元104和控制单元105。其中，数据检测单元101用于实时检测源瓶201的压力和气体流量，以获得压力值和气体流量值；模式确认单元102用于基于上述压力值和气体流量值在单位时间内的波动情况，确认数据模式，该数据模式包括压力波动而流量固定的模式，和流量波动而压力固定的模式；计算单元103用于根据单位时间内获得的压力值和气体流量值，采用确认出的数据模式和智能计算模型进行计算，以获得调整因子；修正单元10用于基于上述调整因子，对用于计算压力输出值的预设控制算法所使用的控制系数进行修正，以获得新控制系数；控制单元105用于采用使用新控制系数的预设控制算法计算获得压力输出值，并输出至被控对象202。As another technical solution, please refer to FIG. 3 , the embodiment of the present invention also provides a pressure control device, which includes a
被控对象202例如为图1中示出的压力调节阀6的开度。The controlled
可选的，计算单元103还用于计算压力输出值与压力设定值的误差；基于该误差、单位时间内获得的压力值和气体流量值，以及预先设定的调整因子的表达式中压力权重因子和流量权重因子的初始值，采用确认出的数据模式和智能计算模型进行计算，以获得压力权重因子和流量权重因子的修正值；该修正值满足：使误差趋近于最小误差值。Optionally, the
可选的，上述误差满足下述函数：Optionally, the above error satisfies the following function:
其中，x为由单位时间内获得的压力值和气体流量值构成的输入向量；y(x)为压力输出值；ps为压力设定值；n为单位时间内的压力输出值的数量。Among them, x is the input vector composed of the pressure value and gas flow value obtained per unit time; y(x) is the pressure output value; p s is the pressure setting value; n is the number of pressure output values per unit time.
可选的，修正单元104具体用于计算所述调整因子与控制系数的乘积，并将该乘积作为新控制系数。Optionally, the
可选的，数据检测单元101用于实时检测源瓶201的靠近其输入端或输出端处的管路中的压力，以及源瓶201的靠近其输入端处的管路中的气体流量。Optionally, the
以图1为例，数据检测单元101可以实时检测第二进气管路4的靠近源瓶2的输出端处的压力，或者也可以实时检测第一进气管路3的靠近源瓶2的输入端处的压力，具体来说，将压力检测装置设置在第二进气管路4或者第一进气管路3上。另外，可以实时检测第一进气管路3的靠近源瓶2的输入端处的气体流量，即，将流量检测装置设置在第一进气管路3上。Taking Fig. 1 as an example, the
本发明实施例提供的压力控制装置，其可以快速、精确地控制源瓶的压力，以使其与压力设定值趋于一致，从而不仅可以最大限度地减少压力波动对工艺的影响，而且可以提高压力控制的响应速度。The pressure control device provided by the embodiment of the present invention can quickly and accurately control the pressure of the source bottle so that it tends to be consistent with the pressure setting value, thereby not only minimizing the impact of pressure fluctuations on the process, but also Improved response speed of pressure control.
作为另一个技术方案，本发明实施例还提供一种光伏设备，如图1所示，包括反应腔室(例如为扩散炉管1)、源瓶2、第一进气管路3、第二进气管路4、流量调节阀5、压力调节阀6和真空泵7，其中，源瓶2中用于盛放工艺气体源(例如磷源、硼源等)第一进气管路3的两端分别与源瓶2的出气端与扩散炉管1连接；第二进气管路4与源瓶2的进气端连接，用以向源瓶2中输送携带气体(例如氮气)；流量调节阀5设置在第一进气管路3上，用于调节输送至源瓶2中的携带气体的流量；压力调节阀6设置在第二进气管路4上，用于控制压力调节阀6调节源瓶2的压力。As another technical solution, the embodiment of the present invention also provides a photovoltaic device, as shown in FIG.
光伏设备还包括本发明实施例提供的上述压力控制装置，用于控制压力调节阀6调节源瓶2的压力，以使其与压力设定值趋于一致。The photovoltaic equipment also includes the above-mentioned pressure control device provided by the embodiment of the present invention, which is used to control the
本发明实施例提供的光伏设备，其通过采用本发明实施例提供的上述压力控制装置，可以快速、精确地控制源瓶的压力，以使其与压力设定值趋于一致，从而不仅可以最大限度地减少压力波动对工艺的影响，而且可以提高压力控制的响应速度。The photovoltaic equipment provided by the embodiment of the present invention can quickly and accurately control the pressure of the source bottle by using the above-mentioned pressure control device provided by the embodiment of the present invention, so that it tends to be consistent with the pressure setting value, so that not only the maximum Minimize the impact of pressure fluctuations on the process, and can improve the response speed of pressure control.
可以理解的是，以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式，然而本发明并不局限于此。对于本领域内的普通技术人员而言，在不脱离本发明的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本发明的保护范围。It can be understood that, the above embodiments are only exemplary embodiments adopted for illustrating the principle of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.
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| CN113110632B (en) * | 2021-05-10 | 2023-09-05 | 北京七星华创流量计有限公司 | Pressure control method, pressure control device and semiconductor process equipment |
| CN113641195A (en) * | 2021-07-22 | 2021-11-12 | 深圳市英威腾电气股份有限公司 | Pressure adjusting method, electronic device, and storage medium |
| CN114415747B (en) * | 2021-12-21 | 2023-10-27 | 成都中科唯实仪器有限责任公司 | Pressure regulating method of vacuum regulating valve |
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