KR970074964A - 오존함유수용 스테인리스 강재 및 그 제조방법 - Google Patents

오존함유수용 스테인리스 강재 및 그 제조방법 Download PDF

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KR970074964A
KR970074964A KR1019970021297A KR19970021297A KR970074964A KR 970074964 A KR970074964 A KR 970074964A KR 1019970021297 A KR1019970021297 A KR 1019970021297A KR 19970021297 A KR19970021297 A KR 19970021297A KR 970074964 A KR970074964 A KR 970074964A
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stainless steel
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키요코 다케다
시게키 아즈마
요시오 다루타니
요시다카 니시야마
야스시 마쯔다
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고지마 마타오
스미토모긴조쿠고오교오 가부시키가이샤
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    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
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    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C—CHEMISTRY; METALLURGY
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    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D6/00—Heat treatment of ferrous alloys
    • C21D6/004—Heat treatment of ferrous alloys containing Cr and Ni
    • C—CHEMISTRY; METALLURGY
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    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/004—Very low carbon steels, i.e. having a carbon content of less than 0,01%
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    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/34—Ferrous alloys, e.g. steel alloys containing chromium with more than 1.5% by weight of silicon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
    • C22C38/42—Ferrous alloys, e.g. steel alloys containing chromium with nickel with copper
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/76—Adjusting the composition of the atmosphere
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D6/00—Heat treatment of ferrous alloys
    • C21D6/002—Heat treatment of ferrous alloys containing Cr

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Abstract

본 발명은, 반도체 제조공정 등에 이용되는 오존을 함유하는 초순수등의 오존함유수에 대한 내식성이 우수한 스테인리스 강재 및 그 제조방법을 제공하는 것을 목적으로 하고 있다.
본 발명의 스테인리스 강재는, Cr : 12∼30%, Ni 0∼35%, Al과 Si를 합쳐서 1∼6% 함유하며, 이들 합금원소 이외의 원소함유율을 가능한 한 낮게 제한한 스테인리스강의 모재 표면에, Al산화물 및 Si산화물 가운데에서 적어도 한쪽을 주체로 하는 산화물 피막을 갖추고 있는 것을 특징으로 하고 있다.
본 발명의 스테인리스 강재를 제조하는 경우의 모재 표면에 산화물 피막을 형성시키는 방법은, 고온산화법과 습식 산화법의 어느 하나에 의하면 좋다. 본 발명의 스테인리스 강재 및 본 발명의 제조방법에 의해 얻어지는 스테인리스 강재는, 오존함유수 속으로 모재의 금속이온의 용출이 거의 발생하지 않는다. 또 Cr, Ni, Al, Si등 필요한 원소 이외의 합금원소가 낮게 제한되어 있으므로, 스테인리스 강재로서의 내식성이 뛰어날 뿐만아니라, 강재에서의 미립자 발생(발진)도 적다고 하는 특징을 가지고 있다.

Description

오존함유수용 스테인리스 강재 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (11)

