DE69938368D1 - Durchflussregeleinrichtung mit Umschaltung in Abhängigkeit vom Fluid - Google Patents

Durchflussregeleinrichtung mit Umschaltung in Abhängigkeit vom Fluid

Info

Publication number
DE69938368D1
DE69938368D1 DE69938368T DE69938368T DE69938368D1 DE 69938368 D1 DE69938368 D1 DE 69938368D1 DE 69938368 T DE69938368 T DE 69938368T DE 69938368 T DE69938368 T DE 69938368T DE 69938368 D1 DE69938368 D1 DE 69938368D1
Authority
DE
Germany
Prior art keywords
flow rate
fluid
signal
control
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69938368T
Other languages
English (en)
Other versions
DE69938368T2 (de
Inventor
Tadahiro Ohmi
Satoshi Kagatsume
Jun Hirose
Kouji Nishino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69938368D1 publication Critical patent/DE69938368D1/de
Publication of DE69938368T2 publication Critical patent/DE69938368T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Magnetically Actuated Valves (AREA)
  • Feedback Control In General (AREA)
  • External Artificial Organs (AREA)
  • Paper (AREA)
  • Measuring Volume Flow (AREA)
DE69938368T 1998-08-24 1999-08-09 Durchflussregeleinrichtung mit Umschaltung in Abhängigkeit vom Fluid Expired - Fee Related DE69938368T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23665698A JP3522544B2 (ja) 1998-08-24 1998-08-24 流体可変型流量制御装置
JP23665698 1998-08-24

Publications (2)

Publication Number Publication Date
DE69938368D1 true DE69938368D1 (de) 2008-04-24
DE69938368T2 DE69938368T2 (de) 2009-03-05

Family

ID=17003853

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69938368T Expired - Fee Related DE69938368T2 (de) 1998-08-24 1999-08-09 Durchflussregeleinrichtung mit Umschaltung in Abhängigkeit vom Fluid
DE69927932T Expired - Fee Related DE69927932T2 (de) 1998-08-24 1999-08-09 Flexibler durchflussregler

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69927932T Expired - Fee Related DE69927932T2 (de) 1998-08-24 1999-08-09 Flexibler durchflussregler

Country Status (9)

