KR101543375B1 - 기판 처리 장치, 반도체 장치의 제조 방법 및 온도 검출 방법 - Google Patents

기판 처리 장치, 반도체 장치의 제조 방법 및 온도 검출 방법 Download PDF

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KR101543375B1
KR101543375B1 KR1020130103884A KR20130103884A KR101543375B1 KR 101543375 B1 KR101543375 B1 KR 101543375B1 KR 1020130103884 A KR1020130103884 A KR 1020130103884A KR 20130103884 A KR20130103884 A KR 20130103884A KR 101543375 B1 KR101543375 B1 KR 101543375B1
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thermocouple
reaction tube
insulation
tube
substrate
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KR20140039987A (ko
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히데토 야마구치
테츠야 코스기
마사아키 우에노
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가부시키가이샤 히다치 고쿠사이 덴키
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020130103884A 2012-09-25 2013-08-30 기판 처리 장치, 반도체 장치의 제조 방법 및 온도 검출 방법 Active KR101543375B1 (ko)

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JP2012210264A JP6080451B2 (ja) 2012-09-25 2012-09-25 基板処理装置、半導体装置の製造方法、及び熱電対支持体
JPJP-P-2012-210264 2012-09-25

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KR1020150029724A Division KR101579501B1 (ko) 2012-09-25 2015-03-03 기판 처리 장치, 반도체 장치의 제조 방법 및 온도 검출 방법

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KR20140039987A KR20140039987A (ko) 2014-04-02
KR101543375B1 true KR101543375B1 (ko) 2015-08-11

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KR1020150029724A Active KR101579501B1 (ko) 2012-09-25 2015-03-03 기판 처리 장치, 반도체 장치의 제조 방법 및 온도 검출 방법

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US (3) US20140120636A1 (enExample)
JP (1) JP6080451B2 (enExample)
KR (2) KR101543375B1 (enExample)
TW (2) TW201546905A (enExample)

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JP6579974B2 (ja) * 2015-02-25 2019-09-25 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、温度センサ及び半導体装置の製造方法
US10228291B2 (en) 2015-02-25 2019-03-12 Kokusai Electric Corporation Substrate processing apparatus, and thermocouple
US10535538B2 (en) * 2017-01-26 2020-01-14 Gary Hillman System and method for heat treatment of substrates
KR20190008101A (ko) 2017-07-14 2019-01-23 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 기판 보지구 및 반도체 장치의 제조 방법
JP6857156B2 (ja) 2017-07-14 2021-04-14 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、基板保持具及び半導体装置の製造方法
US10998205B2 (en) * 2018-09-14 2021-05-04 Kokusai Electric Corporation Substrate processing apparatus and manufacturing method of semiconductor device
CN112689887B (zh) 2018-09-18 2024-09-27 株式会社国际电气 基板温度传感器、基板保持件、基板处理装置以及半导体装置的制造方法
KR102608535B1 (ko) * 2019-01-07 2023-11-30 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 반도체 장치의 제조 방법 및 히터 유닛
WO2021176505A1 (ja) * 2020-03-02 2021-09-10 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法および記録媒体
JP6916920B1 (ja) * 2020-03-04 2021-08-11 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、治具、半導体装置の製造方法および基板処理装置の校正方法
TWI736449B (zh) * 2020-10-19 2021-08-11 中國鋼鐵股份有限公司 熱電偶之修復與固定裝置及其使用方法
JP7236420B2 (ja) * 2020-10-29 2023-03-09 株式会社Kokusai Electric 温度センサ、ヒータユニット、基板処理装置及び半導体装置の製造方法
JP7565885B2 (ja) * 2021-07-27 2024-10-11 三菱電機株式会社 半導体装置の製造方法および半導体製造装置
CN114234763B (zh) * 2021-12-31 2024-07-26 拓荆科技股份有限公司 位置调整量监测装置
CN114527009B (zh) * 2022-02-09 2023-07-04 南京钢铁股份有限公司 一种在热模拟试验机上熔化凝固过程控制方法
WO2025074667A1 (ja) 2023-10-06 2025-04-10 株式会社Kokusai Electric 温度測定アセンブリ、基板処理装置、基板処理方法、半導体装置の製造方法及びプログラム
KR102763912B1 (ko) 2024-07-11 2025-02-10 (주) 예스티 파티클 비산 방지 기능을 갖는 고압 어닐링 장치

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Also Published As

Publication number Publication date
US10418293B2 (en) 2019-09-17
US20140120636A1 (en) 2014-05-01
KR101579501B1 (ko) 2015-12-22
JP2014067766A (ja) 2014-04-17
TW201546905A (zh) 2015-12-16
KR20140039987A (ko) 2014-04-02
TW201421585A (zh) 2014-06-01
TWI562240B (enExample) 2016-12-11
US11049742B2 (en) 2021-06-29
JP6080451B2 (ja) 2017-02-15
TWI511203B (zh) 2015-12-01
KR20150035904A (ko) 2015-04-07
US20190355630A1 (en) 2019-11-21
US20180040520A1 (en) 2018-02-08

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