KR20170123238A - 반도체 패키지 및 반도체 패키지의 제조 방법 - Google Patents

반도체 패키지 및 반도체 패키지의 제조 방법 Download PDF

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KR20170123238A
KR20170123238A KR1020170047733A KR20170047733A KR20170123238A KR 20170123238 A KR20170123238 A KR 20170123238A KR 1020170047733 A KR1020170047733 A KR 1020170047733A KR 20170047733 A KR20170047733 A KR 20170047733A KR 20170123238 A KR20170123238 A KR 20170123238A
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South Korea
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semiconductor device
concave portion
insulating layer
resin insulating
substrate
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Korean (ko)
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야스유키 타케하라
카즈히코 키타노
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가부시키가이샤 제이디바이스
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Publication of KR20170123238A publication Critical patent/KR20170123238A/ko
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    • HELECTRICITY
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    • H10P74/00Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/27Structural arrangements therefor
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    • H01L23/522
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    • H10W20/01Manufacture or treatment
    • H10W20/031Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/042Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers the barrier, adhesion or liner layers being seed or nucleation layers
    • H10W20/043Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers the barrier, adhesion or liner layers being seed or nucleation layers for electroplating
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    • H10W20/031Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/042Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers the barrier, adhesion or liner layers being seed or nucleation layers
    • H10W20/044Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers the barrier, adhesion or liner layers being seed or nucleation layers for electroless plating
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    • H10W70/08Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers by depositing layers on the chip or wafer, e.g. "chip-first" RDLs
    • H10W70/09Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers by depositing layers on the chip or wafer, e.g. "chip-first" RDLs extending onto an encapsulation that laterally surrounds the chip or wafer, e.g. fan-out wafer level package [FOWLP] RDLs
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    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
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    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
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    • H10W74/114Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • H10W74/117Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
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    • H10W74/127Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed characterised by arrangements for sealing or adhesion
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    • H10W74/131Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/134Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being in grooves in the semiconductor body
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KR1020170047733A 2016-04-28 2017-04-13 반도체 패키지 및 반도체 패키지의 제조 방법 Withdrawn KR20170123238A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2016-090189 2016-04-28
JP2016090189A JP6678506B2 (ja) 2016-04-28 2016-04-28 半導体パッケージ及び半導体パッケージの製造方法

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KR20170123238A true KR20170123238A (ko) 2017-11-07

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KR1020170047733A Withdrawn KR20170123238A (ko) 2016-04-28 2017-04-13 반도체 패키지 및 반도체 패키지의 제조 방법

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Country Link
US (1) US10553456B2 (https=)
JP (1) JP6678506B2 (https=)
KR (1) KR20170123238A (https=)
CN (2) CN114823629A (https=)
TW (2) TWI784738B (https=)

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KR102138012B1 (ko) * 2018-08-28 2020-07-27 삼성전자주식회사 팬-아웃 반도체 패키지
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WO2021111517A1 (ja) * 2019-12-03 2021-06-10 太陽誘電株式会社 部品モジュールおよびその製造方法
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