KR920021630A - 하이드로겐 실세스퀴옥산 수지의 증기상 증착 - Google Patents

하이드로겐 실세스퀴옥산 수지의 증기상 증착 Download PDF

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Publication number
KR920021630A
KR920021630A KR1019920008971A KR920008971A KR920021630A KR 920021630 A KR920021630 A KR 920021630A KR 1019920008971 A KR1019920008971 A KR 1019920008971A KR 920008971 A KR920008971 A KR 920008971A KR 920021630 A KR920021630 A KR 920021630A
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South Korea
Prior art keywords
coating
silicon
hydrogen silsesquioxane
vapor phase
hydrogen
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KR1019920008971A
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English (en)
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KR100196961B1 (ko
Inventor
아일린 젠틀 테레사
Original Assignee
노만 에드워드 루이스
다우 코닝 코포레이션
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Publication of KR920021630A publication Critical patent/KR920021630A/ko
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Publication of KR100196961B1 publication Critical patent/KR100196961B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04—Polysiloxanes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D4/00—Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/106—Utilizing plasma, e.g. corona, glow discharge, cold plasma

Abstract

내용 없음

Description

하이드로겐 실세스퀴옥산 수지의 증기상 증착
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (5)

  1. 하이드로겐 실세스퀴옥산을 포함하는 가스를 기질을 함유하는 증착 챔버내로 도입시키고; 하이드로겐 실세스 퀴옥산의 반응을 유도시켜 피복물을 형성시킴을 특징으로 하여, 실리콘 및 사소를 함유하는 피복물을 기질 위에 증착시키는 방법.
  2. 제1항에 있어서, 하이드로겐 실세스퀴옥산을 담체 가스 속에서 희석시키는 방법.
  3. 제1항에 있어서, SiO2피복물, SiO2/개질 세라믹 옥사이드층, 실리콘 함유 피복물, 실리콘 탄소 함유 피복물, 실리콘 질소 함유 피복물, 실리콘 질소 탄소 함유 피복물, 실리콘 산소 질소 함유 피복물 및 다이아몬드 유사탄소 피복물로 이루어진 그룹으로부터 선택된 피복물을 피복된 기질위에 적용시킴을 추가로 포함하는 방법.
  4. 표본의 약 75% 이상의 분자량이 약 2000 미만인 하이드로겐 실세스퀴옥산을 포함하는 조성물.
  5. 담체 가스속에서 희석시킨 제4항의 하이드로겐 실세스퀴옥산.
    ※ 참고사항:최초출원 내용에 의하여 공개하는 것임.
KR1019920008971A 1991-05-28 1992-05-27 하이드로겐 실세스퀴옥산 수지의 기상 증착법 KR100196961B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/706,464 1991-05-28
US7/706,464 1991-05-28
US07/706,464 US5165955A (en) 1991-05-28 1991-05-28 Method of depositing a coating containing silicon and oxygen

Publications (2)

Publication Number Publication Date
KR920021630A true KR920021630A (ko) 1992-12-18
KR100196961B1 KR100196961B1 (ko) 1999-06-15

Family

ID=24837691

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920008971A KR100196961B1 (ko) 1991-05-28 1992-05-27 하이드로겐 실세스퀴옥산 수지의 기상 증착법

Country Status (7)

Country Link
US (2) US5165955A (ko)
EP (2) EP0516308B1 (ko)
JP (1) JP3311777B2 (ko)
KR (1) KR100196961B1 (ko)
CA (1) CA2068353A1 (ko)
DE (2) DE69211425T2 (ko)
ES (2) ES2122365T3 (ko)

