KR960037293A - 액체 분사 기록 헤드 및 그의 제조 방법 - Google Patents

액체 분사 기록 헤드 및 그의 제조 방법 Download PDF

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KR960037293A
KR960037293A KR1019960012103A KR19960012103A KR960037293A KR 960037293 A KR960037293 A KR 960037293A KR 1019960012103 A KR1019960012103 A KR 1019960012103A KR 19960012103 A KR19960012103 A KR 19960012103A KR 960037293 A KR960037293 A KR 960037293A
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South Korea
Prior art keywords
recording head
jet recording
liquid jet
head according
epoxy compound
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KR1019960012103A
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English (en)
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KR100197041B1 (ko
Inventor
노리오 오꾸마
마사시 미야가와
히로아끼 도시마
Original Assignee
미따라이 후지오
캐논 가부시끼가이샤
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Publication of KR960037293A publication Critical patent/KR960037293A/ko
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Publication of KR100197041B1 publication Critical patent/KR100197041B1/ko

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • B41J2/1634Manufacturing processes machining laser machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating

Abstract

본 발명의 액체 분사 기록 헤드는(1) 경화가능한 에폭시 화합물, (2) 경화가능한 에폭시 화합물에 대해 반응성인 관능기 및 플루오로카르본 잔기를 갖는 화합물, 및 (3) 경화제로 이루어진 수지 조성물의 경화물로부터 형성시킨 구성 부재로 이루어진다.

Description

액체 분사 기록 헤드 및 그의 제조 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도 내지 제9도는 본 발명의 액체 분사 기록 헤드의 제조 방법을 예시하는 도면.

Claims (15)

  1. (1)경화가능한 에폭시 화합물, (2) 경화가능한 에폭시 화합물에 대해 반응성인 관능기 및 플루오로카르본 잔기를 갖는 화합물, 및 (3) 경화제로 이루어진 수지 조성물의 경화물로부터 형성시킨 구성 부재로 이루어지는 액체 분사 기록 헤드.
  2. 제1항에 있어서, 상기 경화제가 양이온계 중합 개시제이고, 상기 수지 조성물이 양이온 중합에 의해 경화되는 것인 액체 분사 기록 헤드.
  3. 제1항에 있어서, 상기 경화가능한 에폭시 화합물에 대해 반응성인 관능기 및 플루오로카르본 잔기를 갖는 화합물이 수지 조성물 중에 1중량% 내지 50중량%의 양으로 함유되는 것인 액체 분사 기록 헤드.
  4. 제1항에 있어서, 상기 경화가능한 에폭시 화합물에 대해 반응성인 관능기 및 플루오로카르본 잔기를 갖는 화합물이 불소를 20중량% 내지 80중량%의 양으로 함유하는 것인 액체 분사 기록 헤드.
  5. 제1항에 있어서, 상기 경화가능한 에폭시 화합물에 대해 반응성인 관능기가 히드록실기인 것인 액체 분사 기록 헤드.
  6. 제5항에 있어서, 상기 경화가능한 에폭시 화합물에 대해 반응성인 관능기 및 플루오로카르본 잔기를 갖는 화합물이 다음 일반식(1)로 표시되는 것인 액체 분사기록 헤드.
    HO-CH2-(CF2)n-CH2-OH (1)
    상기 식 중, n은 1 내지 20의 정수이다.
  7. 제5항에 있어서, 상기 경화가능한 에폭시 화합물에 대해 반응성인 관능기 및 플루오로카르본 잔기를 갖는 화합물이 다음 일반식(2)로 표시되는 것인 액체 분사기록 헤드.
  8. 제1항에 있어서, 상기 경화가능한 에폭시 화합물이 방향족 에폭시 화합물로부터 선택되는 것인 액체 분사 기록 헤드.
  9. 제1항에 있어서, 상기 경화가능한 에폭시 화합물이 지환식 에폭시 화합물로부터 선택되는 것인 액체 분사 기록 헤드.
  10. 제1항에 있어서, 상기 경화가능한 에폭시 화합물이 그의 분자 구조 중에 옥시시클로헥산 골격을 갖는 에폭시 화합물로부터 선택되는 것인 액체 분사 기록 헤드.
  11. (Ⅰ) 잉크 토출 압력 발생 소자가 형성된 기판 상에 용해가능한 수지로부터 잉크 유로 패턴을 형성하는 단계, (Ⅱ) 상기 용해 가능한 수지층 상에 피막 수지층을 형성하는 단계, 및 (Ⅲ) 용해가능한 수지층을 용출에 의해 제거하는 단계로 이루어지며, 여기서 피막 수지층은 (1) 경화가능한 에폭시 화합물, (2) 경화가능한 에폭시 화합물에 대해 반응성인 관능기 및 플루오로카르본 잔기를 갖는 화합물, 및 (3) 경화제로 이루어진 수지조성물의 경화물로부터 형성시키는 것인 액체 분사 기록 헤드의 제조 방법.
  12. 제11항에 있어서, 피막 수지층을 통하여 토출구를 형성하는 단계를 더 포함하는 것인 액체 분사 기록 헤드의 제조 방법.
  13. 제12항에 있어서, 상기 피막 수지층이 감광성 수지로부터 형성되고, 토출구는 포토리소그래피에 의해 형성되는 것인 액체 분사 기록 헤드의 제조 방법.
  14. 제12항에 있어서, 상기 토출구가 산소 플라즈마 에칭에 의해 형성되는 것인 액체 분사 기록 헤드의 제조 방법.
  15. 제12항에 있어서, 상기 토출구가 엑시머 레이저 조사에 의해 형성되는 것인 액체 분사 기록 헤드의 제조 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960012103A 1995-04-21 1996-04-20 액체 분사 기록 헤드 및 그의 제조 방법 KR100197041B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-96737 1995-04-21
JP09673795A JP3368094B2 (ja) 1995-04-21 1995-04-21 インクジェット記録ヘッドの製造方法

