WO2014050648A1 - ロータ、及び、このロータを備えた真空ポンプ - Google Patents
ロータ、及び、このロータを備えた真空ポンプ Download PDFInfo
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- WO2014050648A1 WO2014050648A1 PCT/JP2013/075107 JP2013075107W WO2014050648A1 WO 2014050648 A1 WO2014050648 A1 WO 2014050648A1 JP 2013075107 W JP2013075107 W JP 2013075107W WO 2014050648 A1 WO2014050648 A1 WO 2014050648A1
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- WIPO (PCT)
- Prior art keywords
- rotor
- vacuum pump
- cylindrical body
- peripheral surface
- balancing
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/051—Axial thrust balancing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/38—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/662—Balancing of rotors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/95—Preventing corrosion
Definitions
- the present invention relates to a rotor of a vacuum pump used as a gas exhaust means for a process chamber in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, a solar panel manufacturing apparatus, and other sealed chambers, and a vacuum including the rotor.
- a vacuum pump used as a gas exhaust means for a process chamber in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, a solar panel manufacturing apparatus, and other sealed chambers, and a vacuum including the rotor.
- a vacuum pump disclosed in Patent Document 1 is known as a vacuum pump that exhausts gas in a chamber by rotating a rotor.
- a vacuum pump it is necessary to balance the entire rotating body including the rotor (8) and the rotor blade (10) integrally provided on the outer peripheral surface in the vacuum pump assembly manufacturing stage.
- the gas in the rotor 6 from the substantially middle of the rotor 6 (specifically, from the middle of the rotor 6 to the middle of the connecting portion 60).
- the range up to the exhaust port 3 side end) functions as the thread groove exhaust part Ps.
- the thread groove exhaust part Ps In the region of the thread groove exhaust portion Ps, by providing the thread groove exhaust flow paths R1 and R2 on the inner and outer peripheral sides of the rotor 6, parallelization of the thread groove exhaust flow paths and further improvement of the exhaust performance thereby can be achieved. I am trying. Therefore, when applying the conventional balancing disclosed in Patent Document 1 to the conventional vacuum pump (parallel flow type) shown in FIG. 9 of the present application, from the following ⁇ Problem A> to ⁇ Problem D >> occurs.
- a balancing groove D is formed on the inner peripheral surface of the rotor 6, and balancing is performed in the groove D.
- the fragments of the synthetic resin adhesive M1 caused by the above-mentioned corrosion do not immediately fall downward from the balancing groove D, but remain in the groove D. May end up.
- a fragment of the synthetic resin adhesive M1 generated by experimental corrosion remains in the groove D, and the fragment can be confirmed at the stage of the corrosion resistance test. It is not possible, and it is assumed that the debris flows out from the delivered vacuum pump to the upstream device.
- the synthetic resin adhesive M1 cannot be applied in the groove D, and the tool T tilted during application contacts and interferes with the rotor shaft 5, etc.
- the workability of balancing is bad.
- the tilted tool T easily contacts and interferes with the rotor shaft 5, and the workability of balancing is further deteriorated.
- the balancing portion may have an inner diameter larger than an inner diameter of the first cylindrical body, and the inner diameter may be equal to or greater than or equal to the lower part.
- the balancing portion may have a tapered shape that is deeper near the connecting portion and shallower than the connecting portion.
- the balancing portion has a stepped portion in the middle thereof, the stepped portion is a boundary, the range close to the connecting portion is deep, and the range far from the connecting portion is shallow, It may be characterized by a stepped shape.
- the gas flows backward to the inner peripheral surface of the first cylindrical body or the inner peripheral surface of the connecting portion. It may be characterized by functioning as a non-contact type seal that prevents the above.
- the predetermined gap may be from 0.5 mm to 3.0 mm, more preferably from 1.0 mm to 1.5 mm.
- the third aspect of the present invention is a rotor of a vacuum pump that exhausts the gas in the chamber, wherein the rotor connects the first and second cylinders and the ends of both cylinders.
- the first cylindrical body includes a plurality of rotor blades on an outer peripheral surface thereof, and the plurality of rotor blades are alternately arranged with a plurality of stationary blades along a vacuum pump axis.
- the second cylindrical body forms a thread groove exhaust passage by forming a thread groove exhaust passage at least on the inner peripheral side thereof, and the connecting portion
- the convex portion is formed by connecting the first cylindrical body and the second cylindrical body by fitting and mounting the body.
- the inner peripheral surface and balancing of the rotor characterized in that a mass addition means corrosion resistance to the balancing unit.
- the second cylindrical body can be formed of FRP.
- the vacuum pump according to the present invention comprises the rotor of the vacuum pump according to the first, second or third aspect of the present invention.
- the balance portion of the rotor is provided on the inner peripheral surface of the first cylinder or the connecting portion, and mass adding means is provided in the balance portion.
- mass adding means is provided in the balance portion.
- the tip of the tool in a posture substantially parallel to the inner peripheral surface of the rotor
- a synthetic resin adhesive is previously attached to the balance, and while the tool is moved in parallel, the tip of the tool is inserted into the balancer from the lower side of the opened balancer.
- a synthetic resin adhesive mass addition means
- a synthetic resin adhesive can be added to the position. Since it is not necessary to incline the tool obliquely at the time of addition, contact / interference between the tool and the rotor shaft can be avoided, and the workability of balancing can be improved.
- the phenomenon that the corrosive gas flows backward to the inner peripheral surface of the first cylindrical body or the inner peripheral surface side of the connecting portion is prevented by the non-contact type seal.
- the inner peripheral surface or the inner peripheral surface side of the connecting portion is exposed to corrosive gas. Therefore, for example, when the inner surface of the first cylinder or the inner peripheral surface of the connecting portion is used as a balancing portion, and mass adding means is provided in the balancing portion, generation of fragments due to corrosion of the mass adding means is further increased. It can be effectively prevented.
- the configuration in which the inner peripheral surface of the convex portion is used as a balance portion of the rotor and the balance portion is provided with a corrosion-resistant mass adding means Since the screw groove constituting the screw groove exhaust passage is not formed on the inner peripheral surface of the convex portion, the balance portion of the rotor by the mass adding means provided on the inner peripheral surface of the convex portion is given to the screw groove exhaust portion. Influence, specifically, the effective screw length of the thread groove exhaust portion is not shortened by the presence of the balancing portion, and the exhaust performance of the vacuum pump can be improved.
- the corrosion-resistant mass adding means is adopted, even when the inner peripheral side of the convex portion provided with the mass adding means becomes a flow path communicating with the thread groove exhaust flow path, It is possible to avoid a situation in which the mass adding means is corroded and broken by the corrosive gas in the road, and fragments can be prevented from falling off from the balancing portion. Further, the possibility that such debris flows out to the device downstream of the vacuum pump together with the gas exhausted from the vacuum pump can be greatly reduced.
- the lower part of the inner peripheral surface of the convex portion is opened downward. For this reason, even if for some reason a part of the mass adding means provided on the inner peripheral surface of the convex part falls off as a broken piece, the broken piece does not stay anywhere, and the inside of the convex part It immediately and smoothly drops downward from the open portion of the peripheral surface (the lower side of the inner peripheral surface of the convex portion) and is discharged out of the vacuum pump together with the gas exhausted from the vacuum pump. Therefore, when such debris occurs at the stage of the vacuum pump corrosion resistance test, it becomes possible to quickly discharge and detect such debris, and the debris flows out from the delivered vacuum pump to the upstream device. Can be prevented in advance.
- the lower part of the inner peripheral surface of the convex portion is opened downward. Therefore, when using, for example, a synthetic resin adhesive as the mass adding means, the synthetic resin adhesive is attached in advance to the tip of the tool in a posture substantially parallel to the inner peripheral surface of the rotor, and the tool is moved in parallel. Synthetic resin material at a predetermined position on the inner peripheral surface of the convex portion by inserting the tip of the tool into the inner peripheral surface of the convex portion from the open portion of the inner peripheral surface of the convex portion (the lower side of the inner peripheral surface of the convex portion) An adhesive (mass adding means) can be added. Since it is not necessary to incline the tool at the time of addition, contact / interference between the tool and the rotor shaft can be avoided, and the workability of balancing can be improved.
- FIG.1 (a) is sectional drawing of the vacuum pump (screw groove pump parallel flow type) which is 1st Embodiment of this invention, The same figure (b) is the B section enlarged view of (a).
- FIGS. 3A and 3B are explanatory views of a modification of the shape of the notch K1 shown in FIG.
- FIG. 4A is a sectional view of a vacuum pump (screw groove pump folded flow type) according to a second embodiment of the present invention, and
- FIG. 4B is an enlarged view of a portion B of FIG. FIG.
- FIG. 5A is a sectional view of a vacuum pump (thread groove pump parallel flow and partially resin rotor type) according to a third embodiment of the present invention
- FIG. 5B is an enlarged view of a portion B of FIG.
- 6A is a cross-sectional view of a vacuum pump (thread groove pump parallel flow type) according to a fourth embodiment of the present invention
- FIG. 6B is an enlarged view of a portion B of FIG. Fig.7
- (a) is sectional drawing of the rotor of the vacuum pump which is 5th Embodiment of this invention
- the same figure (b) is the B section enlarged view of (a).
- FIG. 8A is a cross-sectional view of a vacuum pump (thread groove pump parallel flow type) according to a sixth embodiment of the present invention
- FIG. 8B is an enlarged view of a portion B of FIG. Sectional drawing of the conventional vacuum pump (screw groove
- FIG. 10 is an explanatory diagram of a method for balancing the rotor in the conventional vacuum pump shown in FIG. 9.
- FIG. 1A is a cross-sectional view of a vacuum pump (thread groove pump parallel flow type) according to the first embodiment of the present invention
- FIG. 1B is an enlarged view of a portion B of FIG.
- the gas inlet 2 is connected to a sealed chamber (not shown), which is a high vacuum, such as a process chamber of a semiconductor manufacturing apparatus, by a bolt (not shown) provided on the flange 1C on the upper edge of the pump case 1A.
- the gas exhaust port 3 is connected in communication with an auxiliary pump (not shown).
- a cylindrical stator column 4 containing various electrical components is provided at the center of the pump case 1A, and the stator column 4 is fixed to the pump base 1B with a lower end as a fixing portion. It is set up at.
- a rotor shaft 5 is provided inside the stator column 4, and the rotor shaft 5 is arranged such that its upper end portion faces the gas inlet 2 and its lower end portion faces the pump base 1B. is there. Further, the upper end portion of the rotor shaft 5 is provided so as to protrude upward from the cylindrical upper end surface of the stator column 4.
- the drive motor 12 includes a stator 12A and a rotor 12B, and is provided near the center of the rotor shaft 5.
- the stator 12 ⁇ / b> A of the drive motor 12 is installed inside the stator column 4, and the rotor 12 ⁇ / b> B of the drive motor 12 is integrally mounted on the outer peripheral surface side of the rotor shaft 5.
- Two sets of radial magnetic bearings 10 are arranged one by one above and below the drive motor 12, and one set of axial magnetic bearings 11 is arranged on the lower end side of the rotor shaft 5.
- the rotor shaft 5 is levitated and supported by a magnetic force at a predetermined position in the radial direction.
- the axial magnetic bearing 11 includes a disk-shaped armature disk 11A attached to the outer periphery of the lower end portion of the rotor shaft 5, an axial electromagnet 11B facing up and down across the armature disk 11A, and a position slightly away from the lower end surface of the rotor shaft 5. And an axial direction displacement sensor 11C installed in The armature disk 11A is made of a material having high magnetic permeability, and the upper and lower axial electromagnets 11B attract the armature disk 11A from the upper and lower directions with a magnetic force.
- the axial direction displacement sensor 11 ⁇ / b> C detects the axial displacement of the rotor shaft 5.
- the rotor shaft 5 is levitated and supported by a magnetic force at a predetermined position in the axial direction.
- a rotor 6 is provided on the outer side of the stator column 4.
- the rotor 6 has a cylindrical shape surrounding the outer periphery of the stator column 4, and has a connecting portion 60 (specifically, an annular shape) positioned substantially in the middle thereof.
- a connecting portion 60 specifically, an annular shape
- two cylindrical bodies having different diameters are connected in the cylindrical axis direction.
- the rotor 6 in the vacuum pump of FIG. 1 (a) is cut out from one aluminum alloy lump, the first cylinder 61, the second cylinder 62, and the connection constituting the rotor 6 are connected.
- the part 60 and an end member 63 described later are formed as one component.
- An end member 63 is integrally provided at the upper end of the first cylinder 61 as a member constituting the upper end surface thereof, and the rotor 6 is integrated with the rotor shaft 5 through the end member 63. It has become.
- a boss hole 7 is provided at the center of the end member 63 and a stepped shoulder (hereinafter referred to as “rotor shaft”) is formed on the outer periphery of the upper end of the rotor shaft 5. Shoulder 9 ”).
- the rotor 6 is configured to be rotatably supported around its axis (the rotor shaft 5) by the radial magnetic bearings 10 and 10 and the axial magnetic bearing 11 through the rotor shaft 5. Accordingly, in the vacuum pump P1 of FIG. 1A, the rotor shaft 5, the radial magnetic bearings 10, 10 and the axial magnetic bearing 11 function as support means for rotatably supporting the rotor 6 around its axis. Further, since the rotor 6 rotates integrally with the rotor shaft 5, the drive motor 12 that rotationally drives the rotor shaft 5 functions as a drive unit that rotationally drives the rotor 6.
- a plurality of rotor blades 13 are integrally provided on the outer peripheral surface of the rotor 6 on the upstream side from the substantially middle of the rotor 6, specifically, on the outer peripheral surface of the first cylindrical body 61 constituting the rotor 6.
- the plurality of rotor blades 13 are arranged in a radial pattern around the rotation center axis of the rotor 6 (rotor axis 5) or the axis of the outer case 1 (hereinafter referred to as “vacuum pump axis”).
- a plurality of fixed blades 14 are provided on the inner peripheral side of the pump case 1A, and the plurality of fixed blades 14 are also arranged in a radial pattern around the vacuum pump axis.
- the rotary blades 13 and the fixed blades 14 that are radially arranged as described above are alternately arranged in multiple stages along the vacuum pump axis so that the vacuum pump A blade exhaust portion Pt of P1 is configured.
- the first cylindrical body 61 constituting the rotor 6 includes a plurality of rotary blades 13 on the outer peripheral surface, and the plurality of rotary blades 13 are provided at the vacuum pump shaft center.
- the blade exhaust part Pt of the vacuum pump P1 is configured by being alternately arranged with the plurality of fixed blades 14 along the axis.
- Each of the rotor blades 13 is a blade-like cut product that is cut and formed integrally with the outer diameter machining portion of the rotor 6 and is inclined at an angle that is optimal for exhausting gas molecules. . Any of the fixed blades 14 is also inclined at an angle optimum for exhausting gas molecules.
- the inner thread groove exhaust part stator 18A (hereinafter referred to as “inner thread groove exhaust part stator 18A”) has an outer peripheral surface of the second cylindrical body 62.
- the cylindrical fixing portion is disposed so as to face the inner peripheral surface of the second cylindrical body 62, and is disposed so as to be surrounded by the inner periphery of the second cylindrical body 62.
- a screw groove 19A that changes to a tapered cone shape whose depth is reduced in diameter downward is formed on the outer peripheral portion of the inner screw groove exhaust portion stator 18A.
- the thread groove 19A is spirally engraved from the upper end to the lower end of the inner thread groove exhaust portion stator 18A, and the thread groove exhaust flow path is formed on the inner peripheral side of the second cylindrical body 62 by such a thread groove 19A. (Hereinafter referred to as “inner screw groove exhaust passage R1”).
- the lower end portion of the inner thread groove exhaust portion stator 18A is supported by the pump base 1B.
- the second cylindrical body 62 constituting the rotor 6 has at least the inner peripheral surface and the outer periphery of the fixed portion (inner screw groove exhaust portion stator 18A) facing the inner peripheral surface.
- the thread groove exhaust portion Ps of the vacuum pump P1 is configured.
- the above-described inner thread groove exhaust flow path R1 or the like described above is formed by forming the thread grooves 19A and 19B described above on the inner peripheral surface or the outer peripheral surface of the second cylindrical body 62 or on both surfaces thereof. You may comprise so that the outer side thread groove exhaust flow path R2 may be provided.
- the gas is compressed by the drag effect on the inner peripheral surface of the screw groove 19A and the second cylindrical body 62 and the drag effect on the outer peripheral surface of the screw groove 19B and the second cylindrical body 62.
- the depth of the thread groove 19A is deepest on the upstream inlet side of the inner thread groove exhaust flow path R1 (flow path opening end closer to the gas intake port 2) and on the downstream outlet side (gas exhaust port 3). It is set so as to be shallowest at the opening end of the flow path closer to. The same applies to the thread groove 19B.
- the upstream inlet of the inner thread groove exhaust flow path R1 opens toward the inner peripheral surface of the rotor 6 (specifically, the inner surface of the connecting portion 60) in the middle of the rotor 6, and the flow path R1.
- the downstream outlet is joined to the downstream outlet of the outer thread groove exhaust passage R2 and communicates with the gas exhaust port 3.
- a communication opening H is formed substantially in the middle of the rotor 6, and the communication opening H is formed so as to penetrate between the front and back surfaces of the rotor 6. It functions to guide a part to the inner thread groove exhaust passage R1.
- the communication opening H having such a function may be formed so as to penetrate the inner and outer surfaces of the connecting portion 60 as shown in FIG.
- a plurality of the communication openings H are provided, and the plurality of communication openings H are arranged so as to be point-symmetric with respect to the vacuum pump axis, whereby the rotor 6 The center of gravity position of the rotor 6 is not easily displaced in the radial direction, and the balance of the rotor 6 can be easily corrected.
- a balancing portion K1 of the rotor 6 is provided on the inner peripheral surface of the first cylinder 61 or the connecting portion 60, and the rotor 6 is balanced on the balancing portion K1.
- the balancing portion K1 is formed by cutting out the inner peripheral surface of the first cylindrical body 61 at a predetermined depth from the connecting portion 60 side as shown in FIGS. It has an inner diameter larger than the inner diameter of the body 61, and the inner diameter is formed to be equal as it goes downward.
- this balancing part K1 has an internal diameter larger than the internal diameter of the 1st cylinder 61, you may form so that the internal diameter may become equal or more as it goes to the lower part.
- the balancing portion K1 is preferably formed in an annular shape over the entire circumferential direction of the inner peripheral surface of the first cylindrical body 61 as shown in FIG. If formed in such a manner, the rotor 6 can be balanced by the mass adding means M at any circumferential position, the degree of freedom of balancing becomes high, and the first cylinder by the notched balancing portion K1. This is because the position of the center of gravity of the rotor 6 is difficult to shift with respect to the radial direction due to the lack of the body 61, and the balance of the rotor 6 can be easily corrected.
- the length of the balancing portion K1 is set to be equal to or less than half of the reference with respect to the axial length of the first cylindrical body 61, but is not limited thereto. There is nothing. Although not shown, the length of the balancing portion K1 may be more than half of the reference.
- FIG. 2 is an explanatory diagram of a method of balancing the rotor 6 by the balancing unit K1 shown in FIG. Since the balancing part K1 shown in FIG. 1 is provided in a form cut out from the connecting part 60 side as described above, the lower side (the connecting part 60 side) of the balancing part K1 is opened downward. ing. Therefore, for example, when a synthetic resin adhesive described later is used as the mass adding means M, the rotor 6 can be balanced by the balancing method shown in FIG.
- a synthetic resin adhesive (mass addition means M) is attached in advance to the tip of the rod-shaped tool T, and the tool T is in a posture substantially parallel to the inner peripheral surface of the rotor 6, In this posture, the tip of the tool T is inserted between the rotor shaft 5 and the rotor 6 (see the tool T indicated by a two-dot broken line in FIG. 2). Then, while translating the tool T inserted as described above, the tip of the tool T is inserted into the balancing portion K1 from the lower side of the balancing portion K1 opened as described above (FIG. 2). And a synthetic resin adhesive (mass adding means M) is added to a predetermined position of the balancing portion K1.
- FIG. 3 (a) and 3 (b) are explanatory diagrams of a modification of the shape of the balancing portion K1 shown in FIG. 1 (a).
- the balancing portion K2 in FIG. 3A has a tapered shape that is deeper in the vicinity of the connection portion 60 and shallower in the distance from the connection portion 60 in the whole.
- the balancing portion K3 in FIG. 3 (b) has a stepped portion S in the middle thereof, and the range close to the connecting portion 60 with the stepped portion S as a boundary is deeper than the connecting portion 60. Shallow, stepped shape.
- Such a balancing portion K2 having a tapered shape and a balancing portion K3 having a stepped portion S can be employed as the balancing portion K1 in FIG.
- illustration is omitted, if necessary, a balancing portion having a shape obtained by combining the tapered shape and the stepped portion can be adopted as the balancing portion K1 in FIG.
- the mass adding means M for example, various synthetic resin adhesives such as epoxy resin, silicon resin, polyamide resin and the like are applied to the balancing portions K1, K2, and K3 with a thickness of about 1 mm, and synthesized by normal temperature or heating.
- a method of curing the resin adhesive can be employed.
- a method of reducing the amount of the synthetic resin adhesive to be applied for example, a method of containing a metal powder having a higher density than the synthetic resin adhesive in the synthetic resin adhesive may be employed.
- this type of metal powder include ceramic fine particles or ceramic short fibers made of metal oxide such as SUS powder, aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ), and chromium oxide (Cr 2 O 3 ). Can be adopted.
- the balancing portions K1, K2, and K3 are arranged from the inner diameter of the first cylindrical body 61. Since it has a configuration in which it has a large inner diameter, and the inner diameter is equal to or greater than the lower part, the lower part of the balancing parts K1, K2, and K3 (the connecting part 60 side) is opened downward. It will be a thing. Thus, for example, even if for some reason a part of the mass adding means M provided in the balancing sections K1, K2, and K3 falls off as broken pieces, the dropped pieces are opened as described above.
- the mass adding means M when the lower portions of the balancing portions K1, K2, and K3 are opened downward as described above, for example, when a synthetic resin adhesive is used as the mass adding means M, it is substantially the same as the inner peripheral surface of the rotor 6. Synthetic resin adhesive is attached to the tip of the tool in a parallel posture in advance, and the balancing parts K1, K2 are opened from the lower side of the opened balancing parts K1, K2, K3 while moving the tool in parallel. By inserting the tip of the tool into K3, a synthetic resin adhesive (mass adding means) can be added to predetermined positions of the balancing portions K1, K2, and K3. Since it is not necessary to incline the tool obliquely at the time of addition, contact / interference between the tool and the rotor shaft can be avoided, and balancing workability is improved.
- a synthetic resin adhesive mass adding means
- FIG. 4A is a cross-sectional view of a vacuum pump (thread groove pump return flow type) according to a second embodiment of the present invention
- FIG. 4B is an enlarged view of a portion B in FIG.
- the vacuum pump P1 in FIG. 1A has a configuration in which gas flows in parallel on the inner peripheral side and the outer peripheral side of the substantially lower half (second cylindrical body 62) of the rotor 6 (thread groove pump parallel flow type).
- the vacuum pump P2 shown in FIG. 4A has a lower end portion of the rotor 6 (specifically, a lower end portion of the second cylindrical body 62) as indicated by arrows R1-R2 in FIG.
- the gas flow is reversed in the vertical direction so that the gas flows in the opposite direction on the inner peripheral side and the outer peripheral side of the substantially lower half of the rotor 6 (thread groove pump return flow type).
- the basic configuration of the vacuum pump P2 other than the configuration is the same as that of the vacuum pump P1 of FIG. 1A, in FIG. 4A, the same members as those shown in FIG. Are denoted by the same reference numerals, and detailed description thereof is omitted.
- FIG. 5A is a cross-sectional view of a vacuum pump (thread groove pump parallel flow and partially resin rotor type) according to a third embodiment of the present invention
- FIG. 5B is an enlarged view of part B of FIG. It is.
- the vacuum pump P3 in FIG. 5A is obtained by forming the second cylindrical body 62 of the vacuum pump P1 in FIG. 1A with fiber reinforced resin, and the basic vacuum pump P3 other than that is configured as follows. Since it is the same as the vacuum pump P1 of FIG. 1A, in FIG. 5A, the same members as those shown in FIG. 1A are denoted by the same reference numerals, and detailed description thereof is omitted.
- the rotor 6 of the vacuum pump P3 in FIG. 5 (a) is similar to the rotor 6 of the vacuum pump P1 in FIG. 1 (a) through the connecting portion 60 to connect the first cylinder 61 and the second cylinder 62.
- the end portions are connected to each other.
- the specific configuration of the rotor 6 such as the specific configuration of the connecting portion 60 and the material of the second cylindrical body 62 is the vacuum pump shown in FIG. It is different from the rotor 6 of P1.
- the connecting portion 60 in the rotor 6 of the vacuum pump P3 in FIG. 5A is integrated with the annular plate 60A integrally provided at the lower end of the first cylinder 61 and the outer peripheral portion of the annular plate 60A.
- the first cylindrical body 61 and the second cylindrical body 62 are formed by fitting and mounting the second cylindrical body 62 on the outer peripheral portion of the annular convex section 60B. Are connected together.
- the balancing sections K1, K2, and K3 shown in FIGS. 1A and 1B and FIGS. 3A and 3B described above in the first embodiment of the present invention are the vacuum pumps shown in FIG. As in P3, the present invention can also be applied to a type in which the second cylindrical body 62 of the entire rotor 6 is formed of fiber reinforced resin.
- FIG. 6A is a cross-sectional view of a vacuum pump (thread groove pump parallel flow type) according to a fourth embodiment of the present invention
- FIG. 6B is an enlarged view of part B of FIG.
- the basic configuration of the vacuum pump P4 of FIG. 6A is the same as that of the vacuum pump of FIG. 1A. Therefore, in FIG. 6A, the same members as those shown in FIG. Are denoted by the same reference numerals, and detailed description thereof is omitted.
- the balancing part K1 in the vacuum pump P1 in FIG. 1A has an inner diameter larger than the inner diameter of the first cylinder 61, but the balancing part K4 in the vacuum pump P4 in FIG.
- the mass adding means M is provided in the balancing portion K4 configured as described above.
- the balancing unit K4 in FIG. 6A can be applied to, for example, the vacuum pump P2 in FIG. 4A and the vacuum pump P3 in FIG.
- the balancing portion K4 of the rotor 6 is provided on the inner peripheral surface of the first cylindrical body 61 or the connecting portion 60 as in the vacuum pump P1 of the first embodiment.
- the thread groove exhaust passages R1 and R2 are not formed on the inner peripheral side of the first cylindrical body 61 or the connecting portion 60, the same effects as the vacuum pump P1 of the first embodiment, that is, It is possible to improve the exhaust performance of the vacuum pump P4 and avoid problems such as the mass adding means M being broken by corrosion and generating debris.
- the lower part of the balancing portion K4 is opened downward as in the vacuum pump P1 of the first embodiment. Therefore, the vacuum pump of the first embodiment The same effect as P1, that is, early discharge and early detection of the fragments are possible, and the workability of balancing is improved.
- FIG. 7A is a cross-sectional view of a rotor of a vacuum pump according to a fifth embodiment of the present invention
- FIG. 7B is an enlarged view of part B of FIG.
- this balancing portion K5 can also employ, for example, a tapered shape or a stepped shape shown in FIGS. 1B and 3A and 3B, respectively.
- the corrosion-resistant mass adding means M since the corrosion-resistant mass adding means M is adopted, the inner peripheral side of the convex portion 60B provided with the mass adding means M is connected to the thread groove exhaust passage R1. Although it becomes a communicating flow path, it is possible to avoid a situation in which the mass adding means M is corroded and broken by corrosive gas in the flow path, and fragments can be prevented from falling off from the balancing portion K5. Further, the possibility that such debris flows out to the device downstream of the vacuum pump together with the gas exhausted from the vacuum pump can be greatly reduced.
- the lower part of the inner peripheral surface of the convex portion 60B is opened downward. For this reason, even if a situation occurs in which a part of the mass adding means M provided on the inner peripheral surface of the convex portion 60B falls off as a broken piece for some reason, the dropped piece does not stay anywhere and the convex portion It immediately and smoothly falls downward from the open portion of the inner peripheral surface of 60B (the lower side of the inner peripheral surface of convex portion 60B), and is discharged out of the vacuum pump together with the gas exhausted from the vacuum pump. Therefore, when such debris is generated at the stage of the corrosion resistance test of the vacuum pump, it becomes possible to quickly discharge and detect such debris, and the debris flows out from the delivered vacuum pump to the upstream device. Problems can be prevented in advance.
- the lower part of the inner peripheral surface of the convex portion 60B is opened downward. Therefore, when using, for example, a synthetic resin adhesive as the mass adding means M, the synthetic resin adhesive is previously attached to the tip of the tool in a posture substantially parallel to the inner peripheral surface of the rotor 6, and the tool is moved in parallel. While inserting the tip of the tool into the inner peripheral surface of the convex portion 60B from the open portion (the lower side of the inner peripheral surface of the convex portion 60B) of the inner peripheral surface of the convex portion 60B, A synthetic resin material adhesive (mass addition means M) can be added to a predetermined position on the peripheral surface. Since it is not necessary to incline the tool obliquely at the time of addition, contact / interference between the tool and the rotor shaft 5 can be avoided, and the workability of balancing can be improved.
- a synthetic resin adhesive as the mass adding means M
- FIG. 8A is a sectional view of a vacuum pump (thread groove pump parallel flow type) according to a sixth embodiment of the present invention
- FIG. 8B is an enlarged view of a portion B of FIG.
- FIG. 8A Since the basic configuration of the vacuum pump P5 in FIG. 8A is the same as that of the vacuum pump P1 in FIG. 1A, in FIG. 8A, the same members as shown in FIG. The same reference numerals are given to the members, and detailed description thereof is omitted.
- FIGS. 1 (a) of FIG. 8 (a) Configuration different from that of the vacuum pump P1 of the vacuum pump P5 is FIGS. 1 (a) of FIG. 8 (a), the inner thread groove exhaust portion stator 18A positioned bottom 60 IN of the connecting portion 60 and its bottom 60 IN side (fixed part ) and by the opposed via a predetermined gap V, connecting part 60 and the stationary seal portion 20 between the inner thread groove exhaust portion stator 18A is formed, the bottom surface 60 iN and the inner thread groove exhaust portion of the connecting portion 60 It is configured to function as a non-contact type seal that prevents the backflow of gas to the inner peripheral surface of the first cylindrical body 61 or the inner peripheral surface of the connecting portion 60 in a range facing the stator 18A. It is.
- the predetermined gap V is set in consideration of the amount of runout of the rotor during operation of the vacuum pump P5, dimensional changes due to thermal expansion, assembly errors during assembly, and the like.
- the predetermined gap V is set to about 0.5 mm to 3.0 mm as a minute seal gap, but this set value can be changed as needed.
- the fixed seal portion 20 is formed integrally with the distal end portion of the inner thread groove exhaust portion stator 18A.
- the fixed seal portion 20 is formed separately from the inner thread groove exhaust portion stator 18A and attached and fixed to the inner thread groove exhaust portion stator 18A may be employed.
- a configuration in which the fixed seal portion 20 is integrally provided or attached and fixed to a fixed portion in a vacuum pump different from the inner thread groove exhaust portion stator 18A, for example, the stator column 4 (fixed portion) or the like may be employed.
- the fixed seal portion 20 is formed in an annular shape so as to surround the outer periphery of the stator column 4.
- the non-contact type seal is provided in an annular shape.
- the balancing portion K1 of the rotor 6 is provided on the inner peripheral surface of the first cylindrical body 61 or the connecting portion 60 as in the vacuum pump P1 of FIG.
- the mass adding means M is provided in the balancing portion K1, but in the case of the vacuum pump P5 in FIG. 8A, the region where the mass adding means M is provided, that is, the first cylindrical body. Since the corrosive gas is prevented from flowing back on the inner peripheral surface 61 or the inner peripheral surface side of the connecting portion 60 as described above, the mass adding means M is less likely to be exposed to the corrosive gas. It is possible to more effectively prevent the generation of fragments due to corrosion of the additional means M.
- the non-contact type seal in the vacuum pump P5 in FIG. 8 (a) described above is not limited to the vacuum pump P1 in FIG. 1 (a), for example, FIG. 4 (a), FIG. 5 (a), or FIG. ) Vacuum pumps P2, P3, and P4.
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Abstract
Description
本出願の図9を参照すると、内側のネジ溝19Aと対向するロータ6の内周面に、合成樹脂接着剤M1の塗布によるバランス取り部BCが設けられるため、ネジ溝排気部Ps全体の有効なネジ長さが短くなり、真空ポンプP6の排気性能が低下する。
本出願の図9を参照すると、合成樹脂接着剤M1の塗布によるバランス取り部BCがロータ6内周側のネジ溝排気流路R1に露出し、露出した合成樹脂接着剤M1がネジ溝排気流路R1内の腐食性ガスに曝される。このため、バランス取り用の合成樹脂接着剤M1が、腐食により砕け、破片となって、前述の製造装置のプロセスチャンバ、その他の密閉チャンバへ流出する可能性がある。例えば、ロータの回転運動により破片に運動エネルギが与えられた場合や、真空ポンプからチャンバ側への排出ガスの逆流が生じた場合などでの流出が考えられる。このような破片の流出は、合成樹脂接着剤M1以外の別の質量付加手段をバランス取り用の錘として採用した場合も、同様に生じ得る。
特に、本出願の図9に示したように、ロータ6のバランス取り部BCの具体的な構成として、ロータ6の内周面にバランス取り用の溝Dを形成し、この溝D内にバランス取り用の合成樹脂接着剤M1を塗布する場合には、前述の腐食によって生じた合成樹脂接着剤M1の破片が、バランス取り用の溝Dから直ちに下方へ落下せず、溝D内に留まってしまう場合がある。このため、例えば、真空ポンプの耐腐食性試験において、試験的な腐食により生じた合成樹脂接着剤M1の破片が前記溝D内に留まり、耐腐食性試験の段階でその破片を確認することができず、納品した真空ポンプからその上流の装置へ前記破片が流出するという不具合が想定される。
