US20130129482A1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- US20130129482A1 US20130129482A1 US13/813,345 US201113813345A US2013129482A1 US 20130129482 A1 US20130129482 A1 US 20130129482A1 US 201113813345 A US201113813345 A US 201113813345A US 2013129482 A1 US2013129482 A1 US 2013129482A1
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- United States
- Prior art keywords
- rotor
- pump
- magnetic
- vacuum pump
- shield member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/95—Preventing corrosion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/171—Steel alloys
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/50—Intrinsic material properties or characteristics
- F05D2300/507—Magnetic properties
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/611—Coating
Definitions
- the present invention relates to a vacuum pump including a rotor that rotates at a high speed and being suitable for use in a magnetic field.
- a turbomolecular pump discharges gas by rotating a rotor provided with turbine blades with respect to stator turbine blades at high speeds.
- the stator turbine blades and the rotor are disposed in a pump casing provided with an inlet flange (refer to, for example, Patent Literature 1).
- PATENT LITERATURE 1 Japanese Laid-open Patent Publication No. 2008-038844.
- the turbomolecular pump includes a pump casing that generally comprises austenite stainless steel (for example, SUS304), which is excellent in corrosion resistance and tensile strength in view of corrosion resistance in case a corrosive gas is discharged and of safety upon breakage of the rotor and so on.
- austenite stainless steel for example, SUS304
- the pump casing is pervious to lines of magnetic force since the austenite stainless steel is a non-magnetic material, so that eddy current is generated in the rotor that rotates at high speeds.
- the rotor is overheated due to Joule heat and there is the possibility that the creep rupture of the rotor, which is made of an aluminum alloy, will result.
- a vacuum pump comprises: a rotor provided with a rotor-side discharge function unit; a motor that drives the rotor to rotate with respect to a stator-side discharge function unit; and a cylindrical pump casing made of a magnetic material, in which the rotor and the stator-side discharge function unit are disposed.
- the rotor-side discharge function unit includes a plurality of stages consisting of rotor turbine blades disposed in an inner space of the pump casing, and a cylindrical drag pump rotating portion provided at a downstream side of the stages consisting of rotor turbine blades outside the inner space of the pumping casing
- the stator-side discharge function unit includes a plurality of stages consisting of stator turbine blades, and a cylindrical drag pump fixing portion which is disposed so as to surround an outer circumferential surface of the drag pump rotating portion at a gap therefrom and which is made of a magnetic material.
- the vacuum pump further comprises: a magnetic bearing unit that includes a thrust magnetic bearing that supports the rotor in an axial direction and a radial bearing that supports the rotor in a radial direction, a pump base portion that is provided with the magnetic bearing unit and that is made of a non-magnetic material, an axial sensor that detects a position in the axial direction of the rotor, a radial sensor that detects a position in the radial direction of the rotor, a first magnetic shield member that is made of a magnetic material and that is provided at an inlet of the pump casing to reduce entrance of external magnetic field into the pump via the inlet, and a second magnetic shield member that is made of a magnetic material and that is provided at the pump base portion to reduce influence of external magnetic field on the magnetic bearing unit.
- a magnetic bearing unit that includes a thrust magnetic bearing that supports the rotor in an axial direction and a radial bearing that supports the rotor in a radial direction
- a pump base portion that
- the second magnetic shield member constitutes a vacuum container in which at least the axial sensor is housed.
- the vacuum pump further comprises: a third magnetic shield member made of a magnetic material that extends in the direction of from the second magnetic shield member to the pump casing so as to cover an outer circumferential surface of the pump base portion that is made of the non-magnetic material.
- the second magnetic shield member and the third magnetic shield member are formed into a one body
- the magnetic shield member includes a disc portion and a supporting beam that supports the disc portion at a center of the inlet.
- the rotor includes a plurality of stages consisting of turbine blades as the rotor-side discharge function unit, the disc portion has an outer diameter D, which is not smaller than an outer diameter Ds of the radial sensor and not larger than a diameter Dri of a circle that passes a joint of each of the turbine blades in a circumferential direction of the rotor.
- the vacuum pump further comprises: a protective net that is fastened to the inlet of the pump casing with bolts to prevent foreign matter from entering the pump, the pump casing being formed of threaded through-holes for fastening with bolts.
- the first magnetic shield member serves as the protective net that is provided at the inlet of the pump casing and prevents foreign matter from entering the pump.
- the magnetic material includes a carbon steel or an alloy steel.
- the pump casing is made of S45C as the carbon steel.
- a surface of the magnetic material is subjected to anticorrosion treatment including N—P plating treatment.
- the stability of the vacuum pump with respect to external magnetic fields such as prevention of overheating of the rotor due to eddy current and so on can be increased.
- FIG. 1 A cross-sectional view of a pump body 1 that constitutes a turbomolecular pump
- FIG. 2 A schematic diagram that illustrates the state of lines of magnetic force when the pump body 1 is disposed in an external magnetic field
- FIG. 3 A diagram showing the tensile strength of a representative magnetic material
- FIG. 4 A diagram showing the tensile strength of alloy steel for a machine structure
- FIG. 5 A diagram showing the tensile strength of carbon steel for a machine structure
- FIG. 6 A diagram showing a thread hole 200 for fixing a protective net
- FIG. 7 A diagram showing a pump casing 2 surrounding both a turbomolecular pump unit and a drag pump unit;
- FIG. 8 A diagram illustrating a second embodiment
- FIG. 9 A fragmentary view taken in the direction of arrow A in FIG. 8 ;
- FIG. 10 A diagram illustrating actions of thrust covers 40 and 41 and a magnetic shield member 42 ;
- FIG. 11 A diagram showing a variation example of the second embodiment.
- FIG. 12 A diagram showing a variation example of the magnetic shield member 42 .
- FIG. 1 is a diagram showing a first embodiment of a vacuum pump according to the present invention, showing a cross-sectional view of a pump body 1 that constitutes a turbomolecular pump.
- the turbomolecular pump includes the pump body 1 shown in FIG. 1 and a control unit (not shown).
- the turbomolecular pump shown in FIG. 1 is a magnetically suspended turbomolecular pump, in which a rotor 30 is contactlessly supported by magnetic bearings 37 in the radial direction and magnetic bearings 38 in the thrust direction. A suspended position of the rotor 30 at which it is suspended is detected by a radial displacement sensor 27 and axial displacement sensor 28 .
- the rotor 30 which is magnetically suspended rotatably by the magnetic bearings, is driven by a motor 36 to rotate at high speeds.
- Reference numerals 26 , 29 denote mechanical bearings. When the magnetic bearings are not operating, the mechanical bearings 26 , 29 support the rotor 30 .
- the turbomolecular pump according to the present embodiment includes a turbo pump unit and a drag pump unit as discharge function units.
- the turbo pump unit is constituted by a plurality of stages consisting of rotor blades 32 provided in the rotor 30 and a plurality of stages consisting of stator blades 22 alternately disposed with respect to the rotor blades in the axial direction.
