KR20170063762A - 알칼리 가용성 수지, 감광성 수지 조성물 및 그 용도 - Google Patents
알칼리 가용성 수지, 감광성 수지 조성물 및 그 용도 Download PDFInfo
- Publication number
- KR20170063762A KR20170063762A KR1020177010773A KR20177010773A KR20170063762A KR 20170063762 A KR20170063762 A KR 20170063762A KR 1020177010773 A KR1020177010773 A KR 1020177010773A KR 20177010773 A KR20177010773 A KR 20177010773A KR 20170063762 A KR20170063762 A KR 20170063762A
- Authority
- KR
- South Korea
- Prior art keywords
- group
- meth
- acrylate
- polymerization unit
- alkali
- Prior art date
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- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 1
- 150000002790 naphthalenes Chemical class 0.000 description 1
- KPSSIOMAKSHJJG-UHFFFAOYSA-N neopentyl alcohol Chemical compound CC(C)(C)CO KPSSIOMAKSHJJG-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- AHHWIHXENZJRFG-UHFFFAOYSA-N oxetane Chemical compound C1COC1 AHHWIHXENZJRFG-UHFFFAOYSA-N 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 125000000538 pentafluorophenyl group Chemical group FC1=C(F)C(F)=C(*)C(F)=C1F 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 150000002987 phenanthrenes Chemical class 0.000 description 1
- 229940067265 pigment yellow 138 Drugs 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- KIWATKANDHUUOB-UHFFFAOYSA-N propan-2-yl 2-hydroxypropanoate Chemical class CC(C)OC(=O)C(C)O KIWATKANDHUUOB-UHFFFAOYSA-N 0.000 description 1
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical compound CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 1
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical group CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 229920005604 random copolymer Polymers 0.000 description 1
- WPPDXAHGCGPUPK-UHFFFAOYSA-N red 2 Chemical compound C1=CC=CC=C1C(C1=CC=CC=C11)=C(C=2C=3C4=CC=C5C6=CC=C7C8=C(C=9C=CC=CC=9)C9=CC=CC=C9C(C=9C=CC=CC=9)=C8C8=CC=C(C6=C87)C(C=35)=CC=2)C4=C1C1=CC=CC=C1 WPPDXAHGCGPUPK-UHFFFAOYSA-N 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 1
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical compound [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/05—Alcohols; Metal alcoholates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/02—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups
- C08L101/10—Compositions of unspecified macromolecular compounds characterised by the presence of specified groups, e.g. terminal or pendant functional groups containing hydrolysable silane groups
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014196958A JP6458236B2 (ja) | 2014-09-26 | 2014-09-26 | アルカリ可溶性樹脂、感光性樹脂組成物及びその用途 |
| JPJP-P-2014-196958 | 2014-09-26 | ||
| PCT/JP2015/076970 WO2016047703A1 (ja) | 2014-09-26 | 2015-09-24 | アルカリ可溶性樹脂、感光性樹脂組成物及びその用途 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20170063762A true KR20170063762A (ko) | 2017-06-08 |
Family
ID=55581224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020177010773A KR20170063762A (ko) | 2014-09-26 | 2015-09-24 | 알칼리 가용성 수지, 감광성 수지 조성물 및 그 용도 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6458236B2 (zh) |
| KR (1) | KR20170063762A (zh) |
| CN (1) | CN106715598B (zh) |
| TW (1) | TWI669287B (zh) |
| WO (1) | WO2016047703A1 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190037115A (ko) * | 2017-09-28 | 2019-04-05 | 제이에스알 가부시끼가이샤 | 감방사선성 수지 조성물 및 그의 용도 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017056928A1 (ja) * | 2015-09-30 | 2017-04-06 | 富士フイルム株式会社 | レジスト組成物、並びに、これを用いたレジスト膜、パターン形成方法及び電子デバイスの製造方法 |
| JP7035889B2 (ja) * | 2017-09-28 | 2022-03-15 | Jsr株式会社 | 感放射線性樹脂組成物およびその用途 |
| JP7047652B2 (ja) * | 2017-09-28 | 2022-04-05 | Jsr株式会社 | 感放射線性樹脂組成物およびその用途 |
| JP7392719B2 (ja) | 2019-06-25 | 2023-12-06 | 株式会社レゾナック | 感光性樹脂組成物、樹脂硬化膜及び画像表示素子 |
| TW202204475A (zh) * | 2020-06-03 | 2022-02-01 | 日商富士軟片股份有限公司 | 硬化性樹脂組成物、硬化膜、積層體、硬化膜之製造方法及半導體器件 |
| WO2024042107A1 (en) | 2022-08-26 | 2024-02-29 | Merck Patent Gmbh | Composition |
| WO2024042106A1 (en) | 2022-08-26 | 2024-02-29 | Merck Patent Gmbh | Composition |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4526856A (en) * | 1983-05-23 | 1985-07-02 | Allied Corporation | Low striation positive diazoketone resist composition with cyclic ketone(s) and aliphatic alcohol as solvents |
| JPS60206802A (ja) * | 1984-03-30 | 1985-10-18 | Dainippon Ink & Chem Inc | 改良された加水分解性シリル基含有ビニル系重合体の製造法 |
| JPS60206812A (ja) * | 1984-03-31 | 1985-10-18 | Dainippon Ink & Chem Inc | 改良された加水分解性シリル基含有ビニル系重合体を含む常温硬化性樹脂組成物 |
| JPH02233709A (ja) * | 1989-03-08 | 1990-09-17 | Kansai Paint Co Ltd | 樹脂、有機液体、非水分散液、水性液体、硬化性組成物及び塗料組成物 |
| KR101068111B1 (ko) * | 2005-01-27 | 2011-09-27 | 주식회사 동진쎄미켐 | 감광성 수지 조성물 |
| JP2006337567A (ja) * | 2005-05-31 | 2006-12-14 | Sekisui Chem Co Ltd | フォトレジスト用光硬化性樹脂組成物、カラムスペーサ及び液晶表示素子 |
| JP5135820B2 (ja) * | 2007-02-20 | 2013-02-06 | Ｊｓｒ株式会社 | アルカリ可溶性重合体、着色層形成用感放射線性組成物、カラーフィルタおよび液晶表示素子 |
| JP5108480B2 (ja) * | 2007-11-28 | 2012-12-26 | 東京応化工業株式会社 | 層間絶縁膜用感光性樹脂組成物 |
| JP5375412B2 (ja) * | 2009-07-30 | 2013-12-25 | Ｊｓｒ株式会社 | 微細パターン形成用樹脂組成物および微細パターン形成方法 |
| JP5413666B2 (ja) * | 2009-11-20 | 2014-02-12 | Ｄｉｃ株式会社 | 複合樹脂組成物、それを含むプライマーコート剤、及び積層体 |
| TW201310166A (zh) * | 2011-08-31 | 2013-03-01 | Everlight Chem Ind Corp | 層間絕緣膜暨保護膜用之樹脂及感光樹脂組成物 |
| JP5935297B2 (ja) * | 2011-11-09 | 2016-06-15 | Jnc株式会社 | ポジ型感光性組成物 |
| JP6218393B2 (ja) * | 2013-02-28 | 2017-10-25 | 東京応化工業株式会社 | 層間絶縁膜用感光性樹脂組成物 |
-
2014
- 2014-09-26 JP JP2014196958A patent/JP6458236B2/ja active Active
-
2015
- 2015-09-23 TW TW104131352A patent/TWI669287B/zh active
- 2015-09-24 CN CN201580051227.1A patent/CN106715598B/zh active Active
- 2015-09-24 KR KR1020177010773A patent/KR20170063762A/ko unknown
- 2015-09-24 WO PCT/JP2015/076970 patent/WO2016047703A1/ja active Application Filing
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190037115A (ko) * | 2017-09-28 | 2019-04-05 | 제이에스알 가부시끼가이샤 | 감방사선성 수지 조성물 및 그의 용도 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106715598B (zh) | 2019-07-19 |
| TW201612141A (en) | 2016-04-01 |
| CN106715598A (zh) | 2017-05-24 |
| JP6458236B2 (ja) | 2019-01-30 |
| WO2016047703A1 (ja) | 2016-03-31 |
| TWI669287B (zh) | 2019-08-21 |
| JP2016069400A (ja) | 2016-05-09 |
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