KR101489001B1 - 1200℃ 피막 저항기 - Google Patents

1200℃ 피막 저항기 Download PDF

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Publication number
KR101489001B1
KR101489001B1 KR20080094807A KR20080094807A KR101489001B1 KR 101489001 B1 KR101489001 B1 KR 101489001B1 KR 20080094807 A KR20080094807 A KR 20080094807A KR 20080094807 A KR20080094807 A KR 20080094807A KR 101489001 B1 KR101489001 B1 KR 101489001B1
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South Korea
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ceramic
intermediate layer
glass ceramic
metal
glass
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Korean (ko)
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KR20090033131A (ko
Inventor
칼하인츠 비난트
토마스 로제
마르지트 잔더
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헤래우스 센서 테크놀로지 게엠베하
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C3/00Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
    • H01C3/04Iron-filament ballast resistors; Other resistors having variable temperature coefficient
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08Protective devices, e.g. casings
    • G01K1/10Protective devices, e.g. casings for preventing chemical attack
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/02Apparatus or processes specially adapted for manufacturing resistors adapted for manufacturing resistors with envelope or housing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H01C17/06506Precursor compositions therefor, e.g. pastes, inks, glass frits or green body
    • H01C17/06513Precursor compositions therefor, e.g. pastes, inks, glass frits or green body characterised by the resistive component
    • H01C17/06526Precursor compositions therefor, e.g. pastes, inks, glass frits or green body characterised by the resistive component composed of metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Electromagnetism (AREA)
  • Thermistors And Varistors (AREA)
KR20080094807A 2007-09-28 2008-09-26 1200℃ 피막 저항기 Active KR101489001B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007046900.6A DE102007046900C5 (de) 2007-09-28 2007-09-28 Hochtemperatursensor und ein Verfahren zu dessen Herstellung
DE102007046900.6-52 2007-09-28

Publications (2)

Publication Number Publication Date
KR20090033131A KR20090033131A (ko) 2009-04-01
KR101489001B1 true KR101489001B1 (ko) 2015-02-02

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ID=40433426

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20080094807A Active KR101489001B1 (ko) 2007-09-28 2008-09-26 1200℃ 피막 저항기

Country Status (5)

