KR890011069A - 세라믹 피복물을 기재위에 형성시키는 방법 - Google Patents

세라믹 피복물을 기재위에 형성시키는 방법 Download PDF

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KR890011069A
KR890011069A KR1019880017555A KR880017555A KR890011069A KR 890011069 A KR890011069 A KR 890011069A KR 1019880017555 A KR1019880017555 A KR 1019880017555A KR 880017555 A KR880017555 A KR 880017555A KR 890011069 A KR890011069 A KR 890011069A
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coating
substrate
coated
vapor deposition
chemical vapor
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KR950000864B1 (ko
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앤드류 할루스카 로렌
윈튼 마이클 케이스
타레이 레오
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노만 에드워드 루이스
다우 코닝 코포레이션
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Abstract

내용 없음

Description

세라믹 피복물을 기질위에 형성하는 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (11)

  1. (a) 하이드로겐 실세스퀴옥산 수지를 포함하는 유동성 기질에 적용하고 ; (b) 수지 용액을 건조시켜 하이드로겐 실세스퀴옥산 수지를 기질 위에 부착시키며 ; (c) 피복된 기질을 암모니아 대기 속에서 세라믹 피복물을 기질 위에 형성시키기에 충분한 온도로 가열함을 포함하여 세라믹 피복물을 기질 위에 형성하는 방법.
  2. 제 1 항에 있어서, (D)(ⅰ) 실리콘 피복물, (ⅱ) 실리콘-탄소 피복물, (ⅲ) 실리콘-질소 피복물 및 (ⅳ) 실리콘-탄소-질소 피복물로 이루어진 그룹중에서 선택된 표면 안정화 피복물을 (a) 화학 증착 , (b) 플라스마 증진된 화학 증착 및 (c) 예비세라믹 중합체 피복물의 적용과 예비세라믹 중합체 피복물의 후속 세라믹화로 이루어진 그룹중에서 선택된 방법으로 세라믹 피복물을 적용함을 추가로 포함하는 방법.
  3. 제 2 항에 있어서, (E)(ⅰ) 실리콘 피복물, (ⅱ) 실리콘-탄소 피복물, (ⅲ) 실리콘-질소 피복물 및 (ⅳ) 실리콘-탄소-질소 피복물로 이루어진 그룹중에서 선택된 차단 피복물을 (a) 화학 증착 및 (b) 플라스마 증진된 화학 증착으로 이루어진 그룹중에서 선택된 방법으로 표면 안정화 피복물에 적용함을 추가로 포함하는 방법.
  4. 제 3 항에 있어서, 차단 피복물을 금속 보조 화학 증착으로 적용하는 방법.
  5. 제 1 항의 방법으로 피복된 기질.
  6. 제 2 항의 방법으로 피복된 기질.
  7. 제 3 항의 방법으로 피복된 기질.
  8. 제 1 항의 방법으로 피복된 전자장치.
  9. 제 2 항의 방법으로 피복된 전자장치.
  10. 제 3 항의 방법으로 피복된 전자장치.
  11. 피복물이 다중 금속화 층에서 형성되는 전자기능을 분리하기 위한 유전 필름으로서 사용되는, 제1항의 피복방법으로 형성된 중간 층을 함유하는 구조를 포함하는 제품.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880017555A 1987-12-28 1988-12-27 세라믹 피복물을 기재위에 형성시키는 방법 KR950000864B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/138,743 US4847162A (en) 1987-12-28 1987-12-28 Multilayer ceramics coatings from the ceramification of hydrogen silsequioxane resin in the presence of ammonia
US138,743 1987-12-28

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KR890011069A true KR890011069A (ko) 1989-08-12
KR950000864B1 KR950000864B1 (ko) 1995-02-02

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US (1) US4847162A (ko)
EP (1) EP0323103B1 (ko)
JP (1) JPH06103689B2 (ko)
KR (1) KR950000864B1 (ko)
CA (1) CA1317822C (ko)
DE (1) DE3889094T2 (ko)

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EP0323103A2 (en) 1989-07-05
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EP0323103B1 (en) 1994-04-13
JPH06103689B2 (ja) 1994-12-14
US4847162A (en) 1989-07-11
CA1317822C (en) 1993-05-18
DE3889094D1 (de) 1994-05-19
KR950000864B1 (ko) 1995-02-02
JPH01202826A (ja) 1989-08-15

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