ATE308074T1 - Flexibler durchflussregler - Google Patents
Flexibler durchflussreglerInfo
- Publication number
- ATE308074T1 ATE308074T1 AT99935121T AT99935121T ATE308074T1 AT E308074 T1 ATE308074 T1 AT E308074T1 AT 99935121 T AT99935121 T AT 99935121T AT 99935121 T AT99935121 T AT 99935121T AT E308074 T1 ATE308074 T1 AT E308074T1
- Authority
- AT
- Austria
- Prior art keywords
- flow rate
- signal
- fluid
- control
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Magnetically Actuated Valves (AREA)
- Feedback Control In General (AREA)
- External Artificial Organs (AREA)
- Paper (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23665698A JP3522544B2 (ja) | 1998-08-24 | 1998-08-24 | 流体可変型流量制御装置 |
PCT/JP1999/004311 WO2000011532A1 (fr) | 1998-08-24 | 1999-08-09 | Organe de commande de debit polyvalent |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE308074T1 true ATE308074T1 (de) | 2005-11-15 |
Family
ID=17003853
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT99935121T ATE308074T1 (de) | 1998-08-24 | 1999-08-09 | Flexibler durchflussregler |
AT05076130T ATE389202T1 (de) | 1998-08-24 | 1999-08-09 | Durchflussregeleinrichtung mit umschaltung in abhängigkeit vom fluid |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05076130T ATE389202T1 (de) | 1998-08-24 | 1999-08-09 | Durchflussregeleinrichtung mit umschaltung in abhängigkeit vom fluid |
Country Status (9)
Country | Link |
---|---|
US (1) | US6314992B1 (de) |
EP (2) | EP1564615B1 (de) |
JP (1) | JP3522544B2 (de) |
KR (1) | KR100329977B1 (de) |
CN (1) | CN1225680C (de) |
AT (2) | ATE308074T1 (de) |
DE (2) | DE69927932T2 (de) |
TW (1) | TW455751B (de) |
WO (1) | WO2000011532A1 (de) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1096351A4 (de) * | 1999-04-16 | 2004-12-15 | Fujikin Kk | Parallel angeordnete flüssigkeitsspeisevorrichtung von einem bypass-type und verfahren und vorrichtung zur regelung der durchflussmenge eines drucksystems mit variablem flüssigkeitsdruck, welche in der flüssigleitsspeisevorrichtung verwendet werden |
US6581623B1 (en) * | 1999-07-16 | 2003-06-24 | Advanced Technology Materials, Inc. | Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels |
JP2002143751A (ja) * | 2000-10-17 | 2002-05-21 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude | 処理液分配装置及び方法 |
JP4487135B2 (ja) * | 2001-03-05 | 2010-06-23 | 東京エレクトロン株式会社 | 流体制御装置 |
KR20040024854A (ko) | 2001-04-24 | 2004-03-22 | 셀레리티 그룹 아이엔씨 | 질량유량 제어장치를 위한 시스템 및 방법 |
KR20040019293A (ko) * | 2001-05-24 | 2004-03-05 | 셀레리티 그룹 아이엔씨 | 소정 비율의 프로세스 유체를 제공하는 방법 및 장치 |
US7073392B2 (en) * | 2002-07-19 | 2006-07-11 | Celerity, Inc. | Methods and apparatus for pressure compensation in a mass flow controller |
JP4195819B2 (ja) * | 2003-01-17 | 2008-12-17 | 忠弘 大見 | 弗化水素ガスの流量制御方法及びこれに用いる弗化水素ガス用流量制御装置 |
