KR930021561A - 고성능의, 내구력있는, 저방사율의 유리와 그의 제조방법 - Google Patents
고성능의, 내구력있는, 저방사율의 유리와 그의 제조방법 Download PDFInfo
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- KR930021561A KR930021561A KR1019930007014A KR930007014A KR930021561A KR 930021561 A KR930021561 A KR 930021561A KR 1019930007014 A KR1019930007014 A KR 1019930007014A KR 930007014 A KR930007014 A KR 930007014A KR 930021561 A KR930021561 A KR 930021561A
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- glass article
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- 239000005344 low-emissivity glass Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000011521 glass Substances 0.000 claims abstract 34
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract 23
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract 17
- 229910052709 silver Inorganic materials 0.000 claims abstract 17
- 239000004332 silver Substances 0.000 claims abstract 17
- 229910052759 nickel Inorganic materials 0.000 claims abstract 10
- 239000011651 chromium Substances 0.000 claims abstract 9
- 238000004544 sputter deposition Methods 0.000 claims abstract 9
- 229910000990 Ni alloy Inorganic materials 0.000 claims abstract 7
- 229910001120 nichrome Inorganic materials 0.000 claims abstract 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract 6
- 229910052804 chromium Inorganic materials 0.000 claims abstract 6
- 150000004767 nitrides Chemical class 0.000 claims abstract 6
- 239000000758 substrate Substances 0.000 claims abstract 6
- 238000002834 transmittance Methods 0.000 claims abstract 4
- 239000010410 layer Substances 0.000 claims 45
- 238000000034 method Methods 0.000 claims 17
- 229910000599 Cr alloy Inorganic materials 0.000 claims 3
- 229910052786 argon Inorganic materials 0.000 claims 3
- 239000000788 chromium alloy Substances 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000011229 interlayer Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 229920006384 Airco Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
- G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
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- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
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- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
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- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12597—Noncrystalline silica or noncrystalline plural-oxide component [e.g., glass, etc.]
Abstract
약80%이상의 가시 투과율, 약0.13%이하의 반구형 방사율(Eh), 및 약0.10이하의 정상 방사율(En)을 나타내는 고성능의, 내구력있는, 저 방사율 유리가Si3N4의 언더코트 및 오버코트, 적어도 하나의 은층, 그리고 바람직하게 니켈합금이 니크롬이고, 크롬이 그의 질화물의 형태인, 니켈 또는 니켈 함금의 적어도 둘의 샌드위치 층들을 함유하는 층조직을 유리 기판에 스퍼 코팅 함에 의해 형성된다.,
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시에 채용되어도 좋은 (또 선행기술의 실시에 여러가지로 채용되는) 에어코 장치 (Airco apparatus)의 약도이다.
제2도는 선행기술의 에어코 층 조직의 부분 측단면도이다.
제3도는 본 발명의 일 실시양태의 부분 측단면도이다.
Claims (35)
- 유리 기판에 층 조직이 유리로부터 외향으로, Si3N4의 언더코트 층.니켈 또는 니켈합금의 제1의 층, 은층, 니켈 또는 니켈합금의 제2의 층 및 Si3N4의 오버코트 층을 합유하고, 상기 유리 기판이 약2mm-6mm의 두께를 가지는 경우에는, 코팅된 유리가 약0.12미만의 정상 방사율(En) 및 약0.16미만의 반원형 방사율(Eh)를 가지는, 스퍼터 코팅의 유리 물품.
- 제1항에 있어서, 상기 층 조직은 내구가능하고 상기 가사투과율이 적어도 78%인, 스퍼터 코팅의 유리 물품.
- 제2항에 있어서, 상기 투과율이 80% 보다 큰, 스퍼터 코팅의 유리 물품.
- 제2항에 있어서, 상기 En이 약0.10이하이고 상기 Eh이 약0.13이하인, 스퍼터 코팅의 유리 물품.
- 제4항에 있어서, 상기 En이 약0.09-0.10이고 상기 Eh이 약0.12-0.143인, 스퍼터 코팅의 유리 물품.
- 제2항에 있어서, 스퍼터 코팅의 유리 물품이, 약10.5ohms/sq의 면적저항을 가지는 것을 특징으로 하는 것.
- 제6항에 있어서, 상기 면적저항이 약9―10ohms/sq인, 스퍼터 코팅의 유리 물품.
- 제1항에 있어서, 상기 니켈 또는 니켈합금 층들이 약7A 보다 적은 두께이고일 은층 만이 있고 상기 은층은 약90A 보다 뎌 두꺼운, 스퍼터 코팅의 유리 물품.
- 제8항에 있어서, 상기 은층이 약90-105A 두꺼운, 스퍼터 코팅의 유리 물품.
- 제8항에 있어서, Si3N4,의 상기 언더코드 층이 적어도 약400A 두껍고 Si3N|4,의 상기 오버코트 층이 적어도 약400A 두꺼운, 스퍼터 코팅의 유리 물품.
- 제1항에 있어서, 상기 층 조직이 본래 상기 다섯의 층으로 이루어져 있는, 스퍼터 코팅의 유리 물품.
- 제1항에 있어서, 상기 층조직이 본래, 유리로부터 외향으로, Si3N4의 제1의 층, 니크롬의 제2의 층, 은의 제3의 층, 니크롬의 제4의 층, 은의 제5의 층, 니크롬의 제6의 층, 그리고 Si3N4의 제7의 층으로 이루어져 있는, 스퍼터 코팅의 유리 물품.