  1. 오존함유수용 스테인리스 강재에 있어서, 화학조성이 중량%로, Cr : 12∼30%, Ni : 0∼35%, Al＋Si : 1∼6%, Mo : 0∼3%, B＋La＋Ce : 0∼0.01%, Cu : 0.1%이하, Nb＋Ti＋Zr : 0.1%이하, C : 0.03%이하, Mn : 0.2%이하, P : 0.03%이하, S : 0.01%이하, N : 0.05%이하, O : 0.01% 이하, 잔부(殘部) : Fe 및 불가피한 불순물;로 구성되는 모재의 표면에, Al산화물 및 Si산화물 가운데 적어도 한쪽을 주체로 하는 산화물 피막을 구비하는 오존함유수용 스테인리스 강재.
  2. 제1항에 있어서, 모재의 Ni함유율이 중량%로 Ni : 0∼5%인 것을 특징으로 하는 오존함유수용 스테인리스 강재.
  3. 제1항에 있어서, 모재의 Cr, Ni 및 Si 함유율이 중량%로 Cr : 12∼25%, Ni : 14∼35%, Si : 0.2%이하이며, 산화물 피막이 Al산화물인 것을 특징으로 하는 오존함유수용 스테인리스 강재.
  4. 제1항에 있어서, 표면의 최대조도(Rmax)가 3㎛ 미만인 것을 특징으로 하는 오존함유수용 스테인리스 강재.
  5. 제1항에 있어서, 산화물 피막의 두께가 5㎚ 이상 500㎚ 이하인 것을 특징으로 하는 오존 함유수용 스테인리스 강재.
  6. 제1항에 있어서, Al산화물이 Al₂O₃인 것을 특징으로 하는 오존함유수용 스테인리스 강재.
  7. 제1항에 있어서, 모재의 Ni함유율이 중량%로 Ni : 0∼5%, 표면의 최대조도(Rmax)가 3㎛ 미만, 산화물 피막의 두께가 5㎚ 이상 500㎚ 이하인 것을 특징으로 하는 오존함유수용 스테인리스강재.
  8. 제1항에 있어서, 모재의 Cr, Ni 및 Si 함유율이 중량%로 Cr : 12∼25%, Ni : 14∼35%, Si : 0.2% 이하이며, 표면의 최대조도 (Rmax)가 3㎛ 미만, 산화물피막의 두께가 5㎚ 이상 500㎚ 이하, 산화물피막이 Al산화물인 것을 특징으로 하는 오존함유수용 스테인리스강재.
  9. 오존함유수용 스테인리스 강재의 제조방법에 있어서, 화학조성이 중량%로 Cr : 12∼30%, Ni 0∼35%, Al＋Si를 합쳐서 1∼6%, Mo : 0∼3%, B＋La＋Ce : 0∼0.01%, Cu : 0.1%이하, Nb＋Ti＋Zr : 0.1%이하, C : 0.03%이하, Mn : 0.2%이하, P : 0.03%이하, S : 0.01%이하, N : 0.05%이하, O : 0.01% 이하, 잔부 : Fe 및 불가피한 불순물; 로 구성되는 모재를, 산소가스 및 수증기를 합친 가스의 분압이 10-11MP이하의 약산화성(弱酸化性) 분위기하에서, 600℃ 이상 1200℃ 이하로 가열함으로서, 모재의 표면에, Al산화물 및 Si산화물 가운데에서 적어도 한쪽을 주체로하는 산화물 피막을 형성시키는 것을 특징으로 하는 오존함유수용 스테인리스강재의 제조방법.
  10. 제9항에 나타난 화학조성으로 구성된 모재를, 중량%로 농도5% 이상 50% 이하인 초산 수용액에 상기 모재를 침지하므로서, 모재의 표면에 Al산화물 및 Si산화물 가운데에서 적어도 한쪽을 주체로 하는 산화물 피막을 형성시키는 것을 특징으로 하는 오존함유수용 스테인리스 강재의 제조방법.
  11. 제9항에 나타난 화학조성으로 구성된 모재를, pH가 1이하인 용액 속에서 상기 모재를 약극전해함으로서, 모재의 표면에 Al산화물 및 Si산화물 가운데에서 적어도 한쪽을 주체로 하는 산화물 피막을 형성시키는 것을 특징으로 하는 오존함유수용 스테인리스 강재의 제조방법.
    ※참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970021297A 1996-05-29 1997-05-28 오존함유수용 스테인리스 강재 및 그 제조방법 KR100227571B1 (ko)

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US5944917A (en) 1999-08-31
EP1281783A1 (en) 2003-02-05
EP1281783B9 (en) 2005-07-27
EP0810295A1 (en) 1997-12-03
KR100227571B1 (ko) 1999-11-01
DE69731788T2 (de) 2005-12-08
EP1281783B1 (en) 2005-01-26
DE69732386D1 (de) 2005-03-03
EP0810295B1 (en) 2004-12-01
DE69732386T2 (de) 2005-12-22

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