JP2004363456A (ja) * | 2003-06-06 | 2004-12-24 | Toshiba Corp | 半導体装置の製造方法および製造装置 |
US7051757B2 (en) * | 2003-06-13 | 2006-05-30 | Mcmillan Company | Flow system with high resolution proportional valve with customizable performance |
JP2005089209A (ja) * | 2003-09-12 | 2005-04-07 | Nippon Oil Corp | 改質器および燃料電池システム |
US6973375B2 (en) * | 2004-02-12 | 2005-12-06 | Mykrolis Corporation | System and method for flow monitoring and control |
US7740024B2 (en) * | 2004-02-12 | 2010-06-22 | Entegris, Inc. | System and method for flow monitoring and control |
US7216019B2 (en) * | 2004-07-08 | 2007-05-08 | Celerity, Inc. | Method and system for a mass flow controller with reduced pressure sensitivity |
JP4572139B2 (ja) * | 2005-05-23 | 2010-10-27 | 株式会社フジキン | 改良型圧力式流量制御装置 |
US9383758B2 (en) | 2005-06-27 | 2016-07-05 | Fujikin Incorporated | Flow rate range variable type flow rate control apparatus |
US9921089B2 (en) | 2005-06-27 | 2018-03-20 | Fujikin Incorporated | Flow rate range variable type flow rate control apparatus |
JP4856905B2 (ja) | 2005-06-27 | 2012-01-18 | 国立大学法人東北大学 | 流量レンジ可変型流量制御装置 |
JP4690827B2 (ja) | 2005-08-26 | 2011-06-01 | 株式会社フジキン | ガスケット型オリフィス及びこれを用いた圧力式流量制御装置 |
JP4866682B2 (ja) | 2005-09-01 | 2012-02-01 | 株式会社フジキン | 圧力センサを保有する流量制御装置を用いた流体供給系の異常検出方法 |
JP4743763B2 (ja) * | 2006-01-18 | 2011-08-10 | 株式会社フジキン | 圧電素子駆動式金属ダイヤフラム型制御弁 |
US7603186B2 (en) * | 2006-04-28 | 2009-10-13 | Advanced Energy Industries, Inc. | Adaptive response time closed loop control algorithm |
JP4820698B2 (ja) | 2006-07-03 | 2011-11-24 | 株式会社フジキン | 圧力式流量制御装置の絞り機構下流側バルブの作動異常検出方法 |
US7640078B2 (en) * | 2006-07-05 | 2009-12-29 | Advanced Energy Industries, Inc. | Multi-mode control algorithm |
JP2008039513A (ja) | 2006-08-03 | 2008-02-21 | Hitachi Metals Ltd | 質量流量制御装置の流量制御補正方法 |
US7651263B2 (en) * | 2007-03-01 | 2010-01-26 | Advanced Energy Industries, Inc. | Method and apparatus for measuring the temperature of a gas in a mass flow controller |
US7905139B2 (en) * | 2008-08-25 | 2011-03-15 | Brooks Instrument, Llc | Mass flow controller with improved dynamic |
JP5216632B2 (ja) * | 2009-03-03 | 2013-06-19 | 東京エレクトロン株式会社 | 流体制御装置 |
JP5395193B2 (ja) * | 2009-12-01 | 2014-01-22 | 株式会社フジキン | 圧力式流量制御装置 |
WO2012153454A1 (ja) | 2011-05-10 | 2012-11-15 | 株式会社フジキン | 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法 |
JP5755958B2 (ja) | 2011-07-08 | 2015-07-29 | 株式会社フジキン | 半導体製造装置の原料ガス供給装置 |
JP5647083B2 (ja) | 2011-09-06 | 2014-12-24 | 株式会社フジキン | 原料濃度検出機構を備えた原料気化供給装置 |
JP5665793B2 (ja) * | 2012-04-26 | 2015-02-04 | 株式会社フジキン | 可変オリフィス型圧力制御式流量制御器 |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
JP5797246B2 (ja) * | 2013-10-28 | 2015-10-21 | 株式会社フジキン | 流量計及びそれを備えた流量制御装置 |
JP6516666B2 (ja) * | 2015-04-08 | 2019-05-22 | 東京エレクトロン株式会社 | ガス供給制御方法 |
WO2017073038A1 (ja) * | 2015-10-28 | 2017-05-04 | 株式会社フジキン | 流量信号補正方法およびこれを用いた流量制御装置 |
