GB201914605D0 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB201914605D0
GB201914605D0 GB201914605A GB201914605A GB201914605D0 GB 201914605 D0 GB201914605 D0 GB 201914605D0 GB 201914605 A GB201914605 A GB 201914605A GB 201914605 A GB201914605 A GB 201914605A GB 201914605 D0 GB201914605 D0 GB 201914605D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB201914605A
Other versions
GB2588146A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1914605.9A priority Critical patent/GB2588146A/en
Publication of GB201914605D0 publication Critical patent/GB201914605D0/en
Priority to PCT/GB2020/052454 priority patent/WO2021069874A1/en
Priority to JP2022520990A priority patent/JP2022552208A/en
Priority to US17/766,631 priority patent/US20230313804A1/en
Priority to KR1020227011548A priority patent/KR20220073757A/en
Publication of GB2588146A publication Critical patent/GB2588146A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
GB1914605.9A 2019-10-09 2019-10-09 Vacuum pump Pending GB2588146A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB1914605.9A GB2588146A (en) 2019-10-09 2019-10-09 Vacuum pump
PCT/GB2020/052454 WO2021069874A1 (en) 2019-10-09 2020-10-05 Vacuum pump comprising an axial magnetic bearing and a radial gas foil bearing
JP2022520990A JP2022552208A (en) 2019-10-09 2020-10-05 Vacuum pump with axial magnetic bearings and gas foil radial bearings
US17/766,631 US20230313804A1 (en) 2019-10-09 2020-10-05 Vacuum pump comprising an axial magnetic bearing and a radial gas foil bearing
KR1020227011548A KR20220073757A (en) 2019-10-09 2020-10-05 Vacuum pump with axial magnetic bearing and radial gas foil bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1914605.9A GB2588146A (en) 2019-10-09 2019-10-09 Vacuum pump

Publications (2)

Publication Number Publication Date
GB201914605D0 true GB201914605D0 (en) 2019-11-20
GB2588146A GB2588146A (en) 2021-04-21

Family

ID=68541197

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1914605.9A Pending GB2588146A (en) 2019-10-09 2019-10-09 Vacuum pump

Country Status (5)

Country Link
US (1) US20230313804A1 (en)
JP (1) JP2022552208A (en)
KR (1) KR20220073757A (en)
GB (1) GB2588146A (en)
WO (1) WO2021069874A1 (en)

Family Cites Families (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2309665C3 (en) * 1973-02-27 1981-07-09 Leybold-Heraeus GmbH, 5000 Köln Turbomolecular vacuum pump
DE2554995A1 (en) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik TURBOMOLECULAR PUMP
JPS5841296A (en) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd Small axial-flow molecular pump applying magnetic bearing
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
JPH0759954B2 (en) * 1985-03-14 1995-06-28 株式会社島津製作所 Magnetic bearing device for turbo molecular pump
JPH0455276Y2 (en) * 1986-05-16 1992-12-25
DE3818556A1 (en) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik MAGNETIC BEARING FOR A FAST ROTATING VACUUM PUMP
JPH0216389A (en) * 1988-06-30 1990-01-19 Ibiden Co Ltd Turbo molecular drag pump
DE3931661A1 (en) * 1989-08-25 1991-04-04 Leybold Ag MAGNETIC BEARING VACUUM PUMP
JPH04219493A (en) * 1990-08-10 1992-08-10 Ebara Corp Turbo-molecular pump
JPH0536093U (en) * 1991-10-18 1993-05-18 セイコー精機株式会社 Vacuum pump
JPH0536094U (en) * 1991-10-18 1993-05-18 セイコー精機株式会社 Vacuum pump
JP2998441B2 (en) * 1992-08-19 2000-01-11 株式会社日立製作所 Turbo vacuum pump
JPH0710492U (en) * 1993-07-19 1995-02-14 セイコー精機株式会社 Turbo molecular pump
DE4427154A1 (en) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Friction pump with magnetic bearings
JPH10292818A (en) * 1997-04-16 1998-11-04 Shimadzu Corp High-speed rotating machine
JPH10288187A (en) * 1997-04-16 1998-10-27 Shimadzu Corp Dry pump
JP3452468B2 (en) * 1997-08-15 2003-09-29 株式会社荏原製作所 Turbo molecular pump
AU9797298A (en) * 1997-10-21 1999-05-10 Multilevel Metals, Inc. Gas bearing turbo pump and gas bearing feedthrough
JP3997578B2 (en) * 1997-12-08 2007-10-24 株式会社島津製作所 High speed rotating equipment
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
DE19827606A1 (en) * 1998-06-20 1999-12-23 Schlafhorst & Co W Non-contact bearing for open-end spinning rotor shaft with magnetic axial bearing
US20030017047A1 (en) * 1998-06-25 2003-01-23 Ebara Corporation Turbo-molecular pump
DE19846189A1 (en) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Friction vacuum pump
DE19915983A1 (en) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vacuum pump with gas storage
DE10022062A1 (en) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Machine, preferably turbo-molecular vacuum pumps, has magnet bearings each comprising concentrically-arranged magnet ring stacks
DE10043235A1 (en) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh vacuum pump
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
JP2002168249A (en) * 2000-11-29 2002-06-14 Shimadzu Corp Rotating machine
KR100702948B1 (en) * 2001-04-06 2007-04-03 삼성테크윈 주식회사 Turbo molecular pump
EP1559914B1 (en) * 2004-01-29 2007-05-09 Pfeiffer Vacuum GmbH Gas friction pump
DE502004003827D1 (en) * 2004-01-29 2007-06-28 Pfeiffer Vacuum Gmbh Gas friction pump
JP2007092646A (en) * 2005-09-29 2007-04-12 Jtekt Corp Supercharger for fuel cell
JP3119272U (en) * 2005-12-08 2006-02-16 株式会社島津製作所 Molecular pump
JP4779761B2 (en) * 2006-03-30 2011-09-28 株式会社ジェイテクト Compressor for fuel cell
DE102006020102A1 (en) * 2006-04-29 2007-10-31 Leybold Vacuum Gmbh Lubricant-free vacuum pump used as a turbo molecular pump comprises a gas bearing surface facing a shaft and/or a gas bearing rotor and having a hard layer
DE102006020710A1 (en) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vacuum pump with housing
JP4894553B2 (en) * 2007-02-23 2012-03-14 株式会社ジェイテクト Centrifugal air compressor
DE102007014142B4 (en) * 2007-03-23 2019-05-29 Pfeiffer Vacuum Gmbh vacuum pump
JP4935509B2 (en) * 2007-06-05 2012-05-23 株式会社島津製作所 Turbo molecular pump
DE102007053979A1 (en) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vacuum pump with lubricant pump
JP5087418B2 (en) * 2008-02-05 2012-12-05 株式会社荏原製作所 Turbo vacuum pump
EP2108844A3 (en) * 2008-03-26 2013-09-18 Ebara Corporation Turbo vacuum pump
JP5577798B2 (en) * 2010-04-02 2014-08-27 株式会社島津製作所 Turbo molecular pump
US20130129482A1 (en) * 2010-08-06 2013-05-23 Shimadzu Corporation Vacuum pump
WO2014050648A1 (en) * 2012-09-26 2014-04-03 エドワーズ株式会社 Rotor, and vacuum pump equipped with rotor
GB2528765A (en) * 2012-10-30 2016-02-03 Edwards Ltd Vacuum pump
JP6331491B2 (en) * 2013-12-27 2018-05-30 株式会社島津製作所 Vacuum pump
JP6638444B2 (en) * 2016-02-09 2020-01-29 株式会社島津製作所 Vacuum pump
JP6672056B2 (en) * 2016-04-22 2020-03-25 三菱重工サーマルシステムズ株式会社 Turbo compressor, turbo refrigeration device provided with the same

Also Published As

Publication number Publication date
WO2021069874A1 (en) 2021-04-15
KR20220073757A (en) 2022-06-03
GB2588146A (en) 2021-04-21
US20230313804A1 (en) 2023-10-05
JP2022552208A (en) 2022-12-15

Similar Documents

Publication Publication Date Title
EP3777911A4 (en) Breast pump
EP3779202A4 (en) Vacuum pump
GB2585528B (en) Pump assembly
CA199141S (en) Vacuum
EP4056855A4 (en) Vacuum pump
EP3804778A4 (en) Breast pump
CA188020S (en) Vacuum pump
GB2578899B (en) Vacuum pump
EP4119795A4 (en) Vacuum pump
EP4043734A4 (en) Vacuum pump
EP3910201A4 (en) Vacuum pump
GB202206036D0 (en) Vacuum pump
CA188489S (en) Vacuum pump
EP3910200A4 (en) Vacuum pump
GB2590663B (en) Vacuum pump
GB201919167D0 (en) Multi-stae vacuum pump
GB201917775D0 (en) Vacuum pump
GB201914605D0 (en) Vacuum pump
GB201901814D0 (en) Vacuum pump
CA210786S (en) Vacuum pump
GB201902303D0 (en) Vacuum pumping
GB201911676D0 (en) Vacuum pump unit
GB2590955B (en) Vacuum pump
GB201820337D0 (en) Vacuum pump
GB2604554B (en) An improved pump