DE60308340D1 - Komponentenanbringverfahren, komponentenanbringvorrichtung und ultraschall-bondierungskopf - Google Patents

Komponentenanbringverfahren, komponentenanbringvorrichtung und ultraschall-bondierungskopf

Info

Publication number
DE60308340D1
DE60308340D1 DE60308340T DE60308340T DE60308340D1 DE 60308340 D1 DE60308340 D1 DE 60308340D1 DE 60308340 T DE60308340 T DE 60308340T DE 60308340 T DE60308340 T DE 60308340T DE 60308340 D1 DE60308340 D1 DE 60308340D1
Authority
DE
Germany
Prior art keywords
component
attachment device
ultrasonic bonding
bonding head
attaching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60308340T
Other languages
English (en)
Other versions
DE60308340T2 (de
Inventor
Shozo Minamitani
Takaharu Mae
Yasuharu Ueno
Akira Yamada
Shinji Kanayama
Makoto Akita
Nobuhisa Watanabe
Akira Mori
Hiroyuki Naito
Shinya Marumo
Makoto Morikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002087596A external-priority patent/JP4056276B2/ja
Priority claimed from JP2002087595A external-priority patent/JP4093781B2/ja
Priority claimed from JP2002087594A external-priority patent/JP4109000B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60308340D1 publication Critical patent/DE60308340D1/de
Publication of DE60308340T2 publication Critical patent/DE60308340T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7525—Means for applying energy, e.g. heating means
    • H01L2224/75252—Means for applying energy, e.g. heating means in the upper part of the bonding apparatus, e.g. in the bonding head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7525—Means for applying energy, e.g. heating means
    • H01L2224/75264—Means for applying energy, e.g. heating means by induction heating, i.e. coils
    • H01L2224/75266—Means for applying energy, e.g. heating means by induction heating, i.e. coils in the upper part of the bonding apparatus, e.g. in the bonding head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7525—Means for applying energy, e.g. heating means
    • H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/75343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
    • H01L2224/75353—Ultrasonic horns
    • H01L2224/75355—Design, e.g. of the wave guide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757—Means for aligning
    • H01L2224/75743—Suction holding means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/812—Applying energy for connecting
    • H01L2224/81201—Compression bonding
    • H01L2224/81205—Ultrasonic bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/812—Applying energy for connecting
    • H01L2224/8121—Applying energy for connecting using a reflow oven
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/812—Applying energy for connecting
    • H01L2224/8122—Applying energy for connecting with energy being in the form of electromagnetic radiation
    • H01L2224/81222—Induction heating, i.e. eddy currents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/812—Applying energy for connecting
    • H01L2224/8122—Applying energy for connecting with energy being in the form of electromagnetic radiation
    • H01L2224/81224—Applying energy for connecting with energy being in the form of electromagnetic radiation using a laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818—Bonding techniques
    • H01L2224/81801—Soldering or alloying
    • H01L2224/81815—Reflow soldering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01047—Silver [Ag]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/014—Solder alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12042—LASER
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Wire Bonding (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
DE60308340T 2002-03-27 2003-03-27 Komponentenanbringverfahren, komponentenanbringvorrichtung und ultraschallbondierungskopf Expired - Lifetime DE60308340T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2002087594 2002-03-27
JP2002087596A JP4056276B2 (ja) 2002-03-27 2002-03-27 部品実装方法及び装置
JP2002087595A JP4093781B2 (ja) 2002-03-27 2002-03-27 超音波ヘッド
JP2002087596 2002-03-27
JP2002087595 2002-03-27
JP2002087594A JP4109000B2 (ja) 2002-03-27 2002-03-27 電子部品実装装置
PCT/JP2003/003906 WO2003081644A2 (en) 2002-03-27 2003-03-27 Electronic component mounting method and apparatus and ultrasondic bonding head

Publications (2)

Publication Number Publication Date
DE60308340D1 true DE60308340D1 (de) 2006-10-26
DE60308340T2 DE60308340T2 (de) 2007-01-11

Family

ID=28457587

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60308340T Expired - Lifetime DE60308340T2 (de) 2002-03-27 2003-03-27 Komponentenanbringverfahren, komponentenanbringvorrichtung und ultraschallbondierungskopf

Country Status (7)

Country Link
US (2) US7229854B2 (de)
EP (1) EP1488449B1 (de)
KR (2) KR100950619B1 (de)
CN (1) CN100377293C (de)
DE (1) DE60308340T2 (de)
TW (1) TWI230102B (de)
WO (1) WO2003081644A2 (de)

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US7591409B2 (en) * 2005-06-13 2009-09-22 Panasonic Corporation Semiconductor device bonding apparatus and method for bonding semiconductor device using the same
WO2008030262A1 (en) * 2005-12-29 2008-03-13 3M Innovative Properties Company Method for atomizing material for coating processes
JP4650309B2 (ja) * 2006-03-20 2011-03-16 株式会社デンソー 超音波接合方法および超音波接合装置
US7980444B2 (en) 2006-05-09 2011-07-19 Panasonic Corporation Electronic component mounting head, and apparatus and method for mounting electronic component
KR100861952B1 (ko) * 2007-04-02 2008-10-09 삼성전자주식회사 본딩장치
JP2008307710A (ja) * 2007-06-12 2008-12-25 Canon Inc インクジェット記録ヘッド、インクジェット記録ヘッドの製造方法およびインクジェット記録ヘッドの実装ツール
JP4399869B2 (ja) * 2007-07-30 2010-01-20 Ｔｄｋ株式会社 超音波振動を用いて実装部品を被実装部品に実装する実装装置
CN101635498B (zh) * 2008-07-22 2012-06-20 鸿富锦精密工业（深圳）有限公司 音圈马达组装治具
JP5296722B2 (ja) * 2009-03-02 2013-09-25 パナソニック株式会社 ボンディングツール、電子部品装着装置、および電子部品装着方法
JP5491081B2 (ja) * 2009-06-22 2014-05-14 株式会社アルテクス 超音波振動金属接合用共振器
KR101060429B1 (ko) 2009-11-05 2011-08-29 서울과학기술대학교 산학협력단 초음파 혼 및 이를 구비하는 플립칩 접합 장치
US20120006810A1 (en) * 2010-07-09 2012-01-12 GM Global Technology Operations LLC Induction heating-assisted vibration welding method and apparatus
US8561879B2 (en) * 2012-01-09 2013-10-22 Apple Inc. Hotbar device and methods for assembling electrical contacts to ensure co-planarity
DE102012111734A1 (de) * 2012-12-03 2014-06-05 Schunk Sonosystems Gmbh Ultraschallschweißvorrichtung sowie Verfahren zum Verschweißen von elektrischen Leitern
KR102073189B1 (ko) * 2013-04-04 2020-02-04 삼성에스디아이 주식회사 이차전지용 용접혼
CH708278A1 (de) * 2013-07-08 2015-01-15 Besi Switzerland Ag Vorrichtung zum Auftragen und Verteilen von Lot auf einem Substrat.
US9776270B2 (en) * 2013-10-01 2017-10-03 Globalfoundries Inc. Chip joining by induction heating
CN104923906B (zh) * 2015-07-05 2017-03-08 浙江正统钢业有限公司 一种用于金属薄片的超声波焊接装置及其焊接方法
DE102015120156B4 (de) * 2015-11-20 2019-07-04 Semikron Elektronik Gmbh & Co. Kg Vorrichtung zur materialschlüssigen Verbindung von Verbindungspartnern eines Leistungselekronik-Bauteils und Verwendung einer solchen Vorrichtung
DE102017220079A1 (de) * 2017-11-10 2019-05-16 Schunk Sonosystems Gmbh Ultraschall-Schweißeinrichtung
CN110666333A (zh) * 2018-07-03 2020-01-10 东莞矩华超声技术有限公司 超声波焊接机主轴系统
US11155042B2 (en) 2018-11-05 2021-10-26 GM Global Technology Operations LLC Hybrid ultrasonic staking for joining panels
EP3923692A4 (de) * 2019-02-05 2022-02-16 Fuji Corporation Montagebezogene vorrichtung und schienenvorrichtung
CN115707329A (zh) * 2021-06-14 2023-02-17 株式会社新川 超声波焊头及半导体装置的制造装置

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Also Published As

Publication number Publication date
KR20090032115A (ko) 2009-03-31
US7229854B2 (en) 2007-06-12
KR100934064B1 (ko) 2009-12-24
KR20040091152A (ko) 2004-10-27
EP1488449A2 (de) 2004-12-22
US20070187457A1 (en) 2007-08-16
WO2003081644A3 (en) 2004-04-15
CN1643652A (zh) 2005-07-20
DE60308340T2 (de) 2007-01-11
US20050227429A1 (en) 2005-10-13
KR100950619B1 (ko) 2010-04-01
TWI230102B (en) 2005-04-01
TW200305472A (en) 2003-11-01
US7861908B2 (en) 2011-01-04
CN100377293C (zh) 2008-03-26
EP1488449B1 (de) 2006-09-13
WO2003081644A2 (en) 2003-10-02

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