KR101608953B1 - 광전 변환 장치 및 그 제조 방법 - Google Patents
광전 변환 장치 및 그 제조 방법 Download PDFInfo
- Publication number
- KR101608953B1 KR101608953B1 KR1020107012348A KR20107012348A KR101608953B1 KR 101608953 B1 KR101608953 B1 KR 101608953B1 KR 1020107012348 A KR1020107012348 A KR 1020107012348A KR 20107012348 A KR20107012348 A KR 20107012348A KR 101608953 B1 KR101608953 B1 KR 101608953B1
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor layer
- single crystal
- layer
- crystal semiconductor
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
- H10F10/172—Photovoltaic cells having only PIN junction potential barriers comprising multiple PIN junctions, e.g. tandem cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2007-292650 | 2007-11-09 | ||
| JP2007292650 | 2007-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20100088151A KR20100088151A (ko) | 2010-08-06 |
| KR101608953B1 true KR101608953B1 (ko) | 2016-04-04 |
Family
ID=40622575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020107012348A Expired - Fee Related KR101608953B1 (ko) | 2007-11-09 | 2008-10-28 | 광전 변환 장치 및 그 제조 방법 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8394655B2 (enExample) |
| JP (1) | JP5352190B2 (enExample) |
| KR (1) | KR101608953B1 (enExample) |
| WO (1) | WO2009060808A1 (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080072953A1 (en) * | 2006-09-27 | 2008-03-27 | Thinsilicon Corp. | Back contact device for photovoltaic cells and method of manufacturing a back contact device |
| US20090139558A1 (en) * | 2007-11-29 | 2009-06-04 | Shunpei Yamazaki | Photoelectric conversion device and manufacturing method thereof |
| JP5248994B2 (ja) * | 2007-11-30 | 2013-07-31 | 株式会社半導体エネルギー研究所 | 光電変換装置の製造方法 |
| EP2075850A3 (en) * | 2007-12-28 | 2011-08-24 | Semiconductor Energy Laboratory Co, Ltd. | Photoelectric conversion device and manufacturing method thereof |
| US8017429B2 (en) | 2008-02-19 | 2011-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing photoelectric conversion device |
| US8229255B2 (en) | 2008-09-04 | 2012-07-24 | Zena Technologies, Inc. | Optical waveguides in image sensors |
| US9515218B2 (en) | 2008-09-04 | 2016-12-06 | Zena Technologies, Inc. | Vertical pillar structured photovoltaic devices with mirrors and optical claddings |
| US9406709B2 (en) | 2010-06-22 | 2016-08-02 | President And Fellows Of Harvard College | Methods for fabricating and using nanowires |
| US20140007928A1 (en) * | 2012-07-06 | 2014-01-09 | Zena Technologies, Inc. | Multi-junction photovoltaic devices |
| US9343490B2 (en) | 2013-08-09 | 2016-05-17 | Zena Technologies, Inc. | Nanowire structured color filter arrays and fabrication method of the same |
| US9082673B2 (en) | 2009-10-05 | 2015-07-14 | Zena Technologies, Inc. | Passivated upstanding nanostructures and methods of making the same |
| US9299866B2 (en) | 2010-12-30 | 2016-03-29 | Zena Technologies, Inc. | Nanowire array based solar energy harvesting device |
| US8299472B2 (en) | 2009-12-08 | 2012-10-30 | Young-June Yu | Active pixel sensor with nanowire structured photodetectors |
| US8735797B2 (en) | 2009-12-08 | 2014-05-27 | Zena Technologies, Inc. | Nanowire photo-detector grown on a back-side illuminated image sensor |
| US9000353B2 (en) | 2010-06-22 | 2015-04-07 | President And Fellows Of Harvard College | Light absorption and filtering properties of vertically oriented semiconductor nano wires |
| US8866065B2 (en) | 2010-12-13 | 2014-10-21 | Zena Technologies, Inc. | Nanowire arrays comprising fluorescent nanowires |