Country Link
US (1) US6314992B1 (de)
EP (2) EP1026566B1 (de)
JP (1) JP3522544B2 (de)
KR (1) KR100329977B1 (de)
CN (1) CN1225680C (de)
AT (2) ATE389202T1 (de)
DE (2) DE69938368T2 (de)
TW (1) TW455751B (de)
WO (1) WO2000011532A1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
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EP2028577A2 (de) * 1999-04-16 2009-02-25 Fujikin Incorporated Flüssigkeitszufuhrvorrichtung mit Parallelbypass sowie Verfahren und Vorrichtung zur Steuerung der dafür verwendeten variablen Durchsatzrate des Flüssigkeitsdrucksystems
US6581623B1 (en) * 1999-07-16 2003-06-24 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
JP2002143751A (ja) * 2000-10-17 2002-05-21 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude 処理液分配装置及び方法
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
AU2002307547A1 (en) * 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
CN100403198C (zh) * 2001-05-24 2008-07-16 迅捷公司 流体流量控制器和定比率控制流体流量的方法和装置
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
JP4195819B2 (ja) * 2003-01-17 2008-12-17 忠弘 大見 弗化水素ガスの流量制御方法及びこれに用いる弗化水素ガス用流量制御装置
JP2004363456A (ja) * 2003-06-06 2004-12-24 Toshiba Corp 半導体装置の製造方法および製造装置
US7051757B2 (en) * 2003-06-13 2006-05-30 Mcmillan Company Flow system with high resolution proportional valve with customizable performance
JP2005089209A (ja) * 2003-09-12 2005-04-07 Nippon Oil Corp 改質器および燃料電池システム
US7740024B2 (en) * 2004-02-12 2010-06-22 Entegris, Inc. System and method for flow monitoring and control
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
JP4572139B2 (ja) * 2005-05-23 2010-10-27 株式会社フジキン 改良型圧力式流量制御装置
US9921089B2 (en) 2005-06-27 2018-03-20 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
JP4856905B2 (ja) * 2005-06-27 2012-01-18 国立大学法人東北大学 流量レンジ可変型流量制御装置
US9383758B2 (en) 2005-06-27 2016-07-05 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
JP4690827B2 (ja) 2005-08-26 2011-06-01 株式会社フジキン ガスケット型オリフィス及びこれを用いた圧力式流量制御装置
JP4866682B2 (ja) 2005-09-01 2012-02-01 株式会社フジキン 圧力センサを保有する流量制御装置を用いた流体供給系の異常検出方法
JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
US7603186B2 (en) * 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
JP4820698B2 (ja) 2006-07-03 2011-11-24 株式会社フジキン 圧力式流量制御装置の絞り機構下流側バルブの作動異常検出方法
US7640078B2 (en) * 2006-07-05 2009-12-29 Advanced Energy Industries, Inc. Multi-mode control algorithm
JP2008039513A (ja) 2006-08-03 2008-02-21 Hitachi Metals Ltd 質量流量制御装置の流量制御補正方法
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
JP5216632B2 (ja) * 2009-03-03 2013-06-19 東京エレクトロン株式会社 流体制御装置
CN102640070B (zh) * 2009-12-01 2015-04-22 株式会社富士金 压力式流量控制装置
WO2012153454A1 (ja) 2011-05-10 2012-11-15 株式会社フジキン 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法
JP5755958B2 (ja) 2011-07-08 2015-07-29 株式会社フジキン 半導体製造装置の原料ガス供給装置
JP5647083B2 (ja) 2011-09-06 2014-12-24 株式会社フジキン 原料濃度検出機構を備えた原料気化供給装置
JP5665793B2 (ja) * 2012-04-26 2015-02-04 株式会社フジキン 可変オリフィス型圧力制御式流量制御器
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5797246B2 (ja) * 2013-10-28 2015-10-21 株式会社フジキン 流量計及びそれを備えた流量制御装置
JP6516666B2 (ja) * 2015-04-08 2019-05-22 東京エレクトロン株式会社 ガス供給制御方法
JP6799862B2 (ja) * 2015-10-28 2020-12-16 株式会社フジキン 流量信号補正方法およびこれを用いた流量制御装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP6929098B2 (ja) 2017-03-30 2021-09-01 株式会社キッツエスシーティー メタルダイヤフラムバルブ
JP7208634B2 (ja) * 2017-07-31 2023-01-19 株式会社フジキン 流体制御システムおよび流量測定方法
US11105512B2 (en) 2018-03-30 2021-08-31 Midea Group Co., Ltd Method and system for controlling a flow curve of an electromechanical gas valve
US11262069B2 (en) 2020-06-25 2022-03-01 Midea Group Co., Ltd. Method and system for auto-adjusting an active range of a gas cooking appliance

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749525Y2 (ja) * 1985-04-17 1995-11-13 株式会社エステック 質量流量自動制御装置
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JP2837112B2 (ja) * 1995-06-09 1998-12-14 株式会社平井 音速ノズルを用いた質量流量制御方法および装置
JP3291161B2 (ja) * 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
JP3580645B2 (ja) * 1996-08-12 2004-10-27 忠弘 大見 圧力式流量制御装置
JPH11119835A (ja) * 1997-10-13 1999-04-30 Horiba Ltd マスフローコントローラおよび集積化流量制御装置
JPH11212653A (ja) * 1998-01-21 1999-08-06 Fujikin Inc 流体供給装置

Also Published As

Publication number Publication date
JP2000066732A (ja) 2000-03-03
EP1026566B1 (de) 2005-10-26
EP1564615B1 (de) 2008-03-12
CN1275217A (zh) 2000-11-29
ATE389202T1 (de) 2008-03-15
DE69927932T2 (de) 2006-07-27
EP1026566A4 (de) 2004-03-17
DE69927932D1 (de) 2005-12-01
DE69938368T2 (de) 2009-03-05
KR100329977B1 (ko) 2002-05-09
US6314992B1 (en) 2001-11-13
CN1225680C (zh) 2005-11-02
JP3522544B2 (ja) 2004-04-26
TW455751B (en) 2001-09-21
ATE308074T1 (de) 2005-11-15
EP1026566A1 (de) 2000-08-09
WO2000011532A1 (fr) 2000-03-02
EP1564615A1 (de) 2005-08-17
KR20010031388A (ko) 2001-04-16

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: OHMI, TADAHIRO, SENDAI-SHI, MIYAGI, JP

Inventor name: KAGATSUME, SATOSHI, FUJIICHO NIRASAKI-SHI, YAM, JP

Inventor name: HIROSE, JUN, FUJIICHO NIRASAKI-SHI, YAMANASHI, JP

Inventor name: NISHINO, KOUJI, OSAKA-SHI, JP

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee