KR101925229B1 - 반도체 장치, 고체 촬상 장치, 및 카메라 시스템 - Google Patents

반도체 장치, 고체 촬상 장치, 및 카메라 시스템 Download PDF

Info

Publication number
KR101925229B1
KR101925229B1 KR1020177009908A KR20177009908A KR101925229B1 KR 101925229 B1 KR101925229 B1 KR 101925229B1 KR 1020177009908 A KR1020177009908 A KR 1020177009908A KR 20177009908 A KR20177009908 A KR 20177009908A KR 101925229 B1 KR101925229 B1 KR 101925229B1
Authority
KR
South Korea
Prior art keywords
signal
chip
transistor
amplifier
comparator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020177009908A
Other languages
English (en)
Korean (ko)
Other versions
KR20170044762A (ko
Inventor
토시아키 나가이
켄 코세키
요스케 우에노
아츠시 스즈키
Original Assignee
소니 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 소니 주식회사 filed Critical 소니 주식회사
Publication of KR20170044762A publication Critical patent/KR20170044762A/ko
Application granted granted Critical
Publication of KR101925229B1 publication Critical patent/KR101925229B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/65Noise processing, e.g. detecting, correcting, reducing or removing noise applied to reset noise, e.g. KTC noise related to CMOS structures by techniques other than CDS
    • H04N5/374
    • H01L27/14612
    • H01L27/14634
    • H01L27/14636
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/06Continuously compensating for, or preventing, undesired influence of physical parameters
    • H03M1/08Continuously compensating for, or preventing, undesired influence of physical parameters of noise
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/06Continuously compensating for, or preventing, undesired influence of physical parameters
    • H03M1/08Continuously compensating for, or preventing, undesired influence of physical parameters of noise
    • H03M1/0863Continuously compensating for, or preventing, undesired influence of physical parameters of noise of switching transients, e.g. glitches
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters
    • H03M1/1205Multiplexed conversion systems
    • H03M1/123Simultaneous, i.e. using one converter per channel but with common control or reference circuits for multiple converters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters
    • H03M1/50Analogue/digital converters with intermediate conversion to time interval
    • H03M1/56Input signal compared with linear ramp
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50Constructional details
    • H04N23/54Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/62Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels
    • H04N25/621Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels for the control of blooming
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/71Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/75Circuitry for providing, modifying or processing image signals from the pixel array
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/778Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising amplifiers shared between a plurality of pixels, i.e. at least one part of the amplifier must be on the sensor array itself
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/78Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
    • H04N5/359
    • H04N5/363
    • H04N5/378
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/804Containers or encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/809Constructional details of image sensors of hybrid image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Theoretical Computer Science (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Analogue/Digital Conversion (AREA)
KR1020177009908A 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템 Active KR101925229B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011232282A JP6056126B2 (ja) 2011-10-21 2011-10-21 固体撮像装置およびカメラシステム
JPJP-P-2011-232282 2011-10-21
PCT/JP2012/006497 WO2013057903A1 (ja) 2011-10-21 2012-10-10 半導体装置、固体撮像装置、およびカメラシステム

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020147009617A Division KR101750606B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020187027813A Division KR102013092B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템

Publications (2)

Publication Number Publication Date
KR20170044762A KR20170044762A (ko) 2017-04-25
KR101925229B1 true KR101925229B1 (ko) 2018-12-04

Family

ID=48140572

Family Applications (6)

Application Number Title Priority Date Filing Date
KR1020177009905A Active KR101925228B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020177009908A Active KR101925229B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020187027813A Active KR102013092B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020197023492A Ceased KR20190096452A (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020147009617A Active KR101750606B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020207015940A Ceased KR20200067928A (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020177009905A Active KR101925228B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템

Family Applications After (4)

Application Number Title Priority Date Filing Date
KR1020187027813A Active KR102013092B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020197023492A Ceased KR20190096452A (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020147009617A Active KR101750606B1 (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
KR1020207015940A Ceased KR20200067928A (ko) 2011-10-21 2012-10-10 반도체 장치, 고체 촬상 장치, 및 카메라 시스템

Country Status (8)