- the drag pump unit is constituted by a cylindrical portion 31 provided in the rotor 30 and a thread stator 24 disposed so as to surround the cylindrical portion 31 at a predetermined gap therefrom. It should be noted that the rotor blades 32 and the cylindrical portion 31 constitute a discharge function unit on the rotor-side and the stator blades 22 and the thread stator 24 constitute a discharge function unit on the stator-side.
- the rotor 30 and the stator blades 22 are disposed in the inside of the cylindrical pump casing 2 made of a magnetic material.
- Each of the stator blades 22 is mounted on a base 20 via a spacer ring 23 .
- a fixed flange 21 c of the pump casing 2 is fastened to the base 20 with a bolt, a stacked spacer ring 23 is sandwiched between the base 20 and the pump casing 2 to position the stator blade 22 .
- the base 20 is provided with a discharge port 25 , to which is connected a back pump.
- an inlet flange 21 b is provided on the side of the inlet of the pump casing 2 .
- the inlet flange 21 b is formed of inlets 21 a, through which gas molecules flow into the pump.
- the inlet flange 21 b is fastened to a flange on the side of the apparatus with bolts.
- the inlet flange 21 b is formed of a plurality of bolt holes for fitting bolts therein. The number of bolt holes and diameter of bolt holes are set according to standards of the flange. Also, to the inlet flange 21 b is fastened a protective net 8 for preventing foreign matter from coming into the pump.
- FIG. 2 is a diagram schematically showing the state of lines of magnetic force when the pump body 1 is disposed in an external magnetic field, showing B-B cross-section in FIG. 1 .
- (a) shows a conventional turbomolecular pump and (b) shows a turbomolecular pump according to the present embodiment.
- a solid line denoted by reference numeral 100 shows lines of magnetic force due to the external magnetic field.
- a symbol R indicates the rotation direction of the rotor 30 .
- the pump casing 2 needs to be made of a material that has excellent tensile strength.
- the conventional turbomolecular pumps use austenite stainless steel, for example SUS304 and so on as a material that is excellent in corrosion resistance and has high tensile strength.
- austenite stainless steel is a non-magnetic material
- a magnetic field should be inevitably formed in a space in the pump casing 2 in which the rotor 30 is disposed.
- the pump casing 2 is formed with a magnetic material having high permeability, so that the lines of magnetic force concentrate on the pump casing 2 and the space in the pump casing is magnetically shielded by the pump casing 2 .
- the rotor 30 is scarcely influenced by the external magnetic field, and the generation of eddy current is prevented.
- the pump casing 2 is made of a material having high tensile strength.
- the tensile strength (about 520 MPa) of the conventionally used austenite stainless steel (SUS304) is referred to.
- FIG. 3 shows the tensile strength of representative magnetic materials.
- Permalloy and steels for mechanical structures have tensile strength equivalent to or higher than 520 MPa of SUS304.
- FIG. 4 shows the tensile strength of alloy steels for mechanical structures (JIS G 4053) and FIG. 5 shows the tensile strength of carbon steels for mechanical structures (JIS G 4051).
- each of them has a tensile strength not lower than 700 MPa, which is above the tensile strength (520 MPa) of SUS304. That is, the alloy steels for mechanical structures can be used in place of SUS304.
- the carbon steels for mechanical structures shown in FIG. 5 S45C and S55C with high carbon contents have tensile strength higher than that of SUS304. If a material that has tensile strength comparable to SUS304 is to be selected, S45C shown in FIG. 5 is appropriate.
- the pump casing 2 Since it is required that the pump casing 2 has corrosion resistance, it is necessary to form a corrosion resistant protective film on the surface of the pump casing if the materials shown in FIGS. 4 and 5 are used.
- the corrosion resistant protective film include films formed by plating such as nickel plating or electrodeposition coating. From the point of corrosion resistance, nickel plating is preferred.
- FIG. 6 is a diagram shown thread holes 200 for fixing the protective net that is formed in the inlet flange portion of the pump casing 2 .
- the protective net 8 that prevents intake of the foreign matter is arranged at the inlet 21 a of the pump casing 2 .
- the protective net 8 is fastened to the inlet flange 21 b with bolts.
- the inlet flange 21 b is formed of the thread holes 200 with which bolts 201 are threadably mounted.
- the thread holes 200 are threaded through-holes.
- the bolts 201 for fastening the protective net bolts as small as possible, for example bolts of M3 or so are used in order to increase the opening area of the inlet 21 a .
- the thread holes 200 are not through-holes, the thickness of the plating becomes thinner toward the back of the holes and there is the possibility that no plating is applied to the bottom portion of the thread holes.
- the corrosive gas could go around the back of the thread holes 200 , so that there is the possibility that the pump casing 2 will get rusted.
- the occurrence of such inconvenience can be prevented by providing through-holes as shown in FIG. 6 .
- the pump casing 2 can be manufactured at relatively low cost.
- the pump casing 2 is provided so as to surround the outer periphery of the turbo pump.
- the pump casing may be configured to surround both the turbo pump unit ( 22 , 32 ) and the drag pump unit ( 24 , 31 ). This can further increase the magnetic shielding effect of the pump casing 2 on the rotor 30 .
- the pump casing 2 it is also possible to make the pump casing 2 to have a shape similar to that shown in FIG. 1 and the thread stator 24 to be made of a magnetic material similar to that used for the pump casing 2 .
- the cylindrical portion 31 of the rotor 30 is magnetically shielded by the thread stator 24 .
- the thread stator 24 is made of a magnetic material and is formed of a corrosion resistant protection film such as nickel plating.
- the turbomolecular pump shown in FIG. 8 has a basic structure as a pump that is the same as the structure shown in FIG. 1 , however, is different from the structure shown in FIG. 1 in that the former includes a thrust cover 40 , a thrust cover 41 and a magnetic shield member 42 .
- the construction of the magnetic bearings is shown in detail in FIG. 8 , their structures are the same as those of the magnetic bearings in the pump shown in FIG. 1 .
- a configuration of the pump is adopted such that, when an external magnetic field in the radial direction acts on the pump, generation of eddy current is prevented in the side circumferential portion of the rotor 30 (for example, the cylindrical portion 31 ).
- the side circumferential portion of the rotor 30 for example, the cylindrical portion 31 .
- eddy current is generated in the rotary blades 32 of the rotor 30 .
- a configuration of the pump is adopted taking into consideration not only the external magnetic field in the radial direction but also the external magnetic field in the axial direction, so that the stability of the vacuum pump against the external magnetic field can be further increased.
- the pump casing 2 and the thread stator 24 include magnetic materials having high permeability in the same manner as in the first embodiment.
- an electromagnet 38 a on an upper side in FIG. 8 that constitute the magnetic bearing 38 in the thrust direction is provided in the base 20 .
- an electromagnet 38 b in a lower side in FIG. 8 is provided in the thrust covers 40 and 41 fastened to the bottom of the base 20 .
- the thrust covers 40 and 41 the axial displacement sensor 28 provided corresponding to the magnetic bearing 38 is also arranged.
- the thrust covers 40 and 41 that are made of the magnetic material constitute a case for magnetic shielding in which the axial displacement sensor 28 and the lower electromagnet 38 b are housed.
- FIG. 9 is a fragmentary view taken in the direction of arrow A in FIG. 8 .
- a magnetic shield member 42 having a shape as shown in FIG. 9 is provided.
- the magnetic shield member 42 includes a disc portion 42 a that is disposed in the center of the inlet 21 a, a ring portion 42 b that is fastened to the inlet flange 21 b, and a connection portion 42 c.
- the connection portion 42 c functions as a beam for supporting the disc 42 a in the center of the inlet 21 a and at the same time functions as a magnetic path that conducts a magnetic flux from the disc portion 42 a to the ring portion 42 b.
- Four opening areas 421 surrounded by the disc portion 42 a, the ring portion 42 b, and the connection portion 42 c serve an actual opening of the pump.
- the diameter size of the disc portion 42 a is D.
- FIG. 10 is a diagram illustrating operations of the thrust covers 40 and 41 and the magnetic shield member 42 as magnetic shields.
- FIG. 10 shows a case in which an external magnetic field in the axial direction is applied to the pump body 1 .
- the arrow lines denoted by reference numeral 300 represent magnetic fluxes.
- the magnetic fluxes which enter the inlet flange 21 b from above in FIG. 10 , apt to gather at a substance having high permeability, so that the magnetic fluxes are apt to gather at the magnetic shield member 42 , which are made of the magnetic material, and the pump casing 2 .
- the most portions of the magnetic fluxes 300 pass through the pump casing 2 to the base 20 .
- opening areas 420 are formed at the magnetic shield member 42 , a portion of the magnetic fluxes enters the pump casing 2 via the opening areas 420 .
- the magnetic shield member 42 plays a role of a magnetic shield, it may be desirable to make the opening areas 421 smaller by increasing the diameter D of the disc portion 42 a, whereas to suppress a reduction in discharge performance of the vacuum pump, it may be desirable to make the opening areas 421 as large as possible.
- the diameter D of the disc portion 42 a is set so as to satisfy the following condition “Ds ⁇ D ⁇ Dri”. As shown in FIG. 8 , Ds denotes an outer diameter of the radial displacement sensor 27 , and Dri denotes a diameter of a circle that passes a joint portion of the rotary blade 32 at the uppermost stage.
- the condition “D ⁇ Dri” is set from the viewpoint of suppressing the reduction in discharge performance.
- those gas molecules that enter the pump casing 2 at a side more radially inward than the joint portion of the rotary blade 32 will bounce off on an upper surface of the rotor 30 to proceed toward the inlet side. That is, there is a low probability that the gas molecules flowing in after passing the central portion of the inlet 21 a are discharged by the pump. Therefore, if a disc portion 42 a that baffles flowing in of the gas molecules is disposed in the central portion of the inlet 21 a, the influence of it on the reduction in the performance of discharging can be held down.
- the outer diameter D of the disc portion 42 a is not larger than the diameter Dri of the disc portion 42 a.
- the cross-sectional area of the connection portion 42 c is larger in order to avoid magnetic saturation.
- the connection part 42 c has a smaller width W.
- the magnetic shield member 42 shown in FIG. 9 it includes the ring part 42 b for attaching it to the inlet flange 2 lb.
- the connection part 42 c may be fastened to the inlet flange 21 b with the ring part 42 b being omitted.
- the condition “DS ⁇ D” is set in order to reduce the influence of the eternal magnetic field on the control of the magnetic bearing.
- the magnetic fluxes that enter through the opening portion 420 pass through the rotor 30 that is made of a non-magnetic material (for example, aluminum) to reach the magnetic bearing part.
- the outer diameter D of the disc portion 42 a is set to be not smaller than the outer diameter Ds of the radial displacement sensor 27 . With this setting, the magnetic fluxes that enter the pump casing 2 from the central portion of the inlet 21 a and reach the magnetic bearing portion are reduced.
- the magnetic fluxes 300 that have passed through the pump casing 2 to the base 20 tend to gather at the thread stator 24 that is made of a magnetic material having relatively high permeability rather than passing straight downward through the base 20 that is made of an aluminum material.
- the magnetic fluxes 300 that have passed through the thread stator 24 flow though the thrust covers 40 and 41 fastened to the lower part of the base 20 via the base 20 to the outside of the pump.
- the components relating to the thrust magnetic bearing 38 are shielded by the thrust covers 40 and 41 and are not influenced by the external magnetic field.
- the thrust covers 40 and 41 function as magnetic shield members that shield the influence by the external magnetic field and exhibit shielding effect not only against the external magnetic field in the axial direction but also the external magnetic field in the radial direction.
- the thrust cover 40 there is the possibility that it provides a path for the magnetic flux of the electromagnet 38 b. Since generally the core of the electromagnet 38 b includes pure steel or the like having high permeability, the influence of the thrust cover 40 is not considered to be so strong, however, it is necessary to take care in selecting magnetic materials. For this reason, it is preferred to select a material for the thrust cover 40 such that it has permeability that is lower than the permeability of the core.
- FIG. 11 presents a diagram that shows a variation example of the turbomolecular pump shown in FIG. 8 .
- the thrust cover 40 is additionally provided with a disc 40 b and a cylinder 40 c that are made of a magnetic material.
- the thrust cover 40 and the disc 40 b, or the disc 40 b and the cylinder 40 c may be fastened with bolts and the like.
- the thrust cover 40 , the disc 40 b, and the cylinder 40 c may be formed as one body. It should be noted that when the disc 40 b and the cylinder 40 c are formed separately from the thrust cover 40 , the surface treatment such as Ni—P plating on the disc 40 b and the cylinder 40 c may be omitted.
- the construction shown in FIG. 10 is configured such that the magnetic fluxes that have passed through the pump casing 2 are guided toward the thrust cover 40 via the thread stator 24 .
- the thread stator 24 which serves as a path for the magnetic fluxes, to have a relatively large cross-sectional area because of its design, it may happen that the intensity of the external magnetic field exceeds the saturated magnetic flux density of the thread stator 24 at some intensity or higher. In such a case, there is the possibility that the magnetism leaks out and eddy current is generated in the cylindrical portion 31 of the rotor 30 which is in close vicinity thereto.
- the disc 40 b and the cylinder 40 c that are made of a magnetic material are provided so as to extend from the thrust cover 40 in the direction of the fastened flange 21 c of the pump casing 2 .
- the magnetic fluxes enter the cylindrical portion 40 c from the pump casing and pass through the disc 40 b and the thrust covers 40 and 41 to come out downward.
- the thread stator 24 may be made of either a magnetic material or a non-magnetic material.
- the magnetic shield member 42 presents an example of the magnetic shield member disposed at the inlet 21 a and may have the shape shown in FIG. 12 .
- a plurality of circular opening areas 422 having an area smaller than that of the opening 421 shown in FIG. 9 are uniformly distributed in the inlet region.
- the diameter of the circular opening areas 422 may be made smaller to have the function of the conventional protective net simultaneously.