また、前記のようなバランス取り用の溝D内に合成樹脂接着剤M1を塗布する際は、例えば本出願の図10に示したように、棒状の工具Tの先端に合成樹脂接着剤M1を予め付着させておき、該工具Tの先端をロータ軸5とロータ6との間Lに挿入する(図10の二点破線で示した工具Tを参照)。この際、バランス取り用の溝Dはロータ6の内周面から所定の深さを有しているので、前記のように挿入した工具Tをロータ6の内周面に対して所定角度傾けないと(図10の実線で示した工具Tを参照)、その溝D内に合成樹脂接着剤M1を塗布することができず、塗布時に傾けた工具Tがロータ軸5に接触・干渉する等、バランス取りの作業性が悪い。特に小型の真空ポンプでは、ロータ軸5とロータ6との間隔が狭くなることから、傾けた工具Tがロータ軸5に接触・干渉し易く、バランス取りの作業性は更に悪化する。
図1(a)の真空ポンプP1では、ロータ6の略中間(具体的には、連結部60)より上流(ロータ6の略中間からロータ6のガス吸気口2側端部までの範囲)が翼排気部Ptとして機能する。以下、この翼排気部Ptを詳細に説明する。
以上の構成からなる翼排気部Ptでは、駆動モータ12の起動により、ロータ軸5、ロータ6および複数の回転翼13が一体に高速回転し、最上段の回転翼13がガス吸気口2から入射した気体分子に下向き方向の運動量を付与する。この下向き方向の運動量を有する気体分子が固定翼14によって次段の回転翼13側へ送り込まれる。以上のような気体分子への運動量の付与と送り込み動作とが繰り返し多段に行われることにより、ガス吸気口2側の気体分子はロータ6の下流に向かって順次移行するように排気される。
図1(a)の真空ポンプP1では、ロータ6の略中間(具体的には、連結部60)より下流(ロータ6の略中間からロータ6のガス排気口3側端部までの範囲)がネジ溝排気部Psとして機能する。以下、このネジ溝排気部Psを詳細に説明する。
先に説明した翼排気部Ptの排気動作による移送で外側ネジ溝排気流路R2の上流入口や最終隙間Gに到達した気体分子は、外側ネジ溝排気流路R2や、連通開口部Hから内側ネジ溝排気流路R1に移行する。移行した気体分子は、ロータ6の回転によって生じる効果、すなわち、第2の筒体62の外周面とネジ溝19Bでのドラッグ効果や、第2の筒体62の内周面とネジ溝19Aでのドラッグ効果によって、遷移流から粘性流に圧縮されながらガス排気口3に向って移行し、最終的に図示しない補助ポンプを通じて外部へ排気される。
図1(a)の真空ポンプP1では、第1の筒体61又は連結部60の内周面に、ロータ6のバランス取り部K1を設け、このバランス取り部K1に、ロータ6のバランスを取るための錘の一種として、同図(b)に示す質量付加手段Mを設けている。
1A ポンプケース
1B ポンプベース
1C フランジ
2 ガス吸気口
3 ガス排気口
4 ステータコラム
5 ロータ軸
6 ロータ
60 連結部
60IN 連結部の内面
60A 環状の板体
60B 環状の凸部
61 第1の筒体
62 第2の筒体
63 端部材
7 ボス孔
9 肩部
10 ラジアル磁気軸受
10A ラジアル電磁石ターゲット
10B ラジアル電磁石
10C ラジアル方向変位センサ
11 アキシャル磁気軸受
11A アーマチュアディスク
11B アキシャル電磁石
11C アキシャル方向変位センサ
12 駆動モータ
12A 固定子
12B 回転子
13 回転翼
13E 最下段の回転翼
14 固定翼
18A 内側ネジ溝排気部ステータ(第2の筒体の内周面に対向する固定部材)
18B 外側ネジ溝排気部ステータ(第2の筒体の外周面に対向する固定部材)
19A、19B ネジ溝
20 固定シール部
BC 従来のバランス取り部
D バランス取り用の溝
G 最終隙間(最下段の回転翼と連通開口部の上流端との間の隙間)
H 連通開口部
K1、K2、K3、K4 バランス取り部
M 質量付加手段
P1、P2、P3、P4、P5、P6 排気ポンプ
Pt 翼排気部
Ps ネジ溝排気部
R1 内側ネジ溝排気通路
R2 外側ネジ溝排気通路
S 段部
T 工具
V 所定隙間(微小シール隙間)
Claims (10)
- チャンバのガスを排気する真空ポンプのロータであって、
前記ロータは、
第1及び第2の筒体と、
前記両筒体の端部どうしを連結する連結部と、を具備し、
前記第1の筒体は、その外周面に複数の回転翼を備えるとともに、これら複数の回転翼が真空ポンプ軸心に沿って複数の固定翼と交互に配置されることによって、翼排気部を構成し、
前記第2の筒体は、少なくとも、その内周側に、ネジ溝排気流路を形成することによって、ネジ溝排気部を構成し、
前記第1の筒体又は前記連結部の内周面に前記ロータのバランス取り部を設け、このバランス取り部に質量付加手段を設けたこと
を特徴とするロータ。 - 前記バランス取り部は、前記第1の筒体の内径より大きい内径を有し、その内径が下部に行くに従い同等又は同等以上であること
を特徴とする請求項1に記載のロータ。 - 前記バランス取り部は、前記連結部に近い方で深く、かつ、前記連結部から遠い方で浅い、テーパ形状になっていること
を特徴とする請求項2に記載のロータ。 - 前記バランス取り部は、その途中に段部を有するとともに、該段部を境界として、前記連結部に近い範囲が深く、かつ、前記連結部より遠い範囲が浅い、段付き形状になっていること
を特徴とする請求項2に記載のロータ。 - 前記連結部と固定部が所定隙間を介して対向することにより、前記第1の筒体の内周面又は前記連結部の内周面側への前記ガスの逆流を防止する非接触型シールとして機能すること
を特徴とする請求項1から4のいずれかに記載のロータ。 - チャンバのガスを排気する真空ポンプのロータであって、
前記ロータは、
第1及び第2の筒体と、
前記両筒体の端部どうしを連結する連結部と、を具備し、
前記第1の筒体は、その外周面に複数の回転翼を備えるとともに、これら複数の回転翼が真空ポンプ軸心に沿って複数の固定翼と交互に配置されることによって、翼排気部を構成し、
前記第2の筒体は、少なくとも、その内周側に、ネジ溝排気流路を形成することによって、ネジ溝排気部を構成し、
前記連結部と固定部が所定隙間を介して対向することにより、前記第1の筒体の内周面又は前記連結部の内周面側への前記ガスの逆流を防止する非接触型シールとして機能すること
を特徴とするロータ。 - 前記所定隙間は、0.5mmから3.0mmであり、より好ましくは1.0mmから1.5mmであること
を特徴とする請求項5または請求項6に記載のロータ。 - チャンバのガスを排気する真空ポンプのロータであって、
前記ロータは、
第1及び第2の筒体と、
前記両筒体の端部どうしを連結する連結部と、を具備し、
前記第1の筒体は、その外周面に複数の回転翼を備えるとともに、これら複数の回転翼が真空ポンプ軸心に沿って複数の固定翼と交互に配置されることによって、翼排気部を構成し、
前記第2の筒体は、少なくとも、その内周側に、ネジ溝排気流路を形成することによって、ネジ溝排気部を構成し、
前記連結部は、前記第1の筒体の下端に一体に設けた環状の板体と、この環状の板体の外周部に一体に設けた環状の凸部とからなり、その環状の凸部に前記第2の筒体が嵌め込み装着されることによって、第1の筒体と第2の筒体とを連結してなり、
前記凸部の内周面を前記ロータのバランス取り部とし、このバランス取り部に耐腐食性の質量付加手段を設けたこと
を特徴とするロータ。 - 前記第2の筒体は、FRPで形成されていること
を特徴とする請求項1から8のいずれかに記載のロータ。 - 請求項1から9のいずれかに記載のロータを備えたことを特徴とする真空ポンプ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/429,645 US9982682B2 (en) | 2012-09-26 | 2013-09-18 | Rotor and vacuum pump equipped with same |
EP13840966.9A EP2902636B1 (en) | 2012-09-26 | 2013-09-18 | Rotor, and vacuum pump equipped with rotor |
CN201380044627.0A CN104541063B (zh) | 2012-09-26 | 2013-09-18 | 转子及具备该转子的真空泵 |
KR1020157001164A KR102106658B1 (ko) | 2012-09-26 | 2013-09-18 | 로터, 및, 이 로터를 구비한 진공 펌프 |
JP2014538413A JP6208141B2 (ja) | 2012-09-26 | 2013-09-18 | ロータ、及び、このロータを備えた真空ポンプ |
