KR101172931B1 - 교체 가능한 막 전구체 서포트 어셈블리 - Google Patents

교체 가능한 막 전구체 서포트 어셈블리 Download PDF

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Publication number
KR101172931B1
KR101172931B1 KR1020077014437A KR20077014437A KR101172931B1 KR 101172931 B1 KR101172931 B1 KR 101172931B1 KR 1020077014437 A KR1020077014437 A KR 1020077014437A KR 20077014437 A KR20077014437 A KR 20077014437A KR 101172931 B1 KR101172931 B1 KR 101172931B1
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South Korea
Prior art keywords
precursor
replaceable
membrane precursor
wall
support assembly
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Expired - Lifetime
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KR1020077014437A
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English (en)
Korean (ko)
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KR20070095914A (ko
Inventor
켄지 수주키
엠마누엘 기도티
게리트 제이 레우신크
마사미치 하라
다이수케 쿠로이와
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도쿄엘렉트론가부시키가이샤
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Priority claimed from US10/998,420 external-priority patent/US7638002B2/en
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Publication of KR20070095914A publication Critical patent/KR20070095914A/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/16—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal carbonyl compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
KR1020077014437A 2004-11-29 2005-10-03 교체 가능한 막 전구체 서포트 어셈블리 Expired - Lifetime KR101172931B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/998,420 2004-11-29
US10/998,420 US7638002B2 (en) 2004-11-29 2004-11-29 Multi-tray film precursor evaporation system and thin film deposition system incorporating same
US11/007,962 US7484315B2 (en) 2004-11-29 2004-12-09 Replaceable precursor tray for use in a multi-tray solid precursor delivery system
US11/007,962 2004-12-09
PCT/US2005/035583 WO2006057710A1 (en) 2004-11-29 2005-10-03 A solid precursor delivery system comprising replaceable stackable trays

Publications (2)

Publication Number Publication Date
KR20070095914A KR20070095914A (ko) 2007-10-01
KR101172931B1 true KR101172931B1 (ko) 2012-08-10

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KR1020077014437A Expired - Lifetime KR101172931B1 (ko) 2004-11-29 2005-10-03 교체 가능한 막 전구체 서포트 어셈블리

Country Status (4)

Country Link
US (1) US7484315B2 (https=)
JP (1) JP4975639B2 (https=)
KR (1) KR101172931B1 (https=)
WO (1) WO2006057710A1 (https=)

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US11414740B2 (en) 2019-06-10 2022-08-16 Applied Materials, Inc. Processing system for forming layers
KR102866784B1 (ko) 2024-10-25 2025-10-01 주식회사 엠더블유코퍼레이션 다공성 촉매가 구비된 고체전구체 기화시스템의 고체 전구체 소스 용기
KR102922124B1 (ko) 2024-10-25 2026-02-04 주식회사 엠더블유코퍼레이션 복수의 열원이 구비된 고체 전구체 기화시스템

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Publication number Priority date Publication date Assignee Title
US11414740B2 (en) 2019-06-10 2022-08-16 Applied Materials, Inc. Processing system for forming layers
KR102866784B1 (ko) 2024-10-25 2025-10-01 주식회사 엠더블유코퍼레이션 다공성 촉매가 구비된 고체전구체 기화시스템의 고체 전구체 소스 용기
KR102922124B1 (ko) 2024-10-25 2026-02-04 주식회사 엠더블유코퍼레이션 복수의 열원이 구비된 고체 전구체 기화시스템

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US20060112883A1 (en) 2006-06-01
JP2008522029A (ja) 2008-06-26
KR20070095914A (ko) 2007-10-01
JP4975639B2 (ja) 2012-07-11
WO2006057710A1 (en) 2006-06-01
US7484315B2 (en) 2009-02-03

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