TWI295415B - Thermal processing unit - Google Patents

Thermal processing unit Download PDF

Info

Publication number
TWI295415B
TWI295415B TW095106655A TW95106655A TWI295415B TW I295415 B TWI295415 B TW I295415B TW 095106655 A TW095106655 A TW 095106655A TW 95106655 A TW95106655 A TW 95106655A TW I295415 B TWI295415 B TW I295415B
Authority
TW
Taiwan
Prior art keywords
substrate
heat treatment
heaters
heater
unit
Prior art date
Application number
TW095106655A
Other languages
English (en)
Chinese (zh)
Other versions
TW200641553A (en
Inventor
Yoshiharu Ota
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200641553A publication Critical patent/TW200641553A/zh
Application granted granted Critical
Publication of TWI295415B publication Critical patent/TWI295415B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/10—Arrangements of rollers
    • B65G39/12—Arrangements of rollers mounted on framework
    • B65G39/18—Arrangements of rollers mounted on framework for guiding loads
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/012—Tempering or quenching glass products by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/04—Tempering or quenching glass products using gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Organic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW095106655A 2005-03-01 2006-02-27 Thermal processing unit TWI295415B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005055944A JP2006245110A (ja) 2005-03-01 2005-03-01 熱的処理装置

Publications (2)

Publication Number Publication Date
TW200641553A TW200641553A (en) 2006-12-01
TWI295415B true TWI295415B (en) 2008-04-01

Family

ID=37051248

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095106655A TWI295415B (en) 2005-03-01 2006-02-27 Thermal processing unit

Country Status (3)

Country Link
JP (1) JP2006245110A (enrdf_load_stackoverflow)
KR (1) KR101237092B1 (enrdf_load_stackoverflow)
TW (1) TWI295415B (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100811695B1 (ko) * 2006-11-28 2008-03-11 엔티엠 주식회사 기판 건조장치
JP2008160011A (ja) * 2006-12-26 2008-07-10 Tokyo Electron Ltd 基板処理装置
JP2008172104A (ja) * 2007-01-12 2008-07-24 Tokyo Electron Ltd リフロー処理装置およびリフロー処理方法
JP4341978B2 (ja) * 2007-03-02 2009-10-14 東京エレクトロン株式会社 基板処理装置
JP5401015B2 (ja) * 2007-03-15 2014-01-29 光洋サーモシステム株式会社 連続式焼成炉
JP2008311250A (ja) * 2007-06-12 2008-12-25 Tokyo Electron Ltd リフローシステムおよびリフロー方法
KR101052758B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 평판 디스플레이 소자 제조 장치
JP4936567B2 (ja) * 2009-09-18 2012-05-23 東京エレクトロン株式会社 熱処理装置
WO2011148716A1 (ja) * 2010-05-25 2011-12-01 シャープ株式会社 ベーク装置
KR102410492B1 (ko) * 2015-07-23 2022-06-20 삼성디스플레이 주식회사 글라스 성형 장치
JP6814570B2 (ja) * 2016-08-18 2021-01-20 株式会社アルバック 搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237965A (ja) * 1996-02-29 1997-09-09 Furukawa Electric Co Ltd:The リフロー炉
JP3756402B2 (ja) * 2000-12-08 2006-03-15 富士写真フイルム株式会社 基板搬送装置及び方法
JP2003332727A (ja) * 2002-05-15 2003-11-21 Sony Corp 熱遮蔽部分材及びリフロー装置

Also Published As

Publication number Publication date
JP2006245110A (ja) 2006-09-14
TW200641553A (en) 2006-12-01
KR101237092B1 (ko) 2013-02-25
KR20060096903A (ko) 2006-09-13

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MM4A Annulment or lapse of patent due to non-payment of fees