KR960033638A - 레이저집광방법 및 장치 - Google Patents

레이저집광방법 및 장치 Download PDF

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Publication number
KR960033638A
KR960033638A KR1019960006761A KR19960006761A KR960033638A KR 960033638 A KR960033638 A KR 960033638A KR 1019960006761 A KR1019960006761 A KR 1019960006761A KR 19960006761 A KR19960006761 A KR 19960006761A KR 960033638 A KR960033638 A KR 960033638A
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KR
South Korea
Prior art keywords
reflector
mirror
laser
reflected
reflectors
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KR1019960006761A
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English (en)
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KR100206095B1 (ko
Inventor
케이지 후세
케이지 에바타
Original Assignee
쿠라우찌 노리타카
스미도모덴기고오교오 가부시기가이샤
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Application filed by 쿠라우찌 노리타카, 스미도모덴기고오교오 가부시기가이샤 filed Critical 쿠라우찌 노리타카
Publication of KR960033638A publication Critical patent/KR960033638A/ko
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Publication of KR100206095B1 publication Critical patent/KR100206095B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
    • G02B17/0621—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

본 발명은 레이저가공에 사용되는 레이저집광광학장치, 특히 레이저광을 초점에 집광하는 레이저집광방법 및 장치에 관한 것으로서, 레이저광의 광로차에 의거한 파면수차를 없애고 높은 집광특성을 얻은 동시에, 입사 레이저광에 광축어긋남이 있어도 그 높은 집광특성을 유지할 수 있고, 가공이 용이한 반사경에 의한 경제적인 제작코스트의 레이저집광광학장치를 얻는 것을 목적으로 한 것이며, 그 구성에 있어서, 레이저집광광학장치는, 어느 것이나 모두 오목면 반사경을 사용한 제1반사경(1)과 제2반사경(2)의 조합으로 이루어지고, 입사레이저광 LA를 2개의 반사경에 의해 동일한 편향방향으로 반사편향하도록 구성한다. 반사경의 한쪽은 트로이 달반사경, 다른쪽은 구면, 실린드리칼, 또는 트로이달의 반사경의 어느하나이다. 2개의 반사경은 경면은 제1반사경에 의해 반사편향된 레이저광이 제2반사경에 의해 반사편광되고 2파면수차를 상쇄할 수 있는 형상으로 형성한 것을 특징으로 한 것이다.

Description

레이저집광방법 및 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 실시예의 레이저집광광학장치의 단면도
제2도는 토로이달(toroidal), 구면, 실린드리칼(cylindrical)의 반사경의 개략도
제3도는 작용의 설명도
제4도는 집광, 파면수차(波面收差)를 최소로하는 곡면을 선택하는 계산과정의 설명도
제5도는 구면(球面)과 토로이달의 반사경의 조합에 의한 파면수차의 분포도

Claims (2)

  1. 입사된 레이저광을 제1의 오목면반사경에 의해 반사편향시키고, 이 반사광을 제2의 오목면반사경에 의해 제1반사경과 동일한 편향방향으로 반사편향시키고, 상기 각 반사경의 곡면을 제1반사경에 의해 발생하는 반사광의 광로차를 제2반사경에 의해 상쇄하는 곡면의 조합으로하고, 제2반사경의 반사광의 파면수차가 최소로 되도록 레이저광을 집광하는 것을 특징으로 하는 레이저집광방법
  2. 오목면의 곡률반경을 각각 가진 제1반사경과 제2반사경을 제1반사경의 반사광의 편향방향이 제2반사경의 반사광의 편향방향과 동일하게 되도록 조합하고, 제1 및 제2반사경의 어느 한쪽이 토로이달미러하고, 다른쪽이 구면미러, 실린드리칼미러, 또는 토로이달미러의 어느 하나로하고, 또한 제1반사경에 의해 발생하는 반사광의 광로차를 제2반사경에 의해 상쇄하는 곡면을 각 반사경이 가지도록 구성해서 이루어진 것을 특징으로 하는 레이저집광장치
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960006761A 1995-03-15 1996-03-14 레이저 집광방법 및 장치 KR100206095B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7055931A JP2720811B2 (ja) 1995-03-15 1995-03-15 レーザ集光方法及び装置
JP95-55931 1995-03-15

Publications (2)

Publication Number Publication Date
KR960033638A true KR960033638A (ko) 1996-10-22
KR100206095B1 KR100206095B1 (ko) 1999-07-01

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Country Status (8)

Country Link
US (1) US5889626A (ko)
EP (1) EP0732168B1 (ko)
JP (1) JP2720811B2 (ko)
KR (1) KR100206095B1 (ko)
CA (1) CA2171590C (ko)
DE (1) DE69616849T2 (ko)
SG (1) SG47088A1 (ko)
TW (2) TW490350B (ko)

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JP6420216B2 (ja) 2015-07-31 2018-11-07 ファナック株式会社 折返しミラーを備えたレーザ発振器
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Also Published As

Publication number Publication date
US5889626A (en) 1999-03-30
DE69616849D1 (de) 2001-12-20
EP0732168B1 (en) 2001-11-14
EP0732168A3 (en) 1997-04-09
TW485853U (en) 2002-05-01
JPH08252683A (ja) 1996-10-01
DE69616849T2 (de) 2002-08-22
SG47088A1 (en) 1998-03-20
JP2720811B2 (ja) 1998-03-04
KR100206095B1 (ko) 1999-07-01
TW490350B (en) 2002-06-11
CA2171590A1 (en) 1996-09-16
EP0732168A2 (en) 1996-09-18
CA2171590C (en) 2007-01-16

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