KR960703228A - 고정밀 부품 얼라인먼트 센서 시스템(a high precision component alignment sensor system) - Google Patents
고정밀 부품 얼라인먼트 센서 시스템(a high precision component alignment sensor system) Download PDFInfo
- Publication number
- KR960703228A KR960703228A KR1019960700135A KR19960700135A KR960703228A KR 960703228 A KR960703228 A KR 960703228A KR 1019960700135 A KR1019960700135 A KR 1019960700135A KR 19960700135 A KR19960700135 A KR 19960700135A KR 960703228 A KR960703228 A KR 960703228A
- Authority
- KR
- South Korea
- Prior art keywords
- quill
- light
- placement machine
- sensor system
- alignment sensor
- Prior art date
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- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/342—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells the sensed object being the obturating part
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0812—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Geophysics And Detection Of Objects (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Inspection Of Paper Currency And Valuable Securities (AREA)
- Automatic Control Of Machine Tools (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
표면 장착 부품 배치 기계와 관련하여 사용하는 레이저 얼라인먼트 센서 시스템이 기술되어 있다. 이 시스템은 조준 렌즈를 통과한 다음, CCD 센서 어레이를 스트라이크하기 위해 얼라인되는 부품을 통과하여 집속되는 조준된 광의 스트라이프를 생성하는 애퍼추어를 통과하는 광으로 구성된다. 부품의 빈과 회로 기판 사이에서 부품을 전송하는 동안, 부품은 회전되고, 센서 어레이 상에 떨어지는 섀도우는 모니터된다. 섀도우의 최소폭이 검출되면, 보정 각 방위는 결정되고, 퀼의 중심과 비교된 섀도우의 중간 연부는 퀼 상의 부품의 좌표위치를 결정한다. 2개의 얼라인먼트는 통상 90°만큼 변위된다. 센서는 보정 신호를 배치 기계에 송신하여, 부품의 각 방위 및 X, Y 위치가 회로 기판 상에 정확하게 배치될 수 있게 한다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 배열을 도시한 평면도이다, 제1도에서는 부품 배치 기계에 의해 회로 기판 또는 작업편상에 배치될 부품을 내장하는 부품 빈이 도시되어 있다, 또한, 제1도에는 퀼에 의해 부품 빈과 작업편 사이의 가장 짧은 루트로 운반될 부품이 도시되어 있다,
제2도는 부품을 회전시키는 회전 모터, 배치 헤드 제어 박스 및 레이저 얼라인먼트 센서를 포함하는 부품 운반 메카니즘을 더욱 상세하게 도시한 정면도이다,
제3도는 광빔 또는 스트라이프가 부품의 양단을 통과하여 리니어 어레이 영상센서를 부딪히게 하는 조준 렌즈 및 레이저 다이오드를 포함하는 본 발명의 기본 소자들을 설명하는 도면이다, 얼라인먼트시에, 부품은 레이저 빔내로 유입되어 측정 기간동안 회전된다,
제4도는 본 발명의 양호한 실시예를 도시한 평면도이다, 제4도에 도시된 바와 같이, 리이저 빔은 한쌍의 반사 미러에 조사되어 조준 렌즈를 통하고 부품을 통과하여 광학 필터를 통해 리니어 CCD어레이 상으로 향한다,
제5도는 제4도의 라인5-5를 따라 절취하여 도시된 레이저 센서의 측단면도이다, 제5도는 레이저와 조준 렌즈 사이의 광학 경로가 폴드되어 한쌍의 폴딩 미러를 경유하여 더 작은 패키지 내로 삽입하는 방법을 설명한다.
