KR970001250A - 투명재료로 이루어진 판유리 및 그 제조방법 - Google Patents

투명재료로 이루어진 판유리 및 그 제조방법 Download PDF

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KR970001250A
KR970001250A KR1019960019945A KR19960019945A KR970001250A KR 970001250 A KR970001250 A KR 970001250A KR 1019960019945 A KR1019960019945 A KR 1019960019945A KR 19960019945 A KR19960019945 A KR 19960019945A KR 970001250 A KR970001250 A KR 970001250A
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츠멜티 안톤
스츠크치르보프스키 요아힘
브라츠 크리스토프
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발처스 운트 라이볼트 도이칠란트 홀딩 악티엔게젤샤프트
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Abstract

가시영역에서 높은 전달률을 가지며 열복사 영역에서 높은 반사율을 갖는 투명재료로 이루어진 판유리 또는 박층에는 다섯 개의 층을 포함하는 다층 Low-e 층이 피복되어 있다. 그것에 의하여 기판에는 예를들면, ZnO, SnO2중 하나의 금속산화물로 구성된 제1층, 예를들면 Zn 및/또는 Ta 중 하나의 금속아산화물로 구성된 제2층, 예를들면 Ag, Cu 중 하나의 금속으로 구성된 제3층, 예를 들면 Ti, Cr, Nb 중 하나의 금속 또는 금속아산화물로 구성된 제4층, 및 제1층과 동일한 재료로구성된 제5층이 직접 피복되어 이루어진다. 각각의 층은 스퍼터에 의해서, 특히 마그네트론-음극스퍼터링에 의해서 연속적으로 피복된다. 이와같이 총 시스템은 종래에 형성된 저-방사율층에 비하여 더 높은 결합강도 및 화학적 내구성을 나타낸다. 유리피복용침투성 첨가제를 투입하는 경우에는 특히 경제적인 피복 방법에 의하여 대형 유리판 표면의 피복이 가능해진다.

Description

투명재료로 이루어진 판유리 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (19)