| US8546742B2 (en) | 2009-06-04 | 2013-10-01 | Zena Technologies, Inc. | Array of nanowires in a single cavity with anti-reflective coating on substrate |
| US9478685B2 (en) | 2014-06-23 | 2016-10-25 | Zena Technologies, Inc. | Vertical pillar structured infrared detector and fabrication method for the same |
| US8835831B2 (en) | 2010-06-22 | 2014-09-16 | Zena Technologies, Inc. | Polarized light detecting device and fabrication methods of the same |
| US8274039B2 (en) | 2008-11-13 | 2012-09-25 | Zena Technologies, Inc. | Vertical waveguides with various functionality on integrated circuits |
| US8748799B2 (en) | 2010-12-14 | 2014-06-10 | Zena Technologies, Inc. | Full color single pixel including doublet or quadruplet si nanowires for image sensors |
| WO2010037102A2 (en) * | 2008-09-29 | 2010-04-01 | Thinsilicon Corporation | Monolithically-integrated solar module |
| JP2012522403A (ja) * | 2009-05-06 | 2012-09-20 | シンシリコン・コーポレーション | 光起電力電池、及び、半導体層スタックにおいて光補足を高める方法 |
| JP2012522404A (ja) * | 2009-06-10 | 2012-09-20 | シンシリコン・コーポレーション | 光起電モジュール、及び複数半導体層スタックを有する光起電モジュールを製造する方法 |
| US20110114156A1 (en) * | 2009-06-10 | 2011-05-19 | Thinsilicon Corporation | Photovoltaic modules having a built-in bypass diode and methods for manufacturing photovoltaic modules having a built-in bypass diode |
| KR101785997B1 (ko) | 2009-10-30 | 2017-10-17 | 주식회사 골드피크이노베이션즈 | 무선통신 시스템에서 요소 반송파 집합 정보 전송방법 및 그 기지국, 단말의 수신방법 |
| US8704083B2 (en) * | 2010-02-11 | 2014-04-22 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and fabrication method thereof |
| JP2013058562A (ja) | 2011-09-07 | 2013-03-28 | Semiconductor Energy Lab Co Ltd | 光電変換装置 |
| KR101832230B1 (ko) | 2012-03-05 | 2018-04-13 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
| KR20140082012A (ko) * | 2012-12-21 | 2014-07-02 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
| KR102006074B1 (ko) * | 2017-10-24 | 2019-07-31 | 경희대학교 산학협력단 | 나노와이어 어레이를 포함하는 태양 전지 및 이의 제조 방법 |
| FR3073081B1 (fr) * | 2017-10-27 | 2019-11-22 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Substrat semi-conducteur protege pour son transport et sa manipulation |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000150940A (ja) * | 1998-11-18 | 2000-05-30 | Denso Corp | 半導体微粒子集合体及びその製造方法 |
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| JPS58180069A (ja) * | 1982-04-15 | 1983-10-21 | Agency Of Ind Science & Technol | 半導体装置 |
| US4496788A (en) * | 1982-12-29 | 1985-01-29 | Osaka Transformer Co., Ltd. | Photovoltaic device |
| US4633034A (en) * | 1985-02-08 | 1986-12-30 | Energy Conversion Devices, Inc. | Photovoltaic device and method |
| US4665277A (en) * | 1986-03-11 | 1987-05-12 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Floating emitter solar cell |
| CA1303194C (en) * | 1987-07-21 | 1992-06-09 | Katsumi Nakagawa | Photovoltaic element with a semiconductor layer comprising non-single crystal material containing at least zn, se and h in an amount of 1 to40 atomic % |
| US4926229A (en) * | 1987-11-20 | 1990-05-15 | Canon Kabushiki Kaisha | Pin junction photovoltaic element with P or N-type semiconductor layer comprising non-single crystal material containing Zn, Se, H in an amount of 1 to 4 atomic % and a dopant and I-type semiconductor layer comprising non-single crystal Si(H,F) material |
| JPH01227307A (ja) | 1988-03-08 | 1989-09-11 | Asahi Glass Co Ltd | 透明導電体 |
