ATE389888T1 - Gerät und verfahren, um die leistung von mikromaschinen oder mikroelektromechanischen bauelementen zu bestimmen - Google Patents
Gerät und verfahren, um die leistung von mikromaschinen oder mikroelektromechanischen bauelementen zu bestimmenInfo
- Publication number
- ATE389888T1 ATE389888T1 AT03447115T AT03447115T ATE389888T1 AT E389888 T1 ATE389888 T1 AT E389888T1 AT 03447115 T AT03447115 T AT 03447115T AT 03447115 T AT03447115 T AT 03447115T AT E389888 T1 ATE389888 T1 AT E389888T1
- Authority
- AT
- Austria
- Prior art keywords
- voltage
- frequency
- determining
- capacitive structure
- micromachinery
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/327—Testing of circuit interrupters, switches or circuit-breakers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2822—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere of microwave or radiofrequency circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
- H01H11/0062—Testing or measuring non-electrical properties of switches, e.g. contact velocity
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US38444802P | 2002-05-29 | 2002-05-29 | |
EP02447137A EP1382977A1 (de) | 2002-07-19 | 2002-07-19 | Gerät und Verfahren um die Leistung von Mikromaschinen oder Mikroelektromechanischen Bauelementen zu bestimmen |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE389888T1 true ATE389888T1 (de) | 2008-04-15 |
Family
ID=39244686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03447115T ATE389888T1 (de) | 2002-05-29 | 2003-05-20 | Gerät und verfahren, um die leistung von mikromaschinen oder mikroelektromechanischen bauelementen zu bestimmen |
Country Status (3)
Country | Link |
---|---|
US (1) | US6998851B2 (de) |
AT (1) | ATE389888T1 (de) |
DE (1) | DE60319770T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040212026A1 (en) * | 2002-05-07 | 2004-10-28 | Hewlett-Packard Company | MEMS device having time-varying control |
US7345806B2 (en) * | 2004-06-23 | 2008-03-18 | Texas Instruments Incorporated | Method and apparatus for characterizing microelectromechanical devices on wafers |
US7551159B2 (en) * | 2004-08-27 | 2009-06-23 | Idc, Llc | System and method of sensing actuation and release voltages of an interferometric modulator |
US7675669B2 (en) * | 2004-09-27 | 2010-03-09 | Qualcomm Mems Technologies, Inc. | Method and system for driving interferometric modulators |
US7545550B2 (en) * | 2004-09-27 | 2009-06-09 | Idc, Llc | Systems and methods of actuating MEMS display elements |
DE102004055939B4 (de) * | 2004-11-19 | 2007-05-03 | Siemens Ag | Schaltmatrix |
US7617064B2 (en) * | 2005-04-12 | 2009-11-10 | Analog Devices, Inc. | Self-test circuit for high-definition multimedia interface integrated circuits |
US20070080695A1 (en) * | 2005-10-11 | 2007-04-12 | Morrell Gary A | Testing system and method for a MEMS sensor |
US7808253B2 (en) * | 2005-12-02 | 2010-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Test method of microstructure body and micromachine |
US7550810B2 (en) * | 2006-02-23 | 2009-06-23 | Qualcomm Mems Technologies, Inc. | MEMS device having a layer movable at asymmetric rates |
US7479785B2 (en) | 2006-08-17 | 2009-01-20 | Freescale Semiconductor, Inc. | Control and testing of a micro electromechanical switch |
US7586238B2 (en) | 2006-08-17 | 2009-09-08 | Freescale Semiconductor, Inc. | Control and testing of a micro electromechanical switch having a piezo element |