  1. 기판과 기판의 측면에 형성된 층시스템을 갖춘 투명재료로 이루어진 판유리에 있어서, 기판에는 a) 산화물군 ZnO, SnO2, In2O3, Bi2O3, TiO2, Ta2O5, SiO2, Al3O3 또는 그 혼합물, 또는 질화물 AlN, Si3N4또는 그 혼합물, 또는 알루미늄 옥시질화물, 티탄옥시질화물, 규소 옥시질화물 또는 그 혼합물로 구성된 제1층이 20㎚ 내지 70㎚의 두께로 부착되어 있고, b) 금속아산화물(화학량식 산화물)로서 금속 Zn 및/또는 Ta 중 하나 또는 그 혼합물로 구성된 제2층이 1㎚ 내지 40㎚의 두께로 부착되어 있고, c) 금속, Ag, Cu 또는 그 혼합물로 구성된 제3층이 5 내지 30㎚의 두께로 부착되어 있고, d) 금속층 또는 금속아산화물(화학식량 산화물)로서 금속 Ti, Cr, Nb 중 하나 또는 그 혼합물, 또는 적어도 15원자%의 금속중 하나와의 합금으로 구성된 제4층이 0.5 내지 5㎚, 바람직하게는 2㎚의 두께로 부착되어 있고, e) 제1층과 동일한 재료로 구성된 제5층이 부착되어 있는 것을 특징으로 하는 판유리.
  2. 제1항에 있어서, 제1층, 제1 및 제5층 또는 제5층은 SnO2, In2O3, TiO2, BiO3또는 0 내지 20원자%의 Mg산화물, Al 산화물, P 산화물, Ti 산화물, Y 산화물, Zr 산화물 또는 Ta 산화물의 함량을 갖는 그 혼합산화물 또는 0 내지 5원자%의 범위에서 주기율표의 원자번호 57 내지 71을 갖는 성분들의 산화물 중 하나로부터 제조되는 것을 특징으로 하는 판유리.
  3. 제1항에 있어서, 제2층은 약 5㎚의 두께를 갖는 것을 특징으로 하는 판유리.
  4. 제1항에 있어서, 제3층과 제4층 사이에 제1항의 제2층과 같은 재료로 구성된 층이 더 부착되는 것을 특징으로 하는 판유리.
  5. 제1항 내지 제4항중 어느 한 항에 있어서, 여러개의 층군이 판유리표면에 연속적으로 형성되는 것을 특징으로 하는 판유리.
  6. 제1항에 있어서, 기판으로서는 투명한 무기 유리판이 사용되는 것을 특징으로 하는 판유리.
  7. 제1항에 있어서, 기판으로서는 투명한 유기 유리판이 사용되는 것을 특징으로 하는 판유리.
  8. 제1항에 있어서, 기판으로서는 투명한 유기 박판이 사용되는 것을 특징으로 하는 판유리.
  9. 제1항에 있어서, 제1항의 제1층과 같이 2개의 상이한 재료로 구성된 제1층 또는 제5층, 또는 이중층으로제1 및 제5층은 20㎚ 내지 70㎚의 전체 두께를 가지고 부착되어 있는 것을 특징으로 하는 판유리.
  10. 제1항에 있어서, 제1층과, 제2층 사이에는 제1항의 제4층과 같은 재료로 구성된 추가적 층이 부착되는 것을 특징으로 하는 판유리.
  11. 가시 스펙트럼영역에서 높은 전달률을 가지며, 음극 스퍼터링에 의한 투명기판의 피막을 통과하는 열복사에 대한 높은 반사율을 갖는 판유리를 제조하는 방법에 있어서, a) 산화물군 ZnO, SnO2, In2O3, Bi2O3, TiO2, Ta2O5, SiO2, Al3O3또는 그 혼합물, 또는 질화물 AlN, Si3N4또는 그 혼합물, 또는 알루미늄 옥시질화물, 티탄옥시질화물, 규소옥시질화물 또는 그 혼합물로 구성된 제1층이 20㎚ 내지 70㎚의 두께로 부착되어 있고, b) 금속아산화물(화학량식 산화물)로서 금속 Zn 및/또는 Ta 중 하나 또는 그 혼합물로 구성된 제2층이 1㎚ 내지 40㎚의 두께로 부착되어 있고, c) 금속,Ag, Cu 또는 그 혼합물로 구성된 제3층이 5 내지 30㎚의 두께로 부착되어 있고, d) 금속층 또는 금속아산화물(화학식량산화물)로서 금속 Ti, Cr, Nb 중 하나 또는 그 혼합물, 또는 적어도 15원자%의 금속중 하나와의 합금으로 구성된 제4층이 0.5 내지 5㎚, 바람직하게는 2㎚의 두께로 부착되어 있고, e) 제1층과 동일한 재료로 구성된 제5층이 부착되어 있는 것을 특징으로 하는 방법.
  12. 제9항에 있어서, 산화물층은 반응성 분위기에서 중화가스, 바람직하게는 아르곤(Ar) 및 산소(O2)로부터형성되고, 질화물층은 반응성 분위기에서 중성가스, 바람직하게 아르곤(Ar) 및 산소(O2)로부터 형성되고, 옥시질화물층은 반응성 분위기에서 아르곤(Ar), 산소(O2) 및 질소(N2)를 가진 중성가스로부터 형성되고, 금속층은 중성분위기에서, 바람직하게 아르곤에서 형성되는 것을 특징으로 하는 방법.
  13. 제9항에 있어서, 산화물층은 SnO2, In2O3, Bi2O3, TiO2, In2O3, 또는 0 내지 20원자%의 Mg 산화물,Al 산화물, P 산화물, Ti 산화물, Y 산화물, Zr 산화물 또는 Ta 산화물의 함량을 갖는 그 혼합산화물 또는 0 내지 5원자%의 범위에서 주기율표의 원자번호 57 내지 71을 갖는 성분들의 산화물 중 하나로부터 제조되는 것을 특징으로 하는 방법.
  14. 제9항에 있어서, ZnO층이 0 내지 10원자%의 Al 산화물의 함량을 가지고 제조되는 것을 특징으로 하는 방법.
  15. 제9항에 있어서, 층은 음극스퍼터링에 의해 형성되는 것을 특징으로 하는 방법.
  16. 제9항에 있어서, 층은 금속타켓으로부터 스퍼터링 되는 것을 특징으로 하는 방법.
  17. 제9항에 있어서, ZnO, SnO2, Bi2O3, TiO2, In2O3, 또는 그 혼합산화물군으로 이루어진 산화물층이 금속이나 또는 제11항과 같은 혼합된 성분을 가진 기초성분의 금속합금으로부터 스퍼터링 되는 것을 특징으로 하는 방법.
  18. 제9항에 있어서, 제1항의 제1층과 같은 2개의 상이한 재료로 구성된 제1층 또는 제5층 또는 이중층으로서 제1층과 제5층은 20㎚ 내지 70㎚의 전체두께를 가지고 부착되는 것을 특징으로 하는 방법.
  19. 제9항에 있어서, 제1층과 제2층 사이에는 제1항의 제4층과 같은 재료로 구성된 층이 더 부착되는 것을 특징으로 하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960019945A 1995-06-08 1996-06-05 투명재료로 이루어진 판유리 및 그 제조방법 KR0171175B1 (ko)

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DE4324576C1 (de) * 1993-07-22 1995-01-26 Ver Glaswerke Gmbh Verfahren zur Herstellung einer mit einer Mehrfachschicht versehenen Glasscheibe

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DE19520843A1 (de) 1996-12-12
EP0747330B1 (de) 1999-04-07
JPH08336928A (ja) 1996-12-24
US5962115A (en) 1999-10-05
KR0171175B1 (ko) 1999-01-15
TW327657B (en) 1998-03-01
ES2132805T3 (es) 1999-08-16
EP0747330A1 (de) 1996-12-11
DE59601582D1 (de) 1999-05-12
JP3998738B2 (ja) 2007-10-31

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