CN111665877B - Pressure control method and device and photovoltaic equipment - Google Patents
Pressure control method and device and photovoltaic equipment Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 44
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- 230000001105 regulatory effect Effects 0.000 claims description 27
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- 238000001514 detection method Methods 0.000 claims description 11
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- 238000013459 approach Methods 0.000 claims description 7
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- 239000007789 gas Substances 0.000 description 48
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
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- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
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Abstract
The embodiment of the invention provides a pressure control method and device and photovoltaic equipment, wherein the method comprises the following steps: s1, detecting the pressure and the gas flow of a source bottle in real time to obtain a pressure value and a gas flow value; s2, confirming a data mode based on the fluctuation conditions of the pressure value and the gas flow value in unit time; s3, calculating by adopting a confirmed data mode and an intelligent calculation model according to the pressure value and the gas flow value obtained in unit time to obtain an adjustment factor; s4, based on the adjustment factor, correcting a control coefficient used by a preset control algorithm for calculating the pressure output value to obtain a new control coefficient; and S5, calculating by adopting a preset control algorithm and using the new control coefficient to obtain a pressure output value, and outputting the pressure output value to the controlled object. The pressure control method and device and the photovoltaic equipment provided by the embodiment of the invention can quickly and accurately control the pressure of the source bottle, reduce the influence of pressure fluctuation on the process and improve the response speed of pressure control.
Description
Technical Field
The invention relates to the technical field of photovoltaics, in particular to a pressure control method and device and photovoltaic equipment.
Background
In recent years, the photovoltaic equipment industry in the world realizes steady growth, and solar cell diffusion is used as a core process in the photovoltaic field, and mainly comprises two forms of open-tube diffusion and closed-tube soft landing diffusion. Wherein, the process of the closed tube soft landing diffusion mode is completely free from the interference of the external environment, and the process quality is completely protected.
As shown in fig. 1, the photovoltaic diffusion furnace includes a diffusion furnace tube 1, a source bottle 2, a first air inlet pipeline 3, a second air inlet pipeline 4, a flow regulating valve 5, a pressure regulating valve 6 and a vacuum pump 7, wherein two ends of the first air inlet pipeline 3 for containing a process gas source (such as a phosphorus source, a boron source and the like) in the source bottle 2 are respectively connected with an air outlet end of the source bottle 2 and the diffusion furnace tube 1; the second air inlet pipeline 4 is connected with the air inlet end of the source bottle 2 and is used for conveying carrying gas (such as nitrogen) into the source bottle 2; the flow regulating valve 5 is arranged on the first air inlet pipeline 3 and is used for regulating the flow of the carrying gas conveyed into the source bottle 2; a pressure regulating valve 6 is arranged on the second air inlet line 4 for controlling the pressure regulating valve 6 to regulate the pressure of the source bottle 2.
At present, how to accurately and rapidly control the pressure of the source bottle 2 to make the pressure of the source bottle and a set pressure value tend to be consistent becomes a core technical problem to be solved urgently.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art, and provides a pressure control method, a pressure control device and photovoltaic equipment, which can quickly and accurately control the pressure of a source bottle to enable the pressure to be consistent with a pressure set value, so that the influence of pressure fluctuation on a process can be reduced to the maximum extent, and the response speed of pressure control can be improved.
In order to achieve the above object, the present invention provides a pressure control method for controlling a pressure of a source bottle of a photovoltaic device, comprising the steps of:
s1, detecting the pressure and the gas flow of the source bottle in real time to obtain a pressure value and a gas flow value;
s2, confirming data modes based on the fluctuation conditions of the pressure value and the gas flow value in unit time, wherein the data modes comprise a mode of pressure fluctuation and fixed flow and a mode of flow fluctuation and fixed pressure;
s3, calculating by adopting the confirmed data mode and a preset intelligent calculation model according to the pressure value and the gas flow value obtained in the unit time to obtain an adjustment factor;
s4, based on the adjusting factor, correcting a control coefficient used by a preset control algorithm for calculating a pressure output value to obtain a new control coefficient;
and S5, calculating by adopting the preset control algorithm and using the new control coefficient to obtain a pressure output value, and outputting the pressure output value to a controlled object.