US15/845,367 US20180128280A1 (en) | 2012-09-26 | 2017-12-18 | Rotor and vacuum pump equipped with same |
Applications Claiming Priority (2)
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JP2012211892 | 2012-09-26 | ||
JP2012-211892 | 2012-09-26 |
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Application Number | Title | Priority Date | Filing Date |
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US14/429,645 A-371-Of-International US9982682B2 (en) | 2012-09-26 | 2013-09-18 | Rotor and vacuum pump equipped with same |
US15/845,367 Division US20180128280A1 (en) | 2012-09-26 | 2017-12-18 | Rotor and vacuum pump equipped with same |
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WO2014050648A1 true WO2014050648A1 (ja) | 2014-04-03 |
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EP (1) | EP2902636B1 (ja) |
JP (1) | JP6208141B2 (ja) |
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WO2021065584A1 (ja) * | 2019-09-30 | 2021-04-08 | エドワーズ株式会社 | 真空ポンプ |
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JP6578838B2 (ja) * | 2015-09-15 | 2019-09-25 | 株式会社島津製作所 | 真空ポンプおよび質量分析装置 |
JP6758865B2 (ja) * | 2016-03-04 | 2020-09-23 | エドワーズ株式会社 | 真空ポンプ |
KR102499085B1 (ko) | 2016-05-04 | 2023-02-10 | 삼성전자주식회사 | 진공 펌프 |
JP7108377B2 (ja) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
JP6967954B2 (ja) * | 2017-12-05 | 2021-11-17 | 東京エレクトロン株式会社 | 排気装置、処理装置及び排気方法 |
JP2020186687A (ja) * | 2019-05-15 | 2020-11-19 | エドワーズ株式会社 | 真空ポンプとそのネジ溝ポンプ部の固定部品 |
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GB0124731D0 (en) * | 2001-10-15 | 2001-12-05 | Boc Group Plc | Vacuum pumps |
JP2003172291A (ja) * | 2001-12-04 | 2003-06-20 | Boc Edwards Technologies Ltd | 真空ポンプ |
CN102762870B (zh) * | 2010-09-06 | 2016-06-29 | 埃地沃兹日本有限公司 | 涡轮分子泵 |
EP2623791B1 (en) * | 2010-09-28 | 2019-12-04 | Edwards Japan Limited | Exhaust pump |
JP6287475B2 (ja) * | 2014-03-28 | 2018-03-07 | 株式会社島津製作所 | 真空ポンプ |
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2013
- 2013-09-18 EP EP13840966.9A patent/EP2902636B1/en active Active
- 2013-09-18 WO PCT/JP2013/075107 patent/WO2014050648A1/ja active Application Filing
- 2013-09-18 CN CN201380044627.0A patent/CN104541063B/zh active Active
- 2013-09-18 US US14/429,645 patent/US9982682B2/en active Active
- 2013-09-18 KR KR1020157001164A patent/KR102106658B1/ko active IP Right Grant
- 2013-09-18 JP JP2014538413A patent/JP6208141B2/ja active Active
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2017
- 2017-12-18 US US15/845,367 patent/US20180128280A1/en not_active Abandoned
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JP3971821B2 (ja) | 1996-08-10 | 2007-09-05 | プファイファー・ヴァキューム・ゲーエムベーハー | 気体摩擦ポンプ |
JP2003021093A (ja) * | 2001-07-05 | 2003-01-24 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP2003065281A (ja) * | 2001-08-27 | 2003-03-05 | Ebara Corp | 真空ポンプ |
JP2003148389A (ja) * | 2001-11-16 | 2003-05-21 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP3974772B2 (ja) | 2001-11-16 | 2007-09-12 | Bocエドワーズ株式会社 | 真空ポンプ |
JP2004278512A (ja) | 2002-10-11 | 2004-10-07 | Alcatel | 複合材を用いたスカート(compositeskirt)を有するターボ/ドラッグポンプ |
WO2012043035A1 (ja) * | 2010-09-28 | 2012-04-05 | エドワーズ株式会社 | 排気ポンプ |
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WO2021065584A1 (ja) * | 2019-09-30 | 2021-04-08 | エドワーズ株式会社 | 真空ポンプ |
US11994137B2 (en) | 2019-09-30 | 2024-05-28 | Edwards Japan Limited | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
KR20150063029A (ko) | 2015-06-08 |
US20150240829A1 (en) | 2015-08-27 |
CN104541063A (zh) | 2015-04-22 |
JP6208141B2 (ja) | 2017-10-04 |
US20180128280A1 (en) | 2018-05-10 |
KR102106658B1 (ko) | 2020-05-04 |
EP2902636B1 (en) | 2023-10-04 |
CN104541063B (zh) | 2018-08-31 |
EP2902636A4 (en) | 2016-10-05 |
US9982682B2 (en) | 2018-05-29 |
EP2902636A1 (en) | 2015-08-05 |
JPWO2014050648A1 (ja) | 2016-08-22 |
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