| US5002618A (en) * | 1989-01-21 | 1991-03-26 | Canon Kabushiki Kaisha | Pin heterojunction photovoltaic elements with polycrystal BAs(H,F) semiconductor film |
| JP2829653B2 (ja) * | 1989-01-21 | 1998-11-25 | キヤノン株式会社 | 光起電力素子 |
| US5002617A (en) * | 1989-01-21 | 1991-03-26 | Canon Kabushiki Kaisha | Pin heterojunction photovoltaic elements with polycrystal AlAs(H,F) semiconductor film |
| JPH02192771A (ja) * | 1989-01-21 | 1990-07-30 | Canon Inc | 光起電力素子 |
| DE69132358T2 (de) * | 1990-05-07 | 2000-12-28 | Canon K.K., Tokio/Tokyo | Solarzelle |
| JPH04276665A (ja) * | 1991-03-04 | 1992-10-01 | Canon Inc | 集積型太陽電池 |
| JP2761156B2 (ja) * | 1992-06-30 | 1998-06-04 | キヤノン株式会社 | 光起電力素子及びその製造方法、並びにそれを用いた発電装置 |
| JP3073327B2 (ja) * | 1992-06-30 | 2000-08-07 | キヤノン株式会社 | 堆積膜形成方法 |
| JPH0644638A (ja) | 1992-07-24 | 1994-02-18 | Sony Corp | 録音装置 |
| JP3360919B2 (ja) * | 1993-06-11 | 2003-01-07 | 三菱電機株式会社 | 薄膜太陽電池の製造方法,及び薄膜太陽電池 |
| JPH07106617A (ja) * | 1993-09-30 | 1995-04-21 | Canon Inc | 透明電極及びその形成方法並びに該透明電極を用いた太陽電池 |
| JP3571785B2 (ja) * | 1993-12-28 | 2004-09-29 | キヤノン株式会社 | 堆積膜形成方法及び堆積膜形成装置 |
| JP2984537B2 (ja) * | 1994-03-25 | 1999-11-29 | キヤノン株式会社 | 光起電力素子 |
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| JP3381443B2 (ja) * | 1995-02-02 | 2003-02-24 | ソニー株式会社 | 基体から半導体層を分離する方法、半導体素子の製造方法およびsoi基板の製造方法 |
| US5736431A (en) * | 1995-02-28 | 1998-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing thin film solar battery |
| JPH08255762A (ja) * | 1995-03-17 | 1996-10-01 | Nec Corp | 半導体デバイスの製造方法 |
| JPH1093122A (ja) * | 1996-09-10 | 1998-04-10 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜太陽電池の製造方法 |
| US6756289B1 (en) * | 1996-12-27 | 2004-06-29 | Canon Kabushiki Kaisha | Method of producing semiconductor member and method of producing solar cell |
| DE69738307T2 (de) * | 1996-12-27 | 2008-10-02 | Canon K.K. | Herstellungsverfahren eines Halbleiter-Bauelements und Herstellungsverfahren einer Solarzelle |
| US6033974A (en) * | 1997-05-12 | 2000-03-07 | Silicon Genesis Corporation | Method for controlled cleaving process |
| JPH10335683A (ja) * | 1997-05-28 | 1998-12-18 | Ion Kogaku Kenkyusho:Kk | タンデム型太陽電池およびその製造方法 |
| JPH1140832A (ja) | 1997-07-17 | 1999-02-12 | Ion Kogaku Kenkyusho:Kk | 薄膜太陽電池およびその製造方法 |
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| JP2005268682A (ja) | 2004-03-22 | 2005-09-29 | Canon Inc | 半導体基材及び太陽電池の製造方法 |
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| WO2008126706A1 (en) * | 2007-04-06 | 2008-10-23 | Semiconductor Energy Laboratory Co., Ltd. | Photovoltaic device and method for manufacturing the same |
| EP2143146A1 (en) * | 2007-04-13 | 2010-01-13 | Semiconductor Energy Laboratory Co, Ltd. | Photovoltaic device and method for manufacturing the same |
-
2008
- 2008-10-28 KR KR1020107012348A patent/KR101608953B1/ko not_active Expired - Fee Related
- 2008-10-28 WO PCT/JP2008/069992 patent/WO2009060808A1/en not_active Ceased
- 2008-10-31 JP JP2008280835A patent/JP5352190B2/ja not_active Expired - Fee Related
- 2008-11-04 US US12/264,541 patent/US8394655B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000150940A (ja) * | 1998-11-18 | 2000-05-30 | Denso Corp | 半導体微粒子集合体及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5352190B2 (ja) | 2013-11-27 |
| WO2009060808A1 (en) | 2009-05-14 |
| JP2009135473A (ja) | 2009-06-18 |
| US8394655B2 (en) | 2013-03-12 |
| KR20100088151A (ko) | 2010-08-06 |
| US20090120498A1 (en) | 2009-05-14 |
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