DE69616849D1 - Verfahren und Gerät zum Fokussieren eines Laserstrahls - Google Patents

Verfahren und Gerät zum Fokussieren eines Laserstrahls

Info

Publication number
DE69616849D1
DE69616849D1 DE69616849T DE69616849T DE69616849D1 DE 69616849 D1 DE69616849 D1 DE 69616849D1 DE 69616849 T DE69616849 T DE 69616849T DE 69616849 T DE69616849 T DE 69616849T DE 69616849 D1 DE69616849 D1 DE 69616849D1
Authority
DE
Germany
Prior art keywords
focusing
laser beam
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69616849T
Other languages
English (en)
Other versions
DE69616849T2 (de
Inventor
Keiji Fuse
Keiji Ebata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69616849D1 publication Critical patent/DE69616849D1/de
Application granted granted Critical
Publication of DE69616849T2 publication Critical patent/DE69616849T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
    • G02B17/0621—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
DE69616849T 1995-03-15 1996-03-14 Verfahren und Gerät zum Fokussieren eines Laserstrahls Expired - Lifetime DE69616849T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7055931A JP2720811B2 (ja) 1995-03-15 1995-03-15 レーザ集光方法及び装置

Publications (2)

Publication Number Publication Date
DE69616849D1 true DE69616849D1 (de) 2001-12-20
DE69616849T2 DE69616849T2 (de) 2002-08-22

Family

ID=13012834

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69616849T Expired - Lifetime DE69616849T2 (de) 1995-03-15 1996-03-14 Verfahren und Gerät zum Fokussieren eines Laserstrahls

Country Status (8)

Country Link
US (1) US5889626A (de)
EP (1) EP0732168B1 (de)
JP (1) JP2720811B2 (de)
KR (1) KR100206095B1 (de)
CA (1) CA2171590C (de)
DE (1) DE69616849T2 (de)
SG (1) SG47088A1 (de)
TW (2) TW490350B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1196952C (zh) * 1999-02-10 2005-04-13 松下电器产业株式会社 反射型光学装置及使用该装置的摄像装置和车载监视装置
DE10050263A1 (de) * 2000-10-09 2002-04-18 Rodenstock Optik G Verfahren zur Kennzeichnung und insbesondere zur Beschriftung von Oberflächen optischer Elemente mit UV-Licht
US6917010B2 (en) * 2001-02-01 2005-07-12 The Regents Of The University Of California Method for brazing and thermal processing
TW594043B (en) 2001-04-11 2004-06-21 Matsushita Electric Ind Co Ltd Reflection type optical apparatus and photographing apparatus using the same, multi-wavelength photographing apparatus, monitoring apparatus for vehicle
US20040052462A1 (en) * 2002-06-27 2004-03-18 Dale Buermann Optical fiber terminator using toroidal reflective surfaces
AU2002363822A1 (en) * 2002-11-20 2004-06-15 Richard Fritz Sauter Method for analyzing molecules for molecule sequencing and spectrometer therefor
DE10310602A1 (de) * 2003-03-11 2004-09-23 Olympus Biosystems Gmbh Zwischen wenigstens zwei optischen Systemen abbildende optische Abbildungsanordnung mit wenigstens einem torischen Spiegel
DE10320529B4 (de) * 2003-04-30 2017-09-07 Carl Zeiss Microscopy Gmbh Dunkelfeld-Beleuchtungssystem
JP4960043B2 (ja) * 2006-08-31 2012-06-27 日立ビアメカニクス株式会社 レーザ加工方法およびレーザ加工装置
JP5060893B2 (ja) * 2007-09-27 2012-10-31 三星ダイヤモンド工業株式会社 レーザ加工装置
KR100954796B1 (ko) * 2007-12-26 2010-04-28 주식회사 포스코 전기강판의 자구 미세화 장치 및 전기강판
JP2010040784A (ja) * 2008-08-05 2010-02-18 Fanuc Ltd レーザ加工装置
JP5558179B2 (ja) * 2010-04-09 2014-07-23 三菱電機株式会社 レーザ装置
JP2013214708A (ja) 2012-03-30 2013-10-17 Gigaphoton Inc レーザ装置、レーザシステムおよび極端紫外光生成装置
WO2013144691A2 (en) * 2012-03-30 2013-10-03 Gigaphoton Inc. Amplifier, laser apparatus, and extreme ultraviolet light generation system
US9360680B1 (en) 2012-08-10 2016-06-07 Ilias Syrgabaev Electromagnetic beam or image stabilization system
KR101511670B1 (ko) * 2013-01-25 2015-04-13 에이엠테크놀로지 주식회사 유리 절단 장치
JP6420216B2 (ja) 2015-07-31 2018-11-07 ファナック株式会社 折返しミラーを備えたレーザ発振器
CN107508126B (zh) * 2016-06-14 2020-05-05 中国科学院上海光学精密机械研究所 一种含离轴抛面镜的激光光路调节方法
WO2022161605A1 (en) * 2021-01-27 2022-08-04 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Thermal laser evaporation system
CN113310968B (zh) * 2021-04-22 2022-07-08 清华大学 一种基于光束整形改善激光诱导击穿光谱可重复性的方法
CN113702007B (zh) * 2021-09-02 2023-09-19 孝感华中精密仪器有限公司 一种离轴光束轴差的标定装置及其标定方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1154711B (de) * 1962-08-24 1963-09-19 Rodenstock Optik G Spiegelkondensator fuer Vergroesserungs- und aehnliche Geraete
US4396285A (en) * 1980-08-25 1983-08-02 Coherent, Inc. Laser system and its method of use
JPS57195205A (en) * 1981-05-26 1982-11-30 Sumitomo Electric Ind Ltd Optical waveguide
DE3268933D1 (en) * 1981-06-03 1986-03-20 Hitachi Ltd Reflection type optical focusing apparatus
IT1157960B (it) * 1982-11-29 1987-02-18 Fiat Veicoli Ind Dispositivo per focalizzare ed omogeneizzare un fascio laser
JPS61293695A (ja) * 1985-06-20 1986-12-24 Toshiba Corp レ−ザ集光装置
JPS63252688A (ja) * 1987-04-10 1988-10-19 Mitsubishi Electric Corp レ−ザ加工ヘツド
JPS6448692A (en) * 1987-08-20 1989-02-23 Mitsubishi Heavy Ind Ltd Multifocusing laser beam condensing device
JPH01113192A (ja) * 1987-10-23 1989-05-01 Hitachi Ltd レーザ加工機用集光装置
US5023886A (en) * 1988-12-01 1991-06-11 Coherent, Inc. High power laser with focusing mirror sets
US5089915A (en) * 1989-07-25 1992-02-18 Chromex, Inc. Fabrication of aspheric surfaces through controlled deformation of the figure of spherical reflective surfaces
JPH06177867A (ja) * 1992-12-04 1994-06-24 Fujitsu Ltd 光伝送装置
JPH07144291A (ja) * 1993-11-25 1995-06-06 Mitsubishi Electric Corp レーザ加工装置の非点収差低減方法
US5420882A (en) * 1994-06-08 1995-05-30 Reliant Technologies, Inc. Infrared CO2 laser with a blue-green aiming beam

Also Published As

Publication number Publication date
TW485853U (en) 2002-05-01
EP0732168A2 (de) 1996-09-18
DE69616849T2 (de) 2002-08-22
SG47088A1 (en) 1998-03-20
KR100206095B1 (ko) 1999-07-01
EP0732168A3 (de) 1997-04-09
CA2171590A1 (en) 1996-09-16
TW490350B (en) 2002-06-11
KR960033638A (ko) 1996-10-22
JP2720811B2 (ja) 1998-03-04
JPH08252683A (ja) 1996-10-01
EP0732168B1 (de) 2001-11-14
US5889626A (en) 1999-03-30
CA2171590C (en) 2007-01-16

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Legal Events

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8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)