- the embodiments may be used singly or combined with each other. This is because the effects of the embodiments can be exhibited singly or in synergism.
- all of the pump casing 2 , the thread stator 24 , the magnetic shield member 42 , the thrust covers 40 and 41 , the disc 40 a, and the cylinder 40 b may be implemented or some of them may be selectively implemented.
- the present invention may be applied similarly to a vacuum pump with only a turbomolecular pump unit and a vacuum pump with only a drag pump unit.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Abstract
A vacuum pump (1) includes: a rotor (30) provided with a rotor-side discharge function unit (32); a motor (36) that drives the rotor (30) to rotate with respect to a stator-side discharge function unit (22); and a cylindrical pump casing (2) made of a magnetic material, in which the rotor (30) and the stator-side discharge function unit (22) are disposed.
Description
- The present invention relates to a vacuum pump including a rotor that rotates at a high speed and being suitable for use in a magnetic field.
- A turbomolecular pump discharges gas by rotating a rotor provided with turbine blades with respect to stator turbine blades at high speeds. The stator turbine blades and the rotor are disposed in a pump casing provided with an inlet flange (refer to, for example, Patent Literature 1).
- PATENT LITERATURE 1: Japanese Laid-open Patent Publication No. 2008-038844.
- The turbomolecular pump includes a pump casing that generally comprises austenite stainless steel (for example, SUS304), which is excellent in corrosion resistance and tensile strength in view of corrosion resistance in case a corrosive gas is discharged and of safety upon breakage of the rotor and so on. However, if the turbomolecular pump is used in magnetic fields, the pump casing is pervious to lines of magnetic force since the austenite stainless steel is a non-magnetic material, so that eddy current is generated in the rotor that rotates at high speeds. As a result, the rotor is overheated due to Joule heat and there is the possibility that the creep rupture of the rotor, which is made of an aluminum alloy, will result.
- According to the 1st aspect of the present invention, a vacuum pump comprises: a rotor provided with a rotor-side discharge function unit; a motor that drives the rotor to rotate with respect to a stator-side discharge function unit; and a cylindrical pump casing made of a magnetic material, in which the rotor and the stator-side discharge function unit are disposed.
- According to the 2nd aspect of the present invention, in the vacuum pump according to the 1st aspect, it is preferred that the rotor-side discharge function unit includes a plurality of stages consisting of rotor turbine blades disposed in an inner space of the pump casing, and a cylindrical drag pump rotating portion provided at a downstream side of the stages consisting of rotor turbine blades outside the inner space of the pumping casing, and the stator-side discharge function unit includes a plurality of stages consisting of stator turbine blades, and a cylindrical drag pump fixing portion which is disposed so as to surround an outer circumferential surface of the drag pump rotating portion at a gap therefrom and which is made of a magnetic material.
- According to the 3rd aspect of the present invention, in the vacuum pump according to the 1st or the 2nd aspect, it is preferred that the vacuum pump further comprises: a magnetic bearing unit that includes a thrust magnetic bearing that supports the rotor in an axial direction and a radial bearing that supports the rotor in a radial direction, a pump base portion that is provided with the magnetic bearing unit and that is made of a non-magnetic material, an axial sensor that detects a position in the axial direction of the rotor, a radial sensor that detects a position in the radial direction of the rotor, a first magnetic shield member that is made of a magnetic material and that is provided at an inlet of the pump casing to reduce entrance of external magnetic field into the pump via the inlet, and a second magnetic shield member that is made of a magnetic material and that is provided at the pump base portion to reduce influence of external magnetic field on the magnetic bearing unit.
- According to the 4th aspect of the present invention, in the vacuum pump according to the 3rd aspect, it is preferred that the second magnetic shield member constitutes a vacuum container in which at least the axial sensor is housed.
- According to the 5th aspect of the present invention, in the vacuum pump according to the 4th aspect, it is preferred that the vacuum pump further comprises: a third magnetic shield member made of a magnetic material that extends in the direction of from the second magnetic shield member to the pump casing so as to cover an outer circumferential surface of the pump base portion that is made of the non-magnetic material.
- According to the 6th aspect of the present invention, in the vacuum pump according to the 5th aspect, it is preferred that the second magnetic shield member and the third magnetic shield member are formed into a one body
- According to the 7th aspect of the present invention, in the vacuum pump according to any one of the 3rd to 6th aspects, it is preferred that the magnetic shield member includes a disc portion and a supporting beam that supports the disc portion at a center of the inlet.
- According to the 8th aspect of the present invention, in the vacuum pump according to the 7th aspect, it is preferred that the rotor includes a plurality of stages consisting of turbine blades as the rotor-side discharge function unit, the disc portion has an outer diameter D, which is not smaller than an outer diameter Ds of the radial sensor and not larger than a diameter Dri of a circle that passes a joint of each of the turbine blades in a circumferential direction of the rotor.
- According to the 9th aspect of the present invention, in the vacuum pump according to any one of the 1st to 8th aspects, it is preferred that the vacuum pump further comprises: a protective net that is fastened to the inlet of the pump casing with bolts to prevent foreign matter from entering the pump, the pump casing being formed of threaded through-holes for fastening with bolts.
- According to the 10th aspect of the present invention, in the vacuum pump according to any one of the 3rd to 6th aspects, it is preferred that the first magnetic shield member serves as the protective net that is provided at the inlet of the pump casing and prevents foreign matter from entering the pump.
- According to the 11th aspect of the present invention, in the vacuum pump according to any one of the 1st to 10th aspect, it is preferred that the magnetic material includes a carbon steel or an alloy steel.
- According to the 12th aspect of the present invention, in the vacuum pump according to the 11th aspect, it is preferred that the pump casing is made of S45C as the carbon steel.
- According to the 13th aspect of the present invention, in the vacuum pump according to the 11th or 12th aspect, it is preferred that a surface of the magnetic material is subjected to anticorrosion treatment including N—P plating treatment.
- According to the present invention, the stability of the vacuum pump with respect to external magnetic fields, such as prevention of overheating of the rotor due to eddy current and so on can be increased.
- (
FIG. 1 ) A cross-sectional view of apump body 1 that constitutes a turbomolecular pump; - (
FIG. 2 ) A schematic diagram that illustrates the state of lines of magnetic force when thepump body 1 is disposed in an external magnetic field; - (
FIG. 3 ) A diagram showing the tensile strength of a representative magnetic material; - (
FIG. 4 ) A diagram showing the tensile strength of alloy steel for a machine structure; - (
FIG. 5 ) A diagram showing the tensile strength of carbon steel for a machine structure; - (
FIG. 6 ) A diagram showing athread hole 200 for fixing a protective net; - (
FIG. 7 ) A diagram showing apump casing 2 surrounding both a turbomolecular pump unit and a drag pump unit; - (
FIG. 8 ) A diagram illustrating a second embodiment; - (
FIG. 9 ) A fragmentary view taken in the direction of arrow A inFIG. 8 ; - (
FIG. 10 ) A diagram illustrating actions of thrust covers 40 and 41 and amagnetic shield member 42; - (
FIG. 11 ) A diagram showing a variation example of the second embodiment; and - (
FIG. 12 ) A diagram showing a variation example of themagnetic shield member 42. - Hereinafter, the embodiments of the present invention are explained with reference to the attached drawings.