Country Link
US (7) US9350929B2 (enExample)
EP (3) EP3328072A3 (enExample)
JP (1) JP6056126B2 (enExample)
KR (6) KR101925228B1 (enExample)
CN (4) CN106851143B (enExample)
DE (1) DE202012013524U1 (enExample)
TW (1) TWI558210B (enExample)
WO (1) WO2013057903A1 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5980080B2 (ja) * 2012-10-02 2016-08-31 キヤノン株式会社 光電変換装置、撮像システム、光電変換装置の検査方法および撮像システムの製造方法
WO2015111371A1 (ja) * 2014-01-22 2015-07-30 パナソニックIpマネジメント株式会社 固体撮像装置及び撮像装置
TWI648986B (zh) * 2014-04-15 2019-01-21 日商新力股份有限公司 攝像元件、電子機器
JP6610962B2 (ja) * 2014-07-25 2019-11-27 ソニー株式会社 固体撮像素子、ad変換器、および電子機器
WO2016027677A1 (ja) * 2014-08-18 2016-02-25 株式会社 日立メディコ アナログ-デジタル変換システム、x線ct装置および医用画像撮影装置
TWI669964B (zh) * 2015-04-06 2019-08-21 日商新力股份有限公司 Solid-state imaging device, electronic device, and AD conversion device
JP6492991B2 (ja) 2015-06-08 2019-04-03 株式会社リコー 固体撮像装置
US9881949B2 (en) * 2015-06-17 2018-01-30 Taiwan Semiconductor Manufacturing Company Ltd. Sensing device, image sensing system and method thereof
JP6266185B2 (ja) * 2015-10-01 2018-01-24 オリンパス株式会社 撮像素子、内視鏡、及び内視鏡システム
US9588240B1 (en) * 2015-10-27 2017-03-07 General Electric Company Digital readout architecture for four side buttable digital X-ray detector
TW201725900A (zh) * 2016-01-06 2017-07-16 原相科技股份有限公司 影像感測器及使用其的影像擷取裝置
US9986185B2 (en) * 2016-03-09 2018-05-29 Ricoh Company, Ltd. Semiconductor integrated circuit and image capturing apparatus
TWI754696B (zh) * 2016-12-14 2022-02-11 日商索尼半導體解決方案公司 固體攝像元件及電子機器
US9825645B1 (en) * 2016-12-22 2017-11-21 Infineon Technologies Ag Self-oscillating dual-slope integrating quantizer for sigma delta modulators
US9967505B1 (en) * 2017-04-13 2018-05-08 Omnivision Technologies, Inc. Comparators for double ramp analog to digital converter
US10431608B2 (en) * 2017-04-13 2019-10-01 Omnivision Technologies, Inc. Dual conversion gain high dynamic range readout for comparator of double ramp analog to digital converter
US10181858B1 (en) * 2017-11-30 2019-01-15 National Instruments Corporation Auto-zero algorithm for reducing measurement noise in analog-to-digital systems over a wide range of sampling rates
US11405575B2 (en) * 2017-12-26 2022-08-02 Sony Semiconductor Solutions Corporation Solid-state imaging element, comparator, and electronic device
US10530380B2 (en) * 2018-04-27 2020-01-07 Raytheon Company Massively parallel three dimensional per pixel single slope analog to digital converter
JP2021184510A (ja) * 2018-08-31 2021-12-02 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置およびその駆動方法、並びに電子機器
CN109151349B (zh) * 2018-09-10 2020-06-05 中国科学院高能物理研究所 全信息读出的像素单元电路及全信息读出方法
JP2020068369A (ja) * 2018-10-18 2020-04-30 キヤノン株式会社 半導体装置、半導体メモリ、光電変換装置、移動体、光電変換装置の製造方法、および半導体メモリの製造方法
JP7365775B2 (ja) * 2019-02-21 2023-10-20 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子
US10924701B2 (en) * 2019-07-18 2021-02-16 Omnivision Technologies, Inc. Column amplifier reset circuit with comparator
CN112399104B (zh) * 2019-08-14 2023-06-16 天津大学青岛海洋技术研究院 一种全局曝光低噪声高速三维传感器锁相像素及读出方式
JP7603379B2 (ja) * 2020-03-30 2024-12-20 ブリルニクス シンガポール プライベート リミテッド 固体撮像装置、固体撮像装置の製造方法、および電子機器
US11240454B2 (en) * 2020-04-29 2022-02-01 Omnivision Technologies, Inc. Hybrid CMOS image sensor with event driven sensing
US11595030B2 (en) * 2020-05-05 2023-02-28 Omnivision Technologies, Inc. Ramp generator providing high resolution fine gain including fractional divider with delta-sigma modulator
JP7277429B2 (ja) * 2020-12-24 2023-05-19 キヤノン株式会社 光電変換装置、光電変換システム、移動体、半導体基板
JP7532274B2 (ja) 2021-01-29 2024-08-13 キオクシア株式会社 半導体記憶装置
JP2022119632A (ja) * 2021-02-04 2022-08-17 キヤノン株式会社 光電変換装置、光電変換システムおよび移動体
CN115171607B (zh) 2022-09-06 2023-01-31 惠科股份有限公司 像素电路、显示面板及显示装置
CN117294968B (zh) * 2023-08-01 2024-05-07 脉冲视觉(北京)科技有限公司 信号处理电路和电子设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006020171A (ja) * 2004-07-02 2006-01-19 Fujitsu Ltd 差動型コンパレータ、アナログ・デジタル変換装置、撮像装置
JP2011159958A (ja) * 2010-01-08 2011-08-18 Sony Corp 半導体装置、固体撮像装置、およびカメラシステム