Optionally, the intelligent computational model comprises a neural network computational model.
Optionally, the step S3 includes:
s31, calculating by adopting the confirmed data mode and the intelligent calculation model according to the pressure value and the gas flow value obtained in the unit time and the initial values of the pressure weight factor and the flow weight factor in the preset expression of the adjustment factor to obtain the corrected values of the pressure weight factor and the flow weight factor;
and S32, replacing the numerical values of the pressure weight factor and the flow weight factor in the expression of the adjustment factor with the correction value to obtain the corrected adjustment factor.
Optionally, the step S31 includes:
s311, calculating the error between the pressure output value and the pressure set value;
s312, calculating by adopting the confirmed data mode and the intelligent calculation model based on the error, the pressure value and the gas flow value obtained in the unit time and the initial values of the pressure weight factor and the flow weight factor in the preset expression of the adjustment factor so as to obtain the corrected values of the pressure weight factor and the flow weight factor; the correction value satisfies: the error is made to approach a minimum error value.
Optionally, in the step S311, the error satisfies the following function:
wherein x is an input vector consisting of the pressure value and the gas flow value obtained in the unit time; y (x) is the pressure output value; p is a radical of s Is the pressure set point; n is the number of said pressure output values per unit time.
Optionally, the step S4 includes:
s41, calculating the product of the adjusting factor and the control coefficient;
and S42, taking the product as the new control coefficient.
Optionally, in the step S1, the pressure in the pipeline of the source bottle near the input end or the output end thereof and the gas flow rate in the pipeline of the source bottle near the input end thereof are detected in real time.
As another technical solution, an embodiment of the present invention further provides a pressure control device for controlling a pressure of a source bottle in a photovoltaic apparatus, including:
the data detection unit is used for detecting the pressure and the gas flow of the source bottle in real time to obtain a pressure value and a gas flow value;
a mode confirmation unit for confirming a data mode based on fluctuation conditions of the pressure value and the gas flow value in a unit time, wherein the data mode comprises a mode of pressure fluctuation and fixed flow and a mode of flow fluctuation and fixed pressure;
the calculation unit is used for calculating by adopting the confirmed data mode and the intelligent calculation model according to the pressure value and the gas flow value obtained in the unit time so as to obtain an adjustment factor;
the correction unit is used for correcting a control coefficient used by a preset control algorithm for calculating a pressure output value based on the adjustment factor so as to obtain a new control coefficient;
and the control unit is used for calculating and obtaining a pressure output value by adopting the preset control algorithm and using the new control coefficient, and outputting the pressure output value to a controlled object.
Optionally, the calculating unit is further configured to calculate an error between the pressure output value and the pressure set value; calculating by using the determined data pattern and the intelligent calculation model based on the error, the pressure value and the gas flow value obtained in the unit time, and initial values of a pressure weight factor and a flow weight factor in a preset expression of the adjustment factor, so as to obtain corrected values of the pressure weight factor and the flow weight factor; the correction value satisfies: the error is made to approach a minimum error value.
As another technical solution, an embodiment of the present invention further provides a photovoltaic device, including a reaction chamber, a source bottle, a first air inlet pipeline, a second air inlet pipeline, a flow regulating valve, and a pressure regulating valve, where two ends of the first air inlet pipeline are connected to an air outlet end of the source bottle and the reaction chamber, respectively; the second air inlet pipeline is connected with the air inlet end of the source bottle and used for conveying the carrier gas into the source bottle; the flow regulating valve is arranged on the first air inlet pipeline; the pressure regulating valve is arranged on the second air inlet pipeline, and the pressure control device provided by the embodiment of the invention is also used for controlling the pressure regulating valve to regulate the pressure of the source bottle so as to enable the pressure regulating valve to be consistent with the set pressure value.
The invention has the beneficial effects that:
in the technical scheme of the pressure control method and the pressure control device provided by the embodiment of the invention, the pressure fluctuation of the source bottle is mainly caused by two factors of pressure fluctuation and gas flow fluctuation, based on the two factors, the pressure and the gas flow of the source bottle are detected in real time, and the data mode is confirmed based on the fluctuation condition of the source bottle in unit time, wherein the data mode comprises a mode of pressure fluctuation and fixed flow and a mode of flow fluctuation and fixed pressure; and then, calculating by adopting the confirmed data pattern and the intelligent calculation model to obtain an adjustment factor, and correcting the control coefficient used by the preset control algorithm based on the adjustment factor. By carrying out the mode confirmation and utilizing the confirmed data mode and the intelligent calculation model to correct the control coefficient, the pressure of the source bottle can be quickly and accurately controlled to be consistent with the pressure set value, so that the influence of pressure fluctuation on the process can be reduced to the maximum extent, and the response speed of pressure control can be improved.
According to the photovoltaic equipment provided by the invention, the pressure of the source bottle can be quickly and accurately controlled by adopting the pressure control device provided by the invention, so that the pressure of the source bottle is consistent with a pressure set value, the influence of pressure fluctuation on the process can be reduced to the maximum extent, and the response speed of pressure control can be improved.
Drawings
FIG. 1 is a schematic view of a photovoltaic diffusion furnace;
FIG. 2 is a block flow diagram of a pressure control method provided by an embodiment of the present invention;
fig. 3 is a schematic block diagram of a pressure control device according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following describes the pressure control method and apparatus, and the photovoltaic device in detail with reference to the attached drawings.
The pressure control method provided by the embodiment of the invention is used for controlling the pressure of the source bottle of the photovoltaic equipment so as to enable the pressure to be consistent with the pressure set value, and the influence of pressure fluctuation on the process is reduced to the maximum extent. The pressure control method provided by the present embodiment will be described in detail below, taking as an example the control of the pressure of the source bottle 2 in the photovoltaic diffusion furnace shown in fig. 1.
Specifically, as shown in fig. 2, the pressure control method includes the following steps:
s1, detecting the pressure and the gas flow of a source bottle 2 in real time to obtain a pressure value and a gas flow value;
in step S1, the pressure at the output of the second inlet line 4 close to the source bottle 2 may be detected in real time, or the pressure at the input of the first inlet line 3 close to the source bottle 2 may also be detected in real time, in particular, the pressure detection means being provided on the second inlet line 4 or the first inlet line 3. In addition, the gas flow at the input of the first gas inlet line 3 close to the source bottle 2 can be detected in real time, i.e. a flow detection means is provided on the first gas inlet line 3.
And S2, confirming data modes based on the pressure values and the fluctuation conditions of the gas flow rate values in unit time, wherein the data modes comprise a mode of pressure fluctuation and fixed flow rate and a mode of pressure fluctuation and fixed flow rate.
For example, if the gas flow rate value is maintained at a certain value, and the pressure value changes due to a change in the pressure set value (e.g., from 1000mbar to 800 mbar), etc., a mode in which the flow rate is fixed for pressure fluctuation can be confirmed; if the pressure value is maintained at a certain value and the gas flow rate value is changed by the flow rate set value (for example, from 1000sccm to 500 sccm), it can be confirmed that the pressure is fixed as a flow rate fluctuation. After the data pattern is confirmed, the confirmed data pattern is used for participating in subsequent calculations.
The pressure fluctuation of the source bottle 2 is mainly caused by two factors of pressure fluctuation and gas flow fluctuation, and based on this, by carrying out the above mode confirmation, the self-correction efficiency of the used intelligent calculation model can be improved by participating the confirmed data mode in the subsequent calculation step, that is, the error between the pressure output value and the pressure set value can be more quickly and accurately approached to the minimum error value, so that the calculation accuracy can be improved, and the control precision can be improved.
