KR101405668B1 - 도포 장치 - Google Patents

도포 장치 Download PDF

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Publication number
KR101405668B1
KR101405668B1 KR1020120145328A KR20120145328A KR101405668B1 KR 101405668 B1 KR101405668 B1 KR 101405668B1 KR 1020120145328 A KR1020120145328 A KR 1020120145328A KR 20120145328 A KR20120145328 A KR 20120145328A KR 101405668 B1 KR101405668 B1 KR 101405668B1
Authority
KR
South Korea
Prior art keywords
substrate
liquid
treatment liquid
discharge pipe
guide member
Prior art date
Application number
KR1020120145328A
Other languages
English (en)
Korean (ko)
Other versions
KR20130079160A (ko
Inventor
유키오 도미후지
Original Assignee
다이니폰 스크린 세이조우 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이니폰 스크린 세이조우 가부시키가이샤 filed Critical 다이니폰 스크린 세이조우 가부시키가이샤
Publication of KR20130079160A publication Critical patent/KR20130079160A/ko
Application granted granted Critical
Publication of KR101405668B1 publication Critical patent/KR101405668B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/28—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
KR1020120145328A 2011-12-22 2012-12-13 도포 장치 KR101405668B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-280684 2011-12-22
JP2011280684 2011-12-22

Publications (2)

Publication Number Publication Date
KR20130079160A KR20130079160A (ko) 2013-07-10
KR101405668B1 true KR101405668B1 (ko) 2014-06-10

Family

ID=48637759

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120145328A KR101405668B1 (ko) 2011-12-22 2012-12-13 도포 장치

Country Status (4)

Country Link
JP (1) JP5965304B2 (zh)
KR (1) KR101405668B1 (zh)
CN (1) CN103177986B (zh)
TW (1) TWI527631B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6723000B2 (ja) * 2015-11-16 2020-07-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6708508B2 (ja) * 2016-07-26 2020-06-10 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
CN108166264B (zh) * 2017-12-22 2020-12-15 邳州恒翔生物制品有限公司 一种用于沙发革的生产线
JP6861198B2 (ja) * 2018-12-12 2021-04-21 株式会社Ｓｃｒｅｅｎホールディングス 基板搬送装置および塗布装置
CN110624760A (zh) * 2019-09-20 2019-12-31 无锡市天牛智能装备有限公司 多辊双面涂布机
KR102243713B1 (ko) * 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염처리장치
KR102243715B1 (ko) * 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염분사장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11216416A (ja) * 1998-01-30 1999-08-10 Dainippon Screen Mfg Co Ltd 基板処理装置および基板搬送装置
JP2009061380A (ja) 2007-09-05 2009-03-26 Dainippon Screen Mfg Co Ltd 塗布装置および塗布方法
KR101086517B1 (ko) 2008-10-15 2011-11-23 다이니폰 스크린 세이조우 가부시키가이샤 기판 처리 장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0322566U (zh) * 1989-07-14 1991-03-08
KR920007701A (ko) * 1990-10-05 1992-05-27 이시다 아키라 균일한 두께의 박막을 형성하기 위한 롤 코팅장치
JPH06238213A (ja) * 1993-02-17 1994-08-30 Dainippon Printing Co Ltd コーティング装置
JPH0687338U (ja) * 1993-05-24 1994-12-22 島田理化工業株式会社 枚葉状処理物の搬送装置
JP3731995B2 (ja) * 1997-12-04 2006-01-05 大日本スクリーン製造株式会社 基板処理装置
JP2000109216A (ja) * 1998-10-02 2000-04-18 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2002244467A (ja) * 2001-02-19 2002-08-30 Sharp Corp 定着装置
KR100593709B1 (ko) * 2002-03-27 2006-06-28 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리장치
JP4091357B2 (ja) * 2002-06-28 2008-05-28 大日本スクリーン製造株式会社 基板処理装置および基板洗浄方法
JP4790451B2 (ja) * 2006-03-08 2011-10-12 住友精密工業株式会社 基板処理装置
JP2011198892A (ja) * 2010-03-18 2011-10-06 Dainippon Screen Mfg Co Ltd 基板洗浄処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11216416A (ja) * 1998-01-30 1999-08-10 Dainippon Screen Mfg Co Ltd 基板処理装置および基板搬送装置
JP2009061380A (ja) 2007-09-05 2009-03-26 Dainippon Screen Mfg Co Ltd 塗布装置および塗布方法
KR101086517B1 (ko) 2008-10-15 2011-11-23 다이니폰 스크린 세이조우 가부시키가이샤 기판 처리 장치

Also Published As

Publication number Publication date
TW201325737A (zh) 2013-07-01
TWI527631B (zh) 2016-04-01
KR20130079160A (ko) 2013-07-10
CN103177986B (zh) 2015-10-21
CN103177986A (zh) 2013-06-26
JP5965304B2 (ja) 2016-08-03
JP2013146727A (ja) 2013-08-01

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