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792849A (en) * 1987-08-04 1988-12-20 Telaction Corporation Digital interactive communication system
US6570617B2 (en) * 1994-01-28 2003-05-27 California Institute Of Technology CMOS active pixel sensor type imaging system on a chip
JP2001339643A (ja) * 2000-05-30 2001-12-07 Nec Corp 固体撮像装置用黒レベル発生回路及び固体撮像装置
WO2004007287A2 (en) * 2002-07-16 2004-01-22 The Charles Stark Draper Laboratory, Inc. Integrated inertial stellar attitude sensor
CN101010944B (zh) * 2004-09-02 2010-06-16 索尼株式会社 摄像装置及摄像结果的输出方法
US7688624B2 (en) * 2004-11-26 2010-03-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
TWI429066B (zh) * 2005-06-02 2014-03-01 新力股份有限公司 Semiconductor image sensor module and manufacturing method thereof
CN101228631A (zh) * 2005-06-02 2008-07-23 索尼株式会社 半导体图像传感器模块及其制造方法
JP4858388B2 (ja) 2007-09-28 2012-01-18 ソニー株式会社 固体撮像装置、駆動制御方法、および撮像装置
TWI399088B (zh) * 2007-10-12 2013-06-11 Sony Corp 資料處理器,固態成像裝置,成像裝置,及電子設備
JP5372382B2 (ja) * 2008-01-09 2013-12-18 ピーエスフォー ルクスコ エスエイアールエル 半導体装置
JP5223343B2 (ja) 2008-01-10 2013-06-26 株式会社ニコン 固体撮像素子
JP2009212162A (ja) * 2008-02-29 2009-09-17 Fujifilm Corp 放射線検出器
JP5173503B2 (ja) * 2008-03-14 2013-04-03 キヤノン株式会社 撮像装置及び撮像システム
JP5269456B2 (ja) * 2008-03-26 2013-08-21 株式会社東芝 イメージセンサおよびその駆動方法
JP5407264B2 (ja) 2008-10-09 2014-02-05 ソニー株式会社 固体撮像素子およびカメラシステム
GB2480927B (en) * 2008-12-16 2014-10-15 Hiok Nam Tay Noise-cancelling image sensors
JP5029624B2 (ja) 2009-01-15 2012-09-19 ソニー株式会社 固体撮像装置及び電子機器
US8625012B2 (en) * 2009-02-05 2014-01-07 The Hong Kong University Of Science And Technology Apparatus and method for improving dynamic range and linearity of CMOS image sensor
JP5985136B2 (ja) * 2009-03-19 2016-09-06 ソニー株式会社 半導体装置とその製造方法、及び電子機器
ATE543215T1 (de) * 2009-03-24 2012-02-15 Sony Corp Festkörper-abbildungsvorrichtung, ansteuerverfahren für festkörper- abbildungsvorrichtung und elektronische vorrichtung
JP4941490B2 (ja) * 2009-03-24 2012-05-30 ソニー株式会社 固体撮像装置、及び電子機器
JP5083272B2 (ja) * 2009-05-07 2012-11-28 ソニー株式会社 半導体モジュール
JP5558801B2 (ja) 2009-12-18 2014-07-23 キヤノン株式会社 固体撮像装置
JP5853351B2 (ja) * 2010-03-25 2016-02-09 ソニー株式会社 半導体装置、半導体装置の製造方法、及び電子機器
JP5696513B2 (ja) * 2011-02-08 2015-04-08 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
JP5791571B2 (ja) * 2011-08-02 2015-10-07 キヤノン株式会社 撮像素子及び撮像装置
CN103268045B (zh) * 2012-09-24 2016-08-10 厦门天马微电子有限公司 Tft阵列基板及其制作方法、液晶显示设备
JP6217458B2 (ja) * 2014-03-03 2017-10-25 ソニー株式会社 半導体装置およびその製造方法、並びに電子機器
EP3101812B1 (en) * 2015-06-05 2022-10-26 Cmosis Bvba In-pixel differential transconductance amplifier for adc and image sensor architecture
KR102500813B1 (ko) * 2015-09-24 2023-02-17 삼성전자주식회사 반도체 소자 및 이의 제조 방법
US10334196B2 (en) * 2016-01-25 2019-06-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006020171A (ja) * 2004-07-02 2006-01-19 Fujitsu Ltd 差動型コンパレータ、アナログ・デジタル変換装置、撮像装置
JP2011159958A (ja) * 2010-01-08 2011-08-18 Sony Corp 半導体装置、固体撮像装置、およびカメラシステム

