KR102062405B1 - 부압 생성 장치 - Google Patents

부압 생성 장치 Download PDF

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Publication number
KR102062405B1
KR102062405B1 KR1020130142729A KR20130142729A KR102062405B1 KR 102062405 B1 KR102062405 B1 KR 102062405B1 KR 1020130142729 A KR1020130142729 A KR 1020130142729A KR 20130142729 A KR20130142729 A KR 20130142729A KR 102062405 B1 KR102062405 B1 KR 102062405B1
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KR
South Korea
Prior art keywords
water
processing
vacuum pump
path
mixed liquid
Prior art date
Application number
KR1020130142729A
Other languages
English (en)
Korean (ko)
Other versions
KR20140082919A (ko
Inventor
히로타카 이시구로
아츠시 후지타
Original Assignee
가부시기가이샤 디스코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 디스코 filed Critical 가부시기가이샤 디스코
Publication of KR20140082919A publication Critical patent/KR20140082919A/ko
Application granted granted Critical
Publication of KR102062405B1 publication Critical patent/KR102062405B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Rotary Pumps (AREA)
KR1020130142729A 2012-12-25 2013-11-22 부압 생성 장치 KR102062405B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-281825 2012-12-25
JP2012281825A JP6132547B2 (ja) 2012-12-25 2012-12-25 負圧生成装置

Publications (2)

Publication Number Publication Date
KR20140082919A KR20140082919A (ko) 2014-07-03
KR102062405B1 true KR102062405B1 (ko) 2020-01-03

Family

ID=50986665

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130142729A KR102062405B1 (ko) 2012-12-25 2013-11-22 부압 생성 장치

Country Status (3)

Country Link
JP (1) JP6132547B2 (ja)
KR (1) KR102062405B1 (ja)
CN (1) CN103894924A (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6340277B2 (ja) * 2014-07-18 2018-06-06 株式会社ディスコ 加工装置
JP6486770B2 (ja) * 2015-05-20 2019-03-20 株式会社ディスコ 切削装置
JP6844970B2 (ja) * 2016-08-18 2021-03-17 株式会社ディスコ 研磨装置
CN106334967B (zh) * 2016-10-12 2019-01-04 广东长盈精密技术有限公司 真空回油系统
CN106392754B (zh) * 2016-11-15 2019-07-09 广东长盈精密技术有限公司 一种机床的溶液回收装置以及机床
JP6920063B2 (ja) * 2017-01-11 2021-08-18 株式会社ディスコ 板状ワークの保持方法
CN106914640B (zh) * 2017-02-07 2019-01-11 江西理工大学应用科学学院 智能钢管钻孔装置
CN109676515B (zh) * 2018-12-26 2020-09-11 江苏纳沛斯半导体有限公司 一种带清洗功能的半导体晶圆研磨装置
JP7339049B2 (ja) * 2019-07-26 2023-09-05 株式会社ディスコ 廃液処理装置
CN112091452B (zh) * 2020-10-21 2021-06-01 淄博水环真空泵厂有限公司 特大型高压水环真空泵异形内壁衬套及其加工装配方法
JP2024000232A (ja) 2022-06-20 2024-01-05 株式会社ディスコ 加工装置ユニット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002144181A (ja) * 2000-11-10 2002-05-21 Disco Abrasive Syst Ltd 加工装置のバキューム生成機構
JP2009135174A (ja) * 2007-11-29 2009-06-18 Sumco Corp 研磨装置とその方法、及び研磨液再生装置とその方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283086A (ja) * 1985-10-07 1987-04-16 Nec Kyushu Ltd 研削排水回収装置
CN2218627Y (zh) * 1994-10-19 1996-01-31 张允清 真空吸盘式多孔码片机
JP3149079B2 (ja) * 1997-04-25 2001-03-26 ヤマハ発動機株式会社 加工液の浄化装置
JP2002151449A (ja) * 2000-11-10 2002-05-24 Disco Abrasive Syst Ltd 加工装置のバキューム生成機構
JP4851282B2 (ja) 2006-09-21 2012-01-11 株式会社ディスコ 切削装置
JP2009043992A (ja) * 2007-08-09 2009-02-26 Disco Abrasive Syst Ltd ウエーハの加工方法
JP2009095941A (ja) * 2007-10-17 2009-05-07 Disco Abrasive Syst Ltd 加工廃液処理装置
CN101138908A (zh) * 2007-10-24 2008-03-12 北大方正集团有限公司 一种负压生成装置、方法及喷墨印刷机
JP2012020365A (ja) * 2010-07-14 2012-02-02 Tomoe Engineering Co Ltd クーラント回収システム
CN102615589B (zh) * 2012-04-12 2014-09-24 浙江金瑞泓科技股份有限公司 一种使用抛光盘接引盘的抛光系统和方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002144181A (ja) * 2000-11-10 2002-05-21 Disco Abrasive Syst Ltd 加工装置のバキューム生成機構
JP2009135174A (ja) * 2007-11-29 2009-06-18 Sumco Corp 研磨装置とその方法、及び研磨液再生装置とその方法

Also Published As

Publication number Publication date
KR20140082919A (ko) 2014-07-03
JP6132547B2 (ja) 2017-05-24
CN103894924A (zh) 2014-07-02
JP2014124701A (ja) 2014-07-07

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