-
FIG. 1 is a diagram showing a first embodiment of a vacuum pump according to the present invention, showing a cross-sectional view of apump body 1 that constitutes a turbomolecular pump. The turbomolecular pump includes thepump body 1 shown inFIG. 1 and a control unit (not shown). - The turbomolecular pump shown in
FIG. 1 is a magnetically suspended turbomolecular pump, in which arotor 30 is contactlessly supported bymagnetic bearings 37 in the radial direction andmagnetic bearings 38 in the thrust direction. A suspended position of therotor 30 at which it is suspended is detected by aradial displacement sensor 27 andaxial displacement sensor 28. Therotor 30, which is magnetically suspended rotatably by the magnetic bearings, is driven by amotor 36 to rotate at high speeds.Reference numerals mechanical bearings rotor 30. - The turbomolecular pump according to the present embodiment includes a turbo pump unit and a drag pump unit as discharge function units. The turbo pump unit is constituted by a plurality of stages consisting of
rotor blades 32 provided in therotor 30 and a plurality of stages consisting ofstator blades 22 alternately disposed with respect to the rotor blades in the axial direction. The drag pump unit is constituted by acylindrical portion 31 provided in therotor 30 and athread stator 24 disposed so as to surround thecylindrical portion 31 at a predetermined gap therefrom. It should be noted that therotor blades 32 and thecylindrical portion 31 constitute a discharge function unit on the rotor-side and thestator blades 22 and thethread stator 24 constitute a discharge function unit on the stator-side. - The
rotor 30 and thestator blades 22 are disposed in the inside of thecylindrical pump casing 2 made of a magnetic material. Each of thestator blades 22 is mounted on abase 20 via aspacer ring 23. When a fixedflange 21 c of thepump casing 2 is fastened to thebase 20 with a bolt, a stackedspacer ring 23 is sandwiched between thebase 20 and thepump casing 2 to position thestator blade 22. Thebase 20 is provided with adischarge port 25, to which is connected a back pump. By driving therotor 30 to rotate at high speeds by amotor 36 while therotor 30 is being magnetically suspended, gas molecules on the side of theinlet 21 a are discharged to the side of thedischarge port 25. - On the side of the inlet of the
pump casing 2, aninlet flange 21 b is provided. Theinlet flange 21 b is formed ofinlets 21 a, through which gas molecules flow into the pump. When thepump body 1 is attached to a vacuum apparatus, generally, theinlet flange 21 b is fastened to a flange on the side of the apparatus with bolts. Theinlet flange 21 b is formed of a plurality of bolt holes for fitting bolts therein. The number of bolt holes and diameter of bolt holes are set according to standards of the flange. Also, to theinlet flange 21 b is fastened aprotective net 8 for preventing foreign matter from coming into the pump. - The rotor of a turbomolecular pump generally includes an aluminum alloy and in case the turbomolecular pump is used in a magnetic field, a problem arises that eddy current is generated therein under influence of the magnetic field.
FIG. 2 is a diagram schematically showing the state of lines of magnetic force when thepump body 1 is disposed in an external magnetic field, showing B-B cross-section inFIG. 1 . InFIG. 2 , (a) shows a conventional turbomolecular pump and (b) shows a turbomolecular pump according to the present embodiment. A solid line denoted byreference numeral 100 shows lines of magnetic force due to the external magnetic field. On the other hand, a symbol R indicates the rotation direction of therotor 30. - Semiconductor manufacturing apparatus and liquid crystal panel manufacturing apparatus in which turbomolecular pumps are used are frequently operated for discharging corrosive gases. To provide against possible breakage of the
rotor 30 that rotates at high speeds, thepump casing 2 needs to be made of a material that has excellent tensile strength. For this purpose, the conventional turbomolecular pumps use austenite stainless steel, for example SUS304 and so on as a material that is excellent in corrosion resistance and has high tensile strength. However, since the austenite stainless steel is a non-magnetic material, if the turbomolecular pump is used in a magnetic field, a magnetic field should be inevitably formed in a space in thepump casing 2 in which therotor 30 is disposed. As a result, when therotor 30 is rotated at high speeds in the magnetic field, eddy current is generated, so that there arises the problem that the temperature of therotor 30 is increased due to Joule heat caused by the eddy current. - On the other hand, in the case of the turbomolecular pump according to the present embodiment, the
pump casing 2 is formed with a magnetic material having high permeability, so that the lines of magnetic force concentrate on thepump casing 2 and the space in the pump casing is magnetically shielded by thepump casing 2. As a result, therotor 30 is scarcely influenced by the external magnetic field, and the generation of eddy current is prevented. - As mentioned above, it is necessary that the
pump casing 2 is made of a material having high tensile strength. As an index to be used here, the tensile strength (about 520 MPa) of the conventionally used austenite stainless steel (SUS304) is referred to.FIG. 3 shows the tensile strength of representative magnetic materials. Among them, Permalloy and steels for mechanical structures have tensile strength equivalent to or higher than 520 MPa of SUS304. -
FIG. 4 shows the tensile strength of alloy steels for mechanical structures (JIS G 4053) andFIG. 5 shows the tensile strength of carbon steels for mechanical structures (JIS G 4051). In the case of the alloy steels for mechanical structures shown inFIG. 4 , each of them has a tensile strength not lower than 700 MPa, which is above the tensile strength (520 MPa) of SUS304. That is, the alloy steels for mechanical structures can be used in place of SUS304. Among the carbon steels for mechanical structures shown inFIG. 5 , S45C and S55C with high carbon contents have tensile strength higher than that of SUS304. If a material that has tensile strength comparable to SUS304 is to be selected, S45C shown inFIG. 5 is appropriate. - Since it is required that the
pump casing 2 has corrosion resistance, it is necessary to form a corrosion resistant protective film on the surface of the pump casing if the materials shown inFIGS. 4 and 5 are used. Examples of the corrosion resistant protective film include films formed by plating such as nickel plating or electrodeposition coating. From the point of corrosion resistance, nickel plating is preferred. - In the case of turbomolecular pumps, it is generally adopted to attach a
protective net 8 as shown inFIG. 1 to the inlet in order to prevent foreign matter from coming into the pump.FIG. 6 is a diagram shown thread holes 200 for fixing the protective net that is formed in the inlet flange portion of thepump casing 2. As shown inFIG. 1 , theprotective net 8 that prevents intake of the foreign matter is arranged at theinlet 21 a of thepump casing 2. Theprotective net 8 is fastened to theinlet flange 21 b with bolts. Theinlet flange 21 b is formed of the thread holes 200 with whichbolts 201 are threadably mounted. According to the present embodiment, in order to increase the throwing power of plating to the thread holes 200, the thread holes 200 are threaded through-holes. - For the
bolts 201 for fastening the protective net, bolts as small as possible, for example bolts of M3 or so are used in order to increase the opening area of theinlet 21 a. For this reason, in case the thread holes 200 are not through-holes, the thickness of the plating becomes thinner toward the back of the holes and there is the possibility that no plating is applied to the bottom portion of the thread holes. In such a case, even if thebolts 201 are threadably mounted, the corrosive gas could go around the back of the thread holes 200, so that there is the possibility that thepump casing 2 will get rusted. However, the occurrence of such inconvenience can be prevented by providing through-holes as shown inFIG. 6 . Also, by using carbon steels in place of conventional SUS304, thepump casing 2 can be manufactured at relatively low cost. - In the example illustrated in