Also Published As

Publication number Publication date
US20180124340A1 (en) 2018-05-03
KR20170044762A (ko) 2017-04-25
KR20190096452A (ko) 2019-08-19
KR20200067928A (ko) 2020-06-12
EP4429119A3 (en) 2025-01-22
JP6056126B2 (ja) 2017-01-11
US9350929B2 (en) 2016-05-24
US20170134678A1 (en) 2017-05-11
CN104054328A (zh) 2014-09-17
KR20140072096A (ko) 2014-06-12
EP4429119A2 (en) 2024-09-11
DE202012013524U1 (de) 2017-07-13
US20170006243A1 (en) 2017-01-05
KR102013092B1 (ko) 2019-08-21
US20160227145A1 (en) 2016-08-04
US10554912B2 (en) 2020-02-04
EP2750375A4 (en) 2015-06-03
US9838626B2 (en) 2017-12-05
EP3328072A3 (en) 2019-01-02
TWI558210B (zh) 2016-11-11
US20140232916A1 (en) 2014-08-21
CN107135360A (zh) 2017-09-05
CN106851143B (zh) 2019-11-19
WO2013057903A1 (ja) 2013-04-25
KR101925228B1 (ko) 2018-12-04
CN106851143A (zh) 2017-06-13
KR20170044761A (ko) 2017-04-25
US10027912B2 (en) 2018-07-17
CN107104668B (zh) 2021-11-16
CN107104668A (zh) 2017-08-29
EP3328072A2 (en) 2018-05-30
US20170134679A1 (en) 2017-05-11
US9654708B2 (en) 2017-05-16
EP2750375A1 (en) 2014-07-02
US9509933B2 (en) 2016-11-29
KR101750606B1 (ko) 2017-06-23
TW201320739A (zh) 2013-05-16
US9736409B2 (en) 2017-08-15
KR20180108915A (ko) 2018-10-04
JP2013090304A (ja) 2013-05-13
US20170288691A1 (en) 2017-10-05
CN104054328B (zh) 2018-05-11

Similar Documents

Publication Publication Date Title
KR101925229B1 (ko) 반도체 장치, 고체 촬상 장치, 및 카메라 시스템
US8767106B2 (en) Comparator, AD converter, solid-state imaging device, and camera system
JP2013168880A (ja) 比較器、ad変換器、固体撮像装置、カメラシステム、および電子機器
JP2013172270A (ja) 比較器、ad変換器、固体撮像装置、カメラシステム、および電子機器
JP6332420B2 (ja) 半導体装置、固体撮像装置、およびカメラシステム
JP6575635B2 (ja) 半導体装置、固体撮像装置、およびカメラシステム
JP2017063493A (ja) 半導体装置、固体撮像装置、およびカメラシステム

Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20170412

Application number text: 1020147009617

Filing date: 20140411

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20170417

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20180319

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20180828

A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20180927

Application number text: 1020147009617

Filing date: 20140411

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20181128

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20181128

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20211026

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20221025

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20231023

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20241029

Start annual number: 7

End annual number: 7