KR960703230A - 고정밀 부품 얼라인먼트 센서 시스템(a high precision component alignment sensor system) - Google Patents

고정밀 부품 얼라인먼트 센서 시스템(a high precision component alignment sensor system)

Info

Publication number
KR960703230A
KR960703230A KR1019960700137A KR19960700137A KR960703230A KR 960703230 A KR960703230 A KR 960703230A KR 1019960700137 A KR1019960700137 A KR 1019960700137A KR 19960700137 A KR19960700137 A KR 19960700137A KR 960703230 A KR960703230 A KR 960703230A
Authority
KR
South Korea
Prior art keywords
component
sensor system
shadow
laser
placement machine
Prior art date
Application number
KR1019960700137A
Other languages
English (en)
Other versions
KR0185693B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR960703230A publication Critical patent/KR960703230A/ko
Application granted granted Critical
Publication of KR0185693B1 publication Critical patent/KR0185693B1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/342—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells the sensed object being the obturating part
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0812—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Operations Research (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Inspection Of Paper Currency And Valuable Securities (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Supply And Installment Of Electrical Components (AREA)
KR1019960700137A 1991-02-22 1992-02-21 고정밀 부품 얼라이먼트 센서 시스템 KR0185693B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US659,983 1991-02-22
US07/659,983 US5278634A (en) 1991-02-22 1991-02-22 High precision component alignment sensor system
PCT/US1992/001123 WO1992014988A1 (en) 1991-02-22 1992-02-21 A high precision component alignment sensor system

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1019930702497A Division KR0185688B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템

Publications (2)

Publication Number Publication Date
KR960703230A true KR960703230A (ko) 1996-06-19
KR0185693B1 KR0185693B1 (ko) 1999-05-15

Family

ID=24647636

Family Applications (7)

Application Number Title Priority Date Filing Date
KR1019960700137A KR0185693B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라이먼트 센서 시스템
KR1019960700133A KR0185689B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700138A KR0185694B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019930702497A KR0185688B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700136A KR0185692B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700134A KR0185690B1 (ko) 1991-02-22 1996-01-11 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700135A KR0185691B1 (ko) 1991-02-22 1996-01-11 고정밀 부품 얼라인먼트 센서 시스템

Family Applications After (6)

Application Number Title Priority Date Filing Date
KR1019960700133A KR0185689B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700138A KR0185694B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019930702497A KR0185688B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700136A KR0185692B1 (ko) 1991-02-22 1992-02-21 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700134A KR0185690B1 (ko) 1991-02-22 1996-01-11 고정밀 부품 얼라인먼트 센서 시스템
KR1019960700135A KR0185691B1 (ko) 1991-02-22 1996-01-11 고정밀 부품 얼라인먼트 센서 시스템

Country Status (11)

Country Link
US (2) US5278634A (ko)
EP (1) EP0572555B1 (ko)
JP (1) JP2995707B2 (ko)
KR (7) KR0185693B1 (ko)
AT (1) ATE161626T1 (ko)
DE (1) DE69223770T2 (ko)
DK (1) DK0572555T3 (ko)
ES (1) ES2113426T3 (ko)
GR (1) GR3026481T3 (ko)
TW (1) TW217483B (ko)
WO (1) WO1992014988A1 (ko)

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ES2113426T3 (es) 1998-05-01
EP0572555B1 (en) 1997-12-29
KR0185693B1 (ko) 1999-05-15
JPH06504847A (ja) 1994-06-02
KR960703231A (ko) 1996-06-19
KR0185694B1 (ko) 1999-05-15
KR0185691B1 (ko) 1999-05-15
KR0185690B1 (ko) 1999-05-15
DE69223770D1 (de) 1998-02-05
US5278634A (en) 1994-01-11
KR0185689B1 (ko) 1999-05-15
WO1992014988A1 (en) 1992-09-03
EP0572555A4 (ko) 1994-03-23
DE69223770T2 (de) 1998-07-16
GR3026481T3 (en) 1998-06-30
KR0185692B1 (ko) 1999-05-15
ATE161626T1 (de) 1998-01-15
DK0572555T3 (da) 1998-08-31
USRE38025E1 (en) 2003-03-11
KR960703227A (ko) 1996-06-19
KR0185688B1 (ko) 1999-05-15
EP0572555A1 (en) 1993-12-08
KR960703226A (ko) 1996-06-19
JP2995707B2 (ja) 1999-12-27
KR960703229A (ko) 1996-06-19
KR960703228A (ko) 1996-06-19
TW217483B (ko) 1993-12-11
KR930703586A (ko) 1993-11-30

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