KR20010062344A - 반도체 집적회로장치 및 그 제조방법 - Google Patents

반도체 집적회로장치 및 그 제조방법 Download PDF

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Publication number
KR20010062344A
KR20010062344A KR1020000075456A KR20000075456A KR20010062344A KR 20010062344 A KR20010062344 A KR 20010062344A KR 1020000075456 A KR1020000075456 A KR 1020000075456A KR 20000075456 A KR20000075456 A KR 20000075456A KR 20010062344 A KR20010062344 A KR 20010062344A
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South Korea
Prior art keywords
film
wiring
interlayer insulating
hole
insulating film
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KR1020000075456A
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English (en)
Korean (ko)
Inventor
타카시 아오야기
아쯔시 오기시마
히로타카 고바야시
유지 하라
Original Assignee
가나이 쓰토무
가부시키가이샤 히타치세이사쿠쇼
스즈키 진이치로
가부시키가이샤 히타치초에루. 에스. 아이. 시스테무즈
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Application filed by 가나이 쓰토무, 가부시키가이샤 히타치세이사쿠쇼, 스즈키 진이치로, 가부시키가이샤 히타치초에루. 에스. 아이. 시스테무즈 filed Critical 가나이 쓰토무
Publication of KR20010062344A publication Critical patent/KR20010062344A/ko
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KR1020000075456A 1999-12-27 2000-12-12 반도체 집적회로장치 및 그 제조방법 Withdrawn KR20010062344A (ko)

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US6573170B2 (en) 2003-06-03
US20010005624A1 (en) 2001-06-28
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JP2001185552A (ja) 2001-07-06

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