CN112461458A - Helium concentration detection control device for helium mass spectrometer leak detection test system - Google Patents
Helium concentration detection control device for helium mass spectrometer leak detection test system Download PDFInfo
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- CN112461458A CN112461458A CN202011000820.2A CN202011000820A CN112461458A CN 112461458 A CN112461458 A CN 112461458A CN 202011000820 A CN202011000820 A CN 202011000820A CN 112461458 A CN112461458 A CN 112461458A
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- Prior art keywords
- helium
- control
- helium concentration
- mass spectrometer
- detection
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- 239000001307 helium Substances 0.000 title claims abstract description 147
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 147
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 147
- 238000001514 detection method Methods 0.000 title claims abstract description 74
- 238000012360 testing method Methods 0.000 title claims abstract description 22
- 238000005070 sampling Methods 0.000 claims abstract description 16
- 230000000087 stabilizing effect Effects 0.000 claims abstract description 9
- 238000011084 recovery Methods 0.000 claims abstract description 6
- 238000004321 preservation Methods 0.000 claims description 17
- 238000005485 electric heating Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 abstract description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- UDWPONKAYSRBTJ-UHFFFAOYSA-N [He].[N] Chemical compound [He].[N] UDWPONKAYSRBTJ-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000001819 mass spectrum Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Abstract
The invention belongs to the field of helium mass spectrometer leak detection test equipment, and particularly discloses a helium concentration detection control device for a helium mass spectrometer leak detection test system, which comprises a detection box, wherein a helium concentration detection controller is arranged in the middle of the detection box, a mixed helium sampling valve, a pressure stabilizing control valve, a micro-flow control valve, a helium concentration sensor, a data output module, an air inlet port, an air outlet port, a data display, a signal amplifier, a data processor, a control contact, a control signal output port and a power supply device are integrated in the helium concentration detection controller, and the helium concentration sensor comprises a constant temperature control structure and a sensor body. The invention can be installed in a helium gas distribution recovery device of a helium mass spectrometer leak detection test system, can be used in other systems needing to detect the helium concentration, automatically controls the helium concentration of the system in real time, has high accuracy in measuring the helium concentration value, controls the helium gas distribution proportion of the system to be accurate, and effectively controls the helium loss of the system.
Description
Technical Field
The invention relates to the field of helium mass spectrometer leak detection test equipment, in particular to a helium concentration detection control device for a helium mass spectrometer leak detection test system.
Background
Helium concentration is a commonly used term in helium mass spectrum leak detection, and a helium mass spectrum leak detection test system is a special device necessary for detecting the tightness in the production process of automobile parts and refrigeration parts. The working principle is that tested parts are put into a vacuum system, helium or helium-nitrogen mixed gas is filled into the parts, and the tightness of the parts is detected. When the tightness of the tested part has defects, the filled helium or helium-nitrogen mixed gas leaks to a vacuum system, and a helium mass spectrometer leak detector connected with the vacuum system detects the amount of the leaked helium, so that the tightness of the part is detected.
Helium is a noble gas which is expensive because helium is required in the process of helium mass spectrometer leak detection test. Therefore, helium mass spectrometer leak detection test systems generally need to be provided with a helium proportional gas distribution and recovery device for use. In order to ensure the accuracy of helium mass spectrometer leak detection test data, measuring and controlling the concentration of helium becomes a necessary means.
At present, most helium concentration measuring devices configured in the existing helium mass spectrometer leak detection test system adopt a heat conduction type helium concentration measuring instrument, the sensitivity of a sensor is low, the flow rate of helium in a pipeline needs to reach 5-6 (L/min) during measurement, the usage amount of helium is large, and a helium gas distribution ratio control function is lacked.
Disclosure of Invention
The invention aims to provide a helium concentration detection control device for a helium mass spectrometer leak detection test system, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the helium concentration detection control device for the helium mass spectrometer leak detection test system comprises a detection box, wherein the top of the detection box is provided with a mounting groove for placing a helium recovery bottle, a plurality of power distribution cabinets are arranged in the detection box, a helium concentration detection controller is arranged in the middle of the detection box, and the outer side surface of the detection box is provided with an operation panel; the helium concentration detection controller is internally integrated with a mixed helium sampling valve, a pressure stabilizing control valve, a micro-flow control valve, a helium concentration sensor, a data output module, an air inlet port, an air outlet port, a data display, a signal amplifier, a data processor, a control contact, a control signal output port and a power supply device, and the power supply device supplies power to all electrical components in the helium concentration detection controller; the helium concentration sensor comprises a constant temperature control structure and a sensor body.
Preferably, the input end of the mixed helium sampling valve is connected with the air inlet port, the output end of the mixed helium sampling valve is connected with the helium concentration sensor, the pressure stabilizing control valve and the micro-flow control valve are sequentially installed on a pipeline between the mixed helium sampling valve and the helium concentration sensor, and the output end of the helium concentration sensor is connected with the air outlet port.
Preferably, the signal output end of the helium concentration sensor is connected to the data output module, the signal output end of the data output module is connected to the data processor, the data processor is respectively connected with the data display, the control contact and the control signal output port, and the data processor amplifies the processed data through the signal amplifier and then sends the amplified data to the data display.
Preferably, a display screen is arranged on the control panel, and the output end of the data display is connected with the display screen.
Preferably, the sensor body comprises a Wheatstone power-on bridge consisting of two micro-current thermocouple wires and two standard resistors, the constant temperature control structure comprises a heat preservation shell and a constant temperature controller which are wrapped outside the sensor body, the heat preservation shell comprises a heat preservation layer with a double-layer structure and an electric heating pipe arranged between the two heat preservation layers, the constant temperature controller is connected with the control end of the electric heating pipe, and the constant temperature controller is controlled by a control panel.
Preferably, the helium concentration detection control instrument is connected with an upper computer through a control contact and a control signal output port and is used for remote control.
Compared with the prior art, the invention has the beneficial effects that:
the invention can be installed in a helium gas distribution recovery device of a helium mass spectrometer leak detection test system, can be used in other systems needing to detect helium concentration, is applied to automatic measurement of helium concentration of helium-nitrogen mixed gas and automatic control of gas distribution proportion, and can control a helium input valve and a nitrogen input valve switch of a gas distribution pipeline by measuring the helium concentration value, thereby realizing automatic real-time measurement of the system helium concentration by a mixed helium concentration instrument required by a control system, automatic real-time control of the system helium concentration, high accuracy of measuring the helium concentration value, accurate control of the system helium gas distribution proportion and effective control of system helium loss.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the helium concentration detection controller according to the present invention;
fig. 3 is a schematic view of the detailed structure of the helium concentration sensor of the present invention.
In the figure: 1. a detection box; 2. mounting grooves; 3. a power distribution cabinet; 4. a helium concentration detection control instrument; 5. a control panel; 6. a mixed helium sampling valve; 7. a pressure stabilizing control valve; 8. a micro flow control valve; 9. a helium concentration sensor; 10. a data output module; 11. an air inlet port; 12. an exhaust port; 13. a data display; 14. a signal amplifier; 15. a data processor; 16. a control contact and a control signal output port; 17. a power supply device; 18. a sensor body; 19. a heat-insulating layer; 20. an electric heating tube.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Referring to fig. 1-3, the present invention provides a technical solution: a helium concentration detection control device for a helium mass spectrometer leak detection test system comprises a detection box 1, wherein the top of the detection box 1 is provided with a mounting groove 2 for placing a helium recovery bottle, a plurality of power distribution cabinets 3 are arranged in the detection box 1, a helium concentration detection control instrument 4 is arranged in the middle of the detection box 1, and the outer side surface of the detection box is provided with an operation panel 5; a mixed helium sampling valve 6, a pressure stabilizing control valve 7, a micro-flow control valve 8, a helium concentration sensor 9, a data output module 10, an air inlet port 11, an air outlet port 12, a data display 13, a signal amplifier 14, a data processor 15, a control contact, a control signal output port 16 and a power supply device 17 are integrated in the helium concentration detection controller 4, and the power supply device 17 supplies power to all electrical components in the helium concentration detection controller 4; the helium concentration sensor 9 includes a thermostatic control structure and a sensor body 18.