- 제2항에 있어서, 상기 은층들의 각각이 약50A 두껍고 상기 니크롬 층들의 각각은 약7A 보다 덜 두꺼운 스퍼터 코팅의 유리 물품.
- 제1항에 있어서, 상기 니켈 또는 니켈합금 층들 중의 적어도 하나가 니켈, 크롬 합금이고 사실상 상기 크롬의 일부가 그의 질화물인, 스퍼터 코팅의 유리 물품.
- 제4항에 있어서, 상기 니켈 또는,니켈합금 층들의 모두가 니켈, 크롬 합금이고 사실상상기 크롬의 일부가 그의 질화물인, 스퍼터 코팅의 유리 물품.
- 제15항에 있어서, 상기 니켈, 크롬 합금이 중량으로 니켈 약80%와 크롬 약20%인, 스퍼터 코팅의 유리 물품.
- 제6항에 있어서, 상기 투과율이 적어도 80% 이상이고, 상기 En이 약0.10이하이며 상기 Eh이 약 0.13이하인, 스퍼터 코팅의 유리 물품.
- 제17항에 있어서, 상기 피복의 유리가 약10.Sohms/sq하의 면적저항을 가지는, 스퍼터 코팅의 유리 물품.
- 제18항에 있어서, 상기 크롬 층의 어느 것의 두께가 약7A 보다 덜 두껍고 상기 은층의 합계 두께가 약90-105A 두꺼운, 스퍼터 코팅의 유리 물품.
- 제19항에 있어서, 약95A 두꺼운 하나의 은층 만이 있는, 스퍼터 코팅의 유리 물품.
- 제19항에 있어서, 니크롬 층에 의해 격리된 두 은층이 있고, 상기 은층의 각각이 약50A 두꺼운, 스퍼터 코팅의 유리 물품.
- 유리 기판 상에 차례로, a)질소함유의 분위기에서 Si3N4,의 언도코트 층을 형성하기, b)질소함유의 분위기에서 크롬의 사실상 일부가 그의 질화물인, 니켈 크롬 합금의 제1의 층을 형성하기, c)단계 b)에 채용된 것과 같은 분위기에서은의 적어도 일 층을 형성하기 d)단계 b) 및 c)와 같은 분위기에서 상기 니켈 크롬 합금의 제2의 층을 형성하기, e)질소함유의 분위기에서 Si3N4의 오버코트 층을 형성하기의 단계들의 스퍼터 코팅을 포함하여, 상기 유리 기판이 약2mm-6mm의 두께인 경우, 코팅의 유리가약0.12미만의 정상 방사율(En)과 약 0.16미만의 반구형 방사율(Eh)을 가지는, 유리 기판에 얇고 내구가능한, 태양관리 층화 조직을 형성하는 방법.
- 제22항에 있어서, 상기 스퍼터 코팅이, 하나가 다른 것과 격리된 복수의 지대에서 실행되고 스피퍼코팅에의해 Si3N4,의 층을 형성하는 단계는, 각각이 100%의 N2를 본래 함유하는 분위기의, 적어도 둘의 분리된 지대에서 실행되며, 상기Ni: Cr 질화물 및 은의 층을 형성하는 단계들은 같은 지대에서 실행되고 상기 스퍼터 코팅은 약0%-75%의 Ar와 100%-25%의 N2의 혼합물로 본래 이루어지는 분위기에서는 행해지는 방법.
- 제23항에 있어서, Ar과 N2의 상기 혼합물이 용적으로 상기 가스들의 각각의 약50%, 방법.
- 제24항에 있어서, 실리콘(Si)으로 본래 이루어지는 관형 타깃들이 스퍼터 코팅에 의해 상기 Si3N4층을 형성하는 데 사용되고 은의 층들이 각기, 니크롬과 은의 평형 타깃들인 방법.
- 제25항에 있어서, 상기 투과율이 80% 보다 큰 방법.
- 제26항에 있어서, 상기 En이 약0.10이하이고 상기 Eh이 약0.13이하인 방법.
- 제27항에 있어서, 상기 코팅의 유리가 10.5ohms/sq이하의 면적저항을 가지는 방법.
- 제28항에 있어서, 상기 Ni : Cr 진화물 층들이 약7A 미만의 두께를 가지고 상기 은의 합계 두께가 약90―105A인 방법.
- 체22항에 있어서, 상기 층조직이 단계 a)-e)에 의해 형성된 다섯 층들로 이루어져 있는 방법.
- 제22항에 있어서, 상기 층조직이 일곱의 층이고 상기 방법이 사이에 Ni : Cr 질화물의 증간의 층을 가진 적어도 둘의 층에 상기 은을 형성하는 단계들을 포함하는 방법.
- 제22항에 있어서, 상기 Si의 상기 스퍼터 코팅이 아르곤과 N2혼합물을 함유하는 분위기에서 행해지는 방법.
- 제22항의 방법에 의한 산물.
- 제30항의 방법에 의한 산물.
- 제31항의 방법에 의한 산물.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
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US07/876,350 US5344718A (en) | 1992-04-30 | 1992-04-30 | High performance, durable, low-E glass |
US876,350 | 1992-04-30 |
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