KR20220073757A - 액시얼 자기 베어링 및 레이디얼 가스 포일 베어링을 포함하는 진공 펌프 - Google Patents

액시얼 자기 베어링 및 레이디얼 가스 포일 베어링을 포함하는 진공 펌프 Download PDF

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Publication number
KR20220073757A
KR20220073757A KR1020227011548A KR20227011548A KR20220073757A KR 20220073757 A KR20220073757 A KR 20220073757A KR 1020227011548 A KR1020227011548 A KR 1020227011548A KR 20227011548 A KR20227011548 A KR 20227011548A KR 20220073757 A KR20220073757 A KR 20220073757A
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KR
South Korea
Prior art keywords
vacuum pump
bearings
bearing
radial
shaft
Prior art date
Application number
KR1020227011548A
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English (en)
Korean (ko)
Inventor
에밀리아노 루체타
Original Assignee
에드워즈 리미티드
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Application filed by 에드워즈 리미티드 filed Critical 에드워즈 리미티드
Publication of KR20220073757A publication Critical patent/KR20220073757A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
KR1020227011548A 2019-10-09 2020-10-05 액시얼 자기 베어링 및 레이디얼 가스 포일 베어링을 포함하는 진공 펌프 KR20220073757A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1914605.9 2019-10-09
GB1914605.9A GB2588146A (en) 2019-10-09 2019-10-09 Vacuum pump
PCT/GB2020/052454 WO2021069874A1 (en) 2019-10-09 2020-10-05 Vacuum pump comprising an axial magnetic bearing and a radial gas foil bearing

Publications (1)

Publication Number Publication Date
KR20220073757A true KR20220073757A (ko) 2022-06-03

Family

ID=68541197

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227011548A KR20220073757A (ko) 2019-10-09 2020-10-05 액시얼 자기 베어링 및 레이디얼 가스 포일 베어링을 포함하는 진공 펌프

Country Status (5)

Country Link
US (1) US20230313804A1 (ja)
JP (1) JP2022552208A (ja)
KR (1) KR20220073757A (ja)
GB (1) GB2588146A (ja)
WO (1) WO2021069874A1 (ja)

Family Cites Families (51)

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Also Published As

Publication number Publication date
GB2588146A (en) 2021-04-21
JP2022552208A (ja) 2022-12-15
GB201914605D0 (en) 2019-11-20
WO2021069874A1 (en) 2021-04-15
US20230313804A1 (en) 2023-10-05

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