In addition, the unit time is a cycle time when a set of pressure flow rate data is periodically acquired. The data acquisition method is, for example: providing a pressure flow data template, periodically acquiring a group of pressure flow data in the process of detecting the pressure and the gas flow of the source bottle in real time, and storing the pressure flow data in the pressure flow data template according to the sequence of detection time. When the mode is confirmed, the fluctuation of the pressure and the flow is analyzed based on the pressure and flow data stored in the pressure and flow data template. In addition, when the data quantity stored in the pressure flow data template reaches the upper limit value, the earliest stored pressure value and gas flow value are deleted firstly, and then the latest acquired pressure value and gas flow value are stored in the pressure flow data template, so that the real-time updating of the pressure flow data template is realized.
And S3, calculating by adopting the confirmed data mode and a preset intelligent calculation model according to the pressure value and the gas flow value obtained in unit time to obtain an adjustment factor.
And in the step S3, the pressure value and the gas flow value obtained in unit time are pressure flow data stored in the current pressure flow data template.
The intelligent calculation model is, for example, a neural network calculation model, and of course, in practical applications, any other intelligent calculation model capable of implementing the above functions may be adopted.
In this embodiment, a common closed-loop control method may be adopted to control the controlled object (for example, the opening degree of the pressure regulating valve) so that the pressure output value is equal to the preset pressure setting value. The closed-loop control method calculates the pressure output value by using a preset control algorithm, such as a Proportional Integral Derivative (PID) control algorithm, according to the pressure value and the pressure set value. The adjustment factor obtained by the intelligent calculation model is used for correcting the control coefficient used by the preset control algorithm to obtain a new control coefficient, and the control coefficient correction mode can achieve the purpose of improving the control precision.
Optionally, the intelligent calculation model has a function of supervising self-learning, that is, based on an error between the pressure output value and the pressure set value, the intelligent calculation model continuously corrects itself so that the error gradually decreases with the accumulation of the calculation times of the model until the error approaches to the minimum error value.
In step S3, the self-correction efficiency of the intelligent calculation model used can be improved by performing the calculation by combining the identified data pattern with the intelligent calculation model, that is, the error between the pressure output value and the pressure set value can be more quickly and accurately approached to the minimum error value, so that the calculation accuracy can be improved, and the control accuracy can be improved.
Specifically, the step S3 includes:
s31, calculating by adopting a confirmed data mode and an intelligent calculation model according to the pressure value and the gas flow value obtained in unit time and the initial values of the pressure weight factor and the flow weight factor in the expression of the preset adjustment factor to obtain the correction values of the pressure weight factor and the flow weight factor;
and S32, replacing the numerical values of the pressure weight factor and the flow weight factor in the expression of the adjustment factor with correction values to obtain the corrected adjustment factor.
For example, the expression of the above adjustment factor is An (f, p), where f and p are the pressure weight factor and the flow weight factor in the expression, respectively. In the calculation process, the pressure flow data in the pressure flow data template is used as the input parameters of the pressure weight factor and the flow weight factor, i.e., the intelligent calculation model performs feature extraction on the pressure flow data, and performs the steps S31 and S32 to calculate and obtain the adjustment factor An (f, p).
It should be noted that, for different data modes, the pressure weighting factor and the flow weighting factor play different roles, for example, for the mode in which the flow is fixed by the pressure fluctuation, the role played by the pressure weighting factor is larger than that played by the flow weighting factor; for a mode where the flow fluctuates and the pressure is fixed, the flow weighting factor plays a greater role than the pressure weighting factor. The two weighting factors have different functions, so that the self-correction efficiency of the used intelligent calculation model is improved, and the error between the pressure output value and the pressure set value can be more quickly and accurately approached to the minimum error value.
The specific method for obtaining the correction values of the pressure weight factor and the flow weight factor is, for example: the step S31 includes:
s311, calculating the error between the pressure output value and the pressure set value;
optionally, in step S311, the error satisfies the following function:
wherein x is an input vector consisting of a pressure value and a gas flow value obtained in unit time; y (x) is the pressure output value; p is a radical of s Is a pressure set value; n is the number of pressure output values per unit time.
