KR101236291B1 - 간섭 변조기를 위한 프로세스 제어 모니터 - Google Patents

간섭 변조기를 위한 프로세스 제어 모니터 Download PDF

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Publication number
KR101236291B1
KR101236291B1 KR1020077009676A KR20077009676A KR101236291B1 KR 101236291 B1 KR101236291 B1 KR 101236291B1 KR 1020077009676 A KR1020077009676 A KR 1020077009676A KR 20077009676 A KR20077009676 A KR 20077009676A KR 101236291 B1 KR101236291 B1 KR 101236291B1
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South Korea
Prior art keywords
delete delete
test unit
layer
process control
control monitor
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Expired - Fee Related
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KR1020077009676A
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English (en)
Korean (ko)
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KR20070062586A (ko
Inventor
윌리엄 제이. 커밍스
브라이언 제이. 갤리
Original Assignee
퀄컴 엠이엠에스 테크놀로지스, 인크.
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0035—Testing
    • B81C99/004—Testing during manufacturing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR1020077009676A 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터 Expired - Fee Related KR101236291B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US61353704P 2004-09-27 2004-09-27
US60/613,537 2004-09-27
US11/198,888 2005-08-05
US11/198,888 US20060176487A1 (en) 2004-09-27 2005-08-05 Process control monitors for interferometric modulators
PCT/US2005/033221 WO2006036601A2 (en) 2004-09-27 2005-09-16 Process control monitors for the fabrication interferometric modulators

Related Child Applications (4)

Application Number Title Priority Date Filing Date
KR1020077010603A Division KR20070067708A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010601A Division KR20070067707A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010602A Division KR101232091B1 (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010604A Division KR20070067709A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터

Publications (2)

Publication Number Publication Date
KR20070062586A KR20070062586A (ko) 2007-06-15
KR101236291B1 true KR101236291B1 (ko) 2013-02-22

Family

ID=35520641

Family Applications (6)

Application Number Title Priority Date Filing Date
KR1020077009676A Expired - Fee Related KR101236291B1 (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010601A Abandoned KR20070067707A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010604A Withdrawn KR20070067709A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010602A Expired - Fee Related KR101232091B1 (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020127028632A Abandoned KR20120125673A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010603A Withdrawn KR20070067708A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터

Family Applications After (5)

Application Number Title Priority Date Filing Date
KR1020077010601A Abandoned KR20070067707A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010604A Withdrawn KR20070067709A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010602A Expired - Fee Related KR101232091B1 (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020127028632A Abandoned KR20120125673A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터
KR1020077010603A Withdrawn KR20070067708A (ko) 2004-09-27 2005-09-16 간섭 변조기를 위한 프로세스 제어 모니터

Country Status (5)

Country Link
US (7) US20060176487A1 (enExample)
JP (5) JP2008516267A (enExample)
KR (6) KR101236291B1 (enExample)
TW (6) TWI360520B (enExample)
WO (1) WO2006036601A2 (enExample)

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US20060176487A1 (en) * 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
KR101375337B1 (ko) 2005-07-22 2014-03-18 퀄컴 엠이엠에스 테크놀로지스, 인크. 지지 구조물들을 가지는 전자기계 장치들 및 그 제조방법들
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