JP2007227556A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2007227556A JP2007227556A JP2006045680A JP2006045680A JP2007227556A JP 2007227556 A JP2007227556 A JP 2007227556A JP 2006045680 A JP2006045680 A JP 2006045680A JP 2006045680 A JP2006045680 A JP 2006045680A JP 2007227556 A JP2007227556 A JP 2007227556A
- Authority
- JP
- Japan
- Prior art keywords
- interlayer film
- electrode
- semiconductor device
- recess
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】 半導体基板10の表面に層間膜4が形成され、前記層間膜4を貫通し前記半導体基板10の表面又は内部に至るコンタクトホール11内にバリアメタル3を介して埋め込まれたコンタクト電極2を有し、前記コンタクト電極2の上部で表面電極1と接続された半導体装置において、前記層間膜4の表面に凹部12が形成され、前記凹部12内で前記層間膜4と前記表面電極1が直接接している。
【選択図】 図1
Description
1a Al合金膜
2 コンタクト電極
3 バリアメタル
3a Ti
3b TiN
4 層間膜
5 ゲート電極
6 ゲート酸化膜
7 ソース領域
8 ベース領域
9 ドレイン領域
10 半導体基板
11 コンタクトホール
12 凹部
13 ゲートトレンチ
14 ユニットセル
15 ボンディングワイヤ
A、A’ 切断箇所
B 超音波振動
C 剥離面
Claims (2)
- 半導体基板の表面に層間膜が形成され、前記層間膜を貫通し前記半導体基板の表面又は内部に至るコンタクトホール内にバリアメタルを介して埋め込まれたコンタクト電極を有し、前記コンタクト電極の上部で表面電極と接続された半導体装置において、前記層間膜の表面に凹部が形成され、前記凹部内で前記層間膜と前記表面電極が直接接していることを特徴とする半導体装置。
- 半導体基板の表面に層間膜が形成され、前記層間膜を貫通し前記半導体基板の表面又は内部に至るコンタクトホール内にバリアメタルを介して埋め込まれたコンタクト電極を有し、前記コンタクト電極の上部で表面電極と接続された半導体装置において、前記層間膜の表面に凹部が形成され、前記凹部内に前記表面電極より硬度の高い材料が埋め込まれていることを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006045680A JP2007227556A (ja) | 2006-02-22 | 2006-02-22 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006045680A JP2007227556A (ja) | 2006-02-22 | 2006-02-22 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007227556A true JP2007227556A (ja) | 2007-09-06 |
Family
ID=38549090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006045680A Pending JP2007227556A (ja) | 2006-02-22 | 2006-02-22 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2007227556A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113097126A (zh) * | 2020-01-09 | 2021-07-09 | 珠海格力电器股份有限公司 | 芯片、功率器件及芯片的制作方法 |
DE112021000466T5 (de) | 2020-09-11 | 2022-10-27 | Fuji Electric Co., Ltd. | Halbleitervorrichtung |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH118264A (ja) * | 1997-06-13 | 1999-01-12 | Nec Corp | 半導体装置及びその製造方法 |
JPH11121457A (ja) * | 1997-10-16 | 1999-04-30 | Matsushita Electron Corp | 半導体装置の製造方法 |
JP2000012688A (ja) * | 1998-06-24 | 2000-01-14 | Sharp Corp | 半導体装置及びその製造方法 |
JP2001185552A (ja) * | 1999-12-27 | 2001-07-06 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
JP2005019696A (ja) * | 2003-06-26 | 2005-01-20 | Seiko Epson Corp | 半導体装置およびその製造方法 |
-
2006
- 2006-02-22 JP JP2006045680A patent/JP2007227556A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH118264A (ja) * | 1997-06-13 | 1999-01-12 | Nec Corp | 半導体装置及びその製造方法 |
JPH11121457A (ja) * | 1997-10-16 | 1999-04-30 | Matsushita Electron Corp | 半導体装置の製造方法 |
JP2000012688A (ja) * | 1998-06-24 | 2000-01-14 | Sharp Corp | 半導体装置及びその製造方法 |
JP2001185552A (ja) * | 1999-12-27 | 2001-07-06 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
JP2005019696A (ja) * | 2003-06-26 | 2005-01-20 | Seiko Epson Corp | 半導体装置およびその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113097126A (zh) * | 2020-01-09 | 2021-07-09 | 珠海格力电器股份有限公司 | 芯片、功率器件及芯片的制作方法 |
DE112021000466T5 (de) | 2020-09-11 | 2022-10-27 | Fuji Electric Co., Ltd. | Halbleitervorrichtung |
DE112021000458T5 (de) | 2020-09-11 | 2022-10-27 | Fuji Electric Co., Ltd. | Halbleitervorrichtung |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6828449B2 (ja) | 半導体装置およびその製造方法 | |
TWI265581B (en) | Semiconductor device and method for fabricating the same | |
CN105374762B (zh) | 待切割的半导体芯片结构及其制造方法 | |
CN1127131C (zh) | 用以覆盖半导体器件上的孔的基层结构及其形成方法 | |
JP2008160039A (ja) | 半導体装置及びその製造方法 | |
JP6027452B2 (ja) | 半導体装置 | |
JP2014192351A (ja) | 半導体装置の製造方法 | |
JP2009224365A (ja) | 半導体装置およびその製造方法 | |
JP2010171107A (ja) | 半導体装置及びその製造方法 | |
JP2007214349A (ja) | 半導体装置 | |
JP2007227556A (ja) | 半導体装置 | |
JP5350878B2 (ja) | トレンチゲートパワー半導体装置及びその製造方法 | |
JP2008042166A (ja) | 縦型ゲート半導体装置及びその製造方法 | |
JP2024024109A (ja) | 炭化珪素半導体装置 | |
JP2005260059A (ja) | 半導体装置、半導体ウェハおよび半導体装置の製造方法 | |
JP2010287853A (ja) | 半導体装置及びその製造方法 | |
KR100956602B1 (ko) | 반도체 소자 제조 방법 | |
JP4502640B2 (ja) | パッシベーション層のクラックの発生を防止した集積回路の製造方法 | |
JP5884557B2 (ja) | 半導体装置 | |
JP4803964B2 (ja) | 電極構造 | |
JP2008251721A (ja) | 貫通配線基板及びその製造方法 | |
US20150194395A1 (en) | Bond pad having a trench and method for forming | |
US10879120B2 (en) | Self aligned via and method for fabricating the same | |
JP2006108489A (ja) | 半導体装置の製造方法 | |
US9111755B1 (en) | Bond pad and passivation layer having a gap and method for forming |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20070705 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090114 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20100426 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20101101 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120522 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20121106 |