Further, the input end of the mixed helium sampling valve 6 is connected with the air inlet port 11, the output end of the mixed helium sampling valve is connected with the helium concentration sensor 9, the pressure stabilizing control valve 7 and the micro-flow control valve 8 are sequentially installed on a pipeline between the mixed helium sampling valve 6 and the helium concentration sensor 9, and the output end of the helium concentration sensor 9 is connected with the exhaust port 12.
Further, a signal output end of the helium concentration sensor 9 is connected to the data output module 10, a signal output end of the data output module 10 is connected to the data processor 15, the data processor 15 is respectively connected to the data display 13, the control contact and the control signal output port 16, and the data processor 15 amplifies the processed data by the signal amplifier 14 and then sends the amplified data to the data display 13.
Further, a display screen is arranged on the control panel 5, and an output end of the data display 13 is connected with the display screen.
Further, the sensor body 18 comprises a Wheatstone power-on bridge consisting of two micro-current thermocouple wires and two standard resistors, the constant temperature control structure comprises a heat preservation shell and a constant temperature controller which are wrapped outside the sensor body 18, the heat preservation shell comprises a heat preservation layer 19 of a double-layer structure and an electric heating pipe 20 arranged between the two heat preservation layers 19, the constant temperature controller is connected with a control end of the electric heating pipe 20, and the constant temperature controller is controlled by the control panel 5.
Further, the helium concentration detection controller 4 is connected with an upper computer through a control contact and a control signal output port 16, and is used for remote control.
The working principle is as follows: helium and nitrogen mixed gas with different proportions flows through a pipeline provided with a helium concentration sensor 9 through an air inlet port 11, a mixed helium sampling valve 6, a pressure stabilizing control valve 7 and a micro-flow control valve 8 are sequentially arranged on the pipeline between the air inlet port 11 and the helium concentration sensor 9, the three form a mixed helium micro-sampler, the sample injection amount of helium is effectively controlled, micro-flow helium is injected, the helium sampling amount of the sensor is reduced, and the sample emission of excessive helium is prevented from influencing the background environment helium background value of helium mass spectrum leak detection.
Helium enters the helium concentration sensor 9, the sensor body 18 is composed of two micro-current thermocouple wires and a Wheatstone power-on bridge composed of two standard resistors, and under the action of constant current, the thermocouple will cause the change of the resistance value of the thermocouple due to different temperature characteristics of helium and nitrogen mixed gas in different proportions, so that different potential differences are generated at two ends of the thermocouple. Measuring this potential difference by the data processor 15 allows the helium concentration values of the various proportions of the helium nitrogen gas mixture flowing through the pipeline to be determined. The data processor 15 is used for measuring the helium concentration value, and the helium input valve and the nitrogen input valve of the gas distribution pipeline can be controlled to be opened and closed, so that the mixed helium concentration required by a control system is realized.
The constant temperature control structure of the helium concentration sensor 9 comprises a heat preservation shell and a constant temperature controller, wherein the heat preservation shell and the constant temperature controller are coated outside a sensor body 18, the heat preservation shell is composed of a heat preservation layer 19 with a double-layer structure and an electric heating pipe 20 arranged between the two heat preservation layers 19, the constant temperature controller is connected with the control end of the electric heating pipe 20, the constant temperature controller is controlled by a control panel 5, during detection, the helium sensitivity of the sensor body 18 is high, and the flow rate of sampled helium only needs 5-10 (ml/min); the constant temperature control structure controls the sensor body 18 to work under the constant temperature condition, so that the induction signal drift is reduced, the distortion of the induction signal caused by the change of the ambient temperature of the sensor body 18 is reduced, and the accurate helium concentration measurement is ensured.
The data output module 10, the data display 13, the signal amplifier 14, the data processor 15, the control contact and the control signal output port 16 form a helium concentration display controller of the helium concentration detection control device, micro signals can be amplified with high precision, real-time data processing, real-time numerical value display and real-time feedback control of helium concentration are achieved, and remote detection control is achieved through an upper computer.
