KR102195240B1 - 기판 검사 장치 및 기판 검사 방법 - Google Patents

기판 검사 장치 및 기판 검사 방법 Download PDF

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Publication number
KR102195240B1
KR102195240B1 KR1020180136170A KR20180136170A KR102195240B1 KR 102195240 B1 KR102195240 B1 KR 102195240B1 KR 1020180136170 A KR1020180136170 A KR 1020180136170A KR 20180136170 A KR20180136170 A KR 20180136170A KR 102195240 B1 KR102195240 B1 KR 102195240B1
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KR
South Korea
Prior art keywords
coating film
light
substrate
reflectance
laser light
Prior art date
Application number
KR1020180136170A
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English (en)
Korean (ko)
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KR20190062190A (ko
Inventor
홍영주
홍덕화
김민규
최정훈
Original Assignee
주식회사 고영테크놀러지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 주식회사 고영테크놀러지 filed Critical 주식회사 고영테크놀러지
Priority to EP18208784.1A priority Critical patent/EP3489620B1/en
Priority to CN201821975696.XU priority patent/CN209399934U/zh
Priority to CN201811434729.4A priority patent/CN109974599B/zh
Priority to JP2018222331A priority patent/JP6732858B6/ja
Priority to US16/202,543 priority patent/US10852125B2/en
Publication of KR20190062190A publication Critical patent/KR20190062190A/ko
Application granted granted Critical
Publication of KR102195240B1 publication Critical patent/KR102195240B1/ko

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0658Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
KR1020180136170A 2017-11-28 2018-11-07 기판 검사 장치 및 기판 검사 방법 KR102195240B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP18208784.1A EP3489620B1 (en) 2017-11-28 2018-11-28 Apparatus for inspecting substrate and method thereof
CN201821975696.XU CN209399934U (zh) 2017-11-28 2018-11-28 基板检查装置
CN201811434729.4A CN109974599B (zh) 2017-11-28 2018-11-28 基板检查装置及基板检查方法
JP2018222331A JP6732858B6 (ja) 2017-11-28 2018-11-28 基板検査装置及び基板検査方法
US16/202,543 US10852125B2 (en) 2017-11-28 2018-11-28 Apparatus for inspecting film on substrate by using optical interference and method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20170160680 2017-11-28
KR1020170160680 2017-11-28

Publications (2)

Publication Number Publication Date
KR20190062190A KR20190062190A (ko) 2019-06-05
KR102195240B1 true KR102195240B1 (ko) 2020-12-24

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Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020180136170A KR102195240B1 (ko) 2017-11-28 2018-11-07 기판 검사 장치 및 기판 검사 방법
KR1020180136165A KR102138622B1 (ko) 2017-11-28 2018-11-07 기판 검사 장치 및 기판 검사 방법
KR1020200090258A KR102275556B1 (ko) 2017-11-28 2020-07-21 기판 검사 장치 및 기판 검사 방법

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020180136165A KR102138622B1 (ko) 2017-11-28 2018-11-07 기판 검사 장치 및 기판 검사 방법
KR1020200090258A KR102275556B1 (ko) 2017-11-28 2020-07-21 기판 검사 장치 및 기판 검사 방법

Country Status (3)

Country Link
JP (3) JP6732858B6 (ja)
KR (3) KR102195240B1 (ja)
CN (5) CN109974599B (ja)

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KR102195240B1 (ko) * 2017-11-28 2020-12-24 주식회사 고영테크놀러지 기판 검사 장치 및 기판 검사 방법
US10859371B2 (en) 2017-11-28 2020-12-08 Koh Young Technology Inc. Apparatus for inspecting substrate and method thereof
US10852125B2 (en) 2017-11-28 2020-12-01 Koh Young Technology Inc. Apparatus for inspecting film on substrate by using optical interference and method thereof
KR102204449B1 (ko) * 2019-10-23 2021-01-18 주식회사 유니아이 광간섭 방식을 이용한 컨포말 코팅 두께 측정 장치
KR102320506B1 (ko) * 2020-07-22 2021-11-03 이화다이아몬드공업 주식회사 데미지층의 깊이 및 데미지층 내의 결함의 농도를 측정하는 방법 및 상기 방법을 수행하는 시스템
WO2022102010A1 (ja) * 2020-11-11 2022-05-19 日本電信電話株式会社 膜厚測定装置および方法
WO2023058784A1 (ko) * 2021-10-05 2023-04-13 이화다이아몬드공업 주식회사 데미지층의 깊이 및 데미지층 내의 결함의 농도를 측정하는 방법 및 상기 방법을 수행하는 시스템
CN114440808A (zh) * 2022-02-24 2022-05-06 广东奥迪威传感科技股份有限公司 超声波测厚方法及装置
WO2024194924A1 (ja) * 2023-03-17 2024-09-26 ヤマハ発動機株式会社 検査装置および検査方法

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Also Published As

Publication number Publication date
KR20200092905A (ko) 2020-08-04
CN109974598B (zh) 2021-05-28
JP2019101038A (ja) 2019-06-24
JP6732858B2 (ja) 2020-07-29
KR102138622B1 (ko) 2020-07-28
CN209399934U (zh) 2019-09-17
CN113324487A (zh) 2021-08-31
JP2019101037A (ja) 2019-06-24
CN113324487B (zh) 2023-08-25
CN109974598A (zh) 2019-07-05
KR20190062190A (ko) 2019-06-05
KR102275556B1 (ko) 2021-07-09
CN109974599B (zh) 2021-03-16
KR20190062189A (ko) 2019-06-05
JP6734352B6 (ja) 2020-09-02
JP2020173269A (ja) 2020-10-22
CN209399935U (zh) 2019-09-17
JP6955305B2 (ja) 2021-10-27
CN109974599A (zh) 2019-07-05
JP6732858B6 (ja) 2020-08-26
JP6734352B2 (ja) 2020-08-05

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