US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
JP6929098B2 (ja) | 2017-03-30 | 2021-09-01 | 株式会社キッツエスシーティー | メタルダイヤフラムバルブ |
CN110892357A (zh) * | 2017-07-31 | 2020-03-17 | 株式会社富士金 | 流体控制系统以及流量测定方法 |
US11105512B2 (en) | 2018-03-30 | 2021-08-31 | Midea Group Co., Ltd | Method and system for controlling a flow curve of an electromechanical gas valve |
US11262069B2 (en) | 2020-06-25 | 2022-03-01 | Midea Group Co., Ltd. | Method and system for auto-adjusting an active range of a gas cooking appliance |
JP7553808B2 (ja) | 2021-01-14 | 2024-09-19 | 浜名湖電装株式会社 | 電磁弁 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0749525Y2 (ja) * | 1985-04-17 | 1995-11-13 | 株式会社エステック | 質量流量自動制御装置 |
JPS63115970A (ja) * | 1986-10-31 | 1988-05-20 | Motoyama Seisakusho:Kk | ダイヤフラム弁 |
JP2837112B2 (ja) * | 1995-06-09 | 1998-12-14 | 株式会社平井 | 音速ノズルを用いた質量流量制御方法および装置 |
JP3291161B2 (ja) * | 1995-06-12 | 2002-06-10 | 株式会社フジキン | 圧力式流量制御装置 |
JP3580645B2 (ja) * | 1996-08-12 | 2004-10-27 | 忠弘 大見 | 圧力式流量制御装置 |
JPH11119835A (ja) * | 1997-10-13 | 1999-04-30 | Horiba Ltd | マスフローコントローラおよび集積化流量制御装置 |
JPH11212653A (ja) * | 1998-01-21 | 1999-08-06 | Fujikin Inc | 流体供給装置 |
-
1998
- 1998-08-24 JP JP23665698A patent/JP3522544B2/ja not_active Expired - Lifetime
-
1999
- 1999-08-09 US US09/530,022 patent/US6314992B1/en not_active Expired - Lifetime
- 1999-08-09 EP EP05076130A patent/EP1564615B1/de not_active Expired - Lifetime
- 1999-08-09 DE DE69927932T patent/DE69927932T2/de not_active Expired - Fee Related
- 1999-08-09 WO PCT/JP1999/004311 patent/WO2000011532A1/ja active IP Right Grant
- 1999-08-09 AT AT99935121T patent/ATE308074T1/de not_active IP Right Cessation
- 1999-08-09 AT AT05076130T patent/ATE389202T1/de not_active IP Right Cessation
- 1999-08-09 CN CNB998014168A patent/CN1225680C/zh not_active Expired - Lifetime
- 1999-08-09 EP EP99935121A patent/EP1026566B1/de not_active Expired - Lifetime
- 1999-08-09 DE DE69938368T patent/DE69938368T2/de not_active Expired - Fee Related
- 1999-08-09 KR KR1020007004402A patent/KR100329977B1/ko not_active IP Right Cessation
- 1999-08-12 TW TW088113823A patent/TW455751B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20010031388A (ko) | 2001-04-16 |
CN1275217A (zh) | 2000-11-29 |
TW455751B (en) | 2001-09-21 |
EP1564615A1 (de) | 2005-08-17 |
DE69927932D1 (de) | 2005-12-01 |
DE69938368T2 (de) | 2009-03-05 |
JP3522544B2 (ja) | 2004-04-26 |
CN1225680C (zh) | 2005-11-02 |
JP2000066732A (ja) | 2000-03-03 |
DE69938368D1 (de) | 2008-04-24 |
EP1026566B1 (de) | 2005-10-26 |
WO2000011532A1 (fr) | 2000-03-02 |
ATE389202T1 (de) | 2008-03-15 |
EP1026566A4 (de) | 2004-03-17 |
US6314992B1 (en) | 2001-11-13 |
EP1564615B1 (de) | 2008-03-12 |
EP1026566A1 (de) | 2000-08-09 |
KR100329977B1 (ko) | 2002-05-09 |
DE69927932T2 (de) | 2006-07-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |