CN104216424B - Delicate flow controller for portable equipment - Google Patents
Delicate flow controller for portable equipment Download PDFInfo
- Publication number
- CN104216424B CN104216424B CN201410431169.2A CN201410431169A CN104216424B CN 104216424 B CN104216424 B CN 104216424B CN 201410431169 A CN201410431169 A CN 201410431169A CN 104216424 B CN104216424 B CN 104216424B
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- Prior art keywords
- gas
- flow controller
- portable equipment
- control valve
- chamber
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- 238000009434 installation Methods 0.000 claims abstract description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000001914 filtration Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 6
- 238000013016 damping Methods 0.000 claims description 4
- 230000001934 delay Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 71
- 230000006872 improvement Effects 0.000 description 6
- 230000003139 buffering effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Flow Control (AREA)
Abstract
The invention discloses a kind of delicate flow controllers for portable equipment, including air inlet, proportional control valve, control assembly, gas outlet, flow sensor, gas circuit structure module and installation pedestal, the gas circuit structure module is connected to a small buffer gas chamber, and the installation pedestal is equipped with porous filter；Gas enters through air inlet, and by entering small buffer gas chamber after porous filter, the output end of the small buffer gas chamber feeds gas into proportional control valve, exported after the control and regulation of proportional control valve by gas outlet.The present invention has many advantages, such as that structure is simpler, volume is smaller, the scope of application is wider.
Description
Technical field
Present invention relates generally to the rigorous analysis apparatus fields of fluid control, refer in particular to a kind of essence suitable for portable equipment
Close flow controller.
Background technique
It is intended in numerous rigorous analysis equipment using to fluid control component, such as one kind of flow controller ---
Electronic pressure controller EPC(full name is Electronic Pressure Controller).For example, in general gas-chromatography
In, the plenum system of gas circuit is as shown in Figure 1.It is generally after gas source 101 enters air accumulator 102, to enter back into flow control
The gas flow controlled in input gas chromatograph 104 in device 103 is stablized.Primarily function is air accumulator 102 herein
Filtering and buffering, while can be come into full contact with environment, keep gas temperature consistent with environment temperature, EPC is facilitated to carry out gas
Ambient temperature compensation.The shortcoming of above structure is that
1) volume of air accumulator 102 is not small, and relatively cumbersome, is not easy to realize portable.
2) when scene replacement field test, the dismounting to gas circuit is necessarily involved, it is troublesome in poeration.
3) it is put into atmosphere and wastes after the high-purity gas dismounting being full of in current air accumulator 102.
Summary of the invention
The technical problem to be solved in the present invention is that, for technical problem of the existing technology, the present invention provides one
Kind structure is simpler, volume is smaller, the wider array of delicate flow controller for portable equipment of the scope of application.
In order to solve the above technical problems, the invention adopts the following technical scheme:
A kind of delicate flow controller for portable equipment, including air inlet, proportional control valve, control assembly, outlet
Mouth, flow sensor, gas circuit structure module and installation pedestal, the gas circuit structure module are connected to a small buffer gas chamber, institute
Installation pedestal is stated equipped with porous filter；Gas enters through air inlet, by entering small buffer gas chamber after porous filter,
The output end of the small buffer gas chamber feeds gas into proportional control valve, by gas outlet after the control and regulation of proportional control valve
Output.
As a further improvement of the present invention: being additionally provided with built-in temperature sensor, the built-in temperature sensor and gas
Body directly contacts the real-time compensation for being used to realize gas temperature.
As a further improvement of the present invention: the installation site of the built-in temperature sensor is near flow sensor
Place and be sealed in gas circuit using sealing element.
As a further improvement of the present invention: having several gentle for carrying out gas filtration on the porous filter
The filter hole of body damping.
As a further improvement of the present invention: being contacted in the installation pedestal with porous filter and small buffer gas chamber
Position be equipped with sealing element.
As a further improvement of the present invention: the small buffer gas chamber is set to the inside of gas circuit structure module.
Compared with the prior art, the advantages of the present invention are as follows:
1, the delicate flow controller for portable equipment of the invention, structure is simpler, volume is smaller, the scope of application
It is wider, it is integrated with gas filtration, buffering and real-time temperature compensation function, makes EPC the case where hardly increasing weight and volume
Under, reach the scheme that large volume air accumulator in substitution laboratory equipment adds EPC.
2, the present invention is using increasing in EPC porous filter, small buffer gas chamber and embedded temperature sensors
Mode achievees the purpose that buffering, the effect of filtering and the real-time temperature compensation to input gas, is risen with reaching replacement air accumulator
Effect and function.
Detailed description of the invention
Fig. 1 is schematic illustration of traditional flow controller in application.
Fig. 2 is schematic illustration of the inventive flow controller in application.
Fig. 3 is the main structure of the schematic diagram of inventive flow controller.
Fig. 4 is the plan structure schematic illustration of inventive flow controller.
Fig. 5 is control principle schematic diagram of the present invention in specific application example.
Marginal data:
1, air inlet；2, gas circuit structure module；3, proportional control valve；4, built-in temperature sensor；5, flow sensor；6,
Control assembly；7, installation pedestal；8, small buffer gas chamber；9, porous filter；10, gas outlet；101, gas source；102, gas storage
Tank；103, flow controller；104, gas chromatograph；201, constant-current drive circuit；202, D/A conversion unit；203, signal tune
Manage circuit；204, AD conversion unit；205, data processing unit；206, memory；207, external communication unit.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
As shown in Figure 2 to 4, the delicate flow controller for portable equipment of the invention, equally to be applied to gas phase
For chromatograph 104, delicate flow controller of the invention is flow controller 103, connects gas source 101 comprising air inlet
1, proportional control valve 3, control assembly 6, gas outlet 10, flow sensor 5, gas circuit structure module 2 and installation pedestal 7, gas circuit knot
Structure module 2 is connected to a small buffer gas chamber 8, and small buffer gas chamber 8 can be set in the inside of gas circuit structure module 2 or outer
Portion, installation pedestal 7 are equipped with porous filter 9, and gas enters through air inlet 1, by entering small buffer after porous filter 9
Gas chamber 8, the output end of small buffer gas chamber 8 feed gas into proportional control valve 3, after the control and regulation of proportional control valve 3 by
Gas outlet 10 exports.Wherein, small buffer gas chamber 8 and porous filter 9 complete gas filtration and input gas pressure wave jointly
The function of dynamic buffering is equivalent to and replaces the pure gas capacitance type of air accumulator to realize to front end input gas using the form of the gentle appearance of vapour lock
The buffer function of body pressure change；There are vapour lock, small buffer gas chambers 8 to be considered as small size gas container for porous filter 9,
Its volume size needs the uninterrupted controlled to determine by flow controller, and flow is bigger, then volume will also increase.
Porous filter 9 can be according to actual needs using the filter of metal class or the filter of other materials class.
Proportional control valve 3, flow sensor 5, control assembly 6 realize the accurate control of output flow jointly.Control assembly 6
For the core control portions of entire electronic flow controller, the signal condition of flow sensor 5, detection are realized, at data
It manages and drive control is carried out to the proportional control valve 3 of control throughput.
In the present embodiment, built-in temperature sensor 4 is further set, built-in temperature sensor 4 is directly contacted with gas, is used
To realize the real-time compensation of gas temperature.Built-in temperature sensor 4 is mainly used to realize the real-time monitoring of gas temperature, to realize
The accurate compensation of gas temperature.Because pressure significantly changes, temperature can change significantly the gas of high-pressure air source output,
Directly can obviously there be biggish error using atmospheric temperature compensation at this time, it is ensured that gas flow accurately controls, it is necessary to
Accurate temperature-compensating has needed exist for accurate temperature measurement and quickly response；Thermistor exists as temperature sensor
It is relatively good selection herein.The installation site of built-in temperature sensor 4 is near the place of flow sensor 5, and use is O-shaped
Circle is sealed in gas circuit, not use the direct glue of sealant be enclosed in gas circuit, is easy to result in blockage to gas circuit or contaminated stream
The high-purity carrier gas crossed.
In the present embodiment, air inlet 1 and gas outlet 10 are designed according to interface standard actually required.For example, can make
With 1/16 inch interface, material is stainless steel；Due to needing to guarantee there are enough mechanical strengths, with gas circuit structure screw combination
Installation, and because being portable application, entire flow controller will be made lightly, so in the place of not requirement of mechanical strength,
Light material is selected as far as possible, as the gas circuit structure module in the present invention uses aluminium.
In the present embodiment, there are several filter hole on porous filter 9, porosity, length three are crossed in the aperture of filter hole
Parameter will be designed determination according to actual use, and the grain diameter that pore size filter filters according to need will select to obtain and compare minimum to select
It is required that filtering grain diameter it is small, such as 2um, 5um and 10um；Cross porosity, length determine its air damping effect size, be
Guarantee that the effect of its air damping should not be excessive, cross porosity and generally require 40% or more, require by flow it is bigger
When, length requirement is shorter, to guarantee that the range of flow of control can reach design requirement.For example, it is desired to the range of flow of control
It is 40% that when for 1~100sccm, the aperture of the porous filter 9 used, which is 5um, crosses porosity, length 3mm, small buffer gas
The volume of room 8 is not less than 2mL (2 π * 10^2*20mm), and corner needs to carry out circular-arc-shaped design, can reduce on certain procedures
The presence of gas dead volume.
Installation pedestal 7 will realize the sealing installation of porous filter 9 and small buffer gas chamber 8, and interface uses several
A O-ring realizes sealing.
As shown in figure 5, flow sensor 5 and built-in temperature sensor 4 detect corresponding flow respectively in the present embodiment
Signal and temperature signal enter AD conversion unit 204(ADC after the conditioning of signal conditioning circuit 203) it is sampled；Sampling
Signal be passed to data processing unit 205(MCU) in processing, the setting that MCU will be stored in this flow signal and memory 206
Target value compares, and considers temperature-compensating, and the difference by calculating itself and target set point is adjusted digital-to-analogue conversion list
First 202(DAC) output, with control the output size of current of constant-current drive circuit 201 control proportional control valve 3 adjust stream
The flow of its gas is crossed, to achieve the purpose that the control output of flow precision.Data processing unit 205(MCU) by externally communicating
Unit 207 and host computer or other equipment carry out data interaction.
