KR20160084420A - 물품 수납 설비 - Google Patents
물품 수납 설비 Download PDFInfo
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- KR20160084420A KR20160084420A KR1020167014870A KR20167014870A KR20160084420A KR 20160084420 A KR20160084420 A KR 20160084420A KR 1020167014870 A KR1020167014870 A KR 1020167014870A KR 20167014870 A KR20167014870 A KR 20167014870A KR 20160084420 A KR20160084420 A KR 20160084420A
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- H01L21/67769—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0485—Check-in, check-out devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0435—Storage devices mechanical using stacker cranes with pulling or pushing means on either stacking crane or stacking area
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0464—Storage devices mechanical with access from above
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G65/00—Loading or unloading
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- H01L21/67346—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/18—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3214—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicle
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3221—Overhead conveying
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3402—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3404—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Robotics (AREA)
Abstract
Description
도 2는 물품 수납 설비의 정면도
도 3은 중계 반송 장치의 평면도
도 4는 중계 반송 장치의 측면도
도 5는 중계 반송 장치의 정면도
도 6은 내부 개소와 수납부를 나타낸 정면도
2: 물품 수납 선반
3: 전방측 반송 장치
4: 후방측 반송 장치
15: 주행 레일
16: 지지체
19: 링크체
20: 탑재 지지부
21: 구동 조작부
23: 탑재체
24: 연동 연결부
P1: 외부 개소
P2: 내부 개소
W: 물품
Claims (5)
- 물품 수납용의 수납부를 선반 상하 방향으로 복수 배열되는 상태로 구비한 물품 수납 선반과, 상기 물품 수납 선반에 대하여 선반 전후 방향에서 전방에 설치되어 상기 수납부에 대한 물품의 반출입(搬出入)을 행하는 전방측 반송 장치(搬送裝置; transport device)와, 상기 물품 수납 선반의 배면보다 선반 전후 방향에서 후방에 위치하는 외부 개소(箇所)와 상기 물품 수납 선반의 배면보다 선반 전후 방향에서 전방에 위치하는 내부 개소 사이에서 물품을 탑재 반송 가능한 후방측 반송 장치가 설치되고,
상기 내부 개소는, 상기 선반 상하 방향으로 배열되는 상기 수납부의 사이에 설정되고,
상기 전방측 반송 장치는, 상기 내부 개소와 상기 수납부 사이에서 상기 물품을 반송 가능하게 구성되어 있는 물품 수납 설비로서,
상기 후방측 반송 장치는, 상기 물품을 탑재 지지하는 탑재 지지부와, 상기 물품을 상기 내부 개소 및 상기 외부 개소로 이동시키기 위해 상기 탑재 지지부를 구동 조작하는 구동 조작부를 구비하여 구성되고,
상기 구동 조작부는, 상기 수납부에 수납된 물품보다 선반 전후 방향에서 후방에 설치되어 있는,
물품 수납 설비. - 제1항에 있어서,
상기 탑재 지지부는, 상기 물품을 탑재 지지하는 선반 전후 방향으로 이동 가능한 탑재체와, 상기 구동 조작부에 의해 조작되는데 수반하여 상기 탑재체를 선반 전후 방향으로 이동시키기 위해 상기 탑재체와 상기 구동 조작부를 연동(連動) 연결하는 연동 연결부를 구비하여 구성되고,
상기 연동 연결부는, 상기 탑재체에서의 선반 전후 방향의 후방측 단부(端部)에 연결되어 상기 수납부에 수납된 물품보다 선반 전후 방향에서 후방에 설치되어 있는, 물품 수납 설비. - 제2항에 있어서,
상기 연동 연결부는, 기단부(基端部)가 상기 구동 조작부에 연결되며 또한 선단부가 상기 탑재체의 상기 후방측 단부에 연결된 봉형(棒形)의 링크체에 의해 구성되고,
상기 구동 조작부가, 상기 링크체를 요동(搖動)시킴으로써 상기 탑재체를 선반 전후 방향으로 이동시키도록 구성되며, 또한 상기 링크체에서의 상기 선단부의 선반 전후 방향에서의 이동 범위의 중간 위치에 설치되어 있는, 물품 수납 설비. - 제1항 내지 제3항 중 어느 한 항에 있어서,
상기 물품 수납 선반은, 상기 수납부를 선반 가로 폭 방향으로 복수 배열하여 구비하고,
상기 내부 개소는, 상기 선반 가로 폭 방향으로 배열되는 상기 수납부의 사이에 설정되고,
상기 후방측 반송 장치의 상기 선반 가로 폭 방향의 폭이, 상기 물품의 상기 선반 가로 폭 방향의 폭보다 협폭(狹幅)으로 형성되어 있는, 물품 수납 설비. - 제1항 내지 제4항 중 어느 한 항에 있어서,
천정에 설치된 주행 레일에 안내 지지된 상태로 상기 주행 레일을 따라 주행 가능하며 또한 상기 물품을 지지하는 지지체를 승강 가능하게 구비한 천정 반송차(搬送車)가 설치되고,
상기 주행 레일은, 상기 외부 개소의 위쪽을 통과하는 상태로 설치되고,
상기 천정 반송차는, 상기 지지체를 승강 이동시켜 상기 외부 개소와의 사이에서 상기 물품을 수수(授受) 가능하게 구성되어 있는, 물품 수납 설비.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2013/080534 WO2015071951A1 (ja) | 2013-11-12 | 2013-11-12 | 物品収納設備(article storage facility) |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160084420A true KR20160084420A (ko) | 2016-07-13 |
| KR102155617B1 KR102155617B1 (ko) | 2020-09-14 |
Family
ID=53056921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020167014870A Active KR102155617B1 (ko) | 2013-11-12 | 2013-11-12 | 물품 수납 설비 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10023385B2 (ko) |
| KR (1) | KR102155617B1 (ko) |
| CN (1) | CN105705440B (ko) |
| WO (1) | WO2015071951A1 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190108608A (ko) * | 2017-02-23 | 2019-09-24 | 무라다기카이가부시끼가이샤 | 스토커 및 작업용 발판의 형성 방법 |
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| JP7002169B2 (ja) | 2014-12-16 | 2022-01-20 | エリコン メテコ(ユーエス)インコーポレイテッド | 靱性及び耐摩耗性を有する多重硬質相含有鉄合金 |
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| EP3962693A1 (en) | 2019-05-03 | 2022-03-09 | Oerlikon Metco (US) Inc. | Powder feedstock for wear resistant bulk welding configured to optimize manufacturability |
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| JP3642729B2 (ja) * | 2000-11-27 | 2005-04-27 | 東京エレクトロン株式会社 | 処理装置 |
| JP2008174357A (ja) | 2007-01-19 | 2008-07-31 | Asyst Technologies Japan Inc | ストッカ |
| US8814488B2 (en) * | 2007-04-02 | 2014-08-26 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and semiconductor device manufacturing method |
| JP5050761B2 (ja) * | 2007-10-03 | 2012-10-17 | 東京エレクトロン株式会社 | 被処理体の処理システム及び被処理体の熱処理方法 |
| JP5234328B2 (ja) * | 2008-04-11 | 2013-07-10 | 株式会社ダイフク | 物品収納設備 |
| JP2010111476A (ja) * | 2008-11-06 | 2010-05-20 | Muratec Automation Co Ltd | 保管庫及び入出庫方法 |
| WO2010106659A1 (ja) * | 2009-03-19 | 2010-09-23 | 平田機工株式会社 | 昇降移載装置及び搬送処理システム |
| JP5282971B2 (ja) * | 2009-07-14 | 2013-09-04 | 株式会社ダイフク | 物品保管設備 |
| CN102470985B (zh) * | 2009-11-27 | 2015-07-22 | 株式会社大福 | 顶棚输送车 |
| JP5477651B2 (ja) * | 2010-08-04 | 2014-04-23 | 株式会社ダイフク | 物品搬送設備 |
| CN202321418U (zh) * | 2011-11-30 | 2012-07-11 | 云南昆船设计研究院 | 一种卷烟棒形料盘自动化存取设备 |
| JP5880343B2 (ja) | 2012-08-06 | 2016-03-09 | 株式会社ダイフク | 物品収納設備 |
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| KR20020015957A (ko) * | 2000-08-23 | 2002-03-02 | 히가시 데쓰로 | 피처리체의 처리시스템 |
| JP2007022677A (ja) * | 2005-07-12 | 2007-02-01 | Asyst Shinko Inc | ストッカ装置 |
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| KR20190108608A (ko) * | 2017-02-23 | 2019-09-24 | 무라다기카이가부시끼가이샤 | 스토커 및 작업용 발판의 형성 방법 |
Also Published As
| Publication number | Publication date |
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| CN105705440A (zh) | 2016-06-22 |
| US20160289001A1 (en) | 2016-10-06 |
| CN105705440B (zh) | 2019-09-10 |
| WO2015071951A1 (ja) | 2015-05-21 |
| KR102155617B1 (ko) | 2020-09-14 |
| US10023385B2 (en) | 2018-07-17 |
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