Claims (1)
- 각각의 소자가 픽셀을 포함하는 다중 소자 광 검출기 어레이와 광원 사이에 삽입된 퀼을 갖고 있는 표면 장착 부품 배치 기계에 의해 운반된 부품의 적절한 수평위치와 각 방위를 결정하는 방법에 있어서, 부품쪽으로 향해진 조준된 광의 스트라이프를 제공하는 단계; 픽업시 최대 에러의 2배만큼 부품이 회전될 때 최소 섀도우가 검출기 상에 드리워질 수 있도록 조준된 광의 스트라이프에 관련하여 부품을 초기에 배향하는 단계; 퀼과 부품을 수직축 주위로 회전시키는 단계; 회전 동안에 주기적으로 어레이의 픽셀을 판독하는 단계; 및 부품의 수평 위치와 각 방위를 결정하기 위해 어레이 판독값을 프로세싱하는 단계를 포함하는 것을 특징으로 하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/659,983 US5278634A (en) | 1991-02-22 | 1991-02-22 | High precision component alignment sensor system |
US659,983 | 1991-02-22 | ||
PCT/US1992/001123 WO1992014988A1 (en) | 1991-02-22 | 1992-02-21 | A high precision component alignment sensor system |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930702497A Division KR0185688B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960703228A true KR960703228A (ko) | 1996-06-19 |
KR0185691B1 KR0185691B1 (ko) | 1999-05-15 |
Family
ID=24647636
Family Applications (7)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930702497A KR0185688B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700133A KR0185689B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700138A KR0185694B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700137A KR0185693B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라이먼트 센서 시스템 |
KR1019960700136A KR0185692B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700135A KR0185691B1 (ko) | 1991-02-22 | 1996-01-11 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700134A KR0185690B1 (ko) | 1991-02-22 | 1996-01-11 | 고정밀 부품 얼라인먼트 센서 시스템 |
Family Applications Before (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930702497A KR0185688B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700133A KR0185689B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700138A KR0185694B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
KR1019960700137A KR0185693B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라이먼트 센서 시스템 |
KR1019960700136A KR0185692B1 (ko) | 1991-02-22 | 1992-02-21 | 고정밀 부품 얼라인먼트 센서 시스템 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960700134A KR0185690B1 (ko) | 1991-02-22 | 1996-01-11 | 고정밀 부품 얼라인먼트 센서 시스템 |
Country Status (11)
Country | Link |
---|---|
US (2) | US5278634A (ko) |
EP (1) | EP0572555B1 (ko) |
JP (1) | JP2995707B2 (ko) |
KR (7) | KR0185688B1 (ko) |
AT (1) | ATE161626T1 (ko) |
DE (1) | DE69223770T2 (ko) |
DK (1) | DK0572555T3 (ko) |
ES (1) | ES2113426T3 (ko) |
GR (1) | GR3026481T3 (ko) |
TW (1) | TW217483B (ko) |
WO (1) | WO1992014988A1 (ko) |
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- 1992-02-21 KR KR1019930702497A patent/KR0185688B1/ko not_active IP Right Cessation
- 1992-02-21 KR KR1019960700133A patent/KR0185689B1/ko not_active IP Right Cessation
- 1992-02-21 ES ES92907810T patent/ES2113426T3/es not_active Expired - Lifetime
- 1992-02-21 EP EP92907810A patent/EP0572555B1/en not_active Expired - Lifetime
- 1992-02-21 KR KR1019960700138A patent/KR0185694B1/ko not_active IP Right Cessation
- 1992-02-21 DK DK92907810T patent/DK0572555T3/da active
- 1992-02-21 WO PCT/US1992/001123 patent/WO1992014988A1/en active IP Right Grant
- 1992-02-21 DE DE69223770T patent/DE69223770T2/de not_active Expired - Lifetime
- 1992-02-21 JP JP4507292A patent/JP2995707B2/ja not_active Expired - Fee Related
- 1992-02-21 KR KR1019960700137A patent/KR0185693B1/ko not_active IP Right Cessation
- 1992-02-21 KR KR1019960700136A patent/KR0185692B1/ko not_active IP Right Cessation
- 1992-06-29 TW TW081105119A patent/TW217483B/zh not_active IP Right Cessation
-
1995
- 1995-11-13 US US08/556,028 patent/USRE38025E1/en not_active Expired - Lifetime
-
1996
- 1996-01-11 KR KR1019960700135A patent/KR0185691B1/ko not_active IP Right Cessation
- 1996-01-11 KR KR1019960700134A patent/KR0185690B1/ko not_active IP Right Cessation
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1998
- 1998-03-30 GR GR980400667T patent/GR3026481T3/el unknown
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KR960703231A (ko) | 1996-06-19 |
ATE161626T1 (de) | 1998-01-15 |
KR0185693B1 (ko) | 1999-05-15 |
US5278634A (en) | 1994-01-11 |
KR0185691B1 (ko) | 1999-05-15 |
KR960703229A (ko) | 1996-06-19 |
KR0185694B1 (ko) | 1999-05-15 |
KR0185692B1 (ko) | 1999-05-15 |
USRE38025E1 (en) | 2003-03-11 |
KR0185690B1 (ko) | 1999-05-15 |
TW217483B (ko) | 1993-12-11 |
DK0572555T3 (da) | 1998-08-31 |
KR0185689B1 (ko) | 1999-05-15 |
DE69223770D1 (de) | 1998-02-05 |
KR0185688B1 (ko) | 1999-05-15 |
EP0572555B1 (en) | 1997-12-29 |
KR930703586A (ko) | 1993-11-30 |
DE69223770T2 (de) | 1998-07-16 |
GR3026481T3 (en) | 1998-06-30 |
KR960703226A (ko) | 1996-06-19 |
WO1992014988A1 (en) | 1992-09-03 |
KR960703230A (ko) | 1996-06-19 |
JP2995707B2 (ja) | 1999-12-27 |
EP0572555A1 (en) | 1993-12-08 |
ES2113426T3 (es) | 1998-05-01 |
JPH06504847A (ja) | 1994-06-02 |
KR960703227A (ko) | 1996-06-19 |
EP0572555A4 (ko) | 1994-03-23 |
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