KR101322126B1 - 다층 배선기판 - Google Patents

다층 배선기판 Download PDF

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Publication number
KR101322126B1
KR101322126B1 KR1020110076655A KR20110076655A KR101322126B1 KR 101322126 B1 KR101322126 B1 KR 101322126B1 KR 1020110076655 A KR1020110076655 A KR 1020110076655A KR 20110076655 A KR20110076655 A KR 20110076655A KR 101322126 B1 KR101322126 B1 KR 101322126B1
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KR
South Korea
Prior art keywords
resin insulating
insulating layer
main surface
surface side
insulating layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020110076655A
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English (en)
Korean (ko)
Other versions
KR20120022593A (ko
Inventor
신노스케 마에다
사토시 히라노
Original Assignee
니혼도꾸슈도교 가부시키가이샤
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Publication of KR20120022593A publication Critical patent/KR20120022593A/ko
Application granted granted Critical
Publication of KR101322126B1 publication Critical patent/KR101322126B1/ko
Expired - Fee Related legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W78/00—Detachable holders for supporting packaged chips in operation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4682—Manufacture of core-less build-up multilayer circuits on a temporary carrier or on a metal foil
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69—Insulating materials thereof
    • H10W70/695—Organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/401—Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10954—Other details of electrical connections
    • H05K2201/10977—Encapsulated connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
    • H05K2201/2009—Reinforced areas, e.g. for a specific part of a flexible printed circuit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/04—Soldering or other types of metallurgic bonding
    • H05K2203/041—Solder preforms in the shape of solder balls
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007—Surface contacts, e.g. bumps
    • H05K3/4015—Surface contacts, e.g. bumps using auxiliary conductive elements, e.g. pieces of metal foil, metallic spheres
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4688—Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
KR1020110076655A 2010-08-02 2011-08-01 다층 배선기판 Expired - Fee Related KR101322126B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2010-173305 2010-08-02
JP2010173305A JP5079059B2 (ja) 2010-08-02 2010-08-02 多層配線基板

Publications (2)

Publication Number Publication Date
KR20120022593A KR20120022593A (ko) 2012-03-12
KR101322126B1 true KR101322126B1 (ko) 2013-10-28

Family

ID=45525552

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110076655A Expired - Fee Related KR101322126B1 (ko) 2010-08-02 2011-08-01 다층 배선기판

Country Status (5)

Country Link
US (1) US8530751B2 (https=)
JP (1) JP5079059B2 (https=)
KR (1) KR101322126B1 (https=)
CN (1) CN102347287B (https=)
TW (1) TWI461117B (https=)