Country Link
US (1) US8183974B2 (https=)
JP (3) JP5641683B2 (https=)
KR (1) KR101489001B1 (https=)
DE (1) DE102007046900C5 (https=)
FR (1) FR2921724B1 (https=)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8162536B2 (en) * 2008-12-15 2012-04-24 Delphi Technologies, Inc. Combined sensor
DE102009007940B4 (de) * 2009-02-06 2010-11-18 Heraeus Sensor Technology Gmbh Nichtleitfähiges Zirkonoxid
DE102009017676B3 (de) * 2009-04-16 2010-08-05 Heraeus Sensor Technology Gmbh Hochtemperatursensor mit Chipdrähten aus Chromoxid bildender Eisenlegierung
DE102009045794A1 (de) 2009-10-19 2011-04-28 Innovative Sensor Technology Ist Ag Sensor zur Bestimmung mindestens einer physikalischen Prozessgröße
DE102010050315C5 (de) * 2010-11-05 2014-12-04 Danfoss Silicon Power Gmbh Verfahren zur Herstellung von gesinterten, elektrischen Baugruppen und damit hergestellte Leistungshalbleitermodule
DE102011051845B3 (de) * 2011-07-14 2012-10-25 Heraeus Sensor Technology Gmbh Messwiderstand mit Schutzrahmen
JP5736348B2 (ja) * 2012-06-21 2015-06-17 立山科学工業株式会社 薄膜抵抗体温度センサとその製造方法
DE102012110210B4 (de) * 2012-10-25 2017-06-01 Heraeus Sensor Technology Gmbh Hochtemperaturchip mit hoher Stabilität
JP6404726B2 (ja) 2014-03-07 2018-10-17 日本特殊陶業株式会社 感温素子及び温度センサ
DE102014104219B4 (de) * 2014-03-26 2019-09-12 Heraeus Nexensos Gmbh Keramikträger sowie Sensorelement, Heizelement und Sensormodul jeweils mit einem Keramikträger und Verfahren zur Herstellung eines Keramikträgers
EP3136067B1 (en) * 2014-04-21 2019-01-30 Kyocera Corporation Wiring substrate and temperature sensing element
JP6430910B2 (ja) 2015-08-05 2018-11-28 日本特殊陶業株式会社 感温素子および温度センサ
CN109073479B (zh) * 2016-04-26 2021-02-19 京瓷株式会社 传感器基板以及传感器装置
JP2018066592A (ja) * 2016-10-17 2018-04-26 Koa株式会社 白金温度センサ素子
JP6821384B2 (ja) * 2016-10-17 2021-01-27 Koa株式会社 白金温度センサ素子
DE102017104162A1 (de) 2017-02-28 2018-08-30 Innovative Sensor Technology Ist Ag Sensorelement und thermischer Strömungssensor zur Bestimmung einer physikalischen Größe eines Messmediums
JP2018146404A (ja) * 2017-03-06 2018-09-20 Koa株式会社 温度センサ素子
JP6929126B2 (ja) * 2017-05-16 2021-09-01 Koa株式会社 温度センサ素子
JP6929125B2 (ja) * 2017-05-16 2021-09-01 Koa株式会社 温度センサ素子
DE102018110889A1 (de) * 2017-05-16 2018-11-22 Koa Corporation Temperatursensor-Element
EP3404405A1 (de) * 2017-05-18 2018-11-21 Heraeus Sensor Technology GmbH Sensor zur bestimmung von gasparametern
EP3409467B1 (de) 2017-05-30 2019-07-03 Heraeus Nexensos GmbH Heizer mit einem co-gesinterten mehrschichtenaufbau
US10371581B2 (en) * 2017-06-02 2019-08-06 Sensata Technologies, Inc. Alumina diffusion barrier for sensing elements
DE102017222495A1 (de) 2017-12-12 2019-06-13 Heraeus Sensor Technology Gmbh Sensor mit thermoschockbeständigem Substrat
DE102018101419A1 (de) * 2018-01-23 2019-07-25 Biotronik Se & Co. Kg Elektrischer Widerstand, insbesondere für medizinische Implantate
DE202019002164U1 (de) 2019-05-17 2019-06-21 Heraeus Nexensos Gmbh Verbesserter Hochtemperaturchip
DE102019113127A1 (de) * 2019-05-17 2020-11-19 Georg Bernitz Messfühler
US20210247218A1 (en) * 2020-02-10 2021-08-12 Hutchinson Technology Incorporated Systems And Methods To Increase Sensor Robustness
CN112268632B (zh) * 2020-10-19 2022-11-04 中国电子科技集团公司第四十九研究所 一种温度系数可调的耐1000℃高温金属薄膜热电阻及其制备方法
CN113529037A (zh) * 2021-07-19 2021-10-22 中国科学院苏州纳米技术与纳米仿生研究所南昌研究院 一种铂薄膜温度传感器的封装方法
EP4470980A1 (de) * 2023-06-02 2024-12-04 Yageo Nexensos GmbH Temperatursensor mit fixiertropfen und runden poren (rohs)
EP4470979A1 (de) * 2023-06-02 2024-12-04 Yageo Nexensos GmbH Brechbarer temperatursensor mit rohs konformem fixiertropfen
DE102023126209A1 (de) 2023-09-27 2025-03-27 Innovative Sensor Technology Ist Ag Vorrichtung zum Erfassen der Temperatur eines Mediums oder zum Heizen des Mediums und Herstellungsverfahren
CN121068047B (zh) * 2025-11-05 2026-02-24 深圳汇北川科技股份有限公司 一种用于固态电池的抗干扰高稳定性薄膜铂温度传感器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002535609A (ja) * 1999-01-14 2002-10-22 ゼンゾテルム テンペラツアゼンゾリック ゲー・エム・ベー・ハー プラチナ温度センサおよびその製造方法
JP2004163331A (ja) * 2002-11-14 2004-06-10 Meiyo Electric Co Ltd 耐熱耐振型温度センサ

Family Cites Families (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2045640A (en) 1934-10-29 1936-06-30 Leeds & Northrup Co Thermal conductivity cell
US2818482A (en) 1953-04-21 1957-12-31 Victory Engineering Corp High speed clinical thermometers
US3249988A (en) 1962-02-27 1966-05-10 Victory Engineering Corp Method of covering resistor bead
US3749631A (en) 1971-04-26 1973-07-31 Dapak Systems Inc Method and apparatus for preparing and assembling communications for mass distribution
FR2188158A1 (https=) 1972-06-14 1974-01-18 Bailey Meter Co
US3952276A (en) 1974-02-21 1976-04-20 Siemens Aktiengesellschaft Fluid tight NTC high temperature sensor and method of producing same
DE2527739C3 (de) 1975-06-21 1978-08-31 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
JPH0323539Y2 (https=) 1980-09-30 1991-05-22
JPS6145465Y2 (https=) 1981-02-11 1986-12-20
US4378489A (en) 1981-05-18 1983-03-29 Honeywell Inc. Miniature thin film infrared calibration source
JPS57207835A (en) 1981-06-17 1982-12-20 Matsushita Electric Ind Co Ltd Manufacturing method for platinum resistance thermometer
DE3205704A1 (de) 1982-02-17 1983-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Einrichtung zur beurteilung des raumklimas
JPS58165026A (ja) 1982-03-25 1983-09-30 Ishizuka Denshi Kk 感熱装置
JPS6064401A (ja) 1983-09-20 1985-04-13 株式会社カ−ク 白金薄膜測温抵抗体
CA1250155A (en) 1984-07-31 1989-02-21 James A. Ruf Platinum resistance thermometer
US4791398A (en) 1986-02-13 1988-12-13 Rosemount Inc. Thin film platinum resistance thermometer with high temperature diffusion barrier
JPH02164003A (ja) 1988-12-19 1990-06-25 Matsushita Electric Ind Co Ltd ガラス封入形サーミスタの製造方法
JPH0328719A (ja) 1989-06-27 1991-02-06 Ngk Insulators Ltd 検出素子
DE3924518A1 (de) 1989-07-25 1991-01-31 Haefele Umweltverfahrenstechik Temperatursensor und verfahren zu seiner herstellung
JPH03165006A (ja) 1989-11-24 1991-07-17 Matsushita Electric Ind Co Ltd ガラス封止形サーミスタの製造方法
US5041809A (en) * 1990-01-08 1991-08-20 General Electric Company Glass-ceramic temperature sensor for heating ovens
DE4026061C1 (https=) 1990-08-17 1992-02-13 Heraeus Sensor Gmbh, 6450 Hanau, De
DE59209347D1 (de) * 1991-02-15 1998-07-02 Siemens Ag Hochtemperatur-platinmetall-temperatursensor
DE4104674A1 (de) 1991-02-15 1992-08-20 Ludwig Schneider Messtechnik G Sensor, insbesondere temperatursensor
JP2968111B2 (ja) 1991-11-22 1999-10-25 日本特殊陶業株式会社 マイグレーション防止パターンを備えた抵抗体物理量センサ
DE4300084C2 (de) 1993-01-06 1995-07-27 Heraeus Sensor Gmbh Widerstandsthermometer mit einem Meßwiderstand
US5401962A (en) 1993-06-14 1995-03-28 Ferran Scientific Residual gas sensor utilizing a miniature quadrupole array
KR950001303A (ko) 1993-06-22 1995-01-03 이헌조 박막 적외선 센서구조 및 그 제조 방법
RU2069324C1 (ru) 1993-07-15 1996-11-20 Московский институт электронной техники Термометр сопротивления
JP3728465B2 (ja) 1994-11-25 2005-12-21 株式会社神戸製鋼所 単結晶ダイヤモンド膜の形成方法
JP2904066B2 (ja) 1995-08-31 1999-06-14 松下電器産業株式会社 温度センサ及びその製造方法
DE19540194C1 (de) * 1995-10-30 1997-02-20 Heraeus Sensor Gmbh Widerstandsthermometer aus einem Metall der Platingruppe
JPH09250952A (ja) 1996-01-08 1997-09-22 Matsushita Electric Ind Co Ltd 温度検出装置とそれを用いた自動車
US6136170A (en) 1996-12-29 2000-10-24 Ngk Spark Plug Co., Ltd. Exhaust gas sensor and system thereof
JP3457826B2 (ja) 1997-01-31 2003-10-20 株式会社リコー 薄膜式抵抗体及びその製造方法、流量センサ、湿度センサ、ガスセンサ、温度センサ
JPH1140403A (ja) 1997-07-22 1999-02-12 Murata Mfg Co Ltd 温度センサ素子
DE19750123C2 (de) 1997-11-13 2000-09-07 Heraeus Electro Nite Int Verfahren zur Herstellung einer Sensoranordnung für die Temperaturmessung
JP3867393B2 (ja) 1998-03-20 2007-01-10 株式会社デンソー マイクロヒータおよびその製造方法ならびにエアフローセンサ
DE19813468C1 (de) 1998-03-26 1999-07-22 Sensotherm Temperatursensorik Sensorbauelement
EP0973020B1 (de) 1998-07-16 2009-06-03 EPIQ Sensor-Nite N.V. Elektrischer Temperatur-Sensor mit Mehrfachschicht
DE19848524C1 (de) 1998-10-21 1999-12-16 Dresden Ev Inst Festkoerper Verfahren zur Herstellung hochintegrationsfähiger Platin-Dünnschichtwiderstände
DE19901183C2 (de) * 1999-01-14 2001-01-25 Sensotherm Temperatursensorik Platintemperatursensor und Herstellungsverfahren für denselben
US6229121B1 (en) 1999-07-23 2001-05-08 Industrial Technology Research Institute Integrated thermal buckling micro switch with electric heater and sensor
JP3461469B2 (ja) 1999-07-27 2003-10-27 株式会社日立製作所 熱式空気流量センサ及び内燃機関制御装置
US6341892B1 (en) 2000-02-03 2002-01-29 George Schmermund Resistance thermometer probe
JP2001230103A (ja) 2000-02-17 2001-08-24 Matsushita Electric Ind Co Ltd ガラス封入形サーミスタ
DE10016415A1 (de) 2000-04-01 2001-10-11 Bosch Gmbh Robert Sensorelement, insbesondere Temperaturfühler
KR100422333B1 (ko) 2000-07-31 2004-03-10 이노스텍 (주) 단결정 거대 입자로 구성된 금속 박막 제조 방법 및 그 금속 박막
JP4016627B2 (ja) 2000-11-22 2007-12-05 株式会社デンソー 温度センサ
JP3589422B2 (ja) * 2000-11-24 2004-11-17 旭化成エレクトロニクス株式会社 異方導電性フィルム
ES2192517T3 (es) 2000-12-05 2003-10-16 Italcoppie S R L Metodo para fabricar una sonda sellada de temperatura y sonda fabricada con dicho metodo.
DE10104493A1 (de) 2001-01-31 2002-08-22 Epiq Sensor Nite N V Temperatursensor und Verfahren zur Herstellung eines Temperatursensors
US20020135454A1 (en) 2001-03-22 2002-09-26 Shunji Ichida Temperature sensor
DE10210772C1 (de) 2002-03-12 2003-06-26 Heraeus Sensor Nite Gmbh Temperatursensor
US7106167B2 (en) * 2002-06-28 2006-09-12 Heetronix Stable high temperature sensor system with tungsten on AlN
US7046116B2 (en) 2002-11-12 2006-05-16 Heraeus Sensor Technology Gmbh Temperature probe and its use
DE10358282A1 (de) 2003-12-12 2005-07-28 Georg Bernitz Bauelement und Verfahren zu dessen Herstellung
ATE367573T1 (de) 2004-02-24 2007-08-15 Electrovac Temperaturmessfühler
JP4168035B2 (ja) * 2004-03-08 2008-10-22 日本特殊陶業株式会社 白金抵抗体式温度センサ
DE102004034185B3 (de) 2004-07-15 2006-01-05 Zitzmann, Heinrich, Dr. Temperaturfühler und Verfahren zu dessen Herstellung
JP4253642B2 (ja) * 2005-02-25 2009-04-15 日本特殊陶業株式会社 温度センサ
DE102007038680A1 (de) 2007-08-15 2009-02-26 Heraeus Sensor Technology Gmbh Rußsensor mit glatter, reiner Al2O3-Oberfläche

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002535609A (ja) * 1999-01-14 2002-10-22 ゼンゾテルム テンペラツアゼンゾリック ゲー・エム・ベー・ハー プラチナ温度センサおよびその製造方法
JP2004163331A (ja) * 2002-11-14 2004-06-10 Meiyo Electric Co Ltd 耐熱耐振型温度センサ

Also Published As

Publication number Publication date
JP5855149B2 (ja) 2016-02-09
DE102007046900B4 (de) 2011-07-21
US8183974B2 (en) 2012-05-22
JP2009085952A (ja) 2009-04-23
JP5976186B2 (ja) 2016-08-23
JP2016011964A (ja) 2016-01-21
DE102007046900A1 (de) 2009-04-30
FR2921724A1 (fr) 2009-04-03
FR2921724B1 (fr) 2014-03-21
JP5641683B2 (ja) 2014-12-17
DE102007046900C5 (de) 2018-07-26
JP2014132272A (ja) 2014-07-17
KR20090033131A (ko) 2009-04-01
US20090115567A1 (en) 2009-05-07

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