FIG. 1 , thepump casing 2 is provided so as to surround the outer periphery of the turbo pump. However, the pump casing may be configured to surround both the turbo pump unit (22, 32) and the drag pump unit (24, 31). This can further increase the magnetic shielding effect of thepump casing 2 on therotor 30. - It is also possible to make the
pump casing 2 to have a shape similar to that shown inFIG. 1 and thethread stator 24 to be made of a magnetic material similar to that used for thepump casing 2. With this configuration, thecylindrical portion 31 of therotor 30 is magnetically shielded by thethread stator 24. Also, in this case, thethread stator 24 is made of a magnetic material and is formed of a corrosion resistant protection film such as nickel plating. - The turbomolecular pump shown in
FIG. 8 has a basic structure as a pump that is the same as the structure shown inFIG. 1 , however, is different from the structure shown inFIG. 1 in that the former includes athrust cover 40, athrust cover 41 and amagnetic shield member 42. Although the construction of the magnetic bearings is shown in detail inFIG. 8 , their structures are the same as those of the magnetic bearings in the pump shown inFIG. 1 . - In the turbomolecular pump according to the first embodiment, a configuration of the pump is adopted such that, when an external magnetic field in the radial direction acts on the pump, generation of eddy current is prevented in the side circumferential portion of the rotor 30 (for example, the cylindrical portion 31). However, there is the possibility that when an external magnetic field in the axial direction acts on the pump, eddy current is generated in the
rotary blades 32 of therotor 30. Separately from heat generation due to eddy current, there arises a problem of an influence of the external magnetic field on the control of magnetic bearings. According to the second embodiment, a configuration of the pump is adopted taking into consideration not only the external magnetic field in the radial direction but also the external magnetic field in the axial direction, so that the stability of the vacuum pump against the external magnetic field can be further increased. - The
pump casing 2 and thethread stator 24 include magnetic materials having high permeability in the same manner as in the first embodiment. In the turbomolecular pump shown inFIG. 8 , anelectromagnet 38 a on an upper side inFIG. 8 that constitute themagnetic bearing 38 in the thrust direction is provided in thebase 20. On the other hand, anelectromagnet 38 b in a lower side inFIG. 8 is provided in the thrust covers 40 and 41 fastened to the bottom of thebase 20. In the thrust covers 40 and 41, theaxial displacement sensor 28 provided corresponding to themagnetic bearing 38 is also arranged. As mentioned above, the thrust covers 40 and 41 that are made of the magnetic material constitute a case for magnetic shielding in which theaxial displacement sensor 28 and thelower electromagnet 38 b are housed. -
FIG. 9 is a fragmentary view taken in the direction of arrow A inFIG. 8 . At theinlet flange 21 b of thepump casing 2, amagnetic shield member 42 having a shape as shown inFIG. 9 is provided. Themagnetic shield member 42 includes adisc portion 42 a that is disposed in the center of theinlet 21 a, aring portion 42 b that is fastened to theinlet flange 21 b, and aconnection portion 42 c. Theconnection portion 42 c functions as a beam for supporting thedisc 42 a in the center of theinlet 21 a and at the same time functions as a magnetic path that conducts a magnetic flux from thedisc portion 42 a to thering portion 42 b. Four openingareas 421 surrounded by thedisc portion 42 a, thering portion 42 b, and theconnection portion 42 c serve an actual opening of the pump. Here, it is assumed that the diameter size of thedisc portion 42 a is D. -
FIG. 10 is a diagram illustrating operations of the thrust covers 40 and 41 and themagnetic shield member 42 as magnetic shields.FIG. 10 shows a case in which an external magnetic field in the axial direction is applied to thepump body 1. The arrow lines denoted byreference numeral 300 represent magnetic fluxes. The magnetic fluxes, which enter theinlet flange 21 b from above inFIG. 10 , apt to gather at a substance having high permeability, so that the magnetic fluxes are apt to gather at themagnetic shield member 42, which are made of the magnetic material, and thepump casing 2. As a result, the most portions of themagnetic fluxes 300 pass through thepump casing 2 to thebase 20. Of course, since opening areas 420 are formed at themagnetic shield member 42, a portion of the magnetic fluxes enters thepump casing 2 via the opening areas 420. - As mentioned above, since the
magnetic shield member 42 plays a role of a magnetic shield, it may be desirable to make the openingareas 421 smaller by increasing the diameter D of thedisc portion 42 a, whereas to suppress a reduction in discharge performance of the vacuum pump, it may be desirable to make the openingareas 421 as large as possible. Thus, according to the present embodiment, with a view to decreasing the influence of the external magnetic field on the magnetic bearings, the diameter D of thedisc portion 42 a is set so as to satisfy the following condition “Ds≦D≦Dri”. As shown inFIG. 8 , Ds denotes an outer diameter of theradial displacement sensor 27, and Dri denotes a diameter of a circle that passes a joint portion of therotary blade 32 at the uppermost stage. - The condition “D≦Dri” is set from the viewpoint of suppressing the reduction in discharge performance. Among the gas molecules that pass through the opening portion 420 of the
magnetic shield member 42 and flow into thepump casing 2, those gas molecules that enter thepump casing 2 at a side more radially inward than the joint portion of therotary blade 32 will bounce off on an upper surface of therotor 30 to proceed toward the inlet side. That is, there is a low probability that the gas molecules flowing in after passing the central portion of theinlet 21 a are discharged by the pump. Therefore, if adisc portion 42 a that baffles flowing in of the gas molecules is disposed in the central portion of theinlet 21 a, the influence of it on the reduction in the performance of discharging can be held down. It is preferred that in order not to hinder the flow of the gas molecules that passes through theinlet 21 a and enters the pump at a side more radially outward than the joint portion of therotary blade 32, the outer diameter D of thedisc portion 42 a is not larger than the diameter Dri of thedisc portion 42 a. From the viewpoint of a path for magnetic fluxes, it is preferred that the cross-sectional area of theconnection portion 42 c is larger in order to avoid magnetic saturation. On the contrary, in order to prevent a decrease in the performance of discharging, it is preferred that theconnection part 42 c has a smaller width W. - It should be noted that in the case of the
magnetic shield member 42 shown inFIG. 9 , it includes thering part 42 b for attaching it to theinlet flange 2 lb. However, theconnection part 42 c may be fastened to theinlet flange 21 b with thering part 42 b being omitted. - On the other hand, the condition “DS≦D” is set in order to reduce the influence of the eternal magnetic field on the control of the magnetic bearing. The magnetic fluxes that enter through the opening portion 420 pass through the