The error C (f, p) is a mean square error, that is, a mean square error of a difference between the pressure output value obtained in the unit time and the set pressure value, and may be obtained by calculating by any other method in practical application.
S312, based on the error, the pressure value and the gas flow value obtained in unit time and the initial values of the pressure weight factor and the flow weight factor in the expression of the preset adjustment factor, calculating by adopting the confirmed data mode and the intelligent calculation model to obtain the correction values of the pressure weight factor and the flow weight factor, wherein the correction values meet the following requirements: the error approaches the minimum error value.
As can be seen from the above, based on the error, the intelligent calculation model may autonomously correct the pressure weight factor and the flow weight factor through the input pressure flow data, so that the error gradually decreases as the number of calculations of the model is accumulated until the minimum error value is reached.
It should be noted that, in the present embodiment, the adjustment factor obtained by calculating the above-mentioned intelligent calculation model is applied to a preset control algorithm (for example, a PID control algorithm), that is, a control coefficient used by the algorithm is modified, so as to achieve the purpose of improving the control accuracy. The embodiment of the present invention does not particularly limit the specific calculation process of the intelligent calculation model, and the intelligent calculation models capable of implementing the above functions in the related art all belong to the protection scope of the present invention.
And S4, based on the adjusting factor, correcting the control coefficient used by a preset control algorithm for calculating the pressure output value to obtain a new control coefficient.
For example, the step S4 includes:
s41, calculating the product of the adjustment factor and the control coefficient;
and S42, taking the product as a new control coefficient.
And S5, calculating by adopting a preset control algorithm and using the new control coefficient to obtain a pressure output value, and outputting the pressure output value to a controlled object.
The controlled object is, for example, the opening degree of the pressure regulating valve 6 shown in fig. 1.
Optionally, before the step S1, the method further includes:
judging whether the current pressure value is equal to a preset pressure set value or not; if yes, ending the process; if not, the step S1 is carried out.
In conclusion, by confirming the mode and correcting the control coefficient by using the confirmed data mode and the intelligent calculation model, the pressure of the source bottle can be quickly and accurately controlled to be consistent with the pressure set value, so that the influence of pressure fluctuation on the process can be reduced to the maximum extent, and the response speed of pressure control can be improved.
As another technical solution, referring to fig. 3, an embodiment of the present invention further provides a pressure control apparatus, which includes a data detection unit 101, a mode confirmation unit 102, a calculation unit 103, a correction unit 104, and a control unit 105. The data detection unit 101 is used for detecting the pressure and the gas flow of the source bottle 201 in real time to obtain a pressure value and a gas flow value; the mode confirming unit 102 is used for confirming a data mode based on the fluctuation conditions of the pressure value and the gas flow value in unit time, wherein the data mode comprises a mode of pressure fluctuation and fixed flow and a mode of flow fluctuation and fixed pressure; the calculation unit 103 is configured to perform calculation by using the identified data pattern and the intelligent calculation model according to the pressure value and the gas flow value obtained in the unit time to obtain an adjustment factor; the correction unit 10 is configured to correct a control coefficient used by a preset control algorithm for calculating a pressure output value based on the adjustment factor to obtain a new control coefficient; the control unit 105 is configured to calculate and obtain a pressure output value by using a preset control algorithm using the new control coefficient, and output the pressure output value to the controlled object 202.
The controlled object 202 is, for example, the opening degree of the pressure regulating valve 6 shown in fig. 1.
Optionally, the calculating unit 103 is further configured to calculate an error between the pressure output value and the pressure set value; calculating by adopting a confirmed data mode and an intelligent calculation model based on the error, the pressure value and the gas flow value obtained in unit time and initial values of a pressure weight factor and a flow weight factor in an expression of a preset adjustment factor so as to obtain a corrected value of the pressure weight factor and the flow weight factor; the correction value satisfies: the error approaches the minimum error value.
Optionally, the error satisfies the following function:
wherein x is an input vector consisting of a pressure value and a gas flow value obtained in unit time; y (x) is the pressure output value; p is a radical of formula s Is a pressure set value; n is the number of pressure output values per unit time.
