KR100861952B1 - 본딩장치 - Google Patents
본딩장치 Download PDFInfo
- Publication number
- KR100861952B1 KR100861952B1 KR1020070032513A KR20070032513A KR100861952B1 KR 100861952 B1 KR100861952 B1 KR 100861952B1 KR 1020070032513 A KR1020070032513 A KR 1020070032513A KR 20070032513 A KR20070032513 A KR 20070032513A KR 100861952 B1 KR100861952 B1 KR 100861952B1
- Authority
- KR
- South Korea
- Prior art keywords
- heat
- circuit board
- connecting means
- bonding
- heater
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/40—Details of apparatuses used for either manufacturing connectors or connecting the semiconductor or solid-state body
Abstract
Description
Claims (7)
- 경성회로기판 및 연성회로기판을 전기적으로 연결하는 접속수단을 열압착하는 본딩장치에 있어서,상기 접속수단을 압착하는 압착툴;상기 접속수단을 가열하기 위해 열을 제공하는 히터;초음파 진동을 발진하여 상기 히터의 열을 보완하고 상기 접속수단을 가열하는 초음파 진동자;상기 접속수단으로 제공되는 열과 초음파 진동이 지지되도록 하는 압착지지판 및상기 압착툴을 수용하는 실린더를 포함하는 본딩장치.
- 제 1 항에 있어서,상기 압착지지판에는 상기 접속수단이 탑재되는 것을 특징으로 하는 본딩장치.
- 제 1 항에 있어서,상기 압착지지판에는 소정의 온도를 제공하는 열제공수단이 포함되는 본딩장치.
- 제 1 항에 있어서.상기 압착지지판의 온도는 150도 이내 인 것을 특징으로 하는 본딩장치.
- 제 1 항에 있어서,상기 초음파에 의한 진동값은 20~60KHz 인 것을 특징으로 하는 본딩장치.
- 제 1 항에 있어서,상기 히터에 의한 온도는 200도 이내 인 것을 특징으로 하는 본딩장치.
- 제 1 항에 있어서,상기 실린더에 의한 압착범위는 5~35Kgf인 것을 특징으로 하는 본딩장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070032513A KR100861952B1 (ko) | 2007-04-02 | 2007-04-02 | 본딩장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070032513A KR100861952B1 (ko) | 2007-04-02 | 2007-04-02 | 본딩장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080089843A KR20080089843A (ko) | 2008-10-08 |
KR100861952B1 true KR100861952B1 (ko) | 2008-10-09 |
Family
ID=40151274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070032513A KR100861952B1 (ko) | 2007-04-02 | 2007-04-02 | 본딩장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100861952B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107904327A (zh) * | 2017-11-27 | 2018-04-13 | 东莞利奇文教用品有限公司 | 一种皮料超声波接片装置及工艺 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040091152A (ko) * | 2002-03-27 | 2004-10-27 | 마츠시타 덴끼 산교 가부시키가이샤 | 부품 실장 방법, 부품 실장 장치 및 초음파 접합 헤드 |
KR20060120407A (ko) * | 2005-05-20 | 2006-11-27 | 아스리트 에프에이 가부시키가이샤 | 전자부품의 접합장치 |
-
2007
- 2007-04-02 KR KR1020070032513A patent/KR100861952B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040091152A (ko) * | 2002-03-27 | 2004-10-27 | 마츠시타 덴끼 산교 가부시키가이샤 | 부품 실장 방법, 부품 실장 장치 및 초음파 접합 헤드 |
KR20060120407A (ko) * | 2005-05-20 | 2006-11-27 | 아스리트 에프에이 가부시키가이샤 | 전자부품의 접합장치 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107904327A (zh) * | 2017-11-27 | 2018-04-13 | 东莞利奇文教用品有限公司 | 一种皮料超声波接片装置及工艺 |
Also Published As
Publication number | Publication date |
---|---|
KR20080089843A (ko) | 2008-10-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW448331B (en) | Thermo-compressing bonding method and thermo-compressing bonding apparatus | |
US7857028B2 (en) | Mounting device for electrical component | |
JP2010034423A (ja) | 加圧加熱装置及び方法 | |
JP2006324702A (ja) | 電子部品圧着装置および電子部品圧着方法 | |
US8114243B2 (en) | Mounting method using thermocompression head | |
JP6234277B2 (ja) | 圧着ヘッド、それを用いた実装装置および実装方法 | |
KR100861952B1 (ko) | 본딩장치 | |
JP2009505387A (ja) | 多数の半導体構成要素のためのサーモードデバイス | |
JP2001308146A (ja) | チップキャリアに半導体チップを取り付けるための装置 | |
JP3317226B2 (ja) | 熱圧着装置 | |
JP4194227B2 (ja) | 電子部品の熱圧着装置 | |
JP4423165B2 (ja) | 電子部品の超音波実装方法 | |
JP2004119594A (ja) | 一括接合装置 | |
JP5406974B2 (ja) | 熱圧着装置及び電気部品の実装方法 | |
JP2009032845A (ja) | 熱圧着装置及び電気部品の実装方法 | |
JP2021044557A (ja) | 圧着装置 | |
KR100800594B1 (ko) | 엘시디용 씨오에프 엔시피 패키징 장치 | |
JPH05121487A (ja) | 半導体装置の実装構造および実装方法 | |
JPH1022349A (ja) | チップの熱圧着装置 | |
JP2877055B2 (ja) | 熱圧着装置 | |
JP2013084790A (ja) | 熱圧着装置 | |
JP3775960B2 (ja) | 電子部品の圧着装置および圧着方法 | |
JP2016133982A (ja) | Icチップの接合方法 | |
JP2009081337A (ja) | 電子部品の実装方法及び実装装置 | |
JP3741578B2 (ja) | 圧着装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20120914 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20130830 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20140901 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20160831 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20180829 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20190822 Year of fee payment: 12 |