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US5593727A (en) * 1991-03-12 1997-01-14 Virginia Tech Intellectual Properties, Inc. Production of films of SiO2 by chemical vapor deposition
US5310583A (en) * 1992-11-02 1994-05-10 Dow Corning Corporation Vapor phase deposition of hydrogen silsesquioxane resin in the presence of nitrous oxide
JP3153367B2 (ja) * 1992-11-24 2001-04-09 ダウ・コ−ニング・コ−ポレ−ション ポリハイドロジェンシルセスキオキサンの分子量分別方法
CH687613A5 (de) * 1994-02-04 1997-01-15 Tetra Pak Suisse Sa Verfahren zum Versehen einer Verpackung mit hervorragenden Sperreigenschaften.
CH687614A5 (de) * 1994-02-04 1997-01-15 Tetra Pak Suisse Sa Verfahren zum Versehen einer Verpackung mit hervorragenden Sperreigenschaften in bezug auf Gase.
US5456952A (en) * 1994-05-17 1995-10-10 Lsi Logic Corporation Process of curing hydrogen silsesquioxane coating to form silicon oxide layer
JPH08153784A (ja) * 1994-11-28 1996-06-11 Nec Corp 半導体装置の製造方法
FR2733758B1 (fr) * 1995-05-04 1997-07-18 Stelumi Sa Procede et traitement d'un element de conditionnement, notamment a usage medical ou pharmaceutique ; element de conditionnement ainsi traite
US5858544A (en) * 1995-12-15 1999-01-12 Univ Michigan Spherosiloxane coatings
EP0860462A3 (en) * 1997-02-24 1999-04-21 Dow Corning Toray Silicone Company Limited Composition and method for the formation of silica thin films
US6743856B1 (en) 1997-04-21 2004-06-01 Honeywell International Inc. Synthesis of siloxane resins
US6143855A (en) 1997-04-21 2000-11-07 Alliedsignal Inc. Organohydridosiloxane resins with high organic content
US6218497B1 (en) 1997-04-21 2001-04-17 Alliedsignal Inc. Organohydridosiloxane resins with low organic content
US6015457A (en) * 1997-04-21 2000-01-18 Alliedsignal Inc. Stable inorganic polymers
US6177199B1 (en) 1999-01-07 2001-01-23 Alliedsignal Inc. Dielectric films from organohydridosiloxane resins with low organic content
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US6472076B1 (en) 1999-10-18 2002-10-29 Honeywell International Inc. Deposition of organosilsesquioxane films
US6936537B2 (en) 2001-06-19 2005-08-30 The Boc Group, Inc. Methods for forming low-k dielectric films
US6881445B1 (en) * 2001-10-29 2005-04-19 Innovation Chemical Technologies, Ltd. Forming thin films on substrates using a porous carrier
EP1506327A1 (en) * 2002-05-23 2005-02-16 Universit de Sherbrooke Ceramic thin film on various substrates, and process for producing same
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
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CN100446193C (zh) * 2004-02-13 2008-12-24 松下电器产业株式会社 有机无机混合绝缘膜的形成方法
US8901268B2 (en) 2004-08-03 2014-12-02 Ahila Krishnamoorthy Compositions, layers and films for optoelectronic devices, methods of production and uses thereof
US8557877B2 (en) 2009-06-10 2013-10-15 Honeywell International Inc. Anti-reflective coatings for optically transparent substrates
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Also Published As

Publication number Publication date
ES2090514T3 (es) 1996-10-16
EP0516308B1 (en) 1996-06-12
DE69211425D1 (de) 1996-07-18
JPH05186213A (ja) 1993-07-27
US5165955A (en) 1992-11-24
DE69226377T2 (de) 1999-03-04
EP0659904A2 (en) 1995-06-28
ES2122365T3 (es) 1998-12-16
US5279661A (en) 1994-01-18
KR100196961B1 (ko) 1999-06-15
DE69226377D1 (de) 1998-08-27
EP0659904A3 (en) 1995-12-06
JP3311777B2 (ja) 2002-08-05
CA2068353A1 (en) 1992-11-29
EP0659904B1 (en) 1998-07-22
EP0516308A1 (en) 1992-12-02
DE69211425T2 (de) 1996-12-19

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