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KR960037293A true KR960037293A (ko) 1996-11-19
KR100197041B1 KR100197041B1 (ko) 1999-06-15

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US (1) US7055938B1 (ko)
EP (1) EP0738603B1 (ko)
JP (1) JP3368094B2 (ko)
KR (1) KR100197041B1 (ko)
CN (1) CN1082449C (ko)
AT (1) ATE203711T1 (ko)
AU (1) AU724344B2 (ko)
CA (1) CA2174589C (ko)
DE (1) DE69614176T2 (ko)
ES (1) ES2158970T3 (ko)
MX (1) MX9601501A (ko)
SG (1) SG64375A1 (ko)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1072117C (zh) * 1997-10-21 2001-10-03 研能科技股份有限公司 喷墨头电阻层的制程
CN1080646C (zh) * 1997-10-21 2002-03-13 研能科技股份有限公司 形成喷墨头电阻层的方法
CN1073509C (zh) * 1997-10-21 2001-10-24 研能科技股份有限公司 打印机喷墨头的制造方法
JP4174124B2 (ja) * 1998-03-10 2008-10-29 キヤノン株式会社 含フッ素エポキシ樹脂組成物を用いた表面改質方法、インクジェット記録ヘッド、インクジェット記録装置
CN1073017C (zh) * 1998-04-14 2001-10-17 财团法人工业技术研究院 高密度喷墨印头装置及其制造方法
US6473966B1 (en) 1999-02-01 2002-11-05 Casio Computer Co., Ltd. Method of manufacturing ink-jet printer head
JP3554782B2 (ja) * 1999-02-01 2004-08-18 カシオ計算機株式会社 インクジェットプリンタヘッドの製造方法
JP2001089639A (ja) 1999-09-24 2001-04-03 Mitsubishi Heavy Ind Ltd エネルギー線硬化樹脂組成物
WO2005007411A1 (en) 2003-07-22 2005-01-27 Canon Kabushiki Kaisha Ink jet head and its manufacture method
KR100881245B1 (ko) * 2004-06-28 2009-02-05 캐논 가부시끼가이샤 양이온 광중합성 에폭시 수지 조성물, 이것을 사용한 미세구조체, 및 미세 구조체의 제조 방법
JP4498232B2 (ja) * 2004-06-28 2010-07-07 キヤノン株式会社 光カチオン重合性エポキシ樹脂組成物、並びに、これを用いた微細構造体の製造方法及びインクジェットヘッドの製造方法
DE602005015974D1 (de) * 2004-06-28 2009-09-24 Canon Kk Kopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsabgabekopf
TWI295632B (en) 2005-01-21 2008-04-11 Canon Kk Ink jet recording head, producing method therefor and composition for ink jet recording head
US7810904B2 (en) 2005-01-21 2010-10-12 Canon Kabushiki Kaisha Ink jet recording head, producing method therefor and composition for ink jet recording head
US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
US7607227B2 (en) * 2006-02-08 2009-10-27 Eastman Kodak Company Method of forming a printhead
KR102002280B1 (ko) * 2011-09-07 2019-10-01 마이크로켐 코포레이션 저 표면 에너지 기재 상에 릴리프 패턴을 제작하기 위한 에폭시 제형 및 방법
US11635688B2 (en) 2012-03-08 2023-04-25 Kayaku Advanced Materials, Inc. Photoimageable compositions and processes for fabrication of relief patterns on low surface energy substrates
JP2013188916A (ja) * 2012-03-13 2013-09-26 Canon Inc インクジェット記録ヘッドの製造方法
JP6964975B2 (ja) * 2016-01-08 2021-11-10 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
CN105667090A (zh) * 2016-03-03 2016-06-15 中国科学院苏州纳米技术与纳米仿生研究所 平整薄膜层喷孔结构及喷墨打印机