Optionally, the modification unit 104 is specifically configured to calculate a product of the adjustment factor and the control coefficient, and use the product as a new control coefficient.
Optionally, the data detection unit 101 is configured to detect in real time the pressure in the pipeline of the source bottle 201 near its input or output, and the gas flow in the pipeline of the source bottle 201 near its input.
Taking fig. 1 as an example, the data detection unit 101 may detect the pressure at the output end of the second air intake pipe 4 close to the source bottle 2 in real time, or may also detect the pressure at the input end of the first air intake pipe 3 close to the source bottle 2 in real time, specifically, a pressure detection device is disposed on the second air intake pipe 4 or the first air intake pipe 3. In addition, the gas flow at the input of the first gas inlet line 3 close to the source bottle 2 can be detected in real time, i.e. a flow detection means is provided on the first gas inlet line 3.
The pressure control device provided by the embodiment of the invention can quickly and accurately control the pressure of the source bottle to enable the pressure to be consistent with the pressure set value, thereby not only reducing the influence of pressure fluctuation on the process to the maximum extent, but also improving the response speed of pressure control.
As another technical solution, an embodiment of the present invention further provides a photovoltaic device, as shown in fig. 1, including a reaction chamber (for example, a diffusion furnace tube 1), a source bottle 2, a first air inlet pipeline 3, a second air inlet pipeline 4, a flow regulating valve 5, a pressure regulating valve 6, and a vacuum pump 7, where two ends of the first air inlet pipeline 3, which is used for containing a process gas source (for example, a phosphorus source, a boron source, etc.), in the source bottle 2 are respectively connected to an air outlet end of the source bottle 2 and the diffusion furnace tube 1; the second air inlet pipeline 4 is connected with the air inlet end of the source bottle 2 and is used for conveying carrying gas (such as nitrogen) into the source bottle 2; the flow regulating valve 5 is arranged on the first air inlet pipeline 3 and is used for regulating the flow of the carrying gas conveyed into the source bottle 2; a pressure regulating valve 6 is arranged on the second air inlet line 4 for controlling the pressure regulating valve 6 to regulate the pressure of the source bottle 2.
The photovoltaic device further comprises the pressure control device provided by the embodiment of the invention, and the pressure control device is used for controlling the pressure regulating valve 6 to regulate the pressure of the source bottle 2 so as to enable the pressure to be consistent with the pressure set value.
According to the photovoltaic equipment provided by the embodiment of the invention, by adopting the pressure control device provided by the embodiment of the invention, the pressure of the source bottle can be quickly and accurately controlled to be consistent with the pressure set value, so that the influence of pressure fluctuation on the process can be reduced to the maximum extent, and the response speed of pressure control can be improved.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A pressure control method for controlling a pressure of a source bottle of a photovoltaic device, comprising the steps of:
s1, detecting the pressure and the gas flow of the source bottle in real time to obtain a pressure value and a gas flow value;
s2, confirming data modes based on the fluctuation conditions of the pressure value and the gas flow value in unit time, wherein the data modes comprise a mode of pressure fluctuation and fixed flow and a mode of flow fluctuation and fixed pressure;
s3, calculating by adopting the confirmed data mode and a preset intelligent calculation model according to the pressure value and the gas flow value obtained in the unit time to obtain an adjustment factor;
s4, based on the adjusting factor, correcting a control coefficient used by a preset control algorithm for calculating a pressure output value to obtain a new control coefficient;
and S5, calculating by adopting the preset control algorithm and using the new control coefficient to obtain a pressure output value, and outputting the pressure output value to a controlled object.
2. The pressure control method of claim 1, wherein the intelligent computational model comprises a neural network computational model.
3. The pressure control method according to claim 1, characterized in that the step S3 includes:
s31, calculating by adopting the confirmed data mode and the intelligent calculation model according to the pressure value and the gas flow value obtained in the unit time and the initial values of the pressure weight factor and the flow weight factor in the preset expression of the adjustment factor to obtain the corrected values of the pressure weight factor and the flow weight factor;
and S32, replacing the numerical values of the pressure weight factor and the flow weight factor in the expression of the adjustment factor with the correction value to obtain the corrected adjustment factor.
