DE602005015974D1 - Kopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsabgabekopf - Google Patents

Kopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsabgabekopf

Info

Publication number
DE602005015974D1
DE602005015974D1 DE602005015974T DE602005015974T DE602005015974D1 DE 602005015974 D1 DE602005015974 D1 DE 602005015974D1 DE 602005015974 T DE602005015974 T DE 602005015974T DE 602005015974 T DE602005015974 T DE 602005015974T DE 602005015974 D1 DE602005015974 D1 DE 602005015974D1
Authority
DE
Germany
Prior art keywords
heads
head received
liquid chip
chip head
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005015974T
Other languages
English (en)
Inventor
Masahiko Kubota
Takumi Suzuki
Tamaki Sato
Ryoji Kanri
Maki Hatta
Kazuhiro Asai
Shoji Shiba
Etsuko Hino
Hiroe Ishikura
Akihiko Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602005015974D1 publication Critical patent/DE602005015974D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14475Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE602005015974T 2004-06-28 2005-06-27 Kopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsabgabekopf Active DE602005015974D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004190482 2004-06-28
PCT/JP2005/012266 WO2006001530A2 (en) 2004-06-28 2005-06-27 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method

Publications (1)

Publication Number Publication Date
DE602005015974D1 true DE602005015974D1 (de) 2009-09-24

Family

ID=35240915

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005015974T Active DE602005015974D1 (de) 2004-06-28 2005-06-27 Kopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsabgabekopf

Country Status (7)

Country Link
US (1) US7629111B2 (de)
EP (1) EP1768847B1 (de)
KR (1) KR100985348B1 (de)
CN (1) CN100496984C (de)
DE (1) DE602005015974D1 (de)
TW (1) TWI265100B (de)
WO (1) WO2006001530A2 (de)

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KR100865798B1 (ko) 2004-02-27 2008-10-28 캐논 가부시끼가이샤 압전 박막, 압전 박막의 제조방법, 압전 소자, 및 잉크제트 기록 헤드
EP1768848B1 (de) * 2004-06-28 2010-07-21 Canon Kabushiki Kaisha Verfahren zur herstellung eines flüssigkeitsausgabekopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsausgabekopf
JP4447974B2 (ja) 2004-06-28 2010-04-07 キヤノン株式会社 インクジェットヘッドの製造方法
JP4614383B2 (ja) * 2004-12-09 2011-01-19 キヤノン株式会社 インクジェット記録ヘッドの製造方法、及びインクジェット記録ヘッド
TWI295632B (en) * 2005-01-21 2008-04-11 Canon Kk Ink jet recording head, producing method therefor and composition for ink jet recording head
ATE485538T1 (de) * 2005-01-21 2010-11-15 Canon Kk Tintenstrahlaufzeichnungskopf, herstellungsverfahren dafür und zusammensetzung für tintenstrahlaufzeichnungskopf
US7431431B2 (en) * 2005-04-04 2008-10-07 Silverbrook Research Pty Ltd Self passivating transition metal nitride printhead heaters
JP2008023715A (ja) * 2006-07-18 2008-02-07 Canon Inc 液体吐出ヘッドおよびその製造方法
JP4981491B2 (ja) * 2007-03-15 2012-07-18 キヤノン株式会社 インクジェットヘッド製造方法及び貫通電極の製造方法
JP5043548B2 (ja) * 2007-07-27 2012-10-10 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP2009119650A (ja) * 2007-11-13 2009-06-04 Canon Inc インクジェットヘッドの製造方法
US20090136875A1 (en) * 2007-11-15 2009-05-28 Canon Kabushiki Kaisha Manufacturing method of liquid ejection head
JP2010131954A (ja) * 2007-12-19 2010-06-17 Canon Inc 液体吐出ヘッドの製造方法
US20090162797A1 (en) * 2007-12-19 2009-06-25 Canon Kabushiki Kaisha Method of manufacturing liquid ejection head
JP5159336B2 (ja) * 2008-01-25 2013-03-06 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
JP2009220286A (ja) * 2008-03-13 2009-10-01 Canon Inc 液体吐出記録ヘッド及その製造方法
JP5207945B2 (ja) * 2008-12-12 2013-06-12 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP4942218B2 (ja) * 2008-12-16 2012-05-30 キヤノン株式会社 液体吐出ヘッドの製造方法
JP4857354B2 (ja) * 2009-03-13 2012-01-18 キヤノン株式会社 液体吐出ヘッドの製造方法
US8409454B2 (en) * 2009-04-01 2013-04-02 Canon Kabushiki Kaisha Production process for structure and production process for liquid discharge head
JP5574802B2 (ja) * 2009-06-03 2014-08-20 キヤノン株式会社 構造体の製造方法
JP5606213B2 (ja) 2009-09-04 2014-10-15 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP5279686B2 (ja) * 2009-11-11 2013-09-04 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5578859B2 (ja) * 2010-01-14 2014-08-27 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
US8434229B2 (en) * 2010-11-24 2013-05-07 Canon Kabushiki Kaisha Liquid ejection head manufacturing method
JP6873836B2 (ja) 2017-06-19 2021-05-19 キヤノン株式会社 液体吐出ヘッドの製造方法

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JP2004042389A (ja) * 2002-07-10 2004-02-12 Canon Inc 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド
US7658469B2 (en) 2003-07-22 2010-02-09 Canon Kabushiki Kaisha Ink jet head and its manufacture method
WO2005007413A1 (en) 2003-07-22 2005-01-27 Canon Kabushiki Kaisha Ink jet head and its manufacture method
JP4537246B2 (ja) 2004-05-06 2010-09-01 キヤノン株式会社 インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法
EP1768848B1 (de) 2004-06-28 2010-07-21 Canon Kabushiki Kaisha Verfahren zur herstellung eines flüssigkeitsausgabekopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsausgabekopf
JP4459037B2 (ja) 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド
JP4614383B2 (ja) 2004-12-09 2011-01-19 キヤノン株式会社 インクジェット記録ヘッドの製造方法、及びインクジェット記録ヘッド
JP4667028B2 (ja) 2004-12-09 2011-04-06 キヤノン株式会社 構造体の形成方法及びインクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
US7629111B2 (en) 2009-12-08
TWI265100B (en) 2006-11-01
EP1768847A2 (de) 2007-04-04
WO2006001530A3 (en) 2006-02-23
CN100496984C (zh) 2009-06-10
WO2006001530A2 (en) 2006-01-05
CN1976811A (zh) 2007-06-06
KR100985348B1 (ko) 2010-10-04
TW200615156A (en) 2006-05-16
US20070099121A1 (en) 2007-05-03
KR20070030296A (ko) 2007-03-15
EP1768847B1 (de) 2009-08-12

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