US10363740B2 (en) 2017-01-17 2019-07-30 Canon Kabushiki Kaisha Liquid ejection head and method for manufacturing the same
TW201924950A (zh) * 2017-11-27 2019-07-01 愛爾蘭商滿捷特科技公司 形成噴墨噴嘴腔室的方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3720639A (en) 1971-06-24 1973-03-13 Us Navy Fluorinated polyols
US3852222A (en) * 1973-06-25 1974-12-03 Us Navy Fluorinated epoxy resins
JPS57157765A (en) 1981-03-25 1982-09-29 Fujitsu Ltd Nozzle plate for ink jet print head
JPS57208256A (en) 1981-06-18 1982-12-21 Canon Inc Ink jet head
JPS57208255A (en) 1981-06-18 1982-12-21 Canon Inc Ink jet head
JPS60115622A (ja) 1983-11-29 1985-06-22 Toshiba Corp エポキシ樹脂系組成物
JPH0625194B2 (ja) 1984-01-30 1994-04-06 ダイセル化学工業株式会社 新規なエポキシ樹脂の製造方法
JPH0645242B2 (ja) 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
DE3670860D1 (de) 1985-12-23 1990-06-07 Standard Oil Co Ohio Fluor enthaltende beschichtungszusammensetzung auf der basis von epoxydharzen und fluorkohlenstoffharzen sowie verfahren zu ihrer herstellung.
IT1207998B (it) 1986-05-14 1989-06-01 Ausimont Spa Reticolazione di resine epossidiche mediante perfluoropolieteri polifunzionali.
JPH07119269B2 (ja) 1986-08-26 1995-12-20 ダイセル化学工業株式会社 エポキシ樹脂
JPH0725864B2 (ja) 1987-03-09 1995-03-22 ダイセル化学工業株式会社 エポキシ樹脂
JPH0822902B2 (ja) 1988-11-21 1996-03-06 ダイセル化学工業株式会社 エポキシ樹脂の製造方法
JP2787326B2 (ja) * 1989-03-03 1998-08-13 関西ペイント株式会社 硬化性組成物
JP3009049B2 (ja) 1989-03-24 2000-02-14 キヤノン株式会社 インクジェット記録ヘッド、インクジェット記録ヘッドの表面処理方法、及びインクジェット記録装置
JP2697937B2 (ja) 1989-12-15 1998-01-19 キヤノン株式会社 活性エネルギー線硬化性樹脂組成物
US5119116A (en) * 1990-07-31 1992-06-02 Xerox Corporation Thermal ink jet channel with non-wetting walls and a step structure
DE69127801T2 (de) 1990-12-19 1998-02-05 Canon Kk Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf
JPH05138882A (ja) * 1991-11-25 1993-06-08 Seiko Epson Corp インクジエツトヘツド
JP2960608B2 (ja) * 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法

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CN1082449C (zh) 2002-04-10
AU5080196A (en) 1996-10-31
EP0738603A2 (en) 1996-10-23
CA2174589C (en) 1999-12-07
AU724344B2 (en) 2000-09-21
DE69614176D1 (de) 2001-09-06
JPH08290572A (ja) 1996-11-05
EP0738603A3 (en) 1997-07-23
EP0738603B1 (en) 2001-08-01
SG64375A1 (en) 1999-04-27
KR100197041B1 (ko) 1999-06-15
DE69614176T2 (de) 2002-04-25
US7055938B1 (en) 2006-06-06
CA2174589A1 (en) 1996-10-22
CN1145855A (zh) 1997-03-26
MX9601501A (es) 1997-04-30
ES2158970T3 (es) 2001-09-16
ATE203711T1 (de) 2001-08-15
JP3368094B2 (ja) 2003-01-20

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