4. The pressure control method according to claim 3, wherein the step S31 includes:
s311, calculating the error between the pressure output value and the pressure set value;
s312, calculating by adopting the confirmed data mode and the intelligent calculation model based on the error, the pressure value and the gas flow value obtained in the unit time and the initial values of the pressure weight factor and the flow weight factor in the preset expression of the adjustment factor so as to obtain the corrected values of the pressure weight factor and the flow weight factor; the correction value satisfies: the error is made to approach a minimum error value.
5. The pressure control method according to claim 4, wherein in the step S311, the error satisfies the following function:
wherein x is an input vector consisting of the pressure value and the gas flow value obtained in the unit time; y (x) is the pressure output value; p is a radical of s Is the pressure set point; n is the number of said pressure output values per unit time.
6. The pressure control method according to claim 1, wherein the step S4 includes:
s41, calculating the product of the adjusting factor and the control coefficient;
and S42, taking the product as the new control coefficient.
7. The pressure control method according to claim 1, wherein in the step S1, the pressure in the pipe of the source bottle near its input end or output end and the gas flow rate in the pipe of the source bottle near its input end are detected in real time.
8. A pressure control device for controlling the pressure of a source bottle in a photovoltaic plant, comprising:
the data detection unit is used for detecting the pressure and the gas flow of the source bottle in real time so as to obtain a pressure value and a gas flow value;
a mode confirmation unit for confirming a data mode based on fluctuation conditions of the pressure value and the gas flow value in a unit time, wherein the data mode comprises a mode of pressure fluctuation and fixed flow and a mode of flow fluctuation and fixed pressure;
the calculation unit is used for calculating by adopting the confirmed data mode and an intelligent calculation model according to the pressure value and the gas flow value obtained in the unit time so as to obtain an adjustment factor;
the correction unit is used for correcting a control coefficient used by a preset control algorithm for calculating a pressure output value based on the adjustment factor so as to obtain a new control coefficient;
and the control unit is used for calculating to obtain a pressure output value by adopting the preset control algorithm and using the new control coefficient, and outputting the pressure output value to a controlled object.
9. The pressure control device of claim 8, wherein the calculation unit is further configured to calculate an error between the pressure output value and the pressure set value; calculating by using the determined data pattern and the intelligent calculation model based on the error, the pressure value and the gas flow value obtained in the unit time, and initial values of a pressure weight factor and a flow weight factor in a preset expression of the adjustment factor, so as to obtain corrected values of the pressure weight factor and the flow weight factor; the correction value satisfies: the error is made to approach a minimum error value.
10. A photovoltaic device comprises a reaction chamber, a source bottle, a first air inlet pipeline, a second air inlet pipeline, a flow regulating valve and a pressure regulating valve, wherein two ends of the first air inlet pipeline are respectively connected with an air outlet end of the source bottle and the reaction chamber; the second air inlet pipeline is connected with the air inlet end of the source bottle and used for conveying the carrying gas into the source bottle; the flow regulating valve is arranged on the first air inlet pipeline; the pressure regulating valve is arranged on the second air inlet pipeline, and is characterized by further comprising a pressure control device adopting any one of claims 8-9 and used for controlling the pressure regulating valve to regulate the pressure of the source bottle so as to enable the pressure to be consistent with the set pressure value.
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| CN113110632B (en) * | 2021-05-10 | 2023-09-05 | 北京七星华创流量计有限公司 | Pressure control method, pressure control device and semiconductor process equipment |
| CN113641195A (en) * | 2021-07-22 | 2021-11-12 | 深圳市英威腾电气股份有限公司 | Pressure adjusting method, electronic device, and storage medium |
| CN114415747B (en) * | 2021-12-21 | 2023-10-27 | 成都中科唯实仪器有限责任公司 | Pressure regulating method of vacuum regulating valve |
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