It is worth noting that: whole device realizes controlling it through controlling panel 5 and host computer, because the equipment that control button matches is equipment commonly used, belongs to current mature technology, no longer gives unnecessary details its electric connection relation and specific circuit structure here.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The helium concentration detection control device for the helium mass spectrometer leak detection test system comprises a detection box (1), and is characterized in that the top of the detection box (1) is provided with a mounting groove (2) for placing a helium recovery bottle, a plurality of power distribution cabinets (3) are arranged in the detection box, a helium concentration detection control instrument (4) is mounted in the middle of the detection box (1), and the outer side surface of the detection box is provided with an operation panel (5); the helium concentration detection controller (4) is internally and integrally provided with a mixed helium sampling valve (6), a pressure stabilizing control valve (7), a micro-flow control valve (8), a helium concentration sensor (9), a data output module (10), an air inlet port (11), an air outlet port (12), a data display (13), a signal amplifier (14), a data processor (15), a control contact and control signal output port (16) and a power supply device (17), and the power supply device (17) supplies power for all electrical components in the helium concentration detection controller (4); the helium concentration sensor (9) comprises a thermostatic control structure and a sensor body (18).
2. The helium concentration detection control device for the helium mass spectrometer leak detection test system as claimed in claim 1, wherein: the input end of the mixed helium sampling valve (6) is connected with the air inlet port (11), the output end of the mixed helium sampling valve is connected with the helium concentration sensor (9), the pressure stabilizing control valve (7) and the micro-flow control valve (8) are sequentially installed on a pipeline between the mixed helium sampling valve (6) and the helium concentration sensor (9), and the output end of the helium concentration sensor (9) is connected with the air outlet port (12).
3. The helium concentration detection control device for the helium mass spectrometer leak detection test system as claimed in claim 1, wherein: the signal output end of the helium concentration sensor (9) is connected to the data output module (10), the signal output end of the data output module (10) is connected to the data processor (15), the data processor (15) is respectively connected with the data display (13), the control contact and the control signal output port (16), and the data processor (15) amplifies the processed data through the signal amplifier (14) and then sends the amplified data to the data display (13).
4. The helium concentration detection control device for the helium mass spectrometer leak detection test system as claimed in claim 1, wherein: the control panel (5) is provided with a display screen, and the output end of the data display (13) is connected with the display screen.
5. The helium concentration detection control device for the helium mass spectrometer leak detection test system as claimed in claim 1, wherein: the sensor body (18) comprises two microcurrent thermocouple wires and a Wheatstone power-on bridge consisting of two standard resistors, the constant temperature control structure comprises a heat preservation shell and a constant temperature controller which are wrapped outside the sensor body (18), the heat preservation shell comprises a double-layer structure heat preservation layer (19) and an electric heating pipe (20) arranged between the two heat preservation layers (19), the constant temperature controller is connected with the control end of the electric heating pipe (20), and the constant temperature controller is controlled by a control panel (5).
6. The helium concentration detection control device for the helium mass spectrometer leak detection test system as claimed in claim 1, wherein: and the helium concentration detection control instrument (4) is connected with an upper computer through a control contact and a control signal output port (16) and is used for remote control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011000820.2A CN112461458A (en) | 2020-09-22 | 2020-09-22 | Helium concentration detection control device for helium mass spectrometer leak detection test system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011000820.2A CN112461458A (en) | 2020-09-22 | 2020-09-22 | Helium concentration detection control device for helium mass spectrometer leak detection test system |
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| Publication Number | Publication Date |
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| CN112461458A true CN112461458A (en) | 2021-03-09 |
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| CN202011000820.2A Pending CN112461458A (en) | 2020-09-22 | 2020-09-22 | Helium concentration detection control device for helium mass spectrometer leak detection test system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114115083A (en) * | 2022-01-26 | 2022-03-01 | 南通西屋智能科技有限公司 | Automatic control method and system for improving helium gas recovery quality |
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2020
- 2020-09-22 CN CN202011000820.2A patent/CN112461458A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114115083A (en) * | 2022-01-26 | 2022-03-01 | 南通西屋智能科技有限公司 | Automatic control method and system for improving helium gas recovery quality |
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