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US8780576B2 (en) 2011-09-14 2014-07-15 Invensas Corporation Low CTE interposer
KR101939236B1 (ko) * 2011-11-10 2019-01-16 삼성전자 주식회사 기판 및 이를 포함하는 전자 장치
DE112011105967T5 (de) * 2011-12-20 2014-09-25 Intel Corporation Mikroelektronisches Gehäuse und gestapelte mikroelektronische Baugruppe und Rechensystem mit denselben
US9117730B2 (en) * 2011-12-29 2015-08-25 Ibiden Co., Ltd. Printed wiring board and method for manufacturing printed wiring board
KR101331669B1 (ko) * 2012-03-08 2013-11-20 삼성전기주식회사 전력 모듈용 기판
JP5955102B2 (ja) * 2012-05-29 2016-07-20 京セラ株式会社 配線基板およびその製造方法
US9615447B2 (en) * 2012-07-23 2017-04-04 Zhuhai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. Multilayer electronic support structure with integral constructional elements
TW201409633A (zh) * 2012-08-24 2014-03-01 景碩科技股份有限公司 晶片及載板的封裝結構
JP2014063844A (ja) * 2012-09-20 2014-04-10 Sony Corp 半導体装置、半導体装置の製造方法及び電子機器
US8802504B1 (en) 2013-03-14 2014-08-12 Taiwan Semiconductor Manufacturing Company, Ltd. 3D packages and methods for forming the same
US9299649B2 (en) 2013-02-08 2016-03-29 Taiwan Semiconductor Manufacturing Company, Ltd. 3D packages and methods for forming the same
CN104218016A (zh) * 2013-06-04 2014-12-17 宏启胜精密电子(秦皇岛)有限公司 Ic载板及具有该ic载板的半导体器件
KR102149793B1 (ko) * 2013-10-24 2020-08-31 삼성전기주식회사 인쇄회로기판 및 인쇄회로기판의 휨 제어방법
JP6352447B2 (ja) 2014-12-24 2018-07-04 ルネサスエレクトロニクス株式会社 半導体装置
CN105789058A (zh) * 2015-01-14 2016-07-20 钰桥半导体股份有限公司 中介层嵌置于加强层中的线路板及其制作方法
US20160204056A1 (en) * 2015-01-14 2016-07-14 Bridge Semiconductor Corporation Wiring board with interposer and dual wiring structures integrated together and method of making the same
CN105870075A (zh) * 2015-01-22 2016-08-17 恒劲科技股份有限公司 基板结构
CN106034374B (zh) * 2015-03-12 2018-10-16 日立汽车系统(苏州）有限公司 防基板变形结构
TWI603505B (zh) * 2015-04-07 2017-10-21 矽品精密工業股份有限公司 封裝基板
JP2016219452A (ja) * 2015-05-14 2016-12-22 富士通株式会社 多層基板及び多層基板の製造方法
US10109588B2 (en) * 2015-05-15 2018-10-23 Samsung Electro-Mechanics Co., Ltd. Electronic component package and package-on-package structure including the same
JP2016219478A (ja) * 2015-05-15 2016-12-22 イビデン株式会社 配線基板及びその製造方法
JP6819599B2 (ja) * 2015-09-25 2021-01-27 大日本印刷株式会社 実装部品、配線基板、電子装置、およびその製造方法
KR102512228B1 (ko) * 2015-10-01 2023-03-21 삼성전기주식회사 절연재 및 이를 포함하는 인쇄회로기판
US9711458B2 (en) * 2015-11-13 2017-07-18 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and formation method for chip package
KR101912278B1 (ko) * 2015-12-21 2018-10-29 삼성전기 주식회사 전자 부품 패키지 및 그 제조방법
US9761535B1 (en) * 2016-06-27 2017-09-12 Nanya Technology Corporation Interposer, semiconductor package with the same and method for preparing a semiconductor package with the same
KR102456322B1 (ko) * 2017-11-08 2022-10-19 삼성전기주식회사 기판 스트립 및 이를 포함하는 전자소자 패키지
US10242964B1 (en) 2018-01-16 2019-03-26 Bridge Semiconductor Corp. Wiring substrate for stackable semiconductor assembly and stackable semiconductor assembly using the same
TWI655739B (zh) * 2018-04-19 2019-04-01 南亞電路板股份有限公司 封裝結構及其形成方法
JP7099359B2 (ja) * 2019-02-20 2022-07-12 株式会社村田製作所 コイル部品
US11094649B2 (en) * 2020-01-21 2021-08-17 Advanced Semiconductor Engineering, Inc. Semiconductor package structure and method for manufacturing the same
US11233035B2 (en) * 2020-05-28 2022-01-25 Taiwan Semiconductor Manufacturing Company, Ltd. Package structure and method of manufacturing the same
GB202018676D0 (en) * 2020-11-27 2021-01-13 Graphcore Ltd Controlling warpage of a substrate for mounting a semiconductor die
WO2024209540A1 (ja) * 2023-04-04 2024-10-10 三菱電機株式会社 高周波パッケージおよび高周波パッケージの製造方法

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JP2005302968A (ja) 2004-04-09 2005-10-27 Ngk Spark Plug Co Ltd 配線基板
JP2006287056A (ja) 2005-04-01 2006-10-19 Ngk Spark Plug Co Ltd 配線基板および配線基板の製造方法
JP2010103516A (ja) 2008-09-29 2010-05-06 Ngk Spark Plug Co Ltd 補強材付き配線基板
JP4473935B1 (ja) 2009-07-06 2010-06-02 新光電気工業株式会社 多層配線基板

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JP2004356569A (ja) 2003-05-30 2004-12-16 Shinko Electric Ind Co Ltd 半導体装置用パッケージ
JP2008078683A (ja) 2005-08-29 2008-04-03 Shinko Electric Ind Co Ltd 多層配線基板
JP4072176B2 (ja) 2005-08-29 2008-04-09 新光電気工業株式会社 多層配線基板の製造方法
JP2008118155A (ja) 2007-12-20 2008-05-22 Shinko Electric Ind Co Ltd 半導体装置用パッケージ
JP2008118154A (ja) 2007-12-20 2008-05-22 Shinko Electric Ind Co Ltd 半導体装置用パッケージ
JP5290017B2 (ja) 2008-03-28 2013-09-18 日本特殊陶業株式会社 多層配線基板及びその製造方法
JP5179920B2 (ja) * 2008-03-28 2013-04-10 日本特殊陶業株式会社 多層配線基板
JP5306789B2 (ja) 2008-12-03 2013-10-02 日本特殊陶業株式会社 多層配線基板及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005302968A (ja) 2004-04-09 2005-10-27 Ngk Spark Plug Co Ltd 配線基板
JP2006287056A (ja) 2005-04-01 2006-10-19 Ngk Spark Plug Co Ltd 配線基板および配線基板の製造方法
JP2010103516A (ja) 2008-09-29 2010-05-06 Ngk Spark Plug Co Ltd 補強材付き配線基板
JP4473935B1 (ja) 2009-07-06 2010-06-02 新光電気工業株式会社 多層配線基板

Also Published As

Publication number Publication date
JP5079059B2 (ja) 2012-11-21
JP2012033790A (ja) 2012-02-16
CN102347287A (zh) 2012-02-08
CN102347287B (zh) 2015-01-28
KR20120022593A (ko) 2012-03-12
US8530751B2 (en) 2013-09-10
TW201220980A (en) 2012-05-16
US20120024582A1 (en) 2012-02-02
TWI461117B (zh) 2014-11-11

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