Consider from flow principle, since the present invention is applied on portable equipment, required control flow is typically not greater than
200ml/min compares the principle of the filter circuit in electronic circuit, is realized using the combination of vapour lock and small size gas chamber to gas
Filtering and buffering (in electronic circuit, when need filter signal code very little when, can by increase filter resistance, to reach
To the purpose for reducing filter capacitor), experiments verify that, in small flow (actual measurement about within 500ml/min), using small gas chamber and
The combining form of vapour lock can achieve the effect that 2.5L air accumulator is used in experiment.
The above is only the preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-described embodiment,
All technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
For those of ordinary skill, several improvements and modifications without departing from the principles of the present invention should be regarded as protection of the invention
Range.
Claims (6)
1. a kind of delicate flow controller for portable equipment, which is characterized in that including air inlet (1), proportional control valve
(3), control assembly (6), gas outlet (10), flow sensor (5), gas circuit structure module (2) and installation pedestal (7), it is described into
For connect with high-pressure air source, the gas circuit structure module (2) is connected to a small buffer gas chamber (8) and small-sized delays port (1)
Plenum chamber (8) is set to gas circuit structure module (2) inside, and the installation pedestal (7) is equipped with porous filter (9)；Gas pass through into
Port (1) enters, and enters small buffer gas chamber (8) afterwards by porous filter (9), the output of the small buffer gas chamber (8)
End feeds gas into proportional control valve (3), is exported after the control and regulation of proportional control valve (3) by gas outlet (10), the ratio
Example control valve (3), flow sensor (5), control assembly (6) realize the accurate control of output flow jointly.
2. the delicate flow controller according to claim 1 for portable equipment, which is characterized in that be additionally provided with built-in
Temperature sensor (4), the built-in temperature sensor (4) directly contact the real-time compensation for realizing gas temperature with gas.
3. the delicate flow controller according to claim 2 for portable equipment, which is characterized in that the built-in temperature
The installation site of sensor (4) is the place near flow sensor (5) and is sealed in gas circuit using sealing element.
4. the delicate flow controller according to claim 1 or 2 or 3 for portable equipment, which is characterized in that described more
It is used to carry out the filter hole of gas filtration and air damping on hole filter (9) with several.
5. the delicate flow controller according to claim 1 or 2 or 3 for portable equipment, which is characterized in that the peace
It fills and is equipped with sealing element in the position contacted with porous filter (9) and small buffer gas chamber (8) on pedestal (7).
6. the delicate flow controller according to claim 1 or 2 or 3 for portable equipment, which is characterized in that described small
Type buffer air chamber (8) is set to the inside of gas circuit structure module (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410431169.2A CN104216424B (en) | 2014-08-29 | 2014-08-29 | Delicate flow controller for portable equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410431169.2A CN104216424B (en) | 2014-08-29 | 2014-08-29 | Delicate flow controller for portable equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104216424A CN104216424A (en) | 2014-12-17 |
| CN104216424B true CN104216424B (en) | 2019-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410431169.2A Expired - Fee Related CN104216424B (en) | 2014-08-29 | 2014-08-29 | Delicate flow controller for portable equipment |
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| Country | Link |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104914221A (en) * | 2015-06-29 | 2015-09-16 | 中冶南方工程技术有限公司 | Gas sensor sealing device with gas buffer function |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1272186A (en) * | 1998-05-29 | 2000-11-01 | 株式会社富士金 | Gas supply equipment with pressure type flow rate control device |
| WO2004001516A1 (en) * | 2002-06-24 | 2003-12-31 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
| CN1716138A (en) * | 2004-07-01 | 2006-01-04 | 波克股份有限公司 | Fluid flow control device and system |
| CN101858832A (en) * | 2009-04-13 | 2010-10-13 | 武汉市碧海云天环保科技有限责任公司 | Intelligent constant-flow individual air dust sampler and constant-flow control method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353564A (en) * | 2011-06-16 | 2012-02-15 | 深圳国技仪器有限公司 | Individual sampler |
-
2014
- 2014-08-29 CN CN201410431169.2A patent/CN104216424B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1272186A (en) * | 1998-05-29 | 2000-11-01 | 株式会社富士金 | Gas supply equipment with pressure type flow rate control device |
| WO2004001516A1 (en) * | 2002-06-24 | 2003-12-31 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
| CN1716138A (en) * | 2004-07-01 | 2006-01-04 | 波克股份有限公司 | Fluid flow control device and system |
| JP2006059322A (en) * | 2004-07-01 | 2006-03-02 | Boc Group Inc:The | Fluid flow control device and system |
| CN101858832A (en) * | 2009-04-13 | 2010-10-13 | 武汉市碧海云天环保科技有限责任公司 | Intelligent constant-flow individual air dust sampler and constant-flow control method |
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| Publication number | Publication date |
|---|---|
| CN104216424A (en) | 2014-12-17 |
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Granted publication date: 20190409 |