rotor 30 that is made of a non-magnetic material (for example, aluminum) to reach the magnetic bearing part. Then, in order to suppress the influence of the magnetic fluxes, the outer diameter D of thedisc portion 42 a is set to be not smaller than the outer diameter Ds of theradial displacement sensor 27. With this setting, the magnetic fluxes that enter thepump casing 2 from the central portion of theinlet 21 a and reach the magnetic bearing portion are reduced. - The
magnetic fluxes 300 that have passed through thepump casing 2 to the base 20 tend to gather at thethread stator 24 that is made of a magnetic material having relatively high permeability rather than passing straight downward through the base 20 that is made of an aluminum material. Themagnetic fluxes 300 that have passed through thethread stator 24 flow though the thrust covers 40 and 41 fastened to the lower part of thebase 20 via thebase 20 to the outside of the pump. As a result, the components relating to the thrustmagnetic bearing 38 are shielded by the thrust covers 40 and 41 and are not influenced by the external magnetic field. As mentioned above, the thrust covers 40 and 41 function as magnetic shield members that shield the influence by the external magnetic field and exhibit shielding effect not only against the external magnetic field in the axial direction but also the external magnetic field in the radial direction. - It should be noted that regarding the
thrust cover 40, there is the possibility that it provides a path for the magnetic flux of theelectromagnet 38 b. Since generally the core of theelectromagnet 38 b includes pure steel or the like having high permeability, the influence of thethrust cover 40 is not considered to be so strong, however, it is necessary to take care in selecting magnetic materials. For this reason, it is preferred to select a material for the thrust cover 40 such that it has permeability that is lower than the permeability of the core. - Since no particularly high strength is necessary for the thrust covers 40 and 41 and the
magnetic shield member 42, it is possible to select materials having high saturated magnetic flux density from among the magnetic materials shown inFIGS. 4 and 5 . For example, in the case of carbon steels, saturated magnetic flux density is higher as the carbon content is lower. Accordingly, in the case of the material shown inFIG. 5 , 510C shown in the uppermost column of the table is highest in the effect of magnetic shielding and becomes lower toward the bottom column. Since each of the thrust covers 40 and 41 and themagnetic shield member 42 is supposed to be disposed in a vacuum atmosphere, it is preferred that they are subjected to surface treatment for providing corrosion resistance, such as Ni—P plating, electrodeposition or the like. -
FIG. 11 presents a diagram that shows a variation example of the turbomolecular pump shown inFIG. 8 . In this variation example, thethrust cover 40 is additionally provided with adisc 40 b and acylinder 40 c that are made of a magnetic material. The thrust cover 40 and thedisc 40 b, or thedisc 40 b and thecylinder 40 c may be fastened with bolts and the like. Alternatively, thethrust cover 40, thedisc 40 b, and thecylinder 40 c may be formed as one body. It should be noted that when thedisc 40 b and thecylinder 40 c are formed separately from thethrust cover 40, the surface treatment such as Ni—P plating on thedisc 40 b and thecylinder 40 c may be omitted. - The construction shown in
FIG. 10 is configured such that the magnetic fluxes that have passed through thepump casing 2 are guided toward thethrust cover 40 via thethread stator 24. However, in case that it is difficult for thethread stator 24, which serves as a path for the magnetic fluxes, to have a relatively large cross-sectional area because of its design, it may happen that the intensity of the external magnetic field exceeds the saturated magnetic flux density of thethread stator 24 at some intensity or higher. In such a case, there is the possibility that the magnetism leaks out and eddy current is generated in thecylindrical portion 31 of therotor 30 which is in close vicinity thereto. - Accordingly, in the variation examination shown in
FIG. 11 , thedisc 40 b and thecylinder 40 c that are made of a magnetic material are provided so as to extend from the thrust cover 40 in the direction of the fastenedflange 21 c of thepump casing 2. With such a structure, the magnetic fluxes enter thecylindrical portion 40 c from the pump casing and pass through thedisc 40 b and the thrust covers 40 and 41 to come out downward. In this case, thethread stator 24 may be made of either a magnetic material or a non-magnetic material. - In the
magnetic shield member 42 according to the second embodiment presents an example of the magnetic shield member disposed at theinlet 21 a and may have the shape shown inFIG. 12 . InFIG. 12 , a plurality ofcircular opening areas 422 having an area smaller than that of theopening 421 shown inFIG. 9 are uniformly distributed in the inlet region. The diameter of thecircular opening areas 422 may be made smaller to have the function of the conventional protective net simultaneously. - The embodiments may be used singly or combined with each other. This is because the effects of the embodiments can be exhibited singly or in synergism. For example, depending on the environment in which the pump is used, all of the
pump casing 2, thethread stator 24, themagnetic shield member 42, the thrust covers 40 and 41, the disc 40 a, and thecylinder 40 b may be implemented or some of them may be selectively implemented. - The present invention may be applied similarly to a vacuum pump with only a turbomolecular pump unit and a vacuum pump with only a drag pump unit.
- Although in the above description, various embodiments and variation examples have been explained, the present invention is not limited thereto. Other embodiments that are conceivable within the scope of the technical concept of the present invention are contained in the scope of the present invention.
- The disclosures of the following base applications to which priority is claimed in the present application are incorporated herein by reference:
- Japanese Patent Application No. 2010-177136 (filed Aug. 6, 2010), and
Japanese Patent Application No. 2010-232977 (filed Oct. 15, 2010).
Claims (13)
1. A vacuum pump comprising:
a rotor provided with a rotor-side discharge function unit;
a motor that drives the rotor to rotate with respect to a stator-side discharge function unit; and
a cylindrical pump casing made of a magnetic material, in which the rotor and the stator-side discharge function unit are disposed.
2. A vacuum pump according to claim 1 , wherein
the rotor-side discharge function unit includes
a plurality of stages consisting of rotor turbine blades disposed in an inner space of the pump casing, and
a cylindrical drag pump rotating portion provided at a downstream side of the stages consisting of rotor turbine blades outside the inner space of the pumping casing, and
the stator-side discharge function unit includes
a plurality of stages consisting of stator turbine blades, and
a cylindrical drag pump fixing portion which is disposed so as to surround an outer circumferential surface of the drag pump rotating portion at a gap therefrom and which is made of a magnetic material.
3. A vacuum pump according to claim 1 , further comprising:
a magnetic bearing unit that includes a thrust magnetic bearing that supports the rotor in an axial direction and a radial bearing that supports the rotor in a radial direction,
a pump base portion that is provided with the magnetic bearing unit and that is made of a non-magnetic material,
an axial sensor that detects a position in the axial direction of the rotor,
a radial sensor that detects a position in the radial direction of the rotor,
a first magnetic shield member that is made of a magnetic material and that is provided at an inlet of the pump casing to reduce entrance of external magnetic field into the pump via the inlet, and
a second magnetic shield member that is made of a magnetic material and that is provided at the pump base portion to reduce influence of external magnetic field on the magnetic bearing unit.
4. A vacuum pump according to claim 3 , wherein
the second magnetic shield member constitutes a vacuum container in which at least the axial sensor is housed.
5. A vacuum pump according to claim 4 , further comprising:
a third magnetic shield member made of a magnetic material that extends in the direction of from the second magnetic shield member to the pump casing so as to cover an outer circumferential surface of the pump base portion that is made of the non-magnetic material.
6. A vacuum pump according to claim 5 , wherein
the second magnetic shield member and the third magnetic shield member are formed into a one body
7. A vacuum pump according to claim 3 , wherein
the magnetic shield member includes a disc portion and a supporting beam that supports the disc portion at a center of the inlet.
8. A vacuum pump according to claim 7 , wherein
the rotor includes a plurality of stages consisting of turbine blades as the rotor-side discharge function unit,
the disc portion has an outer diameter D, which is not smaller than an outer diameter Ds of the radial sensor and not larger than a diameter Dri of a circle that passes a joint of each of the turbine blades in a circumferential direction of the rotor.
9. A vacuum pump according to claim 1 , further comprising:
a protective net that is fastened to the inlet of the pump casing with bolts to prevent foreign matter from entering the pump, the pump casing being formed of threaded through-holes for fastening with bolts.
10. A vacuum pump according to claim 3 , wherein
the first magnetic shield member serves as the protective net that is provided at the inlet of the pump casing and prevents foreign matter from entering the pump.
11. A vacuum pump according to claim 1 , wherein
the magnetic material includes a carbon steel or an alloy steel.
12. A vacuum pump according to claim 11 , wherein
the pump casing is made of S45C as the carbon steel.
13. A vacuum pump according to claim 11 , wherein
a surface of the magnetic material is subjected to anticorrosion treatment including N—P plating treatment.
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010177136 | 2010-08-06 | ||
JP2010-177136 | 2010-08-06 | ||
JP2010232977 | 2010-10-15 | ||
JP2010-232977 | 2010-10-15 | ||
PCT/JP2011/067943 WO2012018111A1 (en) | 2010-08-06 | 2011-08-05 | Vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
US20130129482A1 true US20130129482A1 (en) | 2013-05-23 |
Family
ID=45559606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/813,345 Abandoned US20130129482A1 (en) | 2010-08-06 | 2011-08-05 | Vacuum pump |
Country Status (4)
Country | Link |
---|---|
US (1) | US20130129482A1 (en) |
JP (1) | JP5494807B2 (en) |
CN (1) | CN103069173B (en) |
WO (1) | WO2012018111A1 (en) |
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US20150063993A1 (en) * | 2013-08-30 | 2015-03-05 | Shimadzu Corporation | Turbo-molecular pump |
EP3034881A1 (en) * | 2014-12-18 | 2016-06-22 | Pfeiffer Vacuum GmbH | Vacuum pump |
US20170074283A1 (en) * | 2015-09-15 | 2017-03-16 | Shimadzu Corporation | Vacuum pump and mass spectrometer |
US10404118B2 (en) | 2016-05-31 | 2019-09-03 | Shimadzu Corporation | Vacuum pump |
EP3561306A1 (en) * | 2018-07-20 | 2019-10-30 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP3640481A1 (en) * | 2018-10-15 | 2020-04-22 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP3926174A1 (en) * | 2021-06-29 | 2021-12-22 | Pfeiffer Vacuum Technology AG | Vacuum pump |
US11536280B2 (en) | 2017-04-20 | 2022-12-27 | Edwards Japan Limited | Vacuum pump, magnetic bearing device, and rotor |
US20230313804A1 (en) * | 2019-10-09 | 2023-10-05 | Edwards Limited | Vacuum pump comprising an axial magnetic bearing and a radial gas foil bearing |
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DE102014102273A1 (en) * | 2014-02-21 | 2015-08-27 | Pfeiffer Vacuum Gmbh | vacuum pump |
CN104466606B (en) * | 2014-11-18 | 2017-11-10 | 宁波日鼎电子科技有限公司 | A kind of connector shell electrophoretic process method of part conducting |
JP6433812B2 (en) * | 2015-02-25 | 2018-12-05 | エドワーズ株式会社 | Adapter and vacuum pump |
JP6948147B2 (en) * | 2017-04-18 | 2021-10-13 | エドワーズ株式会社 | Vacuum pumps, magnetic bearings and shafts of vacuum pumps |
WO2018198288A1 (en) * | 2017-04-27 | 2018-11-01 | 株式会社島津製作所 | Pump monitoring device, vacuum processing device, and vacuum pump |
JP6992569B2 (en) * | 2018-02-14 | 2022-01-13 | 株式会社島津製作所 | Vacuum pump and balance adjustment method |
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- 2011-08-05 JP JP2012527783A patent/JP5494807B2/en not_active Expired - Fee Related
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JPH01190991A (en) * | 1988-01-26 | 1989-08-01 | Osaka Shinku Kiki Seisakusho:Kk | Vacuum pump |
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US20030021672A1 (en) * | 2001-07-03 | 2003-01-30 | Yasushi Maejima | Vacuum pump |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150063993A1 (en) * | 2013-08-30 | 2015-03-05 | Shimadzu Corporation | Turbo-molecular pump |
US9926792B2 (en) * | 2013-08-30 | 2018-03-27 | Shimadzu Corporation | Turbo-molecular pump |
EP3034881A1 (en) * | 2014-12-18 | 2016-06-22 | Pfeiffer Vacuum GmbH | Vacuum pump |
US20170074283A1 (en) * | 2015-09-15 | 2017-03-16 | Shimadzu Corporation | Vacuum pump and mass spectrometer |
US9989069B2 (en) * | 2015-09-15 | 2018-06-05 | Shimadzu Corporation | Vacuum pump and mass spectrometer |
US10404118B2 (en) | 2016-05-31 | 2019-09-03 | Shimadzu Corporation | Vacuum pump |
US11536280B2 (en) | 2017-04-20 | 2022-12-27 | Edwards Japan Limited | Vacuum pump, magnetic bearing device, and rotor |
EP3561306A1 (en) * | 2018-07-20 | 2019-10-30 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP3640481A1 (en) * | 2018-10-15 | 2020-04-22 | Pfeiffer Vacuum Gmbh | Vacuum pump |
US20230313804A1 (en) * | 2019-10-09 | 2023-10-05 | Edwards Limited | Vacuum pump comprising an axial magnetic bearing and a radial gas foil bearing |
EP3926174A1 (en) * | 2021-06-29 | 2021-12-22 | Pfeiffer Vacuum Technology AG | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
WO2012018111A1 (en) | 2012-02-09 |
JPWO2012018111A1 (en) | 2013-10-03 |
JP5494807B2 (en) | 2014-05-21 |
CN103069173A (en) | 2013-04-24 |
CN103069173B (en) | 2016-05-04 |
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Legal Events
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AS | Assignment |
Owner name: SHIMADZU CORPORATION, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:TSUTSUI, SHINGO;REEL/FRAME:029726/0101 Effective date: 20130107 |
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STCB | Information on status: application discontinuation |
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