KR101237092B1 - 열적 처리 장치 - Google Patents

열적 처리 장치 Download PDF

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Publication number
KR101237092B1
KR101237092B1 KR1020060019378A KR20060019378A KR101237092B1 KR 101237092 B1 KR101237092 B1 KR 101237092B1 KR 1020060019378 A KR1020060019378 A KR 1020060019378A KR 20060019378 A KR20060019378 A KR 20060019378A KR 101237092 B1 KR101237092 B1 KR 101237092B1
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KR
South Korea
Prior art keywords
substrate
heaters
cooling
heater
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020060019378A
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English (en)
Korean (ko)
Other versions
KR20060096903A (ko
Inventor
요시하루 오타
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20060096903A publication Critical patent/KR20060096903A/ko
Application granted granted Critical
Publication of KR101237092B1 publication Critical patent/KR101237092B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/10—Arrangements of rollers
    • B65G39/12—Arrangements of rollers mounted on framework
    • B65G39/18—Arrangements of rollers mounted on framework for guiding loads
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/012—Tempering or quenching glass products by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/04—Tempering or quenching glass products using gas

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Organic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020060019378A 2005-03-01 2006-02-28 열적 처리 장치 Expired - Fee Related KR101237092B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005055944A JP2006245110A (ja) 2005-03-01 2005-03-01 熱的処理装置
JPJP-P-2005-00055944 2005-03-01

Publications (2)

Publication Number Publication Date
KR20060096903A KR20060096903A (ko) 2006-09-13
KR101237092B1 true KR101237092B1 (ko) 2013-02-25

Family

ID=37051248

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060019378A Expired - Fee Related KR101237092B1 (ko) 2005-03-01 2006-02-28 열적 처리 장치

Country Status (3)

Country Link
JP (1) JP2006245110A (enrdf_load_stackoverflow)
KR (1) KR101237092B1 (enrdf_load_stackoverflow)
TW (1) TWI295415B (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100811695B1 (ko) * 2006-11-28 2008-03-11 엔티엠 주식회사 기판 건조장치
JP2008160011A (ja) * 2006-12-26 2008-07-10 Tokyo Electron Ltd 基板処理装置
JP2008172104A (ja) * 2007-01-12 2008-07-24 Tokyo Electron Ltd リフロー処理装置およびリフロー処理方法
JP4341978B2 (ja) * 2007-03-02 2009-10-14 東京エレクトロン株式会社 基板処理装置
JP5401015B2 (ja) * 2007-03-15 2014-01-29 光洋サーモシステム株式会社 連続式焼成炉
JP2008311250A (ja) * 2007-06-12 2008-12-25 Tokyo Electron Ltd リフローシステムおよびリフロー方法
KR101052758B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 평판 디스플레이 소자 제조 장치
JP4936567B2 (ja) * 2009-09-18 2012-05-23 東京エレクトロン株式会社 熱処理装置
WO2011148716A1 (ja) * 2010-05-25 2011-12-01 シャープ株式会社 ベーク装置
KR102410492B1 (ko) * 2015-07-23 2022-06-20 삼성디스플레이 주식회사 글라스 성형 장치
JP6814570B2 (ja) * 2016-08-18 2021-01-20 株式会社アルバック 搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237965A (ja) * 1996-02-29 1997-09-09 Furukawa Electric Co Ltd:The リフロー炉
KR20020046160A (ko) * 2000-12-08 2002-06-20 무네유키 가코우 기판반송장치 및 방법
JP2003332727A (ja) * 2002-05-15 2003-11-21 Sony Corp 熱遮蔽部分材及びリフロー装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237965A (ja) * 1996-02-29 1997-09-09 Furukawa Electric Co Ltd:The リフロー炉
KR20020046160A (ko) * 2000-12-08 2002-06-20 무네유키 가코우 기판반송장치 및 방법
JP2003332727A (ja) * 2002-05-15 2003-11-21 Sony Corp 熱遮蔽部分材及びリフロー装置

Also Published As

Publication number Publication date
JP2006245110A (ja) 2006-09-14
TW200641553A (en) 2006-12-01
KR20060096903A (ko) 2006-09-13
TWI295415B (en) 2008-04-01

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