DE102006046403A1 (de) * | 2006-09-29 | 2008-04-03 | Robert Bosch Gmbh | Schaltungsanordnung für ein mikromechanisches Sensorelement mit einer Kondensatoranordnung |
US7830066B2 (en) * | 2007-07-26 | 2010-11-09 | Freescale Semiconductor, Inc. | Micromechanical device with piezoelectric and electrostatic actuation and method therefor |
US7911754B2 (en) * | 2008-01-21 | 2011-03-22 | Biosense Webster, Inc. | Detection of current leakage through opto-switches |
BRPI0908803A2 (pt) * | 2008-02-11 | 2015-07-21 | Qualcomm Mems Technologie Inc | Dispositivo e método de sensoreamento, mensuração ou caracterização de elementos de tela integrados com o esquema de drive de tela |
WO2009102581A1 (en) * | 2008-02-11 | 2009-08-20 | Qualcomm Mems Technologies, Inc. | Impedance sensing to determine pixel state in a passively addressed display array |
EP2252899A2 (de) * | 2008-02-11 | 2010-11-24 | QUALCOMM MEMS Technologies, Inc. | Verfahren zur messung und kennzeichnung interferometrischer modulatoren |
US8258800B2 (en) * | 2008-02-11 | 2012-09-04 | Qualcomm Mems Technologies, Inc. | Methods for measurement and characterization of interferometric modulators |
US20090201282A1 (en) * | 2008-02-11 | 2009-08-13 | Qualcomm Mems Technologies, Inc | Methods of tuning interferometric modulator displays |
US20090241634A1 (en) * | 2008-03-28 | 2009-10-01 | Cenk Acar | Micromachined accelerometer and method with continuous self-testing |
US8638093B2 (en) | 2011-03-31 | 2014-01-28 | General Electric Company | Systems and methods for enhancing reliability of MEMS devices |
CN102565697B (zh) * | 2012-02-16 | 2014-05-28 | 常州工学院 | 欠压脱扣器测试装置 |
US11192779B2 (en) * | 2018-02-07 | 2021-12-07 | The Board Of Trustees Of The Leland Stanford Junior University | Method and apparatus for evaluating electrostatic or nonlinear devices |
CN113074930A (zh) * | 2021-04-16 | 2021-07-06 | 西安交通大学 | 基于单一加速因子的微机电器件寿命预测方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5211051A (en) * | 1987-11-09 | 1993-05-18 | California Institute Of Technology | Methods and apparatus for improving sensor performance |
US5506454A (en) * | 1991-03-20 | 1996-04-09 | Hitachi, Ltd. | System and method for diagnosing characteristics of acceleration sensor |
US5447051A (en) * | 1993-08-05 | 1995-09-05 | Hewlett-Packard Company | Method and apparatus for testing a piezoelectric force sensor |
FI93579C (fi) | 1993-08-20 | 1995-04-25 | Vaisala Oy | Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi |
US5659262A (en) * | 1996-03-15 | 1997-08-19 | Analog Devices, Inc. | Offset trimming for a micromachined sensing device |
FI981457A0 (fi) | 1998-06-24 | 1998-06-24 | Valtion Teknillinen | Mikromekaaninen vaihto- ja tasajännitereferenssilaitteisto |
US6629448B1 (en) * | 2000-02-25 | 2003-10-07 | Seagate Technology Llc | In-situ testing of a MEMS accelerometer in a disc storage system |
WO2002001584A1 (en) | 2000-06-28 | 2002-01-03 | The Regents Of The University Of California | Capacitive microelectromechanical switches |
US6959583B2 (en) * | 2002-04-30 | 2005-11-01 | Honeywell International Inc. | Passive temperature compensation technique for MEMS devices |
-
2003
- 2003-05-20 DE DE60319770T patent/DE60319770T2/de not_active Expired - Lifetime
- 2003-05-20 AT AT03447115T patent/ATE389888T1/de not_active IP Right Cessation
- 2003-05-29 US US10/448,734 patent/US6998851B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60319770D1 (de) | 2008-04-30 |
US6998851B2 (en) | 2006-02-14 |
DE60319770T2 (de) | 2009-04-23 |